Encircling type silicon single crystal rod hoisting device for rounding processing
By designing a ring-shaped monocrystalline silicon rod hoisting device, and using a tension sensor and elasticity display to monitor the hoisting process, the problem of monocrystalline silicon rod clamping and falling off caused by traditional hoisting devices has been solved, thereby improving stability and yield.
Patent Information
- Application Number
- CN202423131559.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-18
- Publication Date
- 2025-12-12
- Estimated Expiration
- 2034-12-18
AI Technical Summary
Traditional large-diameter monocrystalline silicon rod hoisting devices are prone to being clamped or falling off during the clamping process, resulting in unstable movement of the monocrystalline silicon and affecting processing quality and yield.
The ring-type monocrystalline silicon rod hoisting device includes tension straps, tightening buckles, tension sensors, and elasticity displays. By monitoring and controlling the tension and elasticity during the hoisting process, it avoids excessive tightening or loosening and ensures stability.
It improves the stability of single-crystal silicon rods during movement, reduces the probability of collisions, increases the yield of processed length, and the device has a simple structure and is easy to operate.
Smart Images
Figure CN223659613U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a kind of ring type monocrystalline silicon rod hoisting device for round processing, belong to the technical field of semiconductor silicon material processing. BACKGROUND
[0002] With the development of society, mobile phone, car, household appliance and other intelligent products are updated rapidly, and the market demand for IC-grade silicon wafer is increasing. In the process of making IC-grade chip, the demand for large-diameter silicon wafer as a supporting product is also increasing. Large-diameter single crystal is widely used in integrated circuit etching equipment. The ring-shaped single crystal silicon rod is processed by large-diameter single crystal round processing, and the semiconductor material silicon component formed by slicing is an important consumable for integrated circuit etching equipment and a product in great demand in the market.
[0003] Before and after round processing, the stability of single crystal movement directly affects the quality and yield of single crystal. The traditional moving method of large-diameter single crystal ring rod is to tighten the single crystal with a lifting belt and move it with a lifting vehicle. During the tightening process, the single crystal may be damaged due to excessive locking, or the single crystal may fall off due to insufficient locking. SUMMARY
[0004] The utility model aims to provide a kind of ring type monocrystalline silicon rod hoisting device for round processing, to solve the problem of clamping degree and stability of large-diameter single crystal silicon rod hoisting device, control the tightening degree of large-diameter ring-shaped single crystal silicon rod during hoisting, avoid single crystal damage and falling off, thereby improving the stability of single crystal movement.
[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions:
[0006] A ring type monocrystalline silicon rod hoisting device for round processing, the hoisting device has: a tension belt, a tightening lock, a tension sensor, a spring force display,
[0007] The tension belt includes a spring steel sheet and a yarn protection layer wrapped outside the spring steel sheet. The tension belt is assembled from one annular belt and three straight belts. The annular belt is used to tighten the single crystal. One end of each of the three straight belts is connected to the annular belt, and the other end is fixedly connected to the lifting device. The single crystal silicon rod is lifted in a pyramidal shape.
[0008] The tightening lock is arranged at both ends of the annular belt and adjusts the tightening degree of the annular belt through a screw rod mechanical device.
[0009] The tension sensor is located at the connection between the annular belt and the straight belt, and contacts the spring steel sheet of the straight belt through the yarn protection layer. It is used to monitor the change of tension of the straight belt during lifting of the single crystal. When the tension is greater than a fixed limit, the tension sensor alarms.
[0010] The elastic force display is located on one side of the tightening lock buckle and contacts the spring steel sheet of the annular belt through the yarn protection layer, and is used for monitoring the elastic force generated when the annular belt is tightened.
[0011] Preferably, a buffer gasket is installed at the contact position between the bottom of the tightening lock buckle and the single crystal silicon rod.
[0012] Preferably, an insurance lock buckle is arranged inside the tightening lock buckle, which ensures that the tightening degree of the spring steel sheet is not affected when the tightening lock buckle is damaged.
[0013] Preferably, the spring steel sheet is made of stainless steel, with a thickness of 0.4-0.6mm and a width of 18-20mm.
[0014] Preferably, the thickness of the tightening belt is 4-6mm, the width is 21-25mm, the length of the straight belt is 1.5-1.8m, and the circumference of the annular belt is 1570-1600mm.
[0015] Preferably, the straight belt is double-layered at a distance of 20-22cm from the end connected to the lifting device, facilitating the hooking of the lifting device.
[0016] The utility model has the advantages that:
[0017] The utility model provides a kind of ring type single crystal silicon rod hoisting device for sleeve round processing, utilizes tension sensor and elastic force display to control the lifting tension of tightening belt and the degree of tightening of single crystal silicon rod, guarantees the stability of single crystal silicon rod in moving process, can effectively avoid damage to single crystal due to the degree of tightening, and reduce the probability of knock of single crystal product in moving process, to improve the length yield of circular single crystal silicon rod processing.The utility model is easy to assemble in structure, convenient and fast in installation process, easy to operate, and is welcomed by operators. BRIEF DESCRIPTION OF DRAWINGS
[0018] Figure 1 It is a side view when single crystal silicon rod is hoisted using the hoisting device of the utility model.
[0019] Figure 2 It is a perspective view when single crystal silicon rod is hoisted using the hoisting device of the utility model.
[0020] REFERENCE NUMERALS
[0021] 1 straight belt, 2 annular belt, 3 tightening lock buckle, 4 tension sensor, 5 elastic force display. DETAILED DESCRIPTION
[0022] The utility model will be further described below by combining with drawings and specific embodiments, but it does not mean the limitation to the protection scope of the utility model.
[0023] Figure 1 A side view of the hoisting device of the utility model when hoisting a single crystal silicon rod. Figure 2 A perspective view of the hoisting device of the utility model when hoisting a single crystal silicon rod.
[0024] As shown in Figure 1 , 2 , the single crystal silicon rod hoisting device comprises straight belts 1, a ring belt 2, a tightening lock 3, a tension sensor 4 and an elastic force display 5. The tension belt comprises spring steel sheets and a yarn protective layer made of synthetic fiber woven outside the spring steel sheets, and the tension belt is assembled by one ring belt 2 and three straight belts 1, that is, the straight belts 1 and the ring belt 2 are both spring steel sheets inside and are wrapped by synthetic fiber outside. One end of the three straight belts 1 is connected with the ring belt 2, and the other end is fixedly connected with a hoisting device, and the single crystal silicon rod is hoisted in a pyramid shape. The tightening lock 3 is made of stainless steel, is connected with both ends of the ring belt 2, and makes the ring belt 2 continuously wind and shrink through a screw rod mechanical device, so as to achieve the purpose of tightly holding the single crystal, and is used for adjusting the tightening degree of the ring belt to adapt to the diameter change of the single crystal. The tension sensor 4 is located at the connecting part of the ring belt and the straight belt, contacts the spring steel sheet of the straight belt through the yarn protective layer, and is used for monitoring the tension change of the straight belt when the single crystal silicon rod is hoisted. When the tension is greater than a fixed limit value, the tension sensor alarms, so as to avoid the breakage of the tension belt due to the over-heavy single crystal. The elastic force display 5 is located on one side of the tightening lock and contacts the spring steel sheet of the ring belt through the yarn protective layer, and is used for monitoring the elastic force generated when the ring belt is tightened. When the elastic force is greater than a fixed limit value, the elastic force display alarms, so as to avoid the single crystal being damaged due to the over-tightening degree.
[0025] As an embodiment of the utility model, the thickness of the spring steel sheet is 0.4-0.6mm, and the width is 18-20mm. The thickness of the tension belt is 4-6mm, and the width is 21-25mm. The length of the straight belt is 1.5-1.8m, and the circumference of the ring belt is 1570-1600mm. The straight belt is a double-layer structure at a distance of 20-22cm from the head, and is convenient for hanging the lifting car hook. A buffer gasket is installed at the bottom of the tightening lock and the contact part of the single crystal silicon rod. An insurance lock is arranged in the tightening lock, and when the tightening lock is damaged, the insurance lock ensures that the tightening degree of the spring steel sheet is not affected.
[0026] The hoisting device of the utility model controls the hoisting tension of the tension belt and the tightening degree of the single crystal silicon rod by using the tension sensor and the elastic force display, ensures the stability of the single crystal silicon rod in the moving process, can effectively avoid the damage of the single crystal caused by the tightening degree, reduces the bumping probability of the single crystal product in the moving process, and thus improves the length yield of the circular single crystal silicon rod processing.
Claims
1. A ring-shaped single-crystal silicon rod hoisting device for rounding processing, characterized in that, The lifting device is equipped with: tension straps, tightening locks, tension sensors, and a tension display. The tensioning belt includes a spring steel sheet and a yarn protective layer wrapped around the spring steel sheet. The tensioning belt is assembled from a ring belt and three straight belts. The ring belt is used to tighten the single crystal. One end of each of the three straight belts is connected to the ring belt, and the other end is fixedly connected to the lifting device. It is in the shape of a pyramid to lift the single crystal silicon rod. The tightening buckles are located at both ends of the ring belt, and the tightness of the ring belt is adjusted by a screw mechanical device; The tension sensor is located at the connection between the annular belt and the straight belt. It contacts the spring steel sheet of the straight belt through the yarn protective layer and is used to monitor the tension change of the straight belt when lifting the monocrystalline silicon rod. When the tension exceeds the fixed limit, the tension sensor will alarm. The elasticity indicator is located on the side of the tightening buckle and contacts the spring steel sheet of the loop belt through the yarn protective layer. It is used to monitor the magnitude of the elasticity generated when the loop belt is tightened. When the elasticity exceeds a fixed limit, the elasticity indicator will sound an alarm.
2. The ring-shaped single-crystal silicon rod hoisting device for rounding processing according to claim 1, characterized in that, A buffer pad is installed at the bottom of the locking buckle where it contacts the monocrystalline silicon rod.
3. The ring-shaped single-crystal silicon rod hoisting device for rounding processing according to claim 1, characterized in that, The tightening latch has a safety latch inside. When the tightening latch is damaged, the safety latch ensures that the tightening degree of the spring steel sheet is not affected.
4. The ring-shaped single-crystal silicon rod hoisting device for rounding processing according to claim 1, characterized in that, The spring steel sheet is made of stainless steel, with a thickness of 0.4-0.6mm and a width of 18-20mm.
5. The ring-shaped single-crystal silicon rod hoisting device for rounding processing according to claim 1, characterized in that, The tensioning band has a thickness of 4-6mm, a width of 21-25mm, a straight band length of 1.5-1.8m, and a loop circumference of 1570-1600mm.
6. The ring-shaped single-crystal silicon rod hoisting device for rounding processing according to claim 1, characterized in that, The straight strap has a double-layer structure at a distance of 20-22cm from the head, which facilitates the hooking of the lifting device.