Stabilized supporting structure for FEC (Forward Error Correction) equipment

Abstract

The utility model relates to a stable supporting structure for FEC (Forward Error Correction) equipment, which comprises an outer sleeve, an inner sleeve, a supporting part and a supporting part, the inner sleeve is arranged in the outer sleeve, the top of the inner sleeve is fixed to the motor shaft, the bottom of the inner sleeve is suspended, the inner sleeve can rotate relative to the outer sleeve, the lower end of the inner sleeve is of a closed-up structure, and a supporting plate for supporting the inner sleeve is connected to the inner wall of the outer sleeve; and the ball bearing is arranged in a gap between the closing structure and the supporting plate. The device is compact and reasonable in structure and convenient to operate, and the ball bearing is arranged between the inner sleeve and the outer sleeve, so that the accumulation of crystals is effectively blocked, the friction between the inner sleeve and the outer sleeve is reduced, and the running stability of equipment is improved. And meanwhile, the ball bearing also plays a role in fixing the inner sleeve, so that the inner sleeve is prevented from deviating in the transportation or installation process. In conclusion, the device provided by the embodiment not only solves the problem of crystallization generated when FEC is used for treating strong acid and alkali tail gas, but also improves the overall performance and stability of equipment.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor technical field especially a kind of for FEC equipment stable support structure. BACKGROUND

[0002] In semiconductor industry, since wet etching equipment inevitably produces harmful gas when working, so it needs factory to provide air volume and air pressure at all times to discharge harmful gas after classification. However, the air volume and air pressure provided by factory are limited, so it is not conducive to the treatment and discharge of harmful gas.

[0003] It needs a kind of for FEC equipment stable support structure equipment, namely FEC, full name Fan Exhaust Controller. FEC is a kind of small and independent tail gas switching, pressure boosting and stabilizing equipment for FEC equipment stable support structure, responsible for providing stable process air pressure and air volume for main machine, and discharging waste gas generated by main machine into factory treatment.

[0004] As Chinese patent CN219393351U discloses a semiconductor wet etching equipment exhaust treatment device, which comprises a rotating drum assembly (1), and its structure comprises an open end and mutually nested outer cylinder (101) and inner cylinder (102), the outer cylinder (101) is connected to the fan for air extraction, the inner cylinder (102) can rotate in the outer cylinder (101), and the inner cylinder (102) is provided with ventilation hole (103). In the patent, when switching acid and alkali tail gas, strong acid and strong alkali under special environment are easy to produce crystallization at inner and outer sleeve, so as to produce resistance and make tail gas switching device jam, so that the inner sleeve of FEC rotates and produces friction with outer sleeve, and the inner sleeve inlet is not fixed during transportation and use, the position may change to increase the resistance of inner and outer sleeve, affect the normal operation of machine.

[0005] Therefore, we propose a kind of for FEC equipment stable support structure. INVENTION CONTENTS

[0006] The applicant provides a kind of for FEC equipment stable support structure to the above-mentioned shortcomings in prior art production technology, by setting up ball bearing between inner sleeve and outer sleeve, effectively blocks the accumulation of crystallization, reduces the friction between inner and outer sleeve, improves the running stability of equipment.

[0007] The technical scheme adopted by the utility model is as follows:

[0008] A kind of for FEC equipment stable support structure, comprising:

[0009] Outer sleeve, as the outer layer protection and support structure of the whole device;

[0010] The inner sleeve is arranged inside the outer sleeve, the top of the inner sleeve is fixed with the motor shaft, the bottom of the inner sleeve is suspended, the inner sleeve can rotate relative to the outer sleeve, the lower end of the inner sleeve is closed, and a supporting plate for supporting the inner sleeve is connected to the inner wall of the outer sleeve;

[0011] The ball bearing is arranged in the gap between the closed structure and the supporting plate, and is used for reducing friction and preventing crystallization accumulation.

[0012] In one of the embodiments, one end of the outer sleeve is provided with a mounting cover plate, which is used for fixing the whole device at a required position, and the mounting cover plate is fixedly connected with the outer sleeve through bolts or other fasteners.

[0013] In one of the embodiments,

[0014] The air duct is arranged on the outer sleeve and is used for passing and discharging gas.

[0015] In one of the embodiments, the inner sleeve is provided with a ventilation hole.

[0016] In one of the embodiments, the air duct is arranged on the air duct opening arranged on the outer sleeve, and the ventilation hole is intermittently communicated with the air duct with the rotation of the inner sleeve, so that the gas flow is circulated.

[0017] In one of the embodiments, the top of the inner sleeve is fixed with the motor shaft.

[0018] In one of the embodiments, the outer sleeve, the inner sleeve, the air duct and the ball bearing are made of corrosion-resistant materials.

[0019] The beneficial effects of the device are as follows:

[0020] The device has the advantages of compact and reasonable structure, convenient operation, the ball bearing arranged between the inner sleeve and the outer sleeve effectively blocks the accumulation of crystallization, reduces the friction between the inner sleeve and the outer sleeve, and improves the operation stability of the device. Meanwhile, the ball bearing also plays a role in fixing the inner sleeve, so that the inner sleeve is prevented from deviating during transportation or installation. In summary, the device of the embodiment not only solves the crystallization problem of FEC when treating strong acid and alkali tail gas, but also improves the overall performance and stability of the device, and has significant application value and popularization prospect.

[0021] Meanwhile, the device also has the following advantages:

[0022] This invention effectively prevents most of the crystal accumulation at the air inlet by incorporating a ball bearing between the inner and outer sleeves. The continuous movement of the ball bearings breaks up any crystals that may form, which are then carried away by the exhaust gas, thus avoiding long-term crystal accumulation between the inner and outer sleeves. This design significantly reduces friction between the inner and outer sleeves, improves the operational stability of the equipment, and extends its service life. Especially when handling strong acid and alkaline exhaust gases, this design effectively prevents equipment jamming caused by crystal accumulation.

[0023] In this invention, the top of the inner sleeve is fixed to the motor shaft, while the bottom is suspended. This structure may cause the inner sleeve to shift during transportation or installation, affecting the angle control of the inner sleeve. This embodiment addresses this by adding a ball bearing, which secures the inner sleeve and prevents it from shifting during transportation or installation. This design ensures accurate positioning of the inner sleeve, improving the installation precision and operational stability of the equipment. Attached Figure Description

[0024] Figure 1 This is a cross-sectional structural diagram of the present invention.

[0025] Figure 2 for Figure 1 A magnified view of part A in the middle.

[0026] Among them: 100, outer sleeve; 200, inner sleeve; 300, air duct; 400, ball bearing;

[0027] 101. Install cover plate; 102. Air duct opening;

[0028] 201. Vent hole; 202. Closure structure; 203. Support plate. Detailed Implementation

[0029] The specific embodiments of this utility model are described below with reference to the accompanying drawings.

[0030] This embodiment discloses a stable support structure for FEC equipment, which includes an outer sleeve 100, an inner sleeve 200, an air duct 300, and a ball bearing 400. It is used to solve the crystallization generated by FEC when processing strong acid and alkali exhaust gases, reduce friction and improve stability.

[0031] As noted in the background section, there was originally a gap between the inner sleeve 200 and the outer sleeve 100. Long-term accumulation of crystals between the inner and outer sleeves caused blockage. In this embodiment, a ball bearing 400 is installed between the inner sleeve 200 and the outer sleeve 100. After the ball bearing 400 is installed, most of the air intake gap between the inner and outer sleeves is blocked by the ball bearing 400, thus preventing the accumulation of large amounts of crystals between the inner and outer sleeves and maintaining smoothness. Although crystals may still exist between the balls, the continuous movement of the balls breaks them down and they are carried away by the exhaust gas.

[0032] Specifically, such as Figure 1 As shown, in this embodiment, the top of the inner sleeve 200 is fixed by the motor shaft, while the bottom is suspended and not fixed to the outer sleeve 100. During transportation, installation, or operation, the bottom of the inner sleeve 200 may shift to one side, causing the inner and outer sleeves to contact each other, affecting the angle control of the inner sleeve 200. Adding a ball bearing 400 can provide a fixing function and prevent the inner sleeve 200 from shifting position.

[0033] like Figure 1 As shown, in this embodiment, the outer sleeve 100 is the outer sleeve of the entire structure, serving a protective and supportive function. A mounting cover 101 is installed at one end to secure the entire device in the desired position. The mounting cover 101 is firmly connected to the outer sleeve 100 by bolts or other fasteners, ensuring the stability of the entire structure. Simultaneously, the cover 101 facilitates the installation of the inner sleeve 200, further enhancing overall stability.

[0034] like Figure 1 As shown, in this embodiment, the inner sleeve 200 is located inside the outer sleeve 100, with its top fixed to the motor shaft and its bottom suspended. The inner sleeve 200 has vent holes 201 designed for gas passage. Simultaneously, the lower end of the inner sleeve 200 is provided with a constriction structure 202, which is used to adjust the cross-sectional area of ​​gas flow and provide space for subsequent installation of the ball bearing 400. Furthermore, the outer sleeve 100 is provided with a support plate 203 for supporting the inner sleeve 200; specifically, the support plate 203 rests on the lower end of the inner sleeve, i.e., on one side of the constriction structure 202.

[0035] In this embodiment, the air duct 300 is set on the air duct opening 102 opened on the outer sleeve 100. At the same time, as the inner sleeve 200 rotates, the ventilation hole 201 will intermittently communicate with the air duct 300 to realize the flow of air. Moreover, by controlling the intersection area of ​​the ventilation hole 201 and the air duct 300, the airflow volume is controlled, which is ultimately used to improve the efficiency of gas passage and discharge.

[0036] like Figure 2The image shows a partially enlarged view of the ball bearing 400. The ball bearing 400 is positioned in the gap between the inner sleeve 200's constriction structure 202 and the support plate 203, blocking most of the air intake and allowing gas to flow through the gap in the ball bearing 400. This design avoids direct friction between the inner and outer sleeves and also prevents the accumulation of crystals between them.

[0037] The advantage of ball bearing 400 lies in its self-lubricating properties; it requires no additional lubricant and does not generate excessive frictional heat even with prolonged use. Furthermore, ball bearing 400 is maintenance-free, significantly reducing maintenance costs and downtime, and improving equipment reliability.

[0038] The working principle of this invention is as follows: When treating strong acid and alkali exhaust gases, the exhaust gases flow through the gap between the outer sleeve 100 and the inner sleeve 200. Since the top of the inner sleeve 200 is fixed to the motor shaft, it rotates with the motor, while its bottom is suspended. Therefore, during transportation or installation, the bottom of the inner sleeve 200 may shift to one side, causing it to contact the outer sleeve 100 and affecting the angle control of the inner sleeve 200. Adding a ball bearing 400 can fix the inner sleeve 200 and prevent its position from shifting.

[0039] The ball bearing 400 design not only avoids direct friction between the inner and outer sleeves but also prevents the accumulation of crystals between them. Even if crystals do form, they are broken up by the continuous movement of the balls and carried away by the exhaust, thus maintaining the long-term stable operation of the equipment.

[0040] The above description is an explanation of the present utility model and not a limitation thereof. The scope of the present utility model is defined by the claims. Within the protection scope of the present utility model, any form of modification may be made.

Claims

1. A stabilizing support structure for FEC equipment, characterized in that, include: The outer sleeve serves as the outer protective and support structure for the entire device. The inner sleeve is located inside the outer sleeve, with its top fixed to the motor shaft and its bottom suspended, allowing it to rotate relative to the outer sleeve. The lower end of the inner sleeve has a tapered structure, and a support plate is connected to the inner wall of the outer sleeve to hold the inner sleeve. Ball bearings are placed in the gap between the constriction structure and the support plate to reduce friction and prevent crystal accumulation.

2. The stabilizing support structure for FEC equipment according to claim 1, characterized in that, One end of the outer sleeve is fitted with a mounting cover plate, which is used to fix the entire device in the required position. The mounting cover plate is securely connected to the outer sleeve by bolts.

3. The stabilizing support structure for FEC equipment according to claim 1, characterized in that, It also includes air ducts, which are installed on the outer casing for the passage and exhaust of gas.

4. The stabilizing support structure for FEC equipment according to claim 3, characterized in that, The inner sleeve is provided with a vent hole.

5. A stabilizing support structure for FEC equipment according to claim 4, characterized in that, The air duct is set in the air duct opening on the outer sleeve. As the inner sleeve rotates, the vent will intermittently connect with the air duct, thereby realizing the flow of air.

6. A stabilizing support structure for FEC equipment according to claim 1, characterized in that, The top of the inner sleeve is fixed to the motor shaft.

7. A stabilizing support structure for FEC equipment according to claim 1, characterized in that, The outer sleeve, inner sleeve, air duct, and ball bearing are all made of corrosion-resistant materials.

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