Novel rotary suction nozzle device

Abstract

The embodiment of the utility model discloses a novel rotary suction nozzle device, which comprises a synchronizing wheel mechanism, a rotary bearing, a rotary adsorption mechanism, a vacuum pipe joint and a linear sliding group, the synchronizing wheel mechanism is arranged on the rotary bearing, the rotary adsorption mechanism is arranged on the synchronizing wheel mechanism through the linear sliding group, and an air passage which is through up and down is arranged in the rotary adsorption mechanism. A lens for sealing the air channel is arranged at the top of the air channel, and the vacuum pipe connector is arranged on the rotary adsorption mechanism and communicated with the air channel. The lens is arranged at the top of the air passage, so that a user can conveniently arrange a camera at the top of the suction nozzle to shoot a chip, the camera is closer to the chip, visual positioning and chip angle identification are easier, and the correction precision of the chip is improved; the utility model has a floating structure and prevents the chip from being crushed.

Description

Technical Field

[0001] This utility model relates to the field of robotic arm technology, and in particular to a novel rotary suction nozzle device. Background Technology

[0002] In semiconductor manufacturing, when testing or bonding individual chips, it is necessary to move the chip from one location to another. This movement requires vacuum suction using a nozzle.

[0003] When placing the chip using the nozzle, precise positioning and angle are required. To address angle deviation, a rotating structure is added, using a visual method to compensate for angle errors by photographing the chip. Specifically, the camera first photographs the chip to identify its angle, and then the nozzle is rotated to make adjustments. Utility Model Content

[0004] The technical problem to be solved by this utility model embodiment is to provide a novel rotary suction nozzle device to improve accuracy.

[0005] To solve the above-mentioned technical problems, this utility model proposes a novel rotary suction nozzle device, including a synchronous wheel mechanism, a rotary bearing, a rotary adsorption mechanism, a vacuum tube connector, and a linear slide block. The synchronous wheel mechanism is mounted on the rotary bearing, and the rotary adsorption mechanism is mounted on the synchronous wheel mechanism via the linear slide block. The rotary adsorption mechanism has an air passage that runs vertically through it, and a lens that seals the air passage is located at the top of the air passage. The vacuum tube connector is mounted on the rotary adsorption mechanism and communicates with the air passage.

[0006] Furthermore, the rotary adsorption mechanism consists of a floating shaft, a suction nozzle, and an anti-rotation floating block. The suction nozzle is located at the bottom of the floating shaft, the anti-rotation floating block is located at the top of the floating shaft, and the vacuum tube connector is located on the anti-rotation floating block.

[0007] Furthermore, the synchronous pulley mechanism consists of a transmission component and a synchronous pulley. The synchronous pulley is mounted on a rotating bearing. The transmission component is connected to the synchronous pulley and is equipped with a limit pin. The anti-rotation floating block is equipped with a limit groove for limiting the two sides of the limit pin, and the front end of the limit pin is located in the limit groove.

[0008] Furthermore, the limiting pin is cylindrical.

[0009] Furthermore, a limiting screw is provided on the side of the transmission component to limit the rotation angle of the transmission component.

[0010] Furthermore, the rotary adsorption mechanism also includes a nozzle fixing block, through which the nozzle is positioned at the bottom of the floating shaft.

[0011] Furthermore, it also includes a synchronous wheel drive mechanism that drives the synchronous wheel mechanism to rotate.

[0012] The beneficial effects of this utility model are as follows: This utility model has a lens set at the top of the airway, which makes it convenient for users to set the camera at the top of the nozzle to photograph the chip, so that the camera is closer to the chip and it is easier to perform visual positioning and identify the chip angle, thereby improving the chip calibration accuracy; This utility model has a floating structure to prevent chip damage. Attached Figure Description

[0013] Figure 1 This is a three-dimensional structural diagram of the novel rotary suction nozzle device according to an embodiment of the present utility model.

[0014] Figure 2 This is a bottom view of the novel rotary suction nozzle device according to an embodiment of the present invention.

[0015] Figure 3 yes Figure 2 Sectional view at point CC.

[0016] Figure 4 This is a partial structural diagram of the novel rotary suction nozzle device according to an embodiment of the present utility model.

[0017] Figure 5 This is a three-dimensional structural diagram of the anti-rotation floating block according to an embodiment of the present invention.

[0018] Explanation of icon numbers

[0019] 1. Rotary bearing; 2. Linear slide block; 3. Air passage; 4. Floating shaft; 5. Suction nozzle; 6. Anti-rotation floating block; 7. Vacuum tube connector; 8. Transmission component; 9. Synchronous pulley; 10. Limiting pin; 11. Limiting groove; 12. Limiting screw; 13. Suction nozzle fixing block; 14. Synchronous pulley drive mechanism; 15. Lens. Detailed Implementation

[0020] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of this application can be combined with each other. The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] In this embodiment of the invention, directional indicators (such as up, down, left, right, front, back, etc.) are only used to explain the relative positional relationship and movement of the components in a specific posture (as shown in the attached figure). If the specific posture changes, the directional indicators will also change accordingly.

[0022] Furthermore, in this utility model, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features.

[0023] Please refer to Figures 1-5The novel rotary suction nozzle device of this utility model embodiment includes a synchronous wheel mechanism, a rotary bearing, a rotary adsorption mechanism, a vacuum tube connector, and a linear slide block.

[0024] The synchronous pulley mechanism is mounted on the rotary bearing, and the rotary adsorption mechanism is mounted on the synchronous pulley mechanism via a linear slide block. The linear slide block structure is similar to that of the linear bearing, allowing the rotary adsorption mechanism to float up and down relative to the synchronous pulley mechanism.

[0025] The rotary adsorption mechanism features a vertically connected air passage. A lens at the top of the air passage seals the top, allowing a positioning camera to be positioned directly above the suction nozzle. This enables the camera to capture images directly above the chip, improving the accuracy of visual positioning and chip angle recognition. Furthermore, the nozzle position can be determined without inserting or removing the air tube, allowing the control system to perform real-time visual positioning of the nozzle via the camera. In practice, the lens can be a plane lens, convex lens, or concave lens. A vacuum tube connector is located on the rotary adsorption mechanism and communicates with the air passage.

[0026] In one implementation, the rotary adsorption mechanism consists of a floating shaft, a suction nozzle, and an anti-rotation floating block. The air passage is divided into three sections: upper, middle, and lower, which are respectively located within the anti-rotation floating block, the floating shaft, and the suction nozzle. The suction nozzle is located at the bottom of the floating shaft, the anti-rotation floating block is located at the top of the floating shaft, and the vacuum tube connector is located on the anti-rotation floating block.

[0027] In one implementation, the synchronous pulley mechanism consists of a transmission component and a synchronous pulley. The synchronous pulley is mounted on a rotary bearing, and the transmission component connects to the synchronous pulley. The transmission component has a limiting pin, and the anti-rotation floating block has a limiting groove for limiting the two sides of the limiting pin. The front end of the limiting pin is located within the limiting groove, while the limiting pin protrudes from the transmission component. The left and right sides of the limiting groove are vertically parallel. Preferably, the limiting pin is cylindrical. The cylindrical limiting pin is always tangent to the left and right sides of the limiting groove, ensuring overall accuracy without needing to control the installation accuracy of the limiting pin. Even after prolonged operation, if the entire device deforms, the limiting accuracy remains guaranteed.

[0028] In one implementation, a limiting screw is provided on the side of the transmission component to limit its rotation angle. The limiting screw and the limiting pin cooperate to limit the rotation angle.

[0029] In one embodiment, the rotary adsorption mechanism also includes a suction nozzle fixing block, with the suction nozzle positioned at the bottom of the floating shaft via the suction nozzle fixing block.

[0030] In one embodiment, the novel rotary suction nozzle device also includes a synchronous pulley drive mechanism that drives the synchronous pulley mechanism to rotate. The synchronous pulley drive mechanism consists of a motor, a synchronous belt, etc.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A novel rotary suction nozzle device, characterized in that, It includes a synchronous pulley mechanism, a rotary bearing, a rotary adsorption mechanism, a vacuum tube connector, and a linear slide block. The synchronous pulley mechanism is mounted on the rotary bearing, and the rotary adsorption mechanism is mounted on the synchronous pulley mechanism via the linear slide block. The rotary adsorption mechanism has an air passage that runs vertically through it, and a lens that seals the air passage is located at the top of the air passage. The vacuum tube connector is mounted on the rotary adsorption mechanism and is connected to the air passage.

2. The novel rotary suction nozzle device as described in claim 1, characterized in that, The rotary adsorption mechanism consists of a floating shaft, a suction nozzle, and an anti-rotation floating block. The suction nozzle is located at the bottom of the floating shaft, the anti-rotation floating block is located at the top of the floating shaft, and the vacuum tube connector is located on the anti-rotation floating block.

3. The novel rotary suction nozzle device as described in claim 2, characterized in that, The synchronous pulley mechanism consists of a transmission component and a synchronous pulley. The synchronous pulley is mounted on a rotating bearing. The transmission component is connected to the synchronous pulley and is equipped with a limit pin. The anti-rotation floating block is equipped with a limit groove for limiting the two sides of the limit pin, and the front end of the limit pin is located in the limit groove.

4. The novel rotary suction nozzle device as described in claim 3, characterized in that, The limiting pin is cylindrical.

5. The novel rotary suction nozzle device as described in claim 3, characterized in that, The side of the transmission component is provided with a limiting screw to limit the rotation angle of the transmission component.

6. The novel rotary suction nozzle device as described in claim 2, characterized in that, The rotary adsorption mechanism also includes a nozzle fixing block, through which the nozzle is located at the bottom of the floating shaft.

7. The novel rotary suction nozzle device as described in claim 1, characterized in that, It also includes a synchronous wheel drive mechanism that drives the synchronous wheel mechanism to rotate.

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