Testing pressure head device and sorting machine

Abstract

The utility model relates to a testing pressure head device and a sorting machine. The testing pressure head device comprises a driving assembly, the driving assembly comprises a cylinder body, a diaphragm and a piston, the cylinder body comprises an upper cover, a middle cover and a lower cover which are sequentially arranged in a stacked mode, the diaphragm is clamped between the middle cover and the lower cover, the piston is arranged in the cylinder body and can be driven by the diaphragm to move in the cylinder body, and the piston is arranged in the cylinder body and can be driven by the diaphragm to move in the cylinder body. The upper cover is provided with a guide piece for guiding the piston to move in the cylinder body, the middle cover is provided with a shielding part, and the shielding part extends to the position between the diaphragm and the guide piece. According to the test pressure head device provided by the utility model, the abrasion of the diaphragm can be reduced, the service life of the diaphragm is prolonged, a smaller cylinder diameter can be realized, and small pressure can be stably output. The sorting machine provided by the invention comprises the test pressure head device.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor testing, in particular to a test press head device and a handler. BACKGROUND

[0002] Electronic devices need to be tested before being put on the market. The common test equipment at present is a three-temperature test machine, which can test electronic devices at high, medium and low temperatures. The three-temperature test machine usually comprises a press head assembly and a test seat assembly. The press head assembly picks up the electronic devices to be tested and places them on the test seat assembly for performance testing. In order to prevent the press head assembly from damaging the electronic devices, the press head assembly is usually elastically floating.

[0003] An existing three-temperature test machine drives the press head assembly to move by a diaphragm cylinder. Specifically, the diaphragm cylinder comprises a cylinder body, a cylinder cover, a diaphragm and a piston. The cylinder body and the cylinder cover enclose a cylinder chamber, the piston is movable in the cylinder chamber, and the diaphragm is clamped between the cylinder body and the cylinder cover. When gas is introduced into the cylinder chamber, the diaphragm is inflated to push the piston to move. In order to ensure the reliability of the movement of the piston, a guide and limiting structure is usually arranged on the cylinder chamber and the piston. However, in the above-mentioned prior art, the abrasion generated by the reciprocating movement of the piston directly contacts the diaphragm, which easily causes damage to the diaphragm, thereby reducing the service life of the diaphragm cylinder. In addition, in order to ensure the structural strength of the cylinder chamber and the piston, the cylinder diameter of the cylinder is usually difficult to be set smaller, thereby being difficult to meet the use requirement of stable output of small pressure.

[0004] In view of this, it is necessary to propose a new technical scheme to overcome the deficiencies in the prior art. CONTENT OF THE INVENTION

[0005] Based on this, the present application provides a test press head device and a handler, which can at least reduce the risk of abrasion damaging the diaphragm.

[0006] To this end, the present application adopts the following technical scheme: a test press head device, comprising a driving assembly, the driving assembly comprising a cylinder body, a diaphragm and a piston, the cylinder body comprising an upper cover, a middle cover and a lower cover which are sequentially stacked, the diaphragm being clamped between the middle cover and the lower cover, the piston being arranged in the cylinder body and being driven by the diaphragm to move in the cylinder body, wherein the upper cover is provided with a guide for guiding the movement of the piston in the cylinder body, and the middle cover has a shielding part which extends between the diaphragm and the guide.

[0007] In some embodiments, the piston comprises a main body part and a flange part, the flange part being provided with a guide hole which is sleeved on the guide.

[0008] In some embodiments, the guide hole is a through hole, and the guide member can protrude out of the flange portion during movement of the piston.

[0009] In some embodiments, the flange portion has a thickness smaller than that of the main body portion, and the main body portion and the flange portion form a stepped surface.

[0010] In some embodiments, the main body portion and the flange portion are an integral piece.

[0011] In some embodiments, the middle cover has a peripheral side wall, the shielding portion is arranged at one end of the peripheral side wall close to the lower cover, and the flange portion is limited to move in the space between the shielding portion and the upper cover.

[0012] In some embodiments, an opening portion corresponding to the main body portion of the piston is formed inside the shielding portion, and the main body portion protrudes into the opening portion.

[0013] In some embodiments, the upper cover and the lower cover are respectively connected and fixed to the middle cover by fasteners; and / or the upper cover and the middle cover are connected and fixed by fasteners, and the fasteners press against the diaphragm.

[0014] In some embodiments, the diaphragm is provided with a positioning through hole, the lower cover and the middle cover are provided with a positioning blind hole corresponding to the positioning through hole, the upper cover, the diaphragm and the middle cover are positioned by a positioning pin, the positioning pin passes through the positioning through hole, and both ends of the positioning pin are respectively accommodated in the positioning blind holes of the lower cover and the middle cover.

[0015] The application also adopts the following technical scheme: a sorting machine, which comprises a feeding device, a collecting device, a test seat device and a test pressure head device as described above, the feeding device is used to feed electronic devices to be tested to the test seat device and the test pressure head device, the electronic devices to be tested are tested by cooperation of the test pressure head device and the test seat device, and the collecting device is used to sort and recycle the electronic devices after testing.

[0016] The test pressure head device provided by the application comprises a cylinder body, a diaphragm and a piston. The cylinder body comprises an upper cover, a middle cover and a lower cover which are sequentially stacked. The diaphragm is clamped between the middle cover and the lower cover. The piston is arranged in the cylinder body and can be driven by the diaphragm to move in the cylinder body. The upper cover is provided with a guide member for guiding the movement of the piston in the cylinder body. The middle cover has a shielding portion which extends between the diaphragm and the guide member. By arranging the middle cover and the shielding portion extending between the diaphragm and the guide member, the abrasion powder generated by the friction between the piston and the guide member during the movement of the piston does not directly contact the diaphragm, thereby increasing the service life of the diaphragm and improving the service life of the cylinder. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a perspective view of an embodiment of the test pressure head device of this application.

[0019] Figure 2 This is an exploded perspective view of an embodiment of the pressure head device of this application.

[0020] Figure 3 for Figure 2 An exploded three-dimensional view of the component shown from another perspective.

[0021] Figure 4 This is another exploded perspective view of an embodiment of the pressure head device of this application.

[0022] Figure 5 for Figure 4 An exploded three-dimensional view of the component shown from another perspective.

[0023] Figure 6 This is a cross-sectional view of an embodiment of the test pressure head device of this application.

[0024] Figure 7 This is another cross-sectional view of an embodiment of the pressure head device of this application.

[0025] Figure 8 This is another cross-sectional view of an embodiment of the pressure head device of this application.

[0026] Figure 9 This is a perspective view of the follower component in one embodiment of the test pressure head device of this application.

[0027] Figure 10 This is a perspective view of the reset component in one embodiment of the test pressure head device of this application.

[0028] The component labels are as follows:

[0029] 100, test head device; 1, base plate assembly; 11, pipe joint; 2, drive assembly; 20, cylinder; 21, upper cover; 211, upper cover fixing hole; 212, guide; 22, middle cover; 220, opening part; 221, middle cover blind hole; 222, first connecting hole; 223, second connecting hole; 224, circumferential side wall; 225, shielding part; 23, lower cover; 231, lower cover fixing hole; 232, lower cover blind hole; 24, diaphragm; 241, positioning through hole; 242, positioning pin; 25, piston; 251, main body part; 252, flange part; 253, guide hole; 3, follow-up and reset device; 31, follow-up plate; 32, connecting plate; 33, heat insulation part; 4, fluid temperature control device; 6, follow-up assembly; 61, sleeve; 611, lower stop ring; 62, upper stop ring; 63, force-bearing steel ball; 64, connecting screw; 7, reset assembly; 71, sleeve column; 72, spring; 73, retainer; 74, ball; 75, top hat. DETAILED DESCRIPTION

[0030] In order to make the above objectives, features and advantages of the present application more clear and easily understood, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, a lot of specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be implemented in many different ways other than the one described herein, and one of ordinary skill in the art can make similar improvements without departing from the spirit of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0031] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there can be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there can be an intervening element. The terms "vertical", "horizontal", "up", "down", "left", "right", and similar expressions used in the description of the present application are used for the purpose of illustration only and do not indicate the only orientation of the implementation.

[0032] In addition, the terms "first", "second", etc. are used only for the purpose of description and should not be understood as indicating or implying relative importance or an indicated number of technical features. Therefore, the features defined as "first", "second", etc. can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0033] In the present application, unless specifically defined and limited otherwise, the first feature is "on", "under", "above" or "over" the second feature can be that the first feature is in direct contact with the second feature, or the first feature is indirectly in contact with the second feature through an intermediate medium. Moreover, the first feature is "on", "above" and "over" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the first feature is higher than the second feature in horizontal height. The first feature is "under", "below" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the first feature is lower than the second feature in horizontal height.

[0034] Unless otherwise defined, all technical and scientific terms used in the specification of the present application have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "and / or" used in the specification of the present application includes any and all combinations of one or more related listed items.

[0035] Referring to Figures 1 to 8 As shown, the present application provides a test head apparatus 100. The test head apparatus 100 is a component of a test machine, which is mainly used for temperature control of electronic devices, assembly and compression of electronic devices on a test socket assembly, etc. In some embodiments, the electronic devices can be integrated circuit boards or other semiconductor devices, etc., and the test machine can be a three-temperature handler, etc.

[0036] Referring to Figures 2 to 5 As shown, the test head apparatus 100 includes a driving assembly 2. The driving assembly 2 is used to provide a downward pressure to compress the electronic devices on the test socket assembly. In an embodiment of the present application, the driving assembly 2 includes a cylinder body 20, a diaphragm 24 and a piston 25. The cylinder body 20 includes an upper cover 21, a middle cover 22 and a lower cover 23 which are sequentially stacked, and the diaphragm 24 is clamped between the middle cover 22 and the lower cover 23. The piston 25 is arranged in the cylinder body 20, and the piston 25 can be driven by the diaphragm 24 to move in the cylinder body 20. The upper cover 21 is provided with a guide 212 for guiding the movement of the piston 25 in the cylinder body 20, and the middle cover 22 has a shielding portion 225 which extends between the diaphragm 24 and the guide 212.

[0037] The driving assembly 2 provided by the embodiment of the present application is a diaphragm cylinder. Compared with a traditional diaphragm cylinder, the cylinder body 20 is additionally provided with a middle cover 22, and the middle cover 22 has a unique structure. By arranging the middle cover 22 and the middle cover 22 being provided with a shielding part 225 extending between the diaphragm 24 and the guide part 212, the abrasion powder generated by the friction between the piston 25 and the guide part 212 during the movement of the piston 25 is shielded by the shielding part 225 of the middle cover 22, and the abrasion powder does not directly contact the diaphragm 24, thereby reducing the abrasion of the diaphragm 24 by the abrasion powder, increasing the service life of the diaphragm 24, and improving the service life of the entire cylinder.

[0038] Please refer to Figures 4 to 6 As shown in the drawings, the embodiment of the present application also changes the structure of the piston 25, while ensuring the structural strength of the piston 25, a smaller cylinder diameter can be achieved to meet the application scenarios that require stable output of small pressure. Specifically, in the embodiment, the piston 25 includes a main body part 251 and a flange part 252, the thickness of the flange part 252 is smaller than the thickness of the main body part 251, and the main body part 251 and the flange part 252 form a stepped surface. The main body part 251 is used to cooperate with the diaphragm 24 to receive the force from the diaphragm 24 to realize the movement of the piston 25. The flange part 252 does not contact the diaphragm 24, and the flange part 252 is provided with a guide hole 253, and the guide hole 253 is sleeved on the guide part 212. The embodiment of the present application arranges the piston 25 as the main body part 251 and the flange part 252 forming a stepped surface, so that the effective force receiving area in contact with the diaphragm 24 is reduced, that is, only the main body part 251 contacts the diaphragm 24, and the flange part 252 is not an effective force receiving area. In this way, while ensuring the structural strength of the piston 25 and not affecting the arrangement of the guide part, a smaller cylinder diameter can be achieved, which is conducive to stably outputting small pressure.

[0039] In the embodiment, the main body part 251 and the flange part 252 are an integral piece, which is easy to manufacture and has good structural strength. The guide hole 253 is a through hole, and the guide part 212 can protrude out of the flange part 252 during the movement of the piston 25. In this way, the movement distance of the piston 25 is not constrained by the thickness of the flange part 252, and the piston 25 can have a relatively large movement distance. In the embodiment, the guide part 212 is a guide pin, one end of which is accommodated in the mounting hole formed in the upper cover 21, and the other end protrudes out of the cylinder body 20. In the embodiment, the main body part 251 is cylindrical, and the flange part 252 is annular. The flange part 252 uniformly distributes a plurality of guide holes 253 in the circumferential direction, and the plurality of guide holes 253 cooperate with the plurality of guide parts 212 arranged correspondingly, which can improve the smoothness and stability of the guide.

[0040] Please continue to refer to Figures 4 to 6As shown, in the present embodiment, the middle cover 22 is a component with a cavity. Specifically, the middle cover 22 has a peripheral side wall 224, and a shielding portion 225 is arranged at one end of the peripheral side wall 224 close to the lower cover 23. The shielding portion 225 corresponds to the bottom wall of the middle cover 22, and together with the peripheral side wall 224, it encloses a cavity. The other end of the middle cover 22 opposite to the shielding portion 225 is an open mouth. The shielding portion 225 is in the shape of a circular ring and is not a closed structure. An opening portion 220 is formed on the inner side of the shielding portion 225 corresponding to the main body portion 251 of the piston 25. During inflation, the diaphragm 24 contacts the main body portion 251 through the opening portion 220 to push the piston 25 to move. The size of the open mouth is such that the main body portion 251 and the flange portion 252 of the piston 25 can be assembled in the cavity of the middle cover 22, and the size of the opening portion 220 is such that only the main body portion 251 can pass through, and the flange portion 252 cannot pass through.

[0041] In the present embodiment, the upper cover 21 and the lower cover 23 are substantially planar. The lower cover 23 is arranged at the side of the middle cover 22 with the shielding portion 225, and the lower cover 23 is provided with a shallow groove at a position corresponding to the opening portion 220 to form a gas storage space with the diaphragm 24. The diaphragm 24 is clamped between the lower cover 23 and the shielding portion 225. The lower cover 23 is further covered with the substrate assembly 1, and the substrate assembly 1 is provided with an air passage. The inner end of the air passage communicates with the above-mentioned gas storage space between the diaphragm 24 and the lower cover 23, and the outer end of the air passage is connected with the pipe joint 11 to pass in gas through the pipe joint 11. The gas passes into the air passage of the substrate assembly 1 through the pipe joint 11 and is delivered into the gas storage space between the diaphragm 24 and the lower cover 23 to drive the diaphragm 24 to bulge and push the piston 25 to move. The upper cover 21 is arranged at the open mouth side of the middle cover 22 to close the open mouth. The main body portion 251 protrudes into the opening portion 220, and the diaphragm 24 bulges under the action of gas pressure to push the main body portion 251 to move the piston 25. The flange portion 252 of the piston 25 is limited to move in the space between the shielding portion 225 and the upper cover 21.

[0042] Please refer to Figure 4 and Figure 5 As shown, in the present embodiment, the diaphragm 24 is positioned with the middle cover 22 and the lower cover 23 by positioning pins 242 to prevent the diaphragm 24 from shaking and mispositioning. When the middle cover 22 and the lower cover 23 are connected and fixed, the diaphragm 24 is clamped between the middle cover 22 and the lower cover 23. Specifically, the diaphragm 24 is provided with positioning through holes 241, and the lower cover 23 and the middle cover 22 are provided with positioning blind holes corresponding to the positioning through holes 241, which include lower cover blind holes 232 and middle cover blind holes 221. The upper cover 21, the diaphragm 24 and the middle cover 22 are positioned by the positioning pins 242, and the positioning pins 242 pass through the positioning through holes 241, and the two ends of the positioning pins 242 are respectively accommodated in the lower cover blind holes 232 and the middle cover blind holes 221.

[0043] Please continue to refer to Figure 4 and Figure 5As shown, in the embodiment, the upper cover 21 and the lower cover 23 are respectively connected and fixed with the middle cover 22. Specifically, the circumferential wall 224 of the middle cover 22 is provided with a first connecting hole 222 and a second connecting hole 223, the upper cover 21 has an upper cover fixing hole 211 corresponding to the first connecting hole 222, the lower cover 23 has a lower cover fixing hole 231 corresponding to the second connecting hole 223, the upper cover 21 is connected and fixed with the middle cover 22 by a fastener penetrating through the first connecting hole 222 and the upper cover fixing hole 211, and the lower cover 23 is connected and fixed with the middle cover 22 by a fastener penetrating through the second connecting hole 223 and the lower cover fixing hole 231. In the embodiment, the upper cover 21 is connected with the middle cover 22 at the middle points of the four sides, and the lower cover 23 is connected with the middle cover 22 at the four corners; the upper cover 21 and the lower cover 23 are respectively connected with the middle cover 22, which can make the force on the cylinder uniform and dispersed, and improve the reliability of the connection. In some embodiments, the fastener is a bolt. In the embodiment, the upper cover 21 and the middle cover 22 are connected and fixed by the fastener, and the fastener presses on the diaphragm 24 to tightly abut the diaphragm 24 with the lower cover 23, so that the diaphragm 24 is fixed more reliably. Of course, in other embodiments, the fastener can be used to sequentially connect the upper cover 21, the middle cover 22 and the lower cover 23 together.

[0044] Please refer to Figures 1 to 5 As shown, in the embodiment, the test indenter device 100 further comprises a follow-up and reset device 3 and a fluid temperature control device 4. The follow-up and reset device 3 is used to provide a certain movement space in the horizontal direction for the fluid temperature control device 4 and the electronic devices carried thereby when there is an alignment deviation between the test indenter device 100 and the test seat assembly during the pressing process of the test indenter device 100, so as to adjust the alignment deviation, and provide reset for each component when the external force is removed after the test is completed.

[0045] Specifically, please refer to Figure 4 , Figure 7 and Figure 8 As shown, the follow-up and reset device 3 comprises a follow-up plate 31, a follow-up assembly 6 and a reset assembly 7. The follow-up assembly 6 and the reset assembly 7 are arranged in the follow-up plate 31. The follow-up plate 31 is connected with the exposed end of the piston 25 through a connecting plate 32, and the follow-up plate 31 is connected with the fluid temperature control device 4 through a heat insulation piece 33. The follow-up plate 31 and the connecting plate 32 can move relative to each other in the horizontal direction, and the follow-up plate 31 is fixed relative to the heat insulation piece 33 and the fluid temperature control device 4 in the horizontal direction. The fluid temperature control device 4 is internally provided with a flow channel, and fluid can be introduced to achieve temperature control. The lower surface of the fluid temperature control device 4 is in contact with the electronic devices to achieve temperature control and pickup of the electronic devices.

[0046] Please refer to Figure 8 and Figure 9As shown, the follower plate 31 is provided with a receiving groove for receiving the follower assembly 6, which includes a sleeve 61, an upper retaining ring 62 sleeved on the sleeve 61, and a plurality of force-bearing steel balls 63 arranged on the circumference of the sleeve 61. The lower end of the sleeve 61 forms a lower retaining ring 611, and the force-bearing steel balls 63 are clamped between the upper retaining ring 62 and the lower retaining ring 611. A connecting rod 64 passes through the sleeve 61 and is connected to the connecting plate 32. Please refer to Figure 7 and Figure 10 As shown, the reset assembly 7 includes a sleeve column 71, a spring 72, a retainer 73, a ball 74, and a top cap 75. The upper end of the sleeve column 71 forms a retaining ring, and the spring 72 is sleeved on the sleeve column 71 and abuts against the retaining ring. The ball 74 is located above the sleeve column 71 and is limited by the retainer 73, and the top cap 75 is located above the ball 74, and the top cap 75 has a conical concave surface matched with the ball 74. The follower assembly 6 and the reset assembly 7 are both provided in multiple numbers to achieve smooth movement.

[0047] Please refer to Figure 7 and Figure 8 As shown, when the test indenter device 100 moves downward and there is a deviation in the alignment with the test seat assembly, under the matched guiding use of the conical concave surface of the top cap 75 and the ball 74, the follower plate 31 drives the fluid temperature control device 4 and the electronic devices connected thereto to move horizontally relative to the connecting plate 32 to adjust and align the position of the electronic devices. After the test is completed, when the test indenter device 100 drives the electronic devices to move upward and away from the test seat assembly, under the reset force of the spring 72, the sleeve column 71 pushes the ball 74 to reset to the center of the conical concave surface to drive the top cap 75 and the follower plate 31 to reset horizontally. During the movement and reset, the provision of multiple follower assemblies 6 can enable the follower plate 31 to move well and stably. Please refer to Figure 6 and Figure 7 As shown, after the test is completed, the cylinder of the driving assembly 2 is deflated, and the pushing force of the diaphragm 24 applied to the piston 25 disappears. At this time, the spring 72 included in the reset assembly 7 pushes the sleeve column 71, the ball 74, and the top cap 75 upward, the top cap 75 pushes the connecting plate 32 and the piston 25 fixedly connected to the connecting plate 32 upward, so that the piston 25 moves upward and resets.

[0048] The application also provides a sorting machine, which includes a feeding device, a collecting device, a test seat device, and the test indenter device 100 as above. The feeding device is used to feed the electronic devices to be tested to the test seat device and the test indenter device 100, the electronic devices to be tested are tested by the cooperation of the test indenter device 100 and the test seat device, and the collecting device is used to sort and collect the electronic devices after the test.

[0049] From the above description of the specific embodiments, it can be known that the test pressure head device 100 provided by the application includes a cylinder body 20, a diaphragm 24 and a piston 25, the cylinder body 20 includes an upper cover 21, a middle cover 22 and a lower cover 23 which are sequentially stacked, the diaphragm 24 is clamped between the middle cover 22 and the lower cover 23, the piston 25 is arranged in the cylinder body 20 and can be driven by the diaphragm 24 to move in the cylinder body 20, the upper cover 21 is provided with a guide 212 for guiding the piston 25 to move in the cylinder body 20, the middle cover 22 has a shielding part 225 which extends between the diaphragm 24 and the guide 212; by arranging the middle cover 22 and the middle cover 22 being provided with the shielding part 225 which extends between the diaphragm 24 and the guide 212, the abrasion powder generated by the friction between the piston 25 and the guide 212 when the piston 25 moves cannot directly contact the diaphragm 24, the service life of the diaphragm 24 is increased, and the service life of the cylinder is improved.

[0050] The technical features of the above embodiments can be combined in any manner, and in order to make the description simple, all possible combinations of the technical features in the above embodiments are not described, however, as long as the combination of the technical features does not exist contradictory, it should be considered that it is within the scope of the present application.

[0051] The above embodiments only express several implementation manners of the application, the description is more specific and detailed, but it should not be understood as a limitation on the patent application scope. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the application, a number of modifications and improvements can be made, which are all within the protection scope of the application. Therefore, the patent protection scope of the application should be subject to the appended claims.

Claims

1. A test indenter apparatus comprising a drive assembly (2) comprising a cylinder (20), a diaphragm (24) and a piston (25), characterised in that, The cylinder (20) comprises an upper cover (21), a middle cover (22) and a lower cover (23) arranged in sequence, the diaphragm (24) is clamped between the middle cover (22) and the lower cover (23), the piston (25) is arranged in the cylinder (20) and can be driven by the diaphragm (24) to move in the cylinder (20), wherein the upper cover (21) is provided with a guide (212) for guiding the piston (25) to move in the cylinder (20), the middle cover (22) has a shielding part (225) extending between the diaphragm (24) and the guide (212).

2. The test indenter apparatus of claim 1, wherein, The piston (25) comprises a main body part (251) and a flange part (252), the flange part (252) is provided with a guide hole (253) sleeved on the guide (212).

3. The test indenter apparatus of claim 2, wherein, The guide hole (253) is a through hole, and the guide (212) can protrude out of the flange part (252) during the movement of the piston (25).

4. The test indenter apparatus of claim 2, wherein, The thickness of the flange part (252) is less than the thickness of the main body part (251), and the main body part (251) and the flange part (252) form a stepped surface.

5. The test indenter apparatus of claim 4, wherein, The main body part (251) and the flange part (252) are an integral part.

6. The test indenter apparatus of claim 2, wherein, The middle cover (22) has a circumferential side wall (224), the shielding part (225) is arranged at one end of the circumferential side wall (224) close to the lower cover (23), and the flange part (252) is limited to move in the space between the shielding part (225) and the upper cover (21).

7. The test indenter apparatus of claim 6, wherein, An opening part (220) corresponding to the main body part (251) of the piston (25) is formed in the inner side of the shielding part (225), and the main body part (251) protrudes into the opening part (220).

8. The test indenter apparatus of claim 6, wherein, The upper cover (21) and the lower cover (23) are respectively connected and fixed with the middle cover (22) by fasteners; and / or the upper cover (21) and the middle cover (22) are connected and fixed by fasteners, and the fasteners press on the diaphragm (24).

9. The test indenter apparatus of claim 1, wherein, The diaphragm (24) is provided with a positioning through hole (241), the lower cover (23) and the middle cover (22) are provided with positioning blind holes corresponding to the positioning through hole (241), the upper cover (21), the diaphragm (24) and the middle cover (22) are positioned by a positioning pin (242), the positioning pin (242) passes through the positioning through hole (241), and two ends of the positioning pin (242) are respectively accommodated in the positioning blind holes of the lower cover (23) and the middle cover (22).

10. A sorter characterized by The test pressure head device (100) comprises a feeding device, a collecting device, a test seat device and any one of claims 1 to 9, the feeding device is used to feed the electronic device to be tested to the test seat device and the test pressure head device (100), the electronic device to be tested is tested by cooperation of the test pressure head device (100) and the test seat device, and the collecting device is used for classifying and recycling the electronic device after testing.

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