Piezoelectric ceramic piece vacuumizing automatic pasting control system

By utilizing a vacuum chamber and vacuum pumping device in a vacuum environment, an automatic piezoelectric ceramic sheet bonding control system was developed, which solved the problem of uneven bonding between the piezoelectric ceramic sheet and the ultrasonic transducer housing. This system achieves an efficient and precise bonding process, adapting to the needs of different transducer models.

CN223671944UActive Publication Date: 2025-12-16HARBIN SHENGNUO MEDICAL TECH CO LTD
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Patent Information

Application Number
CN202423223225.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-25
Publication Date
2025-12-16
Estimated Expiration
2034-12-25

AI Technical Summary

Technical Problem

In existing technologies, the piezoelectric ceramic sheet is not evenly bonded to the inside of the ultrasonic transducer housing, which easily generates air bubbles, affecting performance parameters, and the manual manufacturing process is inefficient.

Method used

An automatic vacuum bonding control system for piezoelectric ceramic sheets was designed. The system utilizes a vacuum chamber and a vacuum pumping device to bond the sheets in a vacuum environment. A stepper motor drives a sliding guide to move a pressure head, achieving uniform bonding of the piezoelectric ceramic sheets to the ultrasonic transducer housing. Limit switches and drivers control the pressure to ensure bonding accuracy.

Benefits of technology

The vacuum environment reduces the generation of air bubbles in the adhesive, enabling uniform bonding of the piezoelectric ceramic sheet to the ultrasonic transducer housing, improving production efficiency and bonding accuracy, and allowing for flexible replacement of different transducer models.

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Abstract

The utility model relates to the technical field of ultrasonic transducer manufacturing, in particular to a piezoelectric ceramic piece vacuumizing automatic pasting control system which comprises a shell, the shell is of a sealed structure, a vacuum lower cover is arranged in the shell, a partition plate is arranged on the shell, a replaceable clamping groove and an air exhaust hole are formed in the partition plate, and the replaceable clamping groove is used for containing an ultrasonic transducer; a vacuum upper cover is arranged on the partition plate, and the vacuum upper cover and the vacuum lower cover jointly form a vacuum chamber; the moving device is arranged in the vacuum lower cover and comprises a stepping motor, a sliding guide piece and a pressure head, the stepping motor is connected with the sliding guide piece, the pressure head is arranged on the sliding guide piece, and a piezoelectric ceramic piece is arranged on the pressure head; and the vacuumizing device is connected with the vacuum chamber. Under the vacuum environment, uniform and stable pressure is applied to the piezoelectric ceramic piece on the ultrasonic transducer shell so as to reduce bubbles generated in the adhesive, and therefore the purpose of effectively reducing bubbles generated on an adhesive layer in the ultrasonic transducer shell is achieved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to ultrasonic transducer manufacturing technical field, concretely relates to a kind of piezoelectric ceramic sheet vacuum automatic pasting control system. BACKGROUND

[0002] As the device of mechanical energy and ultrasonic wave conversion, and emitting and receiving ultrasonic wave, ultrasonic transducer plays a key role in the field of ultrasonic technology. And piezoelectric ultrasonic transducer is widely used in biomedical instruments, special processing, precision electronic manufacturing and other fields due to its advantages of simple components, convenient driving, high precision, sensitivity, stable performance and low production cost.

[0003] However, the preparation of most types of ultrasonic transducers requires relatively harsh production environment, and the preparation environment of piezoelectric ultrasonic transducer is relatively low. People usually use piezoelectric ultrasonic transducer as the core part of the instrument, but due to human differences, the performance parameters of manually produced piezoelectric ultrasonic transducer cannot be unified, and the production efficiency of manual production is extremely low, which cannot meet market demand.

[0004] During the preparation of the pasted ultrasonic transducer, the adhesion between the piezoelectric layer and the matching layer is usually artificially bonded by adhesive. Since the force of human hand is not uniform, it is easy to cause the piezoelectric ceramic sheet and the ultrasonic transducer shell to be not pasted and adhered, and a large number of air bubbles are generated during the pasting process. This phenomenon will affect the performance parameters of piezoelectric ultrasonic transducer. UTILITY MODEL CONTENTS

[0005] Therefore, the technical problem to be solved by the utility model is to overcome the problem that the piezoelectric ceramic sheet and the ultrasonic transducer shell are easily not pasted and adhered, and the adhesive contains small air bubbles, so as to provide a piezoelectric ceramic sheet vacuum automatic pasting control system.

[0006] In order to solve the above technical problems, the utility model provides a piezoelectric ceramic sheet vacuum automatic pasting control system, which comprises: a shell, the shell is a sealed structure, a vacuum lower cover is arranged in the shell, a partition plate is arranged on the shell, replaceable clamping grooves and air holes are arranged on the partition plate, the replaceable clamping grooves are used for placing ultrasonic transducer shell, a vacuum upper cover is arranged on the partition plate, and the vacuum upper cover and the vacuum lower cover jointly form a vacuum chamber; a moving device is arranged in the vacuum chamber, the moving device comprises a stepping motor, a sliding guide and a pressure head, the stepping motor is connected with the sliding guide, the pressure head is arranged on the sliding guide, and piezoelectric ceramic sheets are arranged on the pressure head; a vacuum device is connected with the vacuum chamber; and a control device is connected with the moving device and the vacuum device.

[0007] Further, the pressure head and the replaceable clamping groove are located on the same axis.

[0008] Further, a bracket is arranged on the sliding guide, and the pressure head is arranged on the bracket.

[0009] Further, an upper limit switch and a lower limit switch are arranged, the upper limit switch is arranged on the upper end of the sliding guide, and the lower limit switch is arranged on the lower end of the sliding guide.

[0010] Further, the sliding guide is a linear slide rail module.

[0011] Further, the motion device further comprises a driver, the driver is arranged in the shell and connected with the stepping motor.

[0012] Further, the power supply is connected with the driver.

[0013] Further, the vacuumizing device comprises a vacuum pump, an exhaust pipe, a gas release valve and a negative pressure gauge, the vacuum pump is connected with the vacuum chamber through the exhaust pipe, the gas release valve is arranged on the exhaust pipe, and the negative pressure gauge is arranged on the shell.

[0014] Further, an air filter is arranged between the vacuum pump and the exhaust pipe.

[0015] Further, the control device comprises a panel switch, and the panel switch is connected with the power supply, the driver, the vacuum pump and the gas release valve.

[0016] The technical scheme of the utility model has the following advantages:

[0017] 1. The piezoelectric ceramic sheet vacuumizing automatic sticking control system provided by the utility model comprises a shell, the shell is of a sealed structure, a vacuum lower cover is arranged in the shell, a partition plate is arranged on the shell, replaceable clamping grooves and air exhaust holes are arranged on the partition plate, the replaceable clamping grooves are used for placing an ultrasonic transducer shell, a vacuum upper cover is arranged on the partition plate, and the vacuum upper cover and the vacuum lower cover jointly form a vacuum chamber; a motion device is arranged in the vacuum chamber, the motion device comprises a stepping motor, a sliding guide and a pressure head, the stepping motor is connected with the sliding guide, the pressure head is arranged on the sliding guide, and piezoelectric ceramic sheets are arranged on the pressure head; a vacuumizing device is connected with the vacuum chamber; and a control device is connected with the motion device and the vacuumizing device.

[0018] By setting the vacuum lower cover in the inside of the shell, the vacuum lower cover can jointly form the vacuum chamber with the vacuum upper cover, the inside of the vacuum chamber is communicated through the air exhaust hole on the partition plate, and the vacuum chamber is vacuumized by the vacuumizing device, so that the inside of the vacuum chamber is ensured to be in the vacuum environment.

[0019] The piezoelectric ceramic sheet vacuumizing automatic pasting control system can apply uniform and stable pressure to the piezoelectric ceramic sheet on the ultrasonic transducer shell under the vacuum environment, so as to reduce the air bubbles in the adhesive, thereby effectively reducing the air bubbles in the adhesive layer inside the ultrasonic transducer shell.

[0020] 2. The piezoelectric ceramic sheet vacuumizing automatic pasting control system provided by the utility model, the pressure head and the replaceable clamping groove are located on the same axis.

[0021] 3. The piezoelectric ceramic sheet vacuumizing automatic pasting control system provided by the utility model, the motion device further comprises a driver, the driver is arranged in the shell and connected with the stepping motor.

[0022] 4. The piezoelectric ceramic sheet vacuumizing automatic pasting control system provided by the utility model, the vacuumizing device comprises a vacuum pump, an exhaust pipe, a gas release valve and a negative pressure gauge, the vacuum pump is connected with the vacuum chamber through the exhaust pipe, the gas release valve is arranged on the exhaust pipe, and the negative pressure gauge is arranged on the shell.

[0023] The summary provides a summary of the content of the utility model, which is intended to introduce the selection of concepts in a simplified form, which will be further described in the detailed description below. The summary is not intended to identify important features or essential features of the disclosure, nor is it intended to limit the scope of the disclosure. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the specific embodiments of the utility model or the technical solutions in the prior art, the drawings needed in the specific embodiments or prior art description will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0025] Fig. 1 The structure diagram of the shell of the piezoelectric ceramic sheet vacuumizing automatic sticking control system provided by the utility model is shown in the figure.

[0026] Fig. 2 The structure diagram of the partition plate of the piezoelectric ceramic sheet vacuumizing automatic sticking control system provided by the utility model is shown in the figure.

[0027] Fig. 3 The structure diagram of the inside of the shell of the piezoelectric ceramic sheet vacuumizing automatic sticking control system provided by the utility model is shown in the figure.

[0028] Fig. 4 The structure diagram of the vacuum lower cover of the piezoelectric ceramic sheet vacuumizing automatic sticking control system provided by the utility model is shown in the figure.

[0029] Explanation of reference signs:

[0030] 1, shell; 2, vacuum lower cover; 3, partition plate; 4, replaceable clamping groove; 5, air extraction hole; 6, ultrasonic transducer shell; 7, vacuum upper cover; 8, movement device; 9, stepping motor; 10, sliding guide; 11, pressure head; 12, control device; 13, vacuumizing device; 14, support; 15, socket; 16, three-in-one switch; 17, driver; 18, power supply; 19, vacuum pump; 20, exhaust pipe; 21, air release valve; 22, negative pressure gauge; 23, air filter; 24, panel switch. DETAILED DESCRIPTION

[0031] In the following, only some exemplary embodiments are briefly described. As those skilled in the art can recognize, the described embodiments can be modified in various different ways without departing from the spirit or scope of the disclosure. Therefore, the drawings and the description are considered to be exemplary in nature rather than limiting.

[0032] In the description of the disclosure, it needs to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "straight", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the disclosure. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the disclosure, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0033] In the description of the disclosure, it needs to be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral connection; it can be mechanical connection, or electrical connection or can communicate with each other; it can be directly connected, or indirectly connected through intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the disclosure can be understood according to the specific circumstances.

[0034] In the disclosure, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the "upper", "above" and "on" of the first feature to the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "under", "below" and "under" of the first feature to the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0035] The disclosure below provides many different embodiments or examples for implementing different structures of the disclosure. For the sake of simplicity, the description below of a particular embodiment or example focuses on the differences among that embodiment and the other embodiments. It is to be understood that the description of a particular embodiment or example is intended to apply to all possible embodiments and examples. Furthermore, the description of a particular embodiment or example is intended to apply to other embodiments and examples as well, unless clearly indicated otherwise.

[0036] The preferred embodiments of the present disclosure will be described below with reference to the drawings. It should be understood that the preferred embodiments described herein are merely for the purpose of illustration and explanation, and are not intended to limit the present disclosure.

[0037] Please refer to Figs. 1 to 4 As shown in the drawings, the utility model provides a piezoelectric ceramic wafer vacuumizing automatic pasting control system, include: casing 1, casing 1 is sealed structure, be equipped with vacuum lower cover 2 in casing 1, be equipped with baffle 3 on casing 1, be equipped with replaceable clamping slot 4 and air extraction hole 5 on baffle 3, replaceable clamping slot 4 is used to place ultrasonic transducer casing 6, be equipped with vacuum upper cover 7 on baffle 3, vacuum upper cover 7 and vacuum lower cover 2 jointly constitute vacuum chamber, movement device 8 is located in vacuum lower cover 2, movement device 8 includes step motor 9 and sliding guide 10 and pressure head 11, step motor 9 is connected with sliding guide 10, pressure head 11 is located on sliding guide 10, be equipped with piezoelectric ceramic wafer on pressure head 11, vacuumizing device 13 is connected with vacuum chamber, control device 12 is connected with movement device 8 and vacuumizing device 13.

[0038] By setting vacuum lower cover 2 in the inside of casing 1, the vacuum lower cover 2 can jointly constitute vacuum chamber with vacuum upper cover 7, through the air extraction hole 5 on baffle 3, realize the communication inside vacuum chamber, and utilize vacuumizing device 13 to carry out vacuumizing to vacuum chamber, to guarantee that vacuum chamber is in vacuum environment. In the process of piezoelectric ceramic wafer and ultrasonic transducer casing 6's pasting, can drive step motor 9 through control device 12, and drive sliding guide 10 to carry out lifting movement, to drive pressure head 11 and bond piezoelectric ceramic wafer on ultrasonic transducer casing 6.

[0039] The piezoelectric ceramic sheet vacuum automatic sticking control system, in a vacuum environment, applies uniform and stable pressure to the piezoelectric ceramic sheet on the ultrasonic transducer shell 6 that has been stuck, so as to reduce the generation of air bubbles in the adhesive, thereby achieving the purpose of effectively reducing the generation of air bubbles in the adhesive layer inside the ultrasonic transducer shell 6. It can be mechanically integrated and does not need to be pressed by hand. At the same time, the replaceable clamping groove 4 can be replaced flexibly, thereby being suitable for the production needs of different types of transducers and having high adaptability.

[0040] The vacuum chamber is divided into a vacuum upper cover 7 and a vacuum lower cover 2, and the ultrasonic transducer shell 6 coated with adhesive is placed in the vacuum chamber for easy operation.

[0041] The pressure head 11 and the piezoelectric ceramic sheet are stuck with double-sided tape, thereby realizing the connection between the pressure head 11 and the piezoelectric ceramic sheet. Of course, other glues with adhesion smaller than the adhesive inside the transducer shell can also be used for connection, as long as the connection between the pressure head 11 and the piezoelectric ceramic sheet can be realized.

[0042] In some optional embodiments, the pressure head 11 and the replaceable clamping groove 4 are located on the same axis. This arrangement can ensure that the pressure head 11 is directly opposite the replaceable clamping groove 4, thereby ensuring the accuracy of the piezoelectric ceramic sheet and the ultrasonic transducer shell 6 during sticking, and avoiding sticking deviation.

[0043] Specifically, the piezoelectric ceramic sheet vacuum automatic sticking control system further comprises a bracket 14, the bracket 14 is arranged on the sliding guide 10, and the pressure head 11 is arranged on the bracket 14. Through the arrangement of the bracket 14, the connection between the pressure head 11 and the sliding guide 10 is realized, that is, the pressure head 11 is installed on the sliding guide 10, and at the same time, the installation stability of the pressure head 11 is ensured.

[0044] The piezoelectric ceramic sheet vacuum automatic sticking control system further comprises an upper limit switch and a lower limit switch (not shown in the figure), the upper limit switch is arranged at the upper end of the sliding guide 10, and the lower limit switch is arranged at the lower end of the sliding guide 10.

[0045] The positions of the upper limit switch and the lower limit switch on the sliding guide 10 can be adjusted adaptively according to actual needs, thereby avoiding the occurrence of machine out-of-control phenomenon;

[0046] The size of the pressure head 11 and the position of the upper limit switch and the lower limit switch are adjusted according to the size of the ultrasonic transducer shell 6, when the pressure head 11 runs to the lower limit switch, the movement is automatically stopped, that is, the maximum pressure of the pressure head 11 on the ceramic piece inside the transducer is calculated, therefore, the operator does not need to pay attention to the position of the pressure head 11 and click the "stop movement" button to control the stepper motor to stop moving.

[0047] In the embodiment, the sliding guide 10 is a linear sliding rail module.

[0048] In some optional embodiments, the motion device 8 further comprises a driver 17 arranged in the shell 2 and connected with the stepper motor 9. The power supply 18 is connected with the driver 17.

[0049] Through the arrangement of the power supply 18 and the driver 17, the stepper motor 9 can be driven by the driver 17 to drive the sliding guide 10 to move up and down, thereby driving the pressure head 11 to move up and down. The power supply 18 provides a power source for the driver 17.

[0050] Specifically, the power supply 18 is a 24V switching power supply.

[0051] In some optional embodiments, the vacuumizing device 13 comprises a vacuum pump 19, an exhaust pipe 20, a gas release valve 21, a negative pressure gauge 22, and the vacuum lower cover 2 and the vacuum upper cover 7 together constitute a vacuum chamber. The vacuum pump 19 is connected with the vacuum chamber through the exhaust pipe 20, the gas release valve 21 is arranged on the exhaust pipe 20, and the negative pressure gauge 22 is arranged on the shell 1.

[0052] Through the connection of the vacuum pump 19, the exhaust pipe 20 and the vacuum chamber, the vacuum pump 19 can be used to vacuumize the vacuum chamber, and the negative pressure gauge 22 can be used to observe the pressure value in the vacuum chamber in real time. When the pressure value reaches the set value, the piezoelectric ceramic piece and the ultrasonic transducer shell 6 can be pasted.

[0053] When the pasting work is completed, the gas release valve 21 can be opened to release the air in the vacuum chamber, so that the atmospheric pressure in the vacuum chamber returns to the normal state.

[0054] Specifically, an air filter 23 is arranged between the vacuum pump 19 and the exhaust pipe 20. The arrangement of the air filter 23 can filter the air.

[0055] The piezoelectric ceramic piece vacuumizing and automatic pasting control system, the control device 12 comprises a panel switch 24, and the panel switch 24 is connected with the driver 17, the vacuum pump 19 and the gas release valve 21.

[0056] The panel switch 24 comprises an OLED display screen and has 2x2 display buttons and a circuit board (not shown in the figure), and a series of operations of the piezoelectric ceramic sheet vacuumizing automatic sticking control system can be controlled by the buttons on the panel switch 24, and the specific operation functions are displayed by the OLED display screen.

[0057] The outer wall of the shell 1 is provided with a socket 15 and a three-in-one switch 16, and the socket 15 is provided for the vacuum pump 13 to use power.

[0058] The three-in-one switch 16 is provided for the power supply 18 to provide power, and the power supply 18 supplies power to the moving device 8, the control device 12, and the air release valve 21.

[0059] The overall use process of the piezoelectric ceramic sheet vacuumizing automatic sticking control system is as follows:

[0060] The ultrasonic transducer shell 6 with the adhesive dripped inside is placed on the clamping groove 4 on the partition plate 3, and then the piezoelectric ceramic sheet and the pressure head 11 are pasted with double-sided adhesive tape, and the vacuum cover 7 is put back in place.

[0061] After the vacuum pump 19 is started, the vacuum pump 19 starts to work and expels the air in the vacuum chamber, so that the adhesive inside the ultrasonic transducer shell 6 is placed in a vacuum environment, thereby expelling the air bubbles inside the adhesive, and the pressure value on the negative pressure table 22 changes with the working time of the vacuum pump 19, and the pressure value in the vacuum chamber is displayed in real time; after 20 to 30 minutes, the running direction of the stepping motor 9 is set to downward, and the stepping motor 9 is started until the stepping motor 9 stops moving after running to the lower limit switch; under the vacuum environment, the pressure head 11 driven by the stepping motor 9 and the piezoelectric ceramic sheet pasted thereon are attached to the sticking place of the ultrasonic transducer shell 6, enough pressure is applied without damaging the piezoelectric ceramic sheet, until the adhesive solidification is completed, after the adhesive solidifies, the air release valve 21 is opened, the vacuum cover 7 is removed, the pressure head 11 is raised, and the ultrasonic transducer with the piezoelectric ceramic sheet pasted and the adhesive solidified is taken out.

[0062] Obviously, the above embodiments are only examples for clearly illustrating, and are not limitation to the embodiments. For ordinary skilled in the art, other different forms of changes or variations can be made on the basis of the above description. Here, all the embodiments need not and cannot be exhausted. The obvious changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. A piezoelectric ceramic sheet vacuumizing automatic sticking control system, characterized by, The utility model relates to a kind of ultrasonic cleaning device, including: Shell (1), shell (1) is sealed structure, vacuum lower cover (2) is equipped in shell (1), baffle (3) is equipped on shell (1), replaceable card slot (4) and air extraction hole (5) are equipped on baffle (3), replaceable card slot (4) is used to place ultrasonic transducer shell (6), vacuum upper cover (7) is equipped on baffle (3), and vacuum upper cover (7) and vacuum lower cover (2) jointly constitute vacuum chamber; Motion device (8) is equipped in vacuum lower cover (2), and motion device (8) includes step motor (9) and sliding guide (10), and pressure head (11), step motor (9) is connected with sliding guide (10), and pressure head (11) is equipped on sliding guide (10), and piezoelectric ceramic piece is equipped on pressure head (11); Vacuumizing device (13) is connected with vacuum chamber; Control device (12) is connected with motion device (8) and vacuumizing device (13).

2. The piezoelectric ceramic disc vacuumizing and automatic sticking control system according to claim 1, characterized in that, Pressure head (11) and replaceable card slot (4) are located on same axis.

3. The piezoelectric ceramic disc vacuumizing and automatic sticking control system according to claim 2, characterized in that, It further includes support (14), support (14) is equipped on sliding guide (10), and pressure head (11) is equipped on support (14).

4. The piezoelectric ceramic disc vacuumizing and automatic sticking control system according to claim 3, characterized in that, It further includes upper limit switch and lower limit switch, upper limit switch is equipped on the upper end of sliding guide (10), and lower limit switch is equipped on the lower end of sliding guide (10).

5. The piezoelectric ceramic disc vacuumizing and automatic sticking control system according to claim 1, characterized in that, Sliding guide (10) is linear slide rail module.

6. The piezoelectric ceramic sheet vacuumizing and automatic sticking control system according to any one of claims 1-4, characterized in that, Motion device (8) further includes driver (17), driver (17) is equipped in shell (1), and is connected with step motor (9).

7. The piezoelectric ceramic disc vacuumizing and automatic sticking control system according to claim 6, characterized in that, Power supply (18) is connected with driver (17).

8. The piezoelectric ceramic disc vacuumizing and automatic sticking control system according to claim 7, characterized in that, Vacuumizing device (13) includes vacuum pump (19) and exhaust pipe (20), air release valve (21), negative pressure gauge (22), vacuum pump (19) is connected with vacuum chamber by exhaust pipe (20), air release valve (21) is equipped on exhaust pipe (20), and negative pressure gauge (22) is equipped on shell (1).

9. The piezoelectric ceramic disc vacuumizing and automatic sticking control system according to claim 8, characterized in that, Air filter (23) is equipped between vacuum pump (19) and exhaust pipe (20).

10. The piezoelectric ceramic disc vacuumizing and automatic sticking control system according to claim 9, characterized in that, Control device (12) includes panel switch (24), and panel switch (24) is connected with power supply (18) and driver (17), vacuum pump (19), air release valve (21).