Automatic blanking and boxing mechanism for masks

Abstract

The utility model discloses an automatic blanking and boxing mechanism for masks, which comprises a movable base, a blanking support and a reversing cylinder, the blanking support is rotatably connected with the base, the reversing cylinder is used for driving the blanking support to rotate by taking the base as a basis, and the reversing cylinder drives the blanking support to be switched between a horizontal state and an inclined state. A supporting assembly and butt-clamping assemblies located on the two sides of the supporting assembly are movably arranged on the discharging support, a material box is placed in an area formed by the butt-clamping assemblies and the supporting assembly, and the material box is supported by the supporting assembly when inclining. According to the automatic discharging and boxing mechanism for the masks, in the whole operation process, an operator does not make contact with the masks, and pollution to the masks is avoided; meanwhile, the discharging support is arranged to be in a rotatable mode, the butt clamping assembly and the supporting assembly are matched, the rotated material box is closer to the ground, and carrying operation by a single person is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of mask, more specifically, relate to a mask automatic blanking boxing mechanism. BACKGROUND

[0002] Photomask (Photomask) also be called simply photomask or MASK, is in the field of semiconductor related production fine pattern needs to use the important tool of important tool, using photomask can realize the rapid replication of target pattern, so that the production of large quantities of semiconductor devices, display devices becomes possible.Mask as master pattern, its production process has higher precision and quality requirement, need on the quartz or other material of the edition face that reaches the transmittance and flatness requirement plating chromium, glue coating, photolithography, development, etching, stripping, inspection, repair etc.Process, photomask is packaged after completing each process processing, needs to be discharged into the crystal box.

[0003] The glass of making photomask product is smooth and fragile, which has higher requirements for the mask blanking and boxing mechanism. At present, in the mask industry, the taking and placing of large-size masks and the transfer are generally achieved by using a robot taking and placing + a fixed type mask placing mechanism for transfer + manual mask lifting and boxing. The large-size mask is large in size and weight, and manual mask lifting is time-consuming and laborious. There are risks of collision and mask falling during the lifting process. In addition, the hand directly contacts the mask, which may cause pollution of the product and cannot guarantee the cleanliness of the product, seriously affecting the production efficiency and quality. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a mask automatic blanking and boxing mechanism to solve the technical problems in the above background.

[0005] The utility model technical scheme provides a mask automatic blanking and boxing mechanism, which comprises a movable base, a blanking support rotatably connected with the base, and a reversing cylinder for driving the blanking support to rotate based on the base.

[0006] The blanking support is movably provided with a supporting assembly and a pair of clamping assemblies located on both sides of the supporting assembly. The material box is placed in the area formed by the pair of clamping assemblies and the supporting assembly, and the material box is supported by the supporting assembly when it is inclined.

[0007] In a preferred embodiment, the blanking support comprises a base and a plurality of supporting rods arranged at intervals on the base, and the material box is supported by the supporting rods.

[0008] In a preferred embodiment, the pair of clamping assemblies comprises two sets of oppositely arranged clamping members, each of the two sets of clamping members comprises a clamping plate and a clamping cylinder and a clamping guide connected with the clamping plate, and the two clamping cylinders drive the two clamping plates to move towards or away from each other.

[0009] In a preferred embodiment, the clamping guide comprises a guide plate and a guide rod arranged through the guide plate, a guide sleeve is arranged on the guide plate, the guide rod is in sliding connection with the guide sleeve, and one end of the guide rod is fixed with the clamping plate.

[0010] In a preferred embodiment, the clamping plate is arranged outside the blanking support and is higher than the support rod body.

[0011] In a preferred embodiment, a bent limiting frame is detachably arranged on the clamping plate.

[0012] In a preferred embodiment, the support assembly comprises an L-shaped support plate and a support driving member connected with the L-shaped support plate, the L-shaped support plate is in sliding connection with the blanking support, and the support driving member drives the L-shaped support plate to move on the blanking support.

[0013] In a preferred embodiment, the support driving member comprises a driving motor and a lead screw connected with the output end of the driving motor, and the L-shaped support plate is connected with the lead screw.

[0014] The beneficial effects of the technical scheme of the utility model are as follows:

[0015] The mask automatic blanking and boxing mechanism has the advantages that the operator is not in contact with the mask during the whole operation process, so that the mask is prevented from being polluted, the blanking support is arranged in a rotatable form, the pair of clamping assemblies and the support assembly are matched, the material box is closer to the ground after being rotated, and the single person can conveniently carry out the carrying operation. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 Fig. 1 is a whole schematic view of the blanking support in a horizontal state according to the utility model,

[0017] Figure 2 Fig. 2 is a whole schematic view of the blanking support in a vertical state according to the utility model,

[0018] Figure 3 Fig. 3 is a plan view according to the utility model,

[0019] Figure 4 Fig. 4 is a partial structure schematic view according to the utility model.

[0020] Explanation of reference signs: 1 base, 2 blanking support, 3 base, 4 support rod body, 5 reversing cylinder, 6 pair of clamping assemblies, 7 clamping cylinder, 8 clamping plate, 9 guide rod, 10 guide sleeve, 11 guide plate, 12 limiting frame, 13 support assembly, 14 L-shaped support plate, 15 drive motor, 16 screw rod. DETAILED DESCRIPTION

[0021] The utility model will be explained in further detail below in combination with the drawings and specific embodiments. The embodiments of the utility model are given for the convenience of example and description, and are not exhaustive or limit the utility model to the disclosed forms. Many modifications and changes are obvious to those skilled in the art. The embodiments are selected and described to better illustrate the principles and practical application of the utility model, and to enable those skilled in the art to understand the utility model so as to design various embodiments with various modifications suitable for specific purposes.

[0022] As Figures 1-4 The utility model technical scheme provides a kind of automatic unloading and boxing mechanism of mask plate, including movable base 1, with the base 1 rotationally connected blanking support 2, for driving the blanking support 2 with base 1 as basis rotation reversing cylinder 5, the reversing cylinder 5 drives the blanking support 2 between horizontal state and inclination device each other switching. The blanking support 2 is movably provided with support assembly 13 and the pair of clamping assemblies 6 located at the both sides of support assembly 13, and the area formed by the pair of clamping assemblies 6 and the support assembly 13 is placed in the material box, and the material box is supported by the support assembly 13 when it is inclined.

[0023] Mask plate needs to be stored in material box, when storing, material box is placed on blanking support 2 and is in horizontal state, then the pair of clamping assemblies 6 and support assembly 13 clamp and position material box, after positioning, the pair of clamping assemblies 6 leaves, to avoid affecting loading;Then robot places mask plate into material box, manually covers material box cover, and the pair of clamping assemblies 6 clamps material box;Then reversing cylinder 5 drives blanking support 2 to rotate, and the maximum angle of rotation is 90 degrees, and specific rotation angle can be adjusted according to actual requirement. By rotating, blanking support 2 changes from the state as shown in Figure 1 Into the state as shown in Figure 2 Further make material box be in standing state, the bottom of material box after rotation is supported by support assembly 13, then the pair of clamping assemblies 6 releases material box, and material box is taken down by artificial, thus the boxing work of mask plate is completed. In the whole operation process, operator has no contact with mask plate, to avoid polluting mask plate, and meanwhile, blanking support 2 is arranged in rotatable form, cooperates with the pair of clamping assemblies 6 and support assembly 13, and material box is closer to ground after rotating, to facilitate single-person carrying operation.

[0024] The blanking support 2 comprises a base 3 and a plurality of support rods 4 arranged on the base 3, and the material box is supported by the support rods 4. The connecting seat arranged on the base 3 is connected with the base 1 through a rotating rod, and the support rods 4 are arranged in plurality, the material box is placed on the support rods 4, and the support stability is high.

[0025] The pair of clamping assemblies 6 comprises two groups of oppositely arranged clamping pieces, and each group of the clamping pieces comprises a clamping plate 8, a clamping cylinder 7 connected with the clamping plate 8 and a clamping guide piece. Two groups of the clamping cylinders 7 drive two clamping plates 8 to move close to or away from each other. The clamping guide piece comprises a guide plate 11 and a guide rod 9 arranged through the guide plate 11. The guide plate 11 is provided with a guide sleeve 10, the guide rod 9 is in sliding connection with the guide sleeve 10, and one end of the guide rod 9 is fixed with the clamping plate 8. The clamping plate 8 is located outside the blanking support 2 and is higher than the support rod 4.

[0026] In the above scheme, after the material box is placed on the blanking support 2, the two clamping cylinders 7 drive the two clamping plates 8 to move close to each other and clamp the side of the material box, and at the same time, the support assembly 13 contacts the other side of the material box. Then the robot places the mask plate into the material box. The arrangement of the clamping guide piece ensures that the clamping plate 8 moves more stably. The pair of clamping assemblies 6 can clamp material boxes of different sizes and meet the boxing work of mask plates of various sizes.

[0027] A bent limiting frame 12 is detachably arranged on the clamping plate 8. The bent limiting frame 12 can protect the material box during rotation, avoid the risk of the material box falling off during the tilting process, and reduce the stroke of the clamping assembly. The bent part can be replaced to meet the limiting requirements of material boxes of different heights.

[0028] The support assembly 13 comprises an L-shaped support plate 14 and a support driving piece connected with the L-shaped support plate 14. The L-shaped support plate 14 is in sliding connection with the blanking support 2, and the support driving piece drives the L-shaped support plate 14 to move on the blanking support 2. The support driving piece comprises a driving motor 15 and a lead screw 16 connected with the output end of the driving motor 15, and the L-shaped support plate 14 is connected with the lead screw 16. The L-shaped support plate 14 supports the bottom of the material box when the material box is tilted, and then the two clamping plates 8 are driven to move away from each other to release the clamping of the material box, so that the material box can be carried.

[0029] Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art and related fields without creative labor shall belong to the protection scope of the present application. The structures, devices and operation methods not specifically described and explained in the present application, if not specially described and limited, are implemented according to the conventional means in the art.

Claims

1. An automatic mask feeding and boxing mechanism, characterized in that: The device comprises a movable base, a feeding support pivotally connected with the base, and a reversing cylinder for driving the feeding support to rotate based on the base, the reversing cylinder driving the feeding support to switch between a horizontal state and an inclined state. The feeding support is movably provided with a supporting assembly and a clamping assembly located on both sides of the supporting assembly, a material box being placed in an area formed by the clamping assembly and the supporting assembly, and the material box being supported by the supporting assembly when being inclined.

2. The automatic unloading and boxing mechanism of the mask according to claim 1, characterized in that: The feeding support comprises a base and a plurality of supporting rods arranged at intervals on the base, and the material box is supported by the supporting rods.

3. The automatic unloading and boxing mechanism of the mask according to claim 2, characterized in that: The clamping assembly comprises two groups of oppositely arranged clamping members, each group of the clamping members comprising a clamping plate, a clamping cylinder connected with the clamping plate, and a clamping guide, and the two groups of clamping cylinders driving the two clamping plates to move close to or away from each other.

4. The automatic unloading and boxing mechanism of the mask according to claim 3, characterized in that: The clamping guide comprises a guide plate and a guide rod arranged through the guide plate, the guide plate being provided with a guide sleeve, the guide rod being slidably connected with the guide sleeve, and one end of the guide rod being fixed with the clamping plate.

5. The automatic unloading and boxing mechanism of the mask according to claim 3, characterized in that: The clamping plate is located outside the feeding support and is higher than the supporting rods.

6. The automatic unloading and boxing mechanism of the mask according to claim 3, characterized in that: The clamping plate is detachably provided with a bent limiting frame.

7. The automatic unloading and boxing mechanism of the mask according to claim 1, characterized in that: The supporting assembly comprises an L-shaped supporting plate and a supporting drive connected with the L-shaped supporting plate, the L-shaped supporting plate being slidably connected with the feeding support, and the supporting drive driving the L-shaped supporting plate to move on the feeding support.

8. The automatic unloading and boxing mechanism of the mask according to claim 7, characterized in that: The supporting drive comprises a driving motor and a lead screw connected with an output end of the driving motor, and the L-shaped supporting plate is connected with the lead screw.

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