Furnace pressure detection device for single crystal furnace special for silicon carbide
By introducing a fixing and detection mechanism into the silicon carbide single crystal furnace, and utilizing the silicone layer to buffer thermal expansion differences and monitor pressure changes in real time, the problems of sensor damage and pressure anomalies are solved, achieving stable measurement and timely alarm, thus ensuring the quality of single crystal growth.
Patent Information
- Application Number
- CN202423187569.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-24
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2034-12-24
AI Technical Summary
In the prior art, the mechanical stress caused by the difference in thermal expansion of the fixing device and sensor when the temperature changes can lead to instability of the contact surface or damage to the sensor. At the same time, the operator cannot detect abnormal pressure in the furnace in time, which affects the single crystal growth process.
The furnace pressure detection device for silicon carbide single crystal furnaces is adopted, including a single crystal furnace frame, a fixing mechanism and a detection mechanism. It utilizes a screw, fixing block, protective frame, motor, temperature sensor and pressure sensor. The silicone layer absorbs temperature changes to ensure stable sensor position. It is also equipped with a control panel and alarm to monitor pressure changes in real time.
It effectively absorbs and evenly distributes temperature changes from the sensor, ensuring measurement consistency and accuracy, and provides timely alarms to prevent the furnace pressure from deviating from the ideal value, thus avoiding sensor damage and ensuring the quality of single crystal growth.
Smart Images
Figure CN223678690U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of silicon carbide, and in particular to a furnace pressure detection device for a silicon carbide-specific single crystal furnace. Background Technology
[0002] In the PVT method, the growth of silicon carbide single crystals involves high temperature and high pressure conditions. In this process, controlling the stability and uniformity of furnace pressure is very important because furnace pressure has a direct impact on the quality, defects, and growth rate of silicon carbide crystals. The furnace pressure detection device is one of the key pieces of equipment in the single crystal furnace. Its function is to monitor and control the pressure of the gas inside the furnace in real time. For silicon carbide single crystal growth, the stability of furnace pressure is directly related to the quality of crystal growth. Excessively high or low furnace pressure will lead to uneven crystal growth, increased defects, and even failure of the entire growth process.
[0003] In existing technologies, the materials of the fixing device and the sensor undergo different expansions when the temperature changes. There is no buffer between them, and the difference in thermal expansion will cause mechanical stress, which will lead to instability of the contact surface or damage to the sensor. Furthermore, once the furnace pressure becomes abnormal, such as too high or too low pressure, the operator cannot detect it in time, causing the furnace pressure to deviate from the ideal value, which will affect the single crystal growth process. Therefore, a furnace pressure detection device for silicon carbide single crystal furnace is proposed to solve the above-mentioned problems. Utility Model Content
[0004] To address the technical problems in existing technologies where the materials of the fixing devices and sensors undergo different expansion processes, and the difference in thermal expansion causes mechanical stress, leading to sensor damage, and where operators cannot detect abnormal furnace pressure in time, resulting in furnace pressure deviating from the ideal value, this application provides a furnace pressure detection device for silicon carbide-specific single crystal furnaces.
[0005] This application provides a furnace pressure detection device for a silicon carbide single crystal furnace, which adopts the following technical solution:
[0006] A furnace pressure detection device for a silicon carbide single crystal furnace includes a single crystal furnace frame. A fixing mechanism is provided inside the single crystal furnace frame. The fixing mechanism includes a screw and a fixing block. The rotation of the screw drives the fixing block to move.
[0007] A detection mechanism is provided on the outer surface of the single crystal furnace frame. The detection mechanism includes a temperature sensor, which monitors the temperature inside the single crystal furnace frame.
[0008] Optionally, the fixing mechanism further includes a protective frame, which is fixedly installed on the inner wall of the single crystal furnace frame by bolts, and a motor is fixedly installed on the inner wall of the protective frame.
[0009] Optionally, the output shaft of the motor is fixedly installed at one end of the screw rod, and the other end of the screw rod is rotationally connected to the inner wall of the protective frame through a bearing.
[0010] Optionally, the inner wall of the groove of the fixed block is threadedly connected to the outer surface of the screw rod, the fixed block is slidingly connected to the inner wall of the groove of the protective frame, a silica gel layer is fixedly installed on the outer surface of the fixed block, and a connecting rod is rotationally connected to the outer surface of the fixed block.
[0011] Optionally, a placement table is fixedly installed on the outer surface of the protective frame, a deflection block is rotationally connected to the outer surface of the placement table, and the outer surface of the deflection block is rotationally connected to the inner wall of the groove of the connecting rod.
[0012] Optionally, the detection mechanism further comprises a pressure sensor, the pressure sensor is placed on the upper surface of one of the placement tables, and the outer surface of the pressure sensor is in contact with the outer surface of the silica gel layer.
[0013] Optionally, the temperature sensor is placed on the upper surface of another of the placement tables, the outer surface of the temperature sensor is in contact with the outer surface of the silica gel layer, and a control panel and an alarm are fixedly installed on the upper surface of the single crystal furnace frame.
[0014] In summary, the present application has at least one of the following beneficial technical effects:
[0015] 1. By setting the fixing mechanism, the fixed block is driven to move, the protective frame can protect the motor and internal facilities, the motor screw rod rotates, the fixed block is threadedly connected to the screw rod to drive it to rotate and move, but since the fixed block is slidingly connected to the protective frame, it is limited, so that it only moves, the silica gel has certain elasticity and deformability, which can absorb and evenly distribute the temperature change of the sensor to a certain extent, the placement table is rotationally connected to the deflection block, which fixes it without affecting the deflection of the deflection block, the deflection block is rotationally connected to the connecting rod, so that the movement of the fixed block drives the deflection block to deflect through the connecting rod, thereby driving another fixed block to move through the connecting rod on the other side, solving the technical problem that in the prior art, the materials of the fixing device and the sensor will experience different expansions when the temperature changes, there is no buffer between the two, the difference in thermal expansion will cause mechanical stress, and then cause unstable contact surface or damage to the sensor.
[0016] 2, through the setting detection mechanism, the temperature in the single crystal furnace frame is monitored, the pressure sensor is placed on the placement table, and is in contact with the silica gel layer, the pressure sensor is fixed through the fixing mechanism, the relative position of the pressure sensor is ensured not to deviate, thereby guaranteeing the consistency and accuracy of measurement, the temperature sensor is placed on another placement table, and is in contact with the silica gel layer, the temperature sensor is fixed through the fixing mechanism, the relative position of the temperature sensor is ensured not to deviate, the control panel is used for monitoring the data output of the temperature sensor and the pressure sensor, provides a real-time operation interface of the system, the alarm is used for monitoring the system state in real time, once the temperature or pressure exceeds the preset safety range, an alarm is immediately sent, so that the staff can take measures, solve the technical problems in the prior art that once the pressure in the furnace is abnormal, such as overhigh or too low pressure, the operator cannot detect in time, the pressure in the furnace deviates from the ideal value, and then the single crystal growth process is affected. BRIEF DESCRIPTION OF DRAWINGS
[0017] Figure 1 is a schematic diagram of a furnace pressure detection device for a single crystal furnace special for silicon carbide provided by the utility model;
[0018] Figure 2 is a perspective view of a protection frame structure of a furnace pressure detection device for a single crystal furnace special for silicon carbide provided by the utility model;
[0019] Figure 3 is a perspective view of a motor structure of a furnace pressure detection device for a single crystal furnace special for silicon carbide provided by the utility model;
[0020] Figure 4 is a perspective view of a placement table structure of a furnace pressure detection device for a single crystal furnace special for silicon carbide provided by the utility model;
[0021] Figure 5 is a perspective view of a deflection block structure of a furnace pressure detection device for a single crystal furnace special for silicon carbide provided by the utility model.
[0022] In the drawing: 1, single crystal furnace frame; 2, protection frame; 21, motor; 3, screw rod; 4, fixed block; 41, silica gel layer; 42, connecting rod; 5, placement table; 51, deflection block; 6, pressure sensor; 7, temperature sensor; 71, control panel; 72, alarm. DETAILED DESCRIPTION
[0023] The following will be combined with the drawings Figures 1-5 The application is further described in detail.
[0024] Refer to Figures 1-5The utility model provides a kind of furnace pressure detection device for silicon carbide special single crystal furnace, including single crystal furnace frame 1, the inside of single crystal furnace frame 1 is provided with fixed mechanism, fixed mechanism includes screw rod 3 and fixed block 4, the rotation of screw rod 3 drives fixed block 4 to move.
[0025] In order to provide protection for motor 21 and internal facilities, the fixed mechanism further includes a protective frame 2, which is fixedly installed on the inner wall of the single crystal furnace frame 1 by bolts. The inner wall of the protective frame 2 is fixedly installed with the motor 21. The protective frame 2 and the single crystal furnace frame 1 are fixedly installed by bolts, which are easy to disassemble. The motor 21 is fixedly installed with the protective frame 2, which provides protection for the motor 21 and internal facilities, avoiding the influence of high temperature or other external factors.
[0026] In order to ensure the stability of rotation, the output shaft of the motor 21 is fixedly installed with one end of the screw rod 3, and the other end of the screw rod 3 is rotatably connected with the inner wall of the protective frame 2 through a bearing. The motor 21 is fixedly installed with the screw rod 3 to drive the screw rod 3 to rotate. One end of the screw rod 3 is rotatably connected with the inner wall of the protective frame 2 through a bearing, which is fixed while rotating without affecting the protective frame 2, so as to ensure the stability of rotation.
[0027] In order to absorb and evenly distribute the temperature changes of the sensor, the inner wall of the groove of the fixed block 4 is threadedly connected with the outer surface of the screw rod 3. The fixed block 4 is slidably connected with the inner wall of the groove of the protective frame 2. The outer surface of the fixed block 4 is fixedly installed with a silica gel layer 41. The outer surface of the fixed block 4 is rotatably connected with a connecting rod 42. The fixed block 4 is driven to rotate and move by threadedly connecting with the screw rod 3. However, the fixed block 4 is limited by being slidably connected with the protective frame 2, so that it only moves. The fixed block 4 is fixedly installed with the silica gel layer 41, which has certain elasticity and deformability. It can absorb and evenly distribute the temperature changes of the sensor to a certain extent.
[0028] In order to drive the deflection of the deflection block 51, the outer surface of the protective frame 2 is fixedly installed with a placement table 5. The outer surface of the placement table 5 is rotatably connected with the deflection block 51. The outer surface of the deflection block 51 is rotatably connected with the groove inner wall of the connecting rod 42. The protective frame 2 is fixedly installed with the placement table 5, which is fixed. The placement table 5 is rotatably connected with the deflection block 51, which is fixed while not affecting the deflection of the deflection block 51. The deflection block 51 is rotatably connected with the connecting rod 42, which is fixed while not affecting the deflection. In order to move the fixed block 4 to drive the deflection of the deflection block 51 through the connecting rod 42, so as to drive another fixed block 4 to move through the other connecting rod 42.
[0029] By setting the fixing mechanism, the fixed block 4 is moved, the protection frame 2 can protect the motor 21 and the internal facilities, the motor 21 screw rod 3 rotates, the fixed block 4 is threadedly connected with the screw rod 3, and the rotation movement is driven, but because the fixed block 4 is slidably connected with the protection frame 2 and is limited, only the movement is made, the silica gel has certain elasticity and deformability, it can absorb and evenly distribute the temperature change of the sensor to a certain extent, the placement table 5 is rotatably connected with the deflection block 51, and the deflection block 51 is fixed while not affecting the deflection of the deflection block 51, the deflection block 51 is rotatably connected with the connecting rod 42, so that the movement of the fixed block 4 drives the deflection block 51 to deflect through the connecting rod 42, thereby driving another fixed block 4 to move through another connecting rod 42 on the other side, solving the technical problem that in the prior art, when the temperature changes, the materials of the fixing device and the sensor will experience different expansions, there is no buffer between the two, the thermal expansion difference will cause mechanical stress, and then cause the instability of the contact surface or the damage of the sensor.
[0030] In order to monitor the temperature in the single crystal furnace frame 1, the outer surface of the single crystal furnace frame 1 is provided with a detection mechanism, and the detection mechanism comprises a temperature sensor 7.
[0031] In order to ensure that the relative position of the pressure sensor 6 does not deviate, the detection mechanism further comprises a pressure sensor 6, the pressure sensor 6 is placed on the upper surface of a placement table 5, the outer surface of the pressure sensor 6 is in contact with the outer surface of the silica gel layer 41, the pressure sensor 6 is placed on the placement table 5 and in contact with the silica gel layer 41, the pressure sensor 6 is fixed by the fixing mechanism, so that the relative position of the pressure sensor 6 does not deviate, thereby ensuring the consistency and accuracy of measurement.
[0032] In order to monitor the data output of the temperature sensor 7 and the pressure sensor 6, the temperature sensor 7 is placed on the upper surface of another placement table 5, the outer surface of the temperature sensor 7 is in contact with the outer surface of the silica gel layer 41, the upper surface of the single crystal furnace frame 1 is respectively fixedly installed with a control panel 71 and an alarm 72, the temperature sensor 7 is placed on the other placement table 5 and in contact with the silica gel layer 41, the temperature sensor 7 is fixed by the fixing mechanism, so that the relative position of the temperature sensor 7 does not deviate, the single crystal furnace frame 1 is respectively fixedly installed with the control panel 71 and the alarm 72, the control panel 71 is used for monitoring the data output of the temperature sensor 7 and the pressure sensor 6, and provides a real-time operation interface of the system, the alarm 72 is used for monitoring the system state in real time, and once it is detected that the temperature or the pressure exceeds the preset safety range, an alarm is immediately given, so that the staff can take measures.
[0033] The temperature in the single crystal furnace frame 1 is monitored by setting a detection mechanism. The pressure sensor 6 is placed on the placement table 5 and is in contact with the silica gel layer 41. The pressure sensor 6 is fixed by a fixing mechanism to ensure that the relative position of the pressure sensor 6 does not deviate, thereby ensuring the consistency and accuracy of the measurement. The temperature sensor 7 is placed on another placement table 5 and is in contact with the silica gel layer 41. The temperature sensor 7 is fixed by a fixing mechanism to ensure that the relative position of the temperature sensor 7 does not deviate. The control panel 71 is used to monitor the data output of the temperature sensor 7 and the pressure sensor 6, and provides a real-time operation interface for the system. The alarm 72 is used to monitor the state of the system in real time. Once the temperature or pressure exceeds the preset safety range, an alarm is immediately issued so that the staff can take measures to solve the problem. In the prior art, once the pressure in the furnace is abnormal, such as excessively high or low pressure, the operator cannot detect it in time, which causes the pressure in the furnace to deviate from the ideal value, thereby affecting the single crystal growth process.
[0034] Working principle: when the sensor needs to be fixed, the staff places the temperature sensor 7 and the pressure sensor 6 on the placement table 5 respectively, and starts the motor 21 to drive the screw rod 3 to rotate, which drives the fixed block 4 connected with it to move in the sliding connection protection frame 2. One side of the fixed block 4 moves through the connecting rod 42 connected with it to drive the deflection block 51 connected with the connecting rod 42 to deflect, thereby driving the other side of the fixed block 4 to move through the other side of the connecting rod 42, and fixing the temperature sensor 7 and the pressure sensor 6. The silica gel layer 41 on the fixed block 4 is in contact with the temperature sensor 7 and the pressure sensor 6, which helps to reduce the influence of external temperature fluctuations and improve the measurement stability. At the same time, the staff monitors the data output of the temperature sensor 7 and the pressure sensor 6 through the control panel 71 to provide a real-time operation interface for the system. The alarm 72 is used to monitor the state of the system in real time. Once the temperature or pressure exceeds the preset safety range, an alarm is immediately issued so that the staff can take measures.
[0035] The above are preferred embodiments of the present application, which do not limit the protection scope of the present application. Therefore, any equivalent changes made on the basis of the structure, shape, and principle of the present application should be covered within the protection scope of the present application.
Claims
1. A furnace pressure detection device for a silicon carbide-specific single crystal furnace, characterized in that: The single crystal furnace frame (1) is internally provided with a fixing mechanism comprising a screw rod (3) and a fixing block (4), the rotation of the screw rod (3) drives the fixing block (4) to move; The outer surface of the single crystal furnace frame (1) is provided with a detection mechanism comprising a temperature sensor (7) for monitoring the temperature in the single crystal furnace frame (1).
2. The furnace pressure detection device for a silicon carbide dedicated single crystal furnace according to claim 1, characterized by: The fixing mechanism further comprises a protective frame (2) fixedly installed on the inner wall of the single crystal furnace frame (1), and the inner wall of the protective frame (2) is fixedly installed with a motor (21).
3. The furnace pressure detecting device for a single crystal furnace for silicon carbide according to claim 2, characterized by: The output shaft of the motor (21) is fixedly installed with the one end of the screw rod (3), and the other end of the screw rod (3) is rotatably connected with the inner wall of the protective frame (2) through a bearing.
4. The furnace pressure detecting device for a single crystal furnace for silicon carbide according to claim 3, characterized by: The inner wall of the groove of the fixing block (4) is threadedly connected with the outer surface of the screw rod (3), the fixing block (4) is slidably connected with the inner wall of the groove of the protective frame (2), the outer surface of the fixing block (4) is fixedly installed with a silica gel layer (41), and the outer surface of the fixing block (4) is rotatably connected with a connecting rod (42).
5. The furnace pressure detecting device for a single crystal furnace for silicon carbide according to claim 4, characterized in that: The outer surface of the protective frame (2) is fixedly installed with a placing table (5), the outer surface of the placing table (5) is rotatably connected with a deflection block (51), and the outer surface of the deflection block (51) is rotatably connected with the groove inner wall of the connecting rod (42).
6. The furnace pressure detection device for a silicon carbide dedicated single crystal furnace according to claim 5, characterized by: The detection mechanism further comprises a pressure sensor (6) placed on the upper surface of one of the placing tables (5), and the outer surface of the pressure sensor (6) is in contact with the outer surface of the silica gel layer (41).
7. The furnace pressure detection device for a silicon carbide dedicated single crystal furnace according to claim 6, characterized by: The temperature sensor (7) is placed on the upper surface of another placing table (5), the outer surface of the temperature sensor (7) is in contact with the outer surface of the silica gel layer (41), and the upper surface of the single crystal furnace frame (1) is fixedly installed with a control panel (71) and an alarm (72) respectively.