Semiconductor low-speed experiment machine

Abstract

The utility model relates to the technical field of mechanical appliances, in particular to a semiconductor low-speed testing machine. Comprising a bottom plate, two vertical rods are symmetrically and fixedly connected to the top of the bottom plate, an assembling plate is fixedly connected to one sides of the two vertical rods, a main shaft is rotationally connected to one side of the assembling plate, a driving mechanism is arranged on the assembling plate and used for driving the main shaft to rotate, and two rotating joints are symmetrically arranged above and below the main shaft. The protruding blocks are inserted into the involution grooves to limit horizontal movement of the connector flange, the two arc-shaped rods are combined into the circular ring to limit vertical movement of the connector flange, it is guaranteed that the rotary connector does not move, and meanwhile the connector flange and the shaft flange extrude the rubber ring; the rubber ring plays a role in enhancing the sealing performance between the joint flange and the shaft flange, so that the rotating shaft and the main shaft are fixedly connected quickly on the premise of ensuring the sealing performance between the rotating shaft and the main shaft, and the efficiency of detecting the rotating joint is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to mechanical appliance technical field, concretely relates to semiconductor low speed experimental machine. BACKGROUND

[0002] Semiconductor rotary joint belongs to important functional components in the important function parts of the chip exposure, developing and other process equipment in the indispensable grinding equipment in the chip production process, in the production process of silicon-based chip, semiconductor joint in the chip production in a variety of processes and process equipment, play the role of conducting fluid and vacuum.

[0003] After the production of semiconductor rotary joint, it needs to detect whether its performance reaches the design use standard, especially wafer implantation ion and planarization and other need low-speed stable medium and vacuum equipment on medium transmission stability, low flow pressure fluctuation performance requirement is very high, so it is necessary to design a kind of semiconductor rotary joint performance testing test machine, simulates the actual working condition of equipment, to detect whether the product can meet the use demand, for example, the flow variation under the required rotating speed, through the detection, find the existing bad items, facilitate fault finding, in view of this, we propose semiconductor low speed experimental machine. UTILITY MODEL CONTENTS

[0004] The utility model discloses a semiconductor low speed experimental machine, to solve the problem in the background art.

[0005] To achieve the above object, one of the purposes of the utility model is to provide semiconductor low speed experimental machine, including the bottom plate, the bottom plate top symmetry fixedly connected with two vertical rods, one side of two vertical rods is fixedly connected with the assembly plate, the one side of assembly plate is rotatably connected with the main shaft, and the drive mechanism is arranged on the assembly plate, the drive mechanism is used for driving the rotation of the main shaft, the upper and lower of main shaft symmetry is provided with two rotary joints, the rotary joint is rotatably arranged with the rotating shaft, the upper end and the lower end of main shaft symmetry is provided with two connecting mechanisms, the connecting mechanism is connected with the main shaft and the rotating shaft and is fixed, the one side of assembly plate is provided with the limiting mechanism, the limiting mechanism is contacted with the rotary joint and limits the rotation of rotary joint.

[0006] As a further improvement of the technical scheme, the connecting mechanism includes a shaft flange fixedly connected to one end of the main shaft, and a plurality of convex columns are fixedly connected in an annular array on one side of each shaft flange away from the other.

[0007] As a further improvement of the technical solution, the outer side of the shaft flange is provided with a sleeve, two arc-shaped rods are symmetrically connected to the side of the sleeve close to the rotary joint in a rotating manner, and a knob is rotatably arranged on the side of the sleeve away from the rotary joint.

[0008] As a further improvement of the technical solution, the side of the sleeve close to the rotary joint is fixedly connected with a magnet bolt, the magnet bolt is composed of a screw rod fixedly connected to the sleeve and a head fixed to the screw rod, when the arc-shaped rods contact with the side wall of the screw rod, the head closely contacts with the upper surface of the arc-shaped rods, the two arc-shaped rods form a circular ring, the circular ring is sleeved on the outer side of the rotating shaft, the inner diameter of the circular ring is smaller than the outer diameter of the joint flange, and the circular ring closely contacts with the side of the joint flange close to the rotary joint.

[0009] As a further improvement of the technical solution, the side of the shaft flange away from the main shaft is fixedly connected with a rubber ring, the rubber ring is sleeved on the outer side of the convex column, and the side of the joint flange close to the main shaft closely contacts with the rubber ring.

[0010] As a further improvement of the technical solution, the driving mechanism comprises a motor fixedly connected to one side of the assembly plate, a transmission wheel is coaxially fixedly connected to the output shaft of the motor and the main shaft, and a belt is transmissionally connected between the two transmission wheels.

[0011] As a further improvement of the technical solution, the limiting mechanism comprises an extension rod fixedly connected to one side of the assembly plate, a metal rod is arranged between the extension rod and the rotary joint, one end of the metal rod extends through the extension rod and extends out, and the metal rod is slidingly connected with the extension rod, a slot is formed in the side wall of the rotary joint, and the other end of the metal rod is slidingly arranged in the slot.

[0012] Compared with the prior art, the semiconductor low-speed experiment machine has the following advantages:

[0013] 1. The semiconductor low-speed experiment machine, by inserting the convex block into the opposite slot to limit the horizontal movement of the joint flange, and by combining the two arc-shaped rods into a circular ring to limit the vertical movement of the joint flange, ensures that the rotary joint does not move, and at the same time, the joint flange and the shaft flange press the rubber ring, the rubber ring enhances the sealing property between the joint flange and the shaft flange, so that the rotating shaft and the main shaft are fixedly connected under the premise of ensuring the sealing property between the rotating shaft and the main shaft, and the efficiency of detecting the rotary joint is improved.

[0014] 2. The semiconductor low-speed experimental machine, by making the rotating shaft rotate relative to the rotary joint at a set rotating speed, simulating the working state of the rotary joint and the rotating shaft, and then conveying fluid materials such as water, oil and air into the interiors of the plurality of fluid channels of the rotary joint and the rotating shaft, so as to detect the reliability of the rotary joint and the rotating shaft when various liquids, vacuum and dry air required in chip production pass through at the same time, detect the fluid leakage condition, rotating stability, noise and rotating torque and other comprehensive tests of various fluids at the set rotating speed in advance, and confirm that the rotary joint can achieve the performance required by the chip production equipment. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is the overall structure schematic diagram of the utility model;

[0016] Figure 2 It is the structure schematic diagram of the driving mechanism and the limiting mechanism of the utility model;

[0017] Figure 3 It is the structure schematic diagram of the connecting mechanism of the utility model;

[0018] Figure 4 It is the structure schematic diagram of the utility model; Figure 3 The sectional view of the utility model;

[0019] Figure 5 It is the structure schematic diagram of the utility model; Figure 4 The structure enlarged view of A in the utility model;

[0020] Figure 6 It is the explosion drawing of the connecting mechanism of the utility model;

[0021] Figure 7 It is the structure schematic diagram of the arc-shaped rod in the open state of the utility model.

[0022] The meanings of various reference numerals in the drawing are as follows:

[0023] 1, vertical rod; 2, assembly plate; 3, main shaft;

[0024] 4, driving mechanism; 41, motor; 42, transmission wheel; 43, belt;

[0025] 5, rotary joint; 51, rotating shaft; 52, joint flange; 53, slot;

[0026] 6, connecting mechanism; 61, shaft flange; 62, convex column; 63, sleeve; 64, arc-shaped rod; 65, magnet bolt; 66, knob; 67, rubber ring;

[0027] 7, limiting mechanism; 71, extension rod; 72, metal rod. DETAILED DESCRIPTION

[0028] Clearly, the described embodiments are merely a part of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0029] Embodiment 1

[0030] Please refer to Figure 1 , Figure 4 and Figure 5 , one of the purposes of the present embodiment is to provide a semiconductor low-speed experimental machine, including a bottom plate, the top of the bottom plate is symmetrically fixedly connected with two vertical rods 1, one side of the two vertical rods 1 is fixedly connected with an assembly plate 2, one side of the assembly plate 2 is rotatably connected with a main shaft 3, a driving mechanism 4 is arranged on the assembly plate 2, the driving mechanism 4 is used to drive the main shaft 3 to rotate, two rotary joints 5 are symmetrically arranged above and below the main shaft 3, a rotating shaft 51 is rotatably arranged in the rotary joint 5, a plurality of fluid channels are formed in the rotary joint 5 and the rotating shaft 51, the fluid channels in the rotary joint 5 and the rotating shaft 51 are in communication with each other, two connecting mechanisms 6 are symmetrically arranged at the upper end and the lower end of the main shaft 3, the connecting mechanism 6 clamps and fixes the corresponding rotating shaft 51 and the main shaft 3, a limiting mechanism 7 is arranged on one side of the assembly plate 2, the limiting mechanism 7 limits the rotation of the rotary joint 5 when it contacts the rotary joint 5, when the driving mechanism 4 drives the main shaft 3 to rotate at low speed, the main shaft 3 drives the rotating shaft 51 to rotate synchronously, because the rotary joint 5 cannot rotate under the limitation of the limiting mechanism 7, the rotating shaft 51 rotates at low speed relative to the rotary joint 5, so as to simulate the working state of the rotary joint 5 and the rotating shaft 51, after the rotary joint 5 side wall is connected with the position of the fluid channel, a plurality of hoses are used to respectively transport water, oil, air and other fluid materials into the plurality of fluid channels, the fluid materials are discharged through the fluid channels in the rotating shaft 51, so as to detect the reliability of the rotary joint 5 and the rotating shaft 51 when various liquids, vacuum and dry air and other complex fluids required in chip production pass through at the same time, to detect the fluid leakage condition, rotation stability, noise and rotation torque and other comprehensive tests of various fluids at the set rotating speed in advance, to confirm that the performance required by the chip production equipment can be achieved.

[0031] When testing the rotary joint 5, depending on whether the rotary joint 5 is installed with the rotating shaft 51 facing downwards or upwards, the rotary joint 5 is selectively installed below or above the main shaft 3. This more realistically simulates the working state of the rotary joint 5, allowing for targeted testing of the rotary joint 5 with different installation methods, thus improving the accuracy of the test results. Since the main shaft 3 is hollow, only one rotary joint 5 is installed on the main shaft 3 during the testing process. When the rotary joint 5 is installed above the main shaft 3, the fluid flowing from the rotating shaft 51 flows downwards along the inner wall of the main shaft 3. When the rotary joint 5 is installed below the main shaft 3, the fluid flowing from the rotating shaft 51 fills the internal space of the main shaft 3 and overflows from the upper end of the main shaft 3. This ensures smooth flow of the fluid and guarantees the normal operation of the rotary joint 5 during testing.

[0032] To drive the main shaft 3 to rotate, the structure of the drive mechanism 4 is detailed below, referring to... Figure 2 The drive mechanism 4 includes a motor 41 fixedly connected to one side of the assembly plate 2. The output shaft of the motor 41 and the main shaft 3 are both coaxially fixedly connected to transmission wheels 42. A belt 43 is connected between the two transmission wheels 42. The motor 41 is electrically connected to an external electrical control box. The start, stop, speed and forward and reverse rotation of the output shaft of the motor 41 are controlled by the electrical control box. After the motor 41 starts, the output shaft of the motor 41 drives one of the transmission wheels 42 to rotate at a set speed. The transmission wheel 42 drives the other transmission wheel 42 and the main shaft 3 to rotate through the belt 43. The main shaft 3 drives the rotating shaft 51 to rotate relative to the rotary joint 5, thereby simulating the working state of the rotary joint 5 and testing the performance of the rotary joint 5 under the working state.

[0033] To limit the rotation of the rotary joint 5 when the main shaft 3 drives the rotating shaft 51 to rotate, the structure of the limiting mechanism 7 is detailed below, referring to... Figure 2 The limiting mechanism 7 includes an extension rod 71 fixedly connected to one side of the assembly plate 2. A metal rod 72 is provided between the extension rod 71 and the rotary joint 5. One end of the metal rod 72 passes through the extension rod 71 and extends outward. The metal rod 72 is slidably connected to the extension rod 71. A slot 53 is provided on the side wall of the rotary joint 5. The other end of the metal rod 72 is slidably disposed inside the slot 53 to limit the rotation of the rotary joint 5, so that the rotating shaft 51 can rotate relative to the rotary joint 5, thereby simulating the working state of the rotary joint 5.

[0034] In order to fix the rotating shaft 51 to the main shaft 3, the structure of the connecting mechanism 6 is detailed below, referring to... Figures 3-7The connecting mechanism 6 comprises shaft flanges 61 fixedly connected at one end of the main shaft 3, a plurality of convex columns 62 fixedly connected in a ring array on the side away from each other of the two shaft flanges 61, a joint flange 52 fixedly connected at one end close to the main shaft 3 of the rotating shaft 51, a plurality of matching slots formed in a ring array on the joint flange 52, the convex columns 62 slidingly arranged in the corresponding matching slots, the convex columns 62 and the matching slots cooperating to limit the horizontal movement of the joint flange 52, a sleeve 63 provided outside the shaft flange 61, two arc-shaped rods 64 symmetrically rotatably connected on the side close to the rotary joint 5 of the sleeve 63, a knob 66 rotatably arranged on the side away from the rotary joint 5 of the sleeve 63, a threaded groove formed in the side wall of the main shaft 3, the knob 66 being in threaded connection with the threaded groove, a magnet bolt 65 fixedly connected on the side close to the rotary joint 5 of the sleeve 63, the magnet bolt 65 being composed of a screw rod fixedly connected on the sleeve 63 and a head fixedly connected on the screw rod, the head being in close contact with the upper surface of the arc-shaped rod 64 when the arc-shaped rod 64 is in contact with the side wall of the screw rod, the two arc-shaped rods 64 forming a ring, the ring being sleeved outside the rotating shaft 51, the inner diameter of the ring being smaller than the outer diameter of the joint flange 52, the ring being in close contact with the side close to the rotary joint 5 of the joint flange 52, the arc-shaped rod 64 being made of iron, the magnetic attraction force between the arc-shaped rod 64 and the magnet bolt 65 resisting the centrifugal force acting on the arc-shaped rod 64 when the rotating shaft 51 rotates at a low speed, so that the arc-shaped rod 64 will not be separated from the magnet bolt 65 under the action of the centrifugal force, a rubber ring 67 fixedly connected on the side away from the main shaft 3 of the shaft flange 61, the rubber ring 67 being sleeved outside the convex column 62, the side close to the main shaft 3 of the joint flange 52 being in close contact with the rubber ring 67, the arc-shaped rod 64 and the rubber ring 67 cooperating to limit the vertical movement of the joint flange 52, so as to fixedly connect the joint flange 52 and the main shaft 3, so that the main shaft 3 drives the rotating shaft 51 to rotate synchronously when the main shaft 3 rotates, and the rotary joint 5 in the working state is simulated and detected.

[0035] When the device detects the rotary joint 5, the rotating shaft 51 is installed above or below the main shaft 3 through the corresponding connecting mechanism 6 according to the installation mode of the rotating shaft 51, and the specific operation is as follows: with reference to Figure 7The two arc-shaped rods 64 are in the open state, the joint flange 52 is placed in contact with the rubber ring 67, and the plurality of convex columns 62 are inserted into the plurality of matching grooves respectively to limit the horizontal movement of the joint flange 52, then the two arc-shaped rods 64 are rotated to combine into a ring, the ring is in contact with the side of the joint flange 52 away from the main shaft 3 to limit the vertical movement of the joint flange 52, the joint flange 52 is preliminarily installed on the main shaft 3, the knob 66 is rotated, the threaded connection between the knob 66 and the threaded groove makes the knob 66 drive the sleeve 63 to move vertically, the sleeve 63 moves to drive the two arc-shaped rods 64 to move vertically synchronously, when the sleeve 63 drives the magnet bolt 65 to move vertically towards the shaft flange 61, the head of the magnet bolt 65 and the connection between the arc-shaped rod 64 and the sleeve 63 drive the two ends of the arc-shaped rod 64 to move respectively, the two arc-shaped rods 64 press the joint flange 52 towards the shaft flange 61, the joint flange 52 and the shaft flange 61 extrude the rubber ring 67, the rubber ring 67 plays a role in enhancing the sealing property between the joint flange 52 and the shaft flange 61, so as to quickly fix and connect the rotating shaft 51 and the main shaft 3 under the premise of ensuring the sealing property between the rotating shaft 51 and the main shaft 3, and the efficiency of detecting the rotary joint 5 is improved.

[0036] By making the rubber ring 67 play a role in enhancing the sealing property between the joint flange 52 and the shaft flange 61, in the process of transporting water, oil, air and other fluid substances into the plurality of fluid channels through the plurality of hoses respectively, and discharging the fluid substances through the fluid channel in the rotating shaft 51, the leakage of the fluid through the gap between the rotating shaft 51 and the main shaft 3 is avoided, and the accuracy of the sealing property detection result between the rotary joint 5 and the rotating shaft 51 is improved.

[0037] The basic principle, main features and advantages of the utility model are shown and described above. It should be understood by those skilled in the art that the utility model is not limited by the above examples, the above examples and descriptions in the specification are only preferred examples of the utility model, and are not used to limit the utility model, various changes and improvements of the utility model can be made without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model claimed. The protection scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. A semiconductor low-speed experimental machine, comprising a base plate, two vertical rods (1) are symmetrically and fixedly connected to the top of the base plate, characterized in that: Two said vertical rod (1) one side fixedly connected with the assembly plate (2), the assembly plate (2) one side rotationally connected with the main shaft (3), the assembly plate (2) is provided with drive mechanism (4), the drive mechanism (4) is used for driving the main shaft (3) rotation, the main shaft (3) upper and lower symmetrically provided with two rotary joints (5), the rotary joint (5) inside rotationally provided with rotating shaft (51), the main shaft (3) upper end and lower end symmetrically provided with two connecting mechanisms (6), the connecting mechanism (6) is fixedly connected with the corresponding rotating shaft (51) and the main shaft (3) clamping, the assembly plate (2) one side is provided with limiting mechanism (7), the limiting mechanism (7) is in contact with the rotary joint (5) when limiting rotary joint (5) rotation.

2. The semiconductor low-speed tester according to claim 1, characterized by: The connecting mechanism (6) includes the shaft flange (61) fixedly connected to one end of the main shaft (3), the two shaft flanges (61) are fixedly connected with a plurality of convex columns (62) on the side away from each other in an annular array, the rotating shaft (51) is fixedly connected with a joint flange (52) on one end close to the main shaft (3), a plurality of symmetrical slots are formed in the joint flange (52), and the convex columns (62) are slidably arranged in the corresponding symmetrical slots.

3. The semiconductor low-speed tester of claim 2, wherein: The outer side of the shaft flange (61) is provided with a sleeve (63), two arc-shaped rods (64) are symmetrically rotatably connected to the side of the sleeve (63) close to the rotary joint (5), and a knob (66) is rotatably arranged on the side of the sleeve (63) away from the rotary joint (5), a threaded groove is formed in the side wall of the main shaft (3), and the knob (66) is in threaded connection with the threaded groove.

4. The semiconductor low-speed tester of claim 3, wherein: The sleeve (63) is fixedly connected with a magnet bolt (65) on the side close to the rotary joint (5), the magnet bolt (65) is composed of a screw rod fixedly connected to the sleeve (63) and a head fixed to the screw rod, when the arc-shaped rod (64) is in contact with the side wall of the screw rod, the head is in close contact with the upper surface of the arc-shaped rod (64), the two arc-shaped rods (64) form a circular ring, the circular ring is arranged on the outer side of the rotating shaft (51), the inner diameter of the circular ring is smaller than the outer diameter of the joint flange (52), and the circular ring is in close contact with the side of the joint flange (52) close to the rotary joint (5).

5. The semiconductor low-speed tester of claim 2, wherein: The shaft flange (61) is fixedly connected with a rubber ring (67) on the side away from the main shaft (3), the rubber ring (67) is arranged on the outer side of the convex column (62), and the side of the joint flange (52) close to the main shaft (3) is in close contact with the rubber ring (67).

6. The semiconductor low-speed tester of claim 1, wherein: The drive mechanism (4) includes a motor (41) fixedly connected to one side of the assembly plate (2), and a transmission wheel (42) is fixedly connected to the output shaft of the motor (41) and the main shaft (3) in a same axis.

7. The semiconductor low-speed tester of claim 1, wherein: The limiting mechanism (7) comprises an extension rod (71) fixedly connected on one side of the assembling plate (2), a metal rod (72) is arranged between the extension rod (71) and the rotary joint (5), one end of the metal rod (72) extends through the extension rod (71) and extends out, and the metal rod (72) is in sliding connection with the extension rod (71), and a slot (53) is formed in the side wall of the rotary joint (5), and the other end of the metal rod (72) is arranged in the slot (53) in a sliding mode.

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