Electrostatic chuck bonding tool

Abstract

The utility model discloses an electrostatic chuck bonding tool which comprises a bottom plate, positioning pins, a lifting plate and rotating screws. The lifting plate is arranged at the bottom of the bottom plate, the positioning pins penetrate through the bottom plate to be mounted on the bottom plate, and the rotating screws penetrate through the bottom plate and the lifting plate. According to the utility model, the top of the positioning pin is higher than the aluminum base, so that alignment of the ceramic chip, parallel fitting of the ceramic chip and the aluminum base, pore reduction, position staggering prevention and concentricity guarantee are facilitated, during pressing and drying, the positioning pin is lower than the ceramic chip, and pressure is applied through the upper pressing plate, so that the ceramic chip and the aluminum base are combined more sufficiently; in the whole machining process, the height of the lifting plate can be adjusted by rotating the screws so as to adjust the height of the positioning needles, so that the positioning needles with different lengths do not need to be replaced for limiting, the machining steps are simplified, the machining time is shortened, the bonding efficiency is effectively improved, and the concentricity of the upper layer and the lower layer can be better controlled.

Description

TECHNICAL FIELD

[0001] The utility model relates to processing frock technical field, concretely relates to a static chuck bonding frock. BACKGROUND

[0002] Electrostatic Chuck (ESC) is a kind of tool using electrostatic force principle to hold workpiece, through the uniform electric field generated on chuck surface, workpiece is stably adsorbed on chuck, to realize high-precision clamping.Compared with traditional mechanical clamping mode, electrostatic chuck can avoid the deformation or damage caused by mechanical clamp to workpiece surface, is especially suitable for thin-walled, brittle or complex shape workpiece processing, is widely used in precision machining, numerical control machine tool, grinding machine and other fields.

[0003] The existing production process is that aluminum base and ceramic sheet are bonded and pressed by frock, when aluminum base and ceramic sheet are bonded, it is necessary to ensure that the contact surface is flat and aligned, to avoid uneven thickness of glue layer, and the relative position of the two is accurately aligned, so that the ceramic sheet and aluminum base have high concentricity, so the positioning pin (PIN) needs to ensure the position and concentricity when aligning. In order to facilitate accurate alignment, the height of the positioning pin (PIN) needs to be higher than the total height of the aluminum base and the ceramic sheet when aligning, but the height of the positioning pin (PIN) needs to be lower than the surface of the ceramic sheet when pressing and drying, so different lengths of positioning PIN need to be frequently replaced, resulting in longer processing time, more processing steps and lower production efficiency. UTILITY MODEL CONTENTS

[0004] The utility model discloses a kind of electrostatic chuck bonding frock to solve above-mentioned problem.

[0005] The utility model discloses the following technical scheme in order to realize the above-mentioned purpose, comprising:

[0006] Bottom plate, positioning pin, lifting plate and rotating screw are included.

[0007] As further description of the above technical scheme, the lifting plate is arranged at the bottom of the bottom plate, the positioning pin is installed on the bottom plate through the bottom plate, and the rotating screw penetrates the bottom plate and the lifting plate.

[0008] As further description of the above technical scheme, the bottom plate includes a support part and a fixed part, and a lifting cavity is formed inside the bottom plate.

[0009] The inner wall of the support part and the edge of the lifting plate are attached, and the fixed part is provided with a positioning pin and a rotating screw.

[0010] As further description of the above technical scheme, the bottom plate is provided with a mounting hole, and the mounting hole includes a first fixing hole and a first placing hole.

[0011] As the further description of the above technical scheme, the first fixing hole is symmetrically provided with two groups, and the first fixing hole is used for mounting a rotating screw.

[0012] As the further description of the above technical scheme, the first placing hole is equiangularly arranged with 2-4 groups, and the first placing hole is used for placing a positioning needle.

[0013] As the further description of the above technical scheme, the lifting plate is provided with a second fixing hole penetratingly arranged, and the second fixing hole is used for mounting a rotating screw and a nut.

[0014] As the further description of the above technical scheme, the lifting plate is provided with a support rib extending towards the center at the edge, and the support rib is provided with a placing groove.

[0015] As the further description of the above technical scheme, the screw bottom and the nut are threadedly connected, and the rotating screw and the nut are used for adjusting the height of the lifting plate.

[0016] As the further description of the above technical scheme, the bottom plate is sequentially provided with an aluminum base and a ceramic sheet above, and the aluminum base and the ceramic sheet are arranged with positioning holes.

[0017] The beneficial effects of the utility model are as follows:

[0018] The utility model discloses, positioning needle top is higher than aluminum base, and it is convenient for ceramic sheet alignment, and ceramic sheet and aluminum base parallelly adhere, reduce the porosity and avoid position misalignment, guarantee the concentricity, when pressing and drying, positioning needle is lower than ceramic sheet, passes through the pressure that the upper pressing plate adds, makes ceramic sheet and aluminum base combine more fully, and the whole processing process can pass through rotating screw adjustment lifting plate height and then adjust the height of positioning needle, so need not replace the positioning needle of different length and carry out the location, has simplified the processing step and processing length, effectively improved the bonding efficiency, and can better control the concentricity of upper and lower layers.

[0019] To more clearly set forth the structural features and effects of the utility model, the utility model will be described in detail below by combining with the drawings and specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is the explosion schematic view of the utility model electrostatic chuck bonding tool;

[0021] Figure 2 It is the utility model electrostatic chuck bonding tool's section view schematic Figure One ;

[0022] Figure 3 It is the utility model electrostatic chuck bonding tool's section view schematic Figure Two ;

[0023] Figure 4 is a cross section of the electrostatic chuck bonding tool Figure Three .

[0024] Reference signs:

[0025] 1, bottom plate; 11, support part; 12, fixed part; 13, lifting cavity; 14, mounting hole; 141, first fixing hole; 142, first placing hole; 2, positioning needle; 3, lifting plate; 31, second fixing hole; 32, placing groove; 4, rotating screw; 5, nut; 6, aluminum base; 7, ceramic sheet; 8, positioning hole. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely below with reference to the drawings in the embodiments of the utility model.

[0027] As Figures 1-4 shown, in one embodiment, an electrostatic chuck bonding tool comprises a bottom plate 1, a positioning needle 2, a lifting plate 3 and a rotating screw 4. Among them, the lifting plate 3 is arranged at the bottom of the bottom plate 1, which can ensure that it is smoothly attached to the bottom plate 1; the positioning needle 2 is installed on the bottom plate 1 by penetrating the bottom plate 1, which plays the role of accurate positioning; the rotating screw 4 penetrates the bottom plate 1 and the lifting plate 3, and the height of the lifting plate 3 can be adjusted by rotating the rotating screw 4, so that the position of the positioning needle 2 can be accurately adjusted to meet the height requirements of different processes or workpieces.

[0028] Further, the bottom plate 1 comprises a support part 11 and a fixed part 12, and a lifting cavity 13 for lifting the lifting plate 3 is formed inside the bottom plate 1; the inner wall of the support part 11 is closely attached to the edge of the lifting plate 3, which ensures that the lifting plate 3 can run smoothly during lifting, avoiding excessive vibration or unnecessary deviation; the fixed part 12 is installed with the positioning needle 2 and the rotating screw 4, and the height adjustment of the lifting plate 3 and the positioning needle 2 is realized by the rotating screw 4.

[0029] Specifically, the bottom plate 1 is provided with a mounting hole 14, and the mounting hole 14 comprises a first fixing hole 141 and a first placing hole 142. Among them, the first fixing hole 141 is symmetrically provided with 2 groups, which is mainly used for installing the rotating screw 4; the first placing hole 142 is equally angularly arranged with 2-4 groups, which is mainly used for placing the positioning needle 2.

[0030] In addition, the aluminum base 6 and the ceramic sheet 7 are placed on the bottom plate 1 in sequence, and the aluminum base 6 and the ceramic sheet 7 also have positioning holes 8 arranged in the corresponding positions, which are used for auxiliary positioning in cooperation with the positioning needle 2 during processing.

[0031] Please continue to refer to Figures 1-4In the embodiment, the second fixing holes 31 are also designed on the corresponding positions of the lifting plate 3, which penetrate through the whole lifting plate 3 and are mainly used for mounting the rotating screw 4 and the nut 5 to ensure the stability and accuracy of the lifting plate 3 during the height adjustment. The design of the second fixing holes 31 enables the rotating screw 4 and the nut 5 to firmly fix the lifting plate 3, avoids unnecessary loosening or deviation during the lifting process, and guarantees the smoothness and reliability of the lifting plate 3 in motion.

[0032] Specifically, the support ribs are extended from the edges of the lifting plate 3 to the center, which not only enhances the structural strength of the lifting plate 3 but also provides additional stability to support the load borne by the lifting plate 3 during work. The support ribs are provided with placing grooves 32 for placing the positioning needles 2. The positioning needles 2 are higher than the aluminum base 6 by 8 mm, which facilitates the alignment of the ceramic sheet 7 and ensures that the ceramic sheet 7 and the aluminum base 6 are parallelly attached to reduce the porosity and avoid positional misalignment, thereby guaranteeing the concentricity during the attachment.

[0033] Please continue to refer to Figures 1-4 In the embodiment, the screw bottom is threadedly connected with the nut 5 for adjusting the height of the lifting plate 3. During processing, the height of the lifting plate 3 is raised or lowered by forward or reverse rotation of the rotating screw 4, thereby realizing the height adjustment of the positioning needles 2.

[0034] Working principle:

[0035] During bonding, the bottom plate 1 is fixed, the lifting plate 3 is raised by forward rotation of the rotating screw 4 to gradually approach the bottom plate 1, the top of the positioning needle 2 is raised to the highest position, the aluminum base 6 is placed on the bottom plate 1, at this time the height of the top of the positioning needle 2 is higher than the aluminum base 6 by a certain height (5-8 mm), then the ceramic sheet 7 and the aluminum base 6 are accurately aligned through the positioning holes 8 on the ceramic sheet 7 and the positioning needles 2.

[0036] After the position is aligned, the lifting plate 3 is lowered by reverse rotation of the rotating screw 44 to gradually move away from the bottom plate 1, so that the top of the positioning needle 2 is lowered to the lowest position, at this time the height of the top of the positioning needle 2 is not higher than the surface of the ceramic sheet 7.

[0037] During pressing, the ceramic sheet 7 and the aluminum base 6 that have completed the alignment are pressed by the upper press plate of the press to fully combine the glue layer between the ceramic sheet 7 and the aluminum base 6 to complete the bonding, then the bonded electrostatic chuck (ESC) and the whole bonding tool are put into an oven to heat and cure the glue.

[0038] Through the above technical solution, the present application does not need to replace positioning needles 2 of different lengths for limiting, simplifies the processing steps and processing time, effectively improves the bonding efficiency, and can better control the concentricity of the upper and lower layers.

[0039] The above description of disclosed embodiments enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An electrostatic chuck bonding tool, characterized by, The utility model relates to a kind of positioning device, including: Bottom plate (1), positioning needle (2), lifting plate (3) and rotating screw (4); The lifting plate (3) is arranged at the bottom of the bottom plate (1), the positioning needle (2) is installed on the bottom plate (1) by penetrating the bottom plate (1), and the rotating screw (4) penetrates the bottom plate (1) and the lifting plate (3).

2. The electrostatic chuck bonding tooling of claim 1, wherein, The bottom plate (1) includes support part (11) and fixed part (12), and lifting cavity (13) is formed inside the bottom plate (1).

3. The electrostatic chuck bonding tooling of claim 2, wherein, The inner wall of the support part (11) and the edge of the lifting plate (3) are attached, and the fixed part (12) is installed with the positioning needle (2) and the rotating screw (4).

4. The electrostatic chuck bonding tooling of claim 2, wherein, The bottom plate (1) is provided with mounting hole (14) by penetrating, and the mounting hole (14) includes first fixed hole (141) and first placement hole (142).

5. The electrostatic chuck bonding tooling of claim 4, wherein, The first fixed hole (141) is symmetrically provided with two groups, and the first fixed hole (141) is used for installing rotating screw (4).

6. The electrostatic chuck bonding tooling of claim 4, wherein, The first placement hole (142) is equally angularly ringed with 2-4 groups, and the first placement hole (142) is used for placing positioning needle (2).

7. The electrostatic chuck bonding tooling of claim 1, wherein, The lifting plate (3) is provided with second fixed hole (31) by penetrating, and the second fixed hole (31) is used for installing rotating screw (4) and nut (5).

8. The electrostatic chuck bonding tooling of claim 7, wherein, The edge of the lifting plate (3) extends to the center with support rib, and the support rib is provided with placement groove (32).

9. The electrostatic chuck bonding tooling of claim 1, wherein, The screw bottom and nut (5) are threadedly connected, and the rotating screw (4) and the nut (5) are used for adjusting the height of the lifting plate (3).

10. The electrostatic chuck bonding tool of claim 1, wherein The bottom plate (1) is sequentially placed with aluminum base (6) and ceramic sheet (7) above, and the aluminum base (6) and the ceramic sheet (7) are ringed with positioning hole (8).

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