Push-pull turntable for vacuum coating

Abstract

The utility model discloses a push-pull turntable for vacuum coating. The push-pull turntable comprises a push-pull trolley, a movable turntable placed on the push-pull trolley, a coating platform and a positioning assembly arranged in the coating platform, the push-pull trolley comprises a bottom plate, at least two first guide rails arranged on the bottom plate in parallel, and at least two butt joint blocks rotationally arranged at one ends of the first guide rails correspondingly. The movable rotating disc comprises a movable base and a rotating disc arranged on the base. The coating platform comprises a supporting plate and at least two second guide rails arranged in the supporting plate in parallel. According to the push-and-pull turntable for vacuum coating, the push-and-pull trolley is in butt joint with the coating platform by overturning the butt-joint block, so that the movable turntable is pushed to move from the push-and-pull trolley and enter the coating platform. According to the push-pull turntable for vacuum coating, the butt joint precision and the butt joint efficiency are greatly improved, and the coating efficiency is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum plating technology field especially relates to a kind of push-pull carousel for vacuum plating. BACKGROUND

[0002] The process of vacuum plating refers to the single layer thickness or multiple layer thickness film structure formed by evaporation through heating or sputtering through accelerated ion bombardment on the surface of substrate in vacuum environment. This process technology has developed very rapidly in recent years, and has been widely used in many fields. In the traditional process, the operator needs to place the carousel vertically in the plating position, which may result in misplacement of the carousel, and the center shaft of the rotating frame on the carousel is not correctly connected with the rotating motor, thereby affecting the plating efficiency. Moreover, the plating technology in the form of moving track connection, such as Chinese patent CN202110359064.0, discloses a continuous vacuum plating production line and method for optical film components, which includes a plating chamber, a front conveying track, a rear conveying track, an electric mobile plate car and a plating rack. Through the setting of the front conveying track, the bearing track and the rear conveying track, the connection and separation of the tracks can be realized, and the automatic movement and transfer of the plating hanger can be completed during connection, while the plating process of the components on the plating hanger can be completed in the plating chamber during separation. The moving track is driven by a mechanical drive and connected, but the cost of mechanical drive is high, and the mechanical drive must be adjusted and connected after each plating is completed, which makes the connection troublesome and inefficient. SUMMARY

[0003] Therefore, the utility model provides a kind of push-pull carousel for vacuum plating to solve the above problems.

[0004] The utility model provides a kind of push-pull carousel for vacuum coating, it includes a push-pull car, a mobile carousel placed on the push-pull car, a coating platform and a positioning component arranged in the coating platform.The push-pull car includes a bottom plate, at least two first guide rails arranged in parallel on the bottom plate, and at least two butt blocks rotatably arranged at one end of the first guide rail respectively.The mobile carousel includes a mobile base, a carousel arranged on the base.The coating platform includes a support plate, at least two second guide rails arranged in parallel in the support plate, a rotary motor arranged on one side of the second guide rail, and a conductive seat arranged on one side of the rotary motor.The side of the bottom plate towards the coating platform is protrusively provided with a guide piece, and the side away from the bottom plate is concave in a circular arc.The support plate has a guide groove between the support plate and the vacuum furnace, and the side of the guide groove is convex in a circular arc.The side of the butt block away from the rotation point of the first guide rail is protrusively provided with a clamping block, and the end of the second guide rail towards the first guide rail is provided with a clamping groove, and the clamping block and the clamping groove are matched.The side of the mobile base towards the coating platform is protrusively provided with a conductive piece, and the thickness of the conductive piece gradually decreases from the end close to the mobile base to the end away from the mobile base.The conductive seat is fixedly arranged on the support plate, and the side of the support plate away from the conductive seat is fixedly provided with a conductive column corresponding to the position of the conductive seat.The conductive seat is provided with two curved conductive pieces, the two conductive pieces are in gap contact, and the curved parts of the two conductive pieces are arranged towards each other.

[0005] Further, the length direction of the first guide rail is parallel to the arrangement direction of the bottom plate and the guide piece, and the distance between the two second guide rails is equal to the distance between the two first guide rails.

[0006] Further, the width of the mobile base corresponds to the distance between the two first guide rails, and at least four rollers are arranged on the two sides of the mobile base.

[0007] Further, a handle is arranged on the side of the mobile base away from the conductive piece.

[0008] Further, a plane ball bearing is arranged between the mobile base and the carousel, and the two sides of the plane ball bearing abut the mobile base and the carousel respectively.

[0009] Further, at least two stop blocks are arranged on the side of the support plate away from the guide groove.

[0010] Further, a rotating machine output end is protruded from the support plate, and a long strip-shaped through slot is formed at the end of the rotating machine output end.

[0011] Further, the positioning assembly comprises a positioning pin seat fixedly arranged on one side of the second guide rail, and a positioning pin arranged on the positioning pin seat.

[0012] Compared with the prior art, the push-pull rotating disc for vacuum coating provided by the utility model is pushed to move from the push-pull trolley and into the coating platform by turning the butt joint block, so that the first guide rail, the butt joint block and the track on the second guide rail form the same track. The conductive sheet can be in full contact with the two power supply sheets, so that the smoothness of the current is ensured and the coating efficiency is improved. The push-pull rotating disc for vacuum coating greatly improves the butt joint precision and butt joint efficiency, and the coating efficiency is high. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 The structure schematic view of the push-pull rotating disc for vacuum coating provided by the utility model is shown.

[0014] Figure 2 The structure schematic view of the push-pull trolley of the push-pull rotating disc for vacuum coating is shown. Figure 1

[0015] Figure 3 The mechanism schematic view of the moving rotating disc of the push-pull rotating disc for vacuum coating is shown. Figure 1

[0016] Figure 4 The exploded schematic view of the coating platform and the vacuum furnace of the push-pull rotating disc for vacuum coating is shown. Figure 1

[0017] The cross-sectional schematic view of the coating platform and the vacuum furnace of the push-pull rotating disc for vacuum coating is shown. Figure 5 DETAILED DESCRIPTION Figure 1 The specific embodiments of the utility model are further described in detail below. It should be understood that the description of the embodiments of the utility model herein is not used to limit the protection scope of the utility model.

[0018] The specific embodiments of the utility model are further described in detail below. It should be understood that the description of the embodiments of the utility model herein is not used to limit the protection scope of the utility model.

[0019] As Figure 1 ​​​As shown, it is the structure schematic view of the push-pull turntable for vacuum coating provided by the utility model. The push-pull turntable for vacuum coating includes a push-pull trolley 10, a mobile turntable 20 placed on the push-pull trolley 10, a coating platform 30 and a positioning assembly 40 arranged in the coating platform 30. It is conceivable that the push-pull turntable for vacuum coating also includes some other functional modules, such as power module, vacuum furnace device and the like, which are the technology known to the person skilled in the art, and will not be described one by one here.

[0020] Please see Figures 2 to 5 It should be noted that the coating platform 30 is arranged inside a vacuum furnace device, and the push-pull trolley 10 is located on one side of the coating platform 30. When the mobile turntable 20 is placed on the push-pull trolley 10, the operator pushes the push-pull trolley 10 and docks it with the coating platform 30, thereby pushing the mobile turntable 20 onto the coating platform 30 to perform coating work on the product to be plated placed on the mobile turntable 20.

[0021] The push-pull trolley 10 includes a bottom plate 11, at least two first guide rails 12 arranged in parallel on the bottom plate 11, and at least two abutting blocks 13 respectively arranged in rotation on one end of the first guide rail 12.

[0022] The side of the bottom plate 11 facing the coating platform 30 is protrudingly provided with a guide piece 14, and the side of the guide piece 14 away from the bottom plate 11 is recessed in a circular arc. The guide piece 14 is used to cooperate with part of the coating platform 30 to limit the movement of the push-pull trolley 10, and the specific cooperation mode will be described below.

[0023] The length direction of the first guide rail 12 is parallel to the arrangement direction of the bottom plate 11 and the guide piece 14, so that when the guide piece 14 functions as a limiting part, the first guide rail 12 can be docked with part of the coating platform 30 through the abutting block 13, thereby transferring the mobile turntable 20.

[0024] The abutting block 13 is arranged at one end of the first guide rail 12 close to the guide piece 14, and one side of the abutting block 13 is arranged in rotation with the first guide rail 12. The abutting block 13 has the same track as the first guide rail 12, so that after the abutting block 13 is turned over, the track on the abutting block 13 is docked with the track on the first guide rail 12 to place the mobile turntable 20.

[0025] The docking block 13 is provided with a clamping block 15 on the side away from the rotation point of the first guide rail 12, which is clamped in part of the film-coated platform 30, thereby completing the docking of the docking block 13 and playing a positioning function. The specific clamping condition will be described below.

[0026] The moving turntable 20 comprises a moving base 21 and a turntable 22 provided on the base 21.

[0027] The width of the moving base 21 corresponds to the distance between the two first guide rails 12, and at least four rollers 23 are provided on the two sides of the moving base 21, which are respectively placed on the two first guide rails 12 to push the moving base 21 so that it can move along the length direction of the first guide rail 12.

[0028] The moving direction of the moving base 21 is towards the film-coated platform 30, and a conductive sheet 24 is provided on the side of the moving base 21 towards the film-coated platform 30, the thickness of the conductive sheet 24 gradually decreases from the end close to the moving base 21 to the end away from the moving base 21. The conductive sheet 24 is used to cooperate with part of the film-coated platform 30, thereby playing a conductive role for the moving base 21 to complete the film-coating work. The specific cooperation mode will be described below.

[0029] A handle 25 is provided on the side of the moving base 21 away from the conductive sheet 24, which is used to facilitate the operator to push and pull the moving base 12.

[0030] A pin hole 26 is provided on the surface of the side of the moving base 21 close to the handle 25, which is used to cooperate with the positioning assembly 40 to complete the positioning of the moving base 21. The specific cooperation mode will be described below.

[0031] A plane ball bearing 27 is provided between the moving base 21 and the turntable 22, the two sides of the plane ball bearing 27 respectively abut against the moving base 21 and the turntable 22, so that the turntable 22 can freely rotate on the moving base 21 to ensure uniform film-coating and improve film-coating quality.

[0032] The middle section of the rotating disc 22 is fixedly provided with a rotating frame center shaft 28, the center axis of which coincides with the center axis of the rotating disc 22. The end of the rotating frame center shaft 28 protruding away from the rotating disc 22 is provided with a convex strip 29 on the end face, which cooperates with part of the coating platform 30 to complete the rotation of the rotating disc 22. The specific cooperation mode will be described below.

[0033] The coating platform 30 comprises a support plate 31, at least two second guide rails 32 arranged in parallel in the support plate 31, a rotating motor 33 arranged on one side of the second guide rail 32, and a conductive seat 34 arranged on one side of the rotating motor 33.

[0034] The support plate 31 is arranged in a vacuum furnace, and at least six insulating ceramic pieces 311 are arranged between the lower surface of the support plate 31 and the vacuum furnace. The six insulating ceramic pieces 311 are used to insulate between the support plate 31 and the vacuum furnace during the coating operation, so as to prevent electrical connection between the support plate 31 and the vacuum furnace and affect the coating operation. The side of the vacuum furnace facing the support plate 31 is provided with a guide groove 35, one side of which is outwardly convex in a circular arc shape and corresponds to the guide piece 14. When the guide piece 14 is clamped into the guide groove 35, the circular arc-shaped parts of the two are in butt joint with each other, thereby assisting the push-pull cart 10 to quickly find the butt joint position and improving the butt joint efficiency.

[0035] The distance between the two second guide rails 32 is equal to the distance between the two first guide rails 12. The end of the second guide rail 32 facing the first guide rail 12 is provided with a clamping groove 36 corresponding to the clamping block 15. During the butt joint operation of the push-pull cart 10 and the coating platform 30, the push-pull cart 10 is first pushed to clamp the guide piece 14 into the guide groove 15 to find the butt joint position of the two, and then the butt joint block 13 is turned over to clamp the clamping block 15 into the clamping groove 36. At this time, the first guide rail 12, the butt joint block 13, and the track on the second guide rail 32 form the same track, thereby completing the butt joint operation and the positioning function under the clamping of the clamping block 15, so as to push the moving rotating disc 20 into the coating platform 30.

[0036] The side of the support plate 31 away from the guide groove 35 is provided with at least two stop blocks 37 for blocking the moving rotating disc 20 to limit it at the coating position.

[0037] The rotary motor 33 is connected with the vacuum furnace and is provided with a first insulation pad 331 to enhance the insulation of the furnace body. The output end of the rotary motor 33 protrudes from the support plate 31, and the end of the output end is provided with an elongated through slot 38. When the moving turntable 20 moves to the coating position, the convex strip 29 on the rotating shaft 28 is clamped in the through slot 38. Thus, under the drive of the rotary motor 33, the rotating shaft 28 can slowly rotate the turntable 22, thereby improving the coating efficiency during the coating operation.

[0038] The conductive seat 34 is fixedly arranged on the support plate 31, and a conductive column 39 is fixedly arranged on the side of the support plate 31 away from the conductive seat 34 and corresponding to the position of the conductive seat 34. The output end of the conductive column 39 penetrates through the vacuum furnace and is connected with the support plate 31. The input end of the conductive column is connected with an external power supply, so that the conductive seat 34 is powered through the support plate 31, and the moving turntable 20 is powered through the conductive sheet 24, thereby completing the coating operation. A second insulation pad 391 is arranged between the conductive seat 34 and the vacuum furnace to enhance the insulation of the furnace body. The first and second insulation pads 331 and 391 are made of polytetrafluoroethylene. The conductive seat 34 is provided with two curved conductive sheets 341. The two conductive sheets 341 are in gap contact, and the curved parts thereof are arranged opposite to each other. When the moving turntable 20 reaches the coating position, the conductive sheet 24 is inserted between the two conductive sheets 341. Since the thickness of the conductive sheet 24 gradually decreases from the end close to the moving base 21 to the end away from the moving base 21, the two sides of the conductive sheet 24 can be in sufficient contact with the two conductive sheets 341, thereby ensuring the smoothness of the current and improving the coating efficiency.

[0039] The positioning assembly 40 includes a positioning pin seat 41 fixedly arranged on one side of the second guide rail 32 and a positioning pin 42 arranged on the positioning pin seat 41.

[0040] When the moving turntable 20 reaches the coating position, the through hole in the positioning pin seat 41 corresponds to the pin hole 26 in the moving base 21. Thus, the positioning pin 42 is inserted into the through hole in the positioning pin seat 41 and the pin hole 26 in the moving base 21 to position the moving base 21 in the coating platform 30, thereby completing the positioning operation.

[0041] Compared with the prior art, the push-pull turntable for vacuum coating is provided, the butt joint block 13 is turned over, the push-pull trolley 10 is butt jointed with the coating platform 30, the first guide rail 12, the butt joint block 13 and the track on the second guide rail 32 form the same track, the moving turntable 20 is pushed to move from the push-pull trolley 10 and enter the coating platform 30. And the two sides of the conductive sheet 24 can be in full contact with the two power supply sheets 341, so as to ensure the smoothness of the current and improve the coating efficiency. The push-pull turntable for vacuum coating greatly improves the butt joint precision and butt joint efficiency, and the coating efficiency is high.

[0042] The above is only the preferred embodiment of the utility model, and is not used for limiting the protection scope of the utility model, and any modification, equivalent replacement or improvement in the spirit of the utility model is covered in the claim range of the utility model.

Claims

1. A push-pull rotary table for vacuum coating, characterized by: The vacuum coating push-pull rotating disc comprises a push-pull trolley, a mobile rotating disc placed on the push-pull trolley, a coating platform, and a positioning assembly arranged in the coating platform.

2. The push-pull rotary table for vacuum coating according to claim 1, characterized in that: The length direction of the first guide rail is parallel to the arrangement direction of the bottom plate and the guide piece.

3. The push-pull rotary table for vacuum coating according to claim 1, characterized in that: The width of the mobile base corresponds to the distance between the two first guide rails, and at least four rollers are arranged on the two sides of the mobile base.

4. The push-pull rotary table for vacuum coating according to claim 1, characterized in that: The mobile base is provided with a handle away from the conductive piece.

5. The push-pull turntable for vacuum coating according to claim 1, characterized in that: A planar ball bearing is arranged between the mobile base and the rotating disc, and the two sides of the planar ball bearing are respectively in abutment with the mobile base and the rotating disc.

6. The push-pull turntable for vacuum coating according to claim 1, characterized in that: The support plate is provided with at least two stop blocks away from the guide groove.

7. The push-pull turntable for vacuum coating according to claim 1, characterized in that: A rotating frame central shaft is fixedly arranged in the middle section of the rotating disc, the end of the protruding part of the rotating frame central shaft away from the rotating disc protrudes from the mobile base, and the end face of the protruding part is provided with a convex strip.

8. The push-pull turntable for vacuum coating according to claim 1, characterized in that: The positioning assembly comprises a positioning pin seat fixedly arranged on one side of the second guide rail, and a positioning pin arranged on the positioning pin seat.

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