Square silicon core cross beam punching detection device
By integrating drying, inspection, and transfer functions, the square silicon core beam drilling inspection device adopts a CCD vision detector and mechanical grippers, solving the problem of the single function of existing equipment and realizing efficient and accurate drilling inspection and production optimization.
Patent Information
- Application Number
- CN202423134937.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-18
- Publication Date
- 2025-12-19
- Estimated Expiration
- 2034-12-18
AI Technical Summary
Existing automated drilling and inspection equipment has limited functionality and cannot achieve an integrated process of automatic drying, transportation, and inspection after drilling. This results in large equipment footprint, high production costs, and difficulty in guaranteeing the accuracy and consistency of inspection results.
Design a square silicon core crossbeam drilling and inspection device that integrates a drying module, an inspection module, and a transfer mechanism. The device uses a CCD vision detector for automatic inspection and mechanical grippers to achieve rapid transfer and accurate inspection of the drilled square silicon core crossbeam.
It enables rapid drying and accurate inspection after drilling, improves inspection accuracy and efficiency, optimizes the production process, enhances the flexibility and versatility of the equipment, reduces production costs, and ensures consistent product quality.
Smart Images
Figure CN223691695U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to punch detection technical field, concretely is a kind of square silicon core beam punch detection device. BACKGROUND
[0002] In the field of semiconductor material processing, square silicon core beam as a kind of key component, its quality and precision are crucial to the whole production process. Especially in the manufacturing process of square silicon core beam needing to punch, the accuracy of punching position and the quality of hole directly affect the subsequent use effect and the overall performance of product. The traditional punch detection mode mostly relies on manual operation, not only inefficient, but also easily influenced by human factors, so that the accuracy and consistency of detection result are difficult to guarantee.
[0003] With the rapid development of automation technology, more and more enterprises begin to seek automated, intelligent punch detection solutions to improve production efficiency and product quality. However, the existing automated punch detection equipment is often single-functioned, can only complete one task in punching or detection, and cannot realize the integrated process of automatic blow-drying, transfer and detection after punching. This not only increases the floor area and production cost of equipment, but also reduces the overall flexibility and efficiency of production line.
[0004] Therefore, there is an urgent need in the market for a square silicon core beam punch detection device that integrates blow-drying, transfer and detection functions to realize fast and accurate detection of square silicon core beam after punching, improve production efficiency and product quality. UTILITY MODEL CONTENT
[0005] The utility model aims at solving the problems in prior art, provide a kind of square silicon core beam punch detection device, the device can realize that square silicon core beam is punched into CCD detection procedure and is detected automatically after, distinguish punching position degree, distinguish good and bad products.
[0006] To achieve the above object, the utility model adopts the technical scheme that a kind of square silicon core beam punch detection device, including rack, the rack is provided with blow-drying module, detection module, the blow-drying module is used to blow neat square silicon core beam after punching, the detection module is used to detect square silicon core beam after punching, the rack is provided with transfer mechanism that square silicon core beam is transferred from wind blow module to punch module, the transfer mechanism includes the mechanical gripper that is movably arranged on the rack, the mechanical gripper is used to grab square silicon core beam after punching, the detection module includes the finished product conveyor that is arranged on the rack, the rack is movably provided with CCD vision detector on the side corresponding finished product conveyor, the CCD vision detector can move along the conveying direction of finished product conveyor.
[0007] To further optimize the utility model, the following technical solutions can be preferred:
[0008] Preferably, the transport mechanism comprises a sliding guide rail arranged on the rack, the sliding guide rail is arranged along the direction from the blow-drying module to the detection module, a sliding seat is arranged on the sliding guide rail, the mechanical clamping jaw is arranged on the sliding seat in a lifting manner, the rack is provided with a first driving mechanism for driving the sliding seat to move along the sliding guide rail, and the sliding seat is provided with a second driving mechanism for driving the mechanical clamping jaw to lift.
[0009] Preferably, the blow-drying module comprises a workbench arranged on the rack, air pipes are arranged around the workbench, air blowing openings are arranged on the air pipes opposite the position of the workbench, and the air pipes are connected with an air source.
[0010] Preferably, the conveying direction of the finished product conveyor is consistent with the length direction of the square silicon core cross beam, and the conveying surface width of the finished product conveyor is matched with the width of the square silicon core cross beam.
[0011] Preferably, the rack is provided with a baffle corresponding to the conveying end of the finished product conveyor, the rack is provided with a material collecting table corresponding to the side of the baffle, the rack is provided with a material pushing mechanism opposite to the side of the material collecting table, and the material pushing mechanism comprises a material pushing plate movably arranged on the rack.
[0012] Preferably, the material collecting table is L-shaped, the receiving surface of the material collecting table is arranged in a downward inclination manner, and the rack is provided with a reciprocating pushing driving mechanism corresponding to the back of the material pushing plate.
[0013] Preferably, the rack is provided with a sliding rail along the conveying direction of the finished product conveyor, the sliding rail is arranged on both sides of the finished product conveyor in two groups and in a symmetrical manner, and the CCD visual detector is movably arranged on the sliding rail.
[0014] The square silicon core cross beam punching detection device disclosed by the utility model realizes a plurality of technical breakthroughs and innovations in the punching detection technical field, and the beneficial effects mainly reflect in the following aspects:
[0015] (1) improve the detection precision and efficiency: by integrating the blow-drying module, the detection module and the transport mechanism, the device can quickly blow dry and accurately detect the square silicon core cross beam after punching. The application of the CCD visual detector makes the detection process more intelligent and automatic, can accurately identify the punching position degree, effectively distinguishes the good and bad products, and greatly improves the detection precision and production efficiency.
[0016] (2)Optimize production process: The device realizes the integrated operation process from blow-drying, transfer to detection, reduces manual intervention, reduces human error, and shortens the production cycle. The flexible grabbing and transfer of the mechanical gripper ensure the seamless connection of the square silicon core beam between each link, improving the overall smoothness and efficiency of the production line.
[0017] (3) Enhance equipment flexibility: The transfer mechanism and the CCD visual detector are designed as active settings, which can adjust the position and motion trajectory according to actual needs, adapt to the detection needs of square silicon core beams of different specifications and different punching requirements. This design not only improves the versatility of the equipment, but also facilitates subsequent maintenance and upgrading.
[0018] (4) Improve product quality: The automated detection process can continuously and stably perform detection standards, avoiding omissions and errors that may occur in manual detection, ensuring that the quality of each square silicon core beam meets production requirements and improving the overall quality level of products.
[0019] (5) Reduce production cost: Although the initial equipment investment may be high, in the long run, the automated detection device can significantly reduce labor costs, improve production efficiency, and reduce scrap rates, thereby bringing higher economic benefits to the enterprise.
[0020] In summary, the square silicon core beam punching detection device of the present utility model has significant beneficial effects in improving detection accuracy and efficiency, optimizing production process, enhancing equipment flexibility, improving product quality, and reducing production cost, which has important significance for promoting the automation and intelligent development of the field of semiconductor material processing. BRIEF DESCRIPTION OF DRAWINGS
[0021] Figure 1 is a schematic diagram of the structure of the punching detection device Figure 1 ;
[0022] Figure 2 is a schematic diagram of the structure of the punching detection device Figure 2 ;
[0023] Figure 3 is a schematic diagram of the structure of the transfer mechanism
[0024] Figure 4 is Figure 1 an enlarged schematic diagram of structure A.
[0025] In the diagram, 1-frame, 2-drying module, 3-detection module, 4-transfer mechanism, 5-finished product conveyor, 6-CCD vision detector, 7-sliding guide rail, 8-sliding seat, 9-mechanical gripper, 10-first drive mechanism, 11-second drive mechanism, 12-worktable, 13-air pipe, 14-air outlet, 15-square silicon core beam, 16-baffle, 17-receiving platform, 18-push plate, 19-reciprocating push drive mechanism, 20-slide rail. Detailed Implementation
[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.
[0027] Example 1:
[0028] like Figures 1-4 As shown, a square silicon core beam drilling detection device includes a frame 1, on which a drying module 2 and a detection module 3 are installed. The drying module is used to clean the square silicon core beam after drilling, and the detection module is used to detect the square silicon core beam after drilling. A transfer mechanism 4 is installed on the frame 1 to transfer the square silicon core beam from the drying module to the drilling module. The transfer mechanism 4 includes a mechanical gripper 9 movably installed on the frame, which is used to grip the square silicon core beam after drilling. The detection module includes a finished product conveyor 5 installed on the frame. A CCD vision detector 6 is movably installed on one side of the frame corresponding to the finished product conveyor 5. The CCD vision detector 6 can move along the conveying direction of the finished product conveyor.
[0029] The transport mechanism includes a sliding guide rail 7 installed on the rack 1, which is arranged in the direction from the drying module to the detection module, and a sliding seat 8 installed on the sliding guide rail. The mechanical clamping jaw 9 can be installed on the sliding seat and can be lifted. The first driving mechanism 10 is installed on the rack 1 to drive the sliding seat to move along the sliding guide rail. The second driving mechanism 11 is installed on the sliding seat 8 to drive the mechanical clamping jaw to lift. The above structure design: (1) By installing the sliding guide rail and the sliding seat, the mechanical clamping jaw can move quickly and stably along the sliding guide rail, thereby realizing efficient transport of the square silicon core beam from the material storage module to the punching module. This design not only improves the transport speed, but also ensures the stability and accuracy during transport, avoiding production problems caused by transport errors. (2) The transport mechanism adopts the combination design of sliding guide rail and sliding seat, which is not only compact and stable, but also can effectively reduce the vibration and noise of the equipment during operation. At the same time, through accurate calculation and debugging, the cooperation precision and stability between the parts are ensured, thereby improving the reliability and service life of the whole equipment. (3) Since the transport mechanism adopts modular design, the connection and disassembly between the parts are very convenient. This not only makes the maintenance and repair of the equipment more simple and fast, but also reduces the maintenance cost and time cost. At the same time, the modular design also makes it possible to quickly locate and repair the problem when the equipment fails, thereby ensuring the continuity and stability of production.
[0030] The drying module 2 includes a workbench 12 installed on the rack, and gas pipes 13 are installed around the workbench. The gas pipes 13 are provided with gas outlets 14 opposite the workbench position, and the gas pipes are connected with a gas source. (1) It can ensure that the square silicon core beam after punching is cleaned on the workbench. This design not only improves the drying efficiency, but also effectively removes the debris and residues generated during punching, providing clean samples for subsequent detection work. (2) Enhance drying uniformity: The installation of the gas outlet opposite the workbench position allows the gas flow to directly act on the surface of the square silicon core beam, ensuring uniform drying effect. This helps to avoid detection errors caused by incomplete drying.
[0031] The conveying direction of the finished product conveyor 5 is consistent with the length direction of the square silicon core beam 15, and the conveying surface width of the finished product conveyor matches the width of the square silicon core beam. This design helps to ensure that the square silicon core beam maintains a stable posture during conveying, avoiding detection errors caused by improper conveying direction.
[0032] Wherein the end of the finished product conveyor is installed with a baffle 16 on the rack, and a receiving table 17 is installed on the rack corresponding to the side position of the baffle, and a pushing mechanism is installed on the rack opposite to the side of the receiving table, which includes a pushing plate 18 movably installed on the rack, and the pushing plate pushes the square silicon core beam on the finished product conveyor to the receiving table; the above design has the following advantages: (1) Optimizing material management: installing a baffle at the end of the finished product conveyor can effectively prevent the square silicon core beam from being pushed out of the conveyor due to inertia during transportation, ensuring the orderly management and safe transportation of materials. At the same time, the existence of the baffle also provides a clear positioning point for the subsequent pushing operation. (2) Improving space utilization: the receiving table is designed as L-shaped, and the receiving surface is installed inclined downward, which not only facilitates the stacking and storage of the square silicon core beam, but also effectively utilizes the vertical space and reduces the occupied area. In addition, the inclined receiving surface also helps to prevent the square silicon core beam from sliding or collapsing during stacking.
[0033] Wherein the receiving table 17 is L-shaped, and the receiving surface of the receiving table is installed inclined downward, and a reciprocating pushing drive mechanism 19 is installed on the rack corresponding to the back of the pushing plate. The above design has the following advantages: (1) Realizing automatic sorting: the pushing mechanism pushes the square silicon core beam on the finished product conveyor to the receiving table accurately through the pushing plate movably installed on the rack. This design realizes the automatic sorting and collection of the square silicon core beam, reduces manual intervention, and improves production efficiency. (2) Enhancing pushing stability: the application of the reciprocating pushing drive mechanism enables the pushing plate to move reciprocally according to the predetermined trajectory and speed, ensuring the stability and accuracy of the pushing process. This design not only improves the pushing efficiency, but also avoids material damage or misplacement caused by improper pushing.
[0034] The rack 1 is provided with slide rails 20 along the conveying direction of the finished product conveyor, the slide rails are symmetrically installed on both sides of the finished product conveyor, the CCD visual detector is movably installed on the slide rails, and is driven to reciprocatingly move on the slide rails by a power mechanism; the above design has the following advantages: (1) improve the detection flexibility: by arranging the slide rails on the rack along the conveying direction of the finished product conveyor, and movably installing the CCD visual detector on the slide rails, the CCD visual detector can be flexibly moved above the finished product conveyor according to actual needs. This design not only improves the flexibility of detection, but also can adapt to the detection needs of square silicon core cross beams of different sizes and different positions, and ensures the accuracy and reliability of the detection results. (2) Optimize the detection efficiency: the introduction of the slide rails enables the CCD visual detector to quickly and accurately position above the square silicon core cross beam to be detected, thereby reducing the waiting time and adjustment time in the detection process. This optimization not only improves the detection efficiency, but also ensures that the square silicon core cross beams on the production line are timely and effectively detected, avoiding production delay caused by delayed detection. The CCD detection device, namely the CCD visual detection device, actually refers to a detection device that converts a target to be taken into an image signal through a machine vision product CCD image sensor, transmits the image signal to a special image processing system, converts the image signal into a digital signal according to pixel distribution and brightness, color and the like, and the image system performs various operations on the digital signal to extract the characteristics of the target, and then controls the action of the equipment on the site according to the judgment result. In the present scheme, a mature visual detector is adopted.
[0035] It is obvious for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.
Claims
1. A square silicon core beam hole detection device, comprising a rack, characterized in that: The rack is provided with a drying module and a detection module, the drying module is used for blowing the square silicon core beam after punching, the detection module is used for detecting the square silicon core beam after punching, the rack is provided with a transfer mechanism for transferring the square silicon core beam from the drying module to the punching module, the transfer mechanism comprises a mechanical clamp jaw movably arranged on the rack, the mechanical clamp jaw is used for grabbing the square silicon core beam after punching, the detection module comprises a finished product conveyor arranged on the rack, a CCD visual detector is movably arranged on one side of the finished product conveyor, and the CCD visual detector can move along the conveying direction of the finished product conveyor.
2. The square silicon core beam hole detection device according to claim 1, characterized in that: The transfer mechanism comprises a sliding guide rail arranged on the rack, the sliding guide rail is arranged in the direction from the drying module to the detection module, a sliding seat is arranged on the sliding guide rail, the mechanical clamp jaw can be arranged on the sliding seat in an elevating manner, a first driving mechanism is arranged on the rack and used for driving the sliding seat to move along the sliding guide rail, and a second driving mechanism is arranged on the sliding seat and used for driving the mechanical clamp jaw to elevate.
3. The square silicon core beam hole detection device according to claim 1, characterized in that: The drying module comprises a workbench arranged on the rack, air pipes are arranged around the workbench, air blowing ports are arranged on the air pipes and opposite to the position of the workbench, and the air pipes are connected with an air source.
4. The square silicon core beam hole detection device according to claim 1, characterized in that: The conveying direction of the finished product conveyor is consistent with the length direction of the square silicon core beam, and the conveying surface width of the finished product conveyor is matched with the width of the square silicon core beam.
5. The apparatus according to claim 1, wherein: A baffle is arranged on the rack and opposite to the conveying end of the finished product conveyor, a material collecting table is arranged on the rack and opposite to one side of the baffle, a pushing mechanism is arranged on the rack and opposite to one side of the material collecting table, the pushing mechanism comprises a pushing plate movably arranged on the rack, and the pushing plate pushes the square silicon core beam on the finished product conveyor to the material collecting table.
6. The square silicon core beam hole detection device according to claim 5, characterized in that: The material collecting table is L-shaped, the receiving surface of the material collecting table is arranged in an inclined downward manner, and a reciprocating pushing driving mechanism is arranged on the rack and opposite to the back of the pushing plate.
7. The apparatus according to claim 5, wherein: The rack is provided with a sliding rail arranged along the conveying direction of the finished product conveyor, the sliding rail has two groups and is symmetrically arranged on both sides of the finished product conveyor, and the CCD visual detector is movably arranged on the sliding rail.