Light path structure of vacuum type X-ray fluorescence spectrophotometer
By optimizing the optical path structure of the vacuum X-ray fluorescence spectrometer, including the vacuum chamber, X-ray tube, detector, and collimation adjustment assembly, the problems of sealing and detection accuracy were solved, achieving efficient and low-cost detection results.
Patent Information
- Application Number
- CN202423232797.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-12-19
- Estimated Expiration
- 2034-12-26
AI Technical Summary
Existing vacuum X-ray fluorescence spectrometers suffer from high requirements for sealing and insufficient performance in analyzing light alloy elements, resulting in high detection accuracy and cost.
An optical path structure including a vacuum chamber, an X-ray tube, a detector, a collimation adjustment assembly, a camera assembly, and a heat dissipation assembly was designed. High-precision detection is achieved through sealed chamber, collimation adjustment, and heat dissipation optimization.
It achieves a compact optical path structure, low processing cost, high detection accuracy, and is capable of vacuum and conventional detection, meeting the needs of high-performance analysis.
Smart Images
Figure CN223692307U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of spectrometer, and particularly relates to a vacuum type X-ray fluorescence spectrometer light path structure. BACKGROUND
[0002] The vacuum type X-ray fluorescence spectrometer light path structure is a high-precision detection instrument for qualitatively and quantitatively analyzing the energy intensity of an element characteristic spectrum of a measured sample surface excited by primary X-rays and the corresponding intensity, and has the characteristics of rapid nondestructive detection and is widely applied to manufacturing industry, medical industry, chemical industry, metallurgical industry and food and environmental safety and many other fields.
[0003] With the continuous development of industrial society, people's production and living activities are increasing, and X-ray nondestructive testing technology is increasingly popular in environmental protection, industrial testing and mineral resource exploration fields. Market requirements for technical indicators of X-ray detection equipment are also increasingly high. The light path part is an important part of the X-ray fluorescence spectrometer and is the physical basis of the X-ray fluorescence spectrometer, especially the vacuum type light path structure, which not only requires sealing to ensure the vacuum of the cavity, but also is particularly important for analyzing the performance of light alloy elements.
[0004] The information disclosed in this BACKGROUND section is only for the purpose of increasing the understanding of the background of the present utility model and should not be regarded as an acknowledgment or any form of suggestion that it forms prior art that is publicly known. CONTENT OF THE UTILITY MODEL
[0005] The utility model aims at providing a vacuum type X-ray fluorescence spectrometer light path structure, which is simple in structure and high in measurement accuracy.
[0006] In order to achieve the above-mentioned purpose, the technical scheme provided by a specific embodiment of the utility model is as follows:
[0007] A vacuum type X-ray fluorescence spectrometer light path structure comprises:
[0008] A vacuum cavity has a sealed chamber therein;
[0009] An X-ray light tube is arranged on the vacuum cavity and can emit X-rays for irradiating a sample into the sealed chamber;
[0010] A detector is arranged on the vacuum cavity and extends into the sealed chamber, and the detector can detect fluorescence generated by X-ray irradiation of the sample;
[0011] A collimation adjusting assembly is arranged in the sealed chamber, and the collimation adjusting assembly comprises a collimation assembly and an adjusting assembly connected to the collimation assembly, and the adjusting assembly drives the collimation assembly to move to adjust the X-rays emitted by the X-ray tube.
[0012] A camera assembly is arranged on the vacuum cavity and used for observing sample state and position information.
[0013] In one or more embodiments of the present application, the adjusting assembly comprises a guide rail and a driving structure.
[0014] The collimation assembly comprises a collimator.
[0015] The collimator is arranged on the guide rail and connected to the driving structure and moves along the guide rail under the action of the driving structure.
[0016] In one or more embodiments of the present application, an observation window is arranged on the vacuum cavity, and a light-transmitting plate is arranged on the observation window, and the camera assembly observes sample state and position information through the light-transmitting plate.
[0017] In one or more embodiments of the present application, the optical path structure of the vacuum X-ray fluorescence spectrometer further comprises a light filtering assembly arranged on the collimation assembly and used for filtering stray light emitted by the X-ray tube.
[0018] In one or more embodiments of the present application, the optical path structure of the vacuum X-ray fluorescence spectrometer further comprises a heat dissipation assembly arranged on the vacuum cavity and in contact with the X-ray tube, and the heat dissipation assembly is used for heat dissipation of the X-ray tube.
[0019] In one or more embodiments of the present application, the heat dissipation assembly comprises a heat radiator and a heat dissipation fan, the heat radiator is in direct contact with the X-ray tube, and the heat dissipation fan is in direct contact with the heat radiator.
[0020] In one or more embodiments of the present application, the optical path structure of the vacuum X-ray fluorescence spectrometer further comprises an illumination assembly and a sound elimination assembly; the illumination assembly is arranged in the sealed chamber and used for providing illumination; and the sound elimination assembly is arranged in the sealed chamber and used for sound elimination.
[0021] In one or more embodiments of the present application, the optical path structure of the vacuum X-ray fluorescence spectrometer further comprises a pressure sensor arranged on the vacuum cavity and extending into the sealed chamber and used for detecting internal pressure value of the chamber.
[0022] In one or more embodiments of the utility model, the vacuum cavity is further provided with an air outlet communicated with the sealed chamber, and an air pipe joint is arranged on the air outlet, and the air pipe joint is used for connecting an external vacuum equipment to vacuumize the sealed chamber.
[0023] In one or more embodiments of the utility model, the vacuum X-ray fluorescence spectrometer light path structure further comprises a cover body arranged on the vacuum cavity and covering the sealed chamber, and the cover body is provided with a sample placement area, and the cover body is provided with a vacuum cover at the sample placement area.
[0024] Compared with the prior art, the vacuum X-ray fluorescence spectrometer light path structure has the following advantages:
[0025] (1) The light path structure is compact and has low processing cost.
[0026] (2) The detection precision is higher, and the performance is better.
[0027] (3) The collimation assembly can be adjusted according to the sample measurement requirement.
[0028] (4) The vacuum detection and the conventional detection can be realized for the sample to be detected. BRIEF DESCRIPTION OF DRAWINGS
[0029] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced as follows, and obviously, the drawings in the following description are only some embodiments described in the utility model, and for those skilled in the art, other drawings can be obtained according to these drawings without creative labor.
[0030] Figure 1 It is a structural schematic view of the vacuum X-ray fluorescence spectrometer light path structure in one embodiment of the utility model;
[0031] Figure 2 It is an internal view of the sealed chamber of the vacuum X-ray fluorescence spectrometer light path structure in one embodiment of the utility model;
[0032] Figure 3 It is a sectional view of the vacuum X-ray fluorescence spectrometer light path structure in one embodiment of the utility model. DETAILED DESCRIPTION
[0033] In order to make the technical scheme in the present application better understood by those skilled in the art, the technical scheme in the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the scope of protection of the present application.
[0034] As shown in the drawings, Figures 1 to 3 The light path structure of the vacuum X-ray fluorescence spectrometer in an embodiment of the present application comprises a vacuum cavity 10, an X-ray light tube 20, a detector 30, a collimation adjustment assembly and a camera assembly 50.
[0035] As shown in the drawings, Figure 1 The vacuum cavity 10 is used to mount and support the above-mentioned components.
[0036] Specifically, the vacuum cavity 10 is configured in a V-shaped structure, and has a V-shaped sealed chamber 11 inside. The V-shaped sealed chamber 11 has a set of parallel side walls arranged oppositely and two inclined planes between the set of side walls for constituting the V-shaped structure.
[0037] The X-ray light tube 20 is arranged on one of the inclined planes of the vacuum cavity 10, and preferably, is located outside the sealed chamber 11. The X-ray light tube 20 can emit X-rays for irradiating a sample into the sealed chamber 11.
[0038] Specifically, a light-transmitting hole is arranged on one of the inclined planes, and the light emitted by the X-ray light tube 20 located outside the sealed chamber 11 enters the sealed chamber 11 through the light-transmitting hole.
[0039] The detector 30 and the camera assembly 50 are also arranged on one of the inclined planes of the vacuum cavity 10.
[0040] Specifically, a detection hole and an observation window are arranged on the inclined plane. The detector 30 is arranged on the detection hole, and the detector 30 extends into the sealed chamber 11 through the detection hole. The detector 30 can detect the fluorescence generated by the sample irradiated by the X-rays. The camera assembly 50 is arranged on the observation window.
[0041] As shown in the drawings, Figure 3 Specifically, a light-transmitting plate 51 is arranged on the observation window. The camera assembly 50 comprises a camera bracket 52 and a camera 53. The camera bracket 52 is fixed on the inclined plane of the vacuum cavity 10, and the camera 53 is fixed on the camera bracket 52. The camera 53 can observe the state and position information of the sample through the light-transmitting plate 51.
[0042] The light-transmitting plate 51 and the observation window, the detection hole and the detector 30 are also sealed by the sealing ring. The light-transmitting plate 51 is preferably a high-transmittance acrylic plate.
[0043] As shown in Figure 1 The vacuum cavity 10 is further provided with an air outlet hole, a cable through hole and a pressure detection hole on one of the inclined surfaces. The air outlet hole is provided with an air pipe joint 111 for connecting an external vacuum device to perform vacuumization on the sealed chamber 11. The cable through hole is provided with an aviation head 112 for electronic wiring and improving the sealing performance of the sealed chamber. The pressure detection hole is provided with a pressure sensor 113 fixed on the vacuum cavity 10 and extending into the sealed chamber 11 through the pressure detection hole for detecting the internal pressure value of the chamber. The pressure sensor 113 is preferably an absolute pressure transmitter. Sealing rings are arranged between the air outlet hole and the air pipe joint 111, between the cable through hole and the aviation head 112, and between the pressure detection hole and the pressure sensor 113 to improve the sealing performance of the sealed chamber.
[0044] Further, a collimation adjusting assembly is arranged in the sealed chamber 11. The collimation adjusting assembly includes a collimation assembly 41 and an adjusting assembly connected to the collimation assembly 41. The adjusting assembly drives the collimation assembly 41 to move to adjust the X-rays emitted by the X-ray tube 20.
[0045] As shown in Figure 2 The adjusting assembly includes a guide rail 421 and a driving structure 422. The collimation assembly 41 includes a collimator. The collimator is arranged on the guide rail 421 and connected to the driving structure 422, and can be controlled to move along the guide rail 421 under the action of the driving structure 422. The guide rail 421 is preferably a linear guide rail, and the driving structure 422 is preferably a screw stepper motor.
[0046] The collimation assembly 41 is further provided with a photoelectric switch 61, an aperture 62 and a filter assembly 63. The filter assembly 63 includes a filter placed in the collimator for filtering stray light emitted by the X-ray tube 20.
[0047] The V-shaped sealed chamber 11 is further provided with an illumination assembly 71 and a sound attenuation assembly 72. The illumination assembly 71 includes an LED lamp for providing illumination. The sound attenuation assembly 72 includes a sound attenuator for sound attenuation.
[0048] As shown in Figure 1 The light path structure of the vacuum X-ray fluorescence spectrometer further includes a heat dissipation assembly. The heat dissipation assembly is arranged on the vacuum cavity 10 and in contact with the X-ray tube 20. The heat dissipation assembly is used for heat dissipation of the X-ray tube 20.
[0049] Specifically, the heat dissipation assembly includes a heat sink 81 and a heat dissipation fan 82, the heat sink 81 is in direct contact with the X-ray tube 20, and the heat dissipation fan 82 is in direct contact with the heat sink 81.
[0050] The optical path structure of the vacuum type X-ray fluorescence spectrometer further includes a cover 12 arranged on the vacuum cavity 11 and covering the sealed cavity 11. Figure 1 and Figure 3 As shown in the figure, a mounting groove is formed in the middle region of the cover 12, a panel compression ring 121 is arranged in the mounting groove, the panel compression ring 121 defines a sample placement region, and a vacuum cover 13 is arranged on the cover 12 at the sample placement region.
[0051] A mounting groove is also formed in the cover 12 at the position of the vacuum cover 13, and a sealing ring is arranged in the mounting groove. The vacuum cover 13 is sealingly connected between the mounting groove and the cover 12 through the sealing ring. The vacuum cover 13 completely covers the panel compression ring 121.
[0052] The optical path structure of the vacuum type X-ray fluorescence spectrometer of the utility model, when installing, first, the X-ray tube 20 and the heat sink 81 are fixed through two hoops, two heat dissipation fans 82 are installed on the heat sink 81, and then are installed together on the vacuum cavity 10.
[0053] Secondly, the detector 30, the air pipe joint 111, the pressure sensor 113, and the aviation head 112 are installed on the vacuum cavity 10. The muffler, the two LED lamps, the photoelectric switch 61, the diaphragm 62, and the guide rail 421 are installed on the vacuum cavity 10. The optical filter is placed in the collimator and then is installed on the driving structure 422. Then the driving structure 422 is installed on the vacuum cavity 10, and the collimator is fixed on the guide rail 421.
[0054] Then, the sealing ring is placed in the corresponding groove of the vacuum cavity 10, the light transmission plate 51 is placed in the vacuum cavity 10, the camera bracket 52 is fixed on the vacuum cavity 10, and then
[0055] The camera 53 is fixed on the camera bracket 52.
[0056] Finally, the sealing ring is placed in the corresponding groove of the vacuum cavity 10, and the cover 12 is fixed on the vacuum cavity 10. The panel compression ring 121 is placed in the corresponding groove of the cover 12, and the sealing ring is sleeved on the vacuum cover 13 and placed on the corresponding groove of the cover 12, and the installation of the entire optical path structure of the vacuum type X-ray fluorescence spectrometer is completed.
[0057] Compared with the prior art, the optical path structure of the vacuum type X-ray fluorescence spectrometer has the following advantages:
[0058] (1) The optical path structure is compact and has low processing cost.
[0059] (2) Detection accuracy is higher, and performance is better.
[0060] (3) The collimation assembly can be adjusted according to the sample requirements.
[0061] (4) The sample to be measured can be detected in vacuum and conventionally.
[0062] It is apparent for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, but can be implemented in other concrete forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered in all aspects as illustrative and not restrictive, and the scope of the present application is defined by the appended claims rather than the above description, and it is intended to embrace all changes falling within the meaning and scope of the equivalent elements of the claims. Any reference signs in the claims should not be considered as limiting the claims to which they relate.
[0063] In addition, it should be understood that, although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the specification is described in this way only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be properly combined to form other embodiments that those skilled in the art can understand.
Claims
1. A light path structure of a vacuum-type X-ray fluorescence spectrometer, characterized by comprising: The application relates to an X-ray fluorescence analysis device. The device comprises: a vacuum cavity with a sealed cavity inside; an X-ray light tube arranged on the vacuum cavity, which can emit X-rays for irradiating a sample into the sealed cavity; a detector arranged on the vacuum cavity and extending into the sealed cavity, which can detect fluorescence generated by X-ray irradiation of a sample; a collimation adjustment assembly arranged in the sealed cavity, which comprises a collimation assembly and an adjustment assembly connected to the collimation assembly, and the adjustment assembly drives the collimation assembly to move to adjust the X-rays emitted by the X-ray light tube; and a camera assembly arranged on the vacuum cavity for observing sample state and position information.
2. The optical path structure of the vacuum-type X-ray fluorescence spectrometer according to claim 1, characterized by, The adjustment assembly comprises a guide rail and a driving structure; the collimation assembly comprises a collimator; the collimator is arranged on the guide rail and connected to the driving structure, and moves along the guide rail under the action of the driving structure.
3. The optical path structure of the vacuum-type X-ray fluorescence spectrometer according to claim 1, characterized by, An observation window is arranged on the vacuum cavity, and a light-transmitting plate is arranged on the observation window, and the camera assembly observes sample state and position information through the light-transmitting plate.
4. The optical path structure of the vacuum-type X-ray fluorescence spectrometer according to claim 1, characterized by, The device further comprises a light filter assembly arranged on the collimation assembly for filtering stray light emitted by the X-ray light tube.
5. The optical path structure of the vacuum-type X-ray fluorescence spectrometer according to claim 1, characterized by, The device further comprises a heat dissipation assembly arranged on the vacuum cavity and in contact with the X-ray light tube, which is used for heat dissipation of the X-ray light tube.
6. The vacuum-type X-ray fluorescence spectrometer optical path structure according to claim 5, characterized by, The heat dissipation assembly comprises a heat sink and a heat dissipation fan, the heat sink is in direct contact with the X-ray light tube, and the heat dissipation fan is in direct contact with the heat sink.
7. The optical path structure of the vacuum-type X-ray fluorescence spectrometer according to claim 1, characterized by, The device further comprises an illumination assembly and a sound elimination assembly; the illumination assembly is arranged in the sealed cavity; and the sound elimination assembly is arranged in the sealed cavity.
8. The optical path structure of the vacuum-type X-ray fluorescence spectrometer according to claim 1, characterized by, The device further comprises a pressure sensor arranged on the vacuum cavity and extending into the sealed cavity, which is used for detecting internal pressure of the cavity.
9. The optical path structure of the vacuum-type X-ray fluorescence spectrometer according to claim 1, characterized by, The vacuum cavity is further provided with an air outlet connected to the sealed cavity, and an air pipe joint is arranged on the air outlet, which is used for connecting an external vacuum equipment to perform vacuumization on the sealed cavity.
10. The optical path structure of the vacuum-type X-ray fluorescence spectrometer according to claim 1, characterized by, The device further comprises a cover arranged on the vacuum cavity and covering the sealed cavity, and a sample placement area is arranged on the cover, and a vacuum cover is arranged on the cover at the sample placement area.