Double-station loading box opener for wafer box

Abstract

The utility model relates to the technical field of semiconductors, in particular to a double-station loading box opener for a wafer box, which comprises a frame body assembly, the frame body assembly is provided with at least two box opening stations, and each box opening station comprises a loading assembly which is arranged on the frame body assembly and used for being arranged on the wafer box and a box opening assembly which is arranged on the frame body assembly and used for being arranged on the wafer box. The lifting box opening assembly is used for opening the box cover; the frame body assembly comprises a back plate, the lifting box opening assembly is installed on the back plate, and the outer side of the lifting box opening assembly is covered with a maintenance box plate; the lower end face of the loading assembly is connected with the upper end of the maintenance box plate. According to the double-station loading box opener for the wafer box, the overall structure is simplified, multi-station integrated design is achieved, the overall equipment space is saved, and more space is reserved for subsequent operation of wafers and the wafer box through longitudinal lifting box opening and cover opening actions; and due to the multi-station design, the material preparation and installation time is shortened.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor, concretely is double position loading unbox ware for wafer box. BACKGROUND

[0002] Wafer box is the storage device for temporarily storing wafers during wafer transfer and maintaining its sealed state. Wafer box usually includes a side opening box body, a box cover that can seal and cover the side opening, and a bottom plate arranged at the bottom of the box body, and the box cover can be completely separated from the box body. Currently, the commonly used wafer box is front opening unified pod (FOUP), usually, a load port for wafer box is arranged in front of the wafer process equipment, and is matched with wafer box transfer robot arm and wafer process equipment wafer transfer robot arm to realize wafer pick and place.

[0003] Currently, multiple load ports are arranged side by side in front of the wafer process equipment, but due to the working radius of the robot arm, this method requires corresponding number of robot arms to be arranged in front and back of the load port, especially for the wafer process equipment that requires multiple stations, the installation space and debugging time cost are relatively higher

[0004] The existing unbox ware is used as the loading system of wafer box and wafer, and multiple unbox wares are usually distributed in the front section of the equipment, and the customer needs to independently install and debug each unbox ware. Currently, most of the unbox wares for wafer box adopt single station design, and the installation space and debugging time cost are relatively high. For manufacturers, the packaging and transportation cost of single station unbox ware is also relatively large. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a wafer box unbox lifting assembly with simple structure, small volume, stable consistency and strong expandability.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme.

[0007] The double position loading unbox ware for wafer box includes a frame assembly, at least two unbox stations are installed on the frame assembly, each unbox station includes a loading assembly for loading wafer box installed on the frame assembly, and a lifting unbox assembly installed on the frame assembly for opening the box cover.

[0008] The frame assembly includes a back plate, the lifting unbox assembly is installed on the back plate, and a maintenance box plate is arranged on the outer side of the lifting unbox assembly; the lower end surface of the loading assembly is connected with the upper end of the maintenance box plate.

[0009] Under the unbox action, the loading assembly bears and locks the box bottom, and the lifting unbox assembly drives the box cover to realize lifting action.

[0010] Further, the loading assembly comprises a loading chassis mounted on the maintenance box plate, a loading platform slidably mounted on the loading chassis, a loading drive for driving the loading platform to move, and a pressing member mounted below the loading platform and adapted to the pressing groove of the box bottom.

[0011] Further, the loading platform comprises an operation area and a loading area; the operation area is through the edge and thickness direction of the corresponding loading platform, and is used for reserving the operation space of the mechanical arm; the loading area is used for carrying the wafer box; and a plurality of positioning pins for positioning the box bottom and a pressure sensor to be placed on the box bottom are arranged on the loading area.

[0012] Further, the pressing member comprises a pressing drive mounted on the lower end surface of the loading platform, a pressing connecting rod connected with the execution end of the pressing drive, and a pressing rod mounted on the end of the pressing connecting rod.

[0013] Further, the loading drive is mounted in the loading chassis, and the telescopic end of the loading drive is connected with the loading platform through a loading connecting block; the loading platform and the upper end surface of the loading chassis are slidably connected through the matched sliding block and sliding rail;

[0014] Further, the lifting and opening box assembly comprises an opening box door group, a lifting frame body for mounting the opening box door group, and a power assembly for driving the lifting frame body to reciprocate; the lifting frame body is mounted with a detection frame group, the top of the detection frame group is provided with a position detector for detecting whether the lifting action is in place; the lifting frame body is further mounted with a door group drive for driving the opening box door group to approach the wafer box and a frame group drive for driving the detection frame group to approach the wafer box;

[0015] Further, the lifting frame body comprises a lifting bottom plate and a lifting vertical plate; the door group drive is mounted on the lifting vertical plate, and the telescopic end of the door group drive penetrates through the lifting vertical plate and is connected with the opening box door group through a door group connecting rod; the frame group drive is mounted on the lifting bottom plate, and the telescopic end of the frame group drive is connected with the detection frame group and drives the frame group drive to slide on the lifting bottom plate; the door group connecting rod comprises a door group connecting plate, the door group connecting plate is mounted with the lifting vertical plate through a connecting guide rod, and the door group connecting plate is connected with the opening box door group through a door group connecting rod;

[0016] Further, the opening box door group comprises a door group shell, a cover suction assembly and a cover locking assembly mounted in the door group shell; the cover suction assembly comprises a cover suction air disc connected with an external air source, and a cover suction air nozzle connected with the cover suction air disc and extending out of the door group shell; the cover suction air nozzle is positionally corresponding to the suction hole on the box cover.

[0017] Further, the lock cover assembly comprises a lock cover drive, a lock cover connecting rod installed at a moving end of the lock cover drive, and a lock cover rotating rod rotatably installed on the door group shell; two ends of the lock cover connecting rod are connected with one end of the lock cover rotating rod, and the other end of the lock cover rotating rod penetrates through the door group shell and is used for locking the locking groove on the box cover.

[0018] Further, the bottom of the frame body assembly is further provided with a moving frame plate and a moving wheel set installed at the lower end face of the moving frame plate.

[0019] Compared with the prior art, the utility model has the advantages that:

[0020] In the specific work of the utility model, the frame body assembly is designed as a double-station, each box opening station is designed as an equal height, and each station performs the loading and opening of the corresponding wafer box; when the opening of the box cover is needed, the crown block automatically places the wafer box on the loading assembly, the loading assembly bears and fixes the bottom of the wafer box, and the lifting box opening assembly drives the box cover of the wafer box to perform the lifting movement; the maintenance box plate is convenient for the subsequent maintenance, maintenance and upgrading of the lifting box opening assembly.

[0021] The double-station loading box opening device of the wafer box has a compact overall structure, a multi-station integrated design, saves the overall equipment space, and reserves more space for the operation of the wafer and the wafer box through the longitudinal lifting box opening and opening action, and the multi-station design reduces the material preparation and installation time. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a schematic view of the overall structure of the utility model;

[0023] Figure 2 It is a schematic view of the rear inclined view of the utility model;

[0024] Figure 3 It is a schematic view of the structure of the loading assembly of the utility model;

[0025] Figure 4 It is a schematic view of the rear inclined view of the loading assembly of the utility model;

[0026] Figure 5 It is a schematic view of the wafer box of the utility model.

[0027] Figure 6 It is a schematic view of the structure of the lifting box opening assembly of the utility model;

[0028] Figure 7 It is a schematic view of the inclined view of the lifting box opening assembly of the utility model;

[0029] Figure 8 It is a schematic view of the internal structure of the box opening door group of the utility model;

[0030] Figure 9 Figure 2 is a schematic diagram of the hidden rear structure of the lifting frame body of the utility model;

[0031] Figure 10 Figure 4 is a schematic diagram of the lock cover rotating rod of the utility model. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the utility model will be apparently and completely described in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments.

[0033] Reference Figures 1-10 As shown in the figure, the dual-station loading and opening device for wafer boxes comprises a frame assembly 1, the frame assembly 1 is provided with at least two opening stations, each opening station comprises a loading assembly 4 for loading a wafer box 5 and a lifting and opening assembly 3 for opening a box cover 51, both of which are installed on the frame assembly 1;

[0034] The frame assembly 1 comprises a back plate 12, the lifting and opening assembly 3 is installed on the back plate 12, and a maintenance box plate 11 is arranged outside the lifting and opening assembly 3; the lower end surface of the loading assembly 4 is connected with the upper end of the maintenance box plate 11; under the opening action, the loading assembly 4 bears and locks the box bottom 52, and the lifting and opening assembly 3 drives the box cover 51 to realize the lifting action;

[0035] In actual use, the frame assembly 1 is designed as a dual-station, each opening station is designed as the same height, and each station performs the loading and opening actions of the corresponding wafer box 5; when the opening action of the box cover 51 is needed, the overhead crane automatically places the wafer box 5 on the loading assembly 4, the loading assembly 4 bears and fixes the box bottom 52 of the wafer box 5, and the lifting and opening assembly 3 drives the box cover 51 of the wafer box 5 to perform the lifting action; the maintenance box plate 11 facilitates the subsequent maintenance and upgrading of the lifting and opening assembly 3;

[0036] The dual-station loading and opening device for wafer boxes has a compact overall structure, a multi-station integrated design, saves the overall equipment space, and reserves more space for the subsequent operation of the wafer and the wafer box through the vertical lifting and opening action, and the multi-station design reduces the material preparation and installation time.

[0037] In the embodiment, the loading assembly 4 comprises a loading chassis 41 mounted on the maintenance box plate 11, a loading platform 43 slidingly mounted on the loading chassis 41, a loading drive 42 driving the loading platform 43 to move, and a pressing member 46 mounted below the loading platform 43 and adapted to the pressing groove of the box bottom 52; wherein the loading platform 43 is used for carrying the box bottom 52 of the wafer box 5, the pressing member 46 is used for fixing the box bottom 52, and the stability of the box cover 51 of the wafer box 5 under the opening and closing actions is ensured.

[0038] In the embodiment, the loading platform 43 comprises an operation area 431 and a loading area 432; the operation area 431 is through the edge and thickness direction of the corresponding loading platform 43, and is used for reserving the operation space of the mechanical arm; the loading area 432 is used for carrying the wafer box 5; and a plurality of positioning pins 44 for positioning the box bottom 52 and a pressure sensor 45 where the box bottom 52 is placed are arranged on the loading area 432; the operation area 431 and the loading area 432 are one specific structure, that is, the loading platform 43 is in the shape of a rectangular frame plate with one corner missing, and the missing part is connected with the space in the frame and forms the operation area 431 together with the space in the frame, and the loading area 432 is the surface of the rectangular frame plate; this structure can also facilitate the arrangement of three positioning pins 44, so as to realize the stable positioning of the wafer box 5; and the operation area 431 is used for reserving the operation space of the mechanical arm.

[0039] In the embodiment, the pressing member 46 comprises a pressing drive 461 mounted on the lower end surface of the loading platform 43, a pressing connecting rod 462 connected with the execution end of the pressing drive 461, and a pressing rod 463 mounted on the end of the pressing connecting rod 462; the pressing drive 461 is an electric cylinder or a pneumatic cylinder, drives the pressing connecting rod 462 to extend and retract, and in turn drives the pressing rod 463; the front end of the pressing rod 463 is an auxiliary roller, so that the pressing rod 463 can smoothly extend into the pressing groove of the box bottom 52.

[0040] In the embodiment, the loading drive 42 is mounted in the loading chassis 41, and the telescopic end of the loading drive 42 is connected with the loading platform 43 through a loading connecting block 421; the loading platform 43 and the upper end surface of the loading chassis 41 are slidingly connected through the matched sliding block and sliding rail; the loading drive 42 is a pneumatic cylinder or an electric cylinder, and is used for small-range sliding adjustment of the loading platform 43, so as to ensure that the box cover 51 can enter the working position of the lifting opening assembly 3.

[0041] In this embodiment, the lifting box opening assembly 3 comprises a box opening door group 31, a lifting frame body 33 for mounting the box opening door group 31, and a power assembly 32 for driving the lifting frame body 33 to reciprocate; the lifting frame body 33 is provided with a detection frame group 35, and the top of the detection frame group 35 is provided with a position detector 38 for detecting whether the lifting action is in place; the lifting frame body 33 is further provided with a door group drive 37 for driving the box opening door group 31 to approach the wafer box and a frame group drive 36 for driving the detection frame group 35 to approach the wafer box;

[0042] During the lifting and box opening process, the power assembly 32 drives the lifting frame body 33 to change the height of the box opening door group 31 and the detection frame group 35, and the detection frame group 35 identifies whether the detection is in place. The box opening door group 31 is used to unlock and grasp the cover of the wafer box, thereby realizing the opening and closing action of the box cover. The lifting frame body 33 is slidably installed on the back plate 12 in the form of a sliding rail, and is driven by the power assembly 32 to reciprocate. The box opening door group 31 and the detection frame group 35 are installed on the lifting frame body 33, and during the lifting process, the box opening door group 31 and the detection frame group 35 are brought to the specified height position. After reaching the preset height, the position detector 38 detects the wafer box, and the box opening door group 31 unlocks and grasps the cover 51 of the wafer box 5. The power assembly 32 continues to work, and the box opening door group 31 drives the cover 51 to further rise, thereby realizing the opening action. After other operations are completed, the power assembly 32 drives the lifting frame body 33 to descend, thereby realizing the lowering of the cover 51 and completing the opening and closing action of the overall box cover.

[0043] In this embodiment, the lifting frame body 33 comprises a lifting bottom plate 332 and a lifting vertical plate 331. The door group drive 37 is installed on the lifting vertical plate 331, and the telescopic end of the door group drive 37 passes through the lifting vertical plate 331 and is connected to the box opening door group 31 through a door group connecting frame 34. The frame group drive 36 is installed on the lifting bottom plate 332, and the telescopic end of the frame group drive 36 is connected to the detection frame group 35 and drives the frame group drive 36 to slide on the lifting bottom plate 332. The lifting vertical plate 331 is slidably connected to the back plate 12 through a sliding rail, thereby ensuring the stability of the overall lifting operation of the lifting frame body 33. The door group drive 37 and the frame group drive 36 are electric cylinders or air cylinders, thereby controlling the distance between the box opening door group 31 and the detection frame group 35 and the wafer box 5.

[0044] In the embodiment, the door group connecting frame 34 comprises a door group connecting plate 341, which is installed with a connecting guide rod 343 and the lifting vertical plate 331, and is connected with the opening box door group 31 through a door group connecting rod 342; the door group connecting plate 341 is connected with the telescopic end of the door group drive 37, and is slidably installed on the lifting vertical plate 331 through the connecting guide rod 343; the door group connecting plate 341 is fixedly connected with the opening box door group 31 through the door group connecting rod 342, so that the opening box door group 31 can stably approach and move away from the wafer box 5 as a whole.

[0045] In the embodiment, the opening box door group 31 comprises a door group housing 311, in which a cover suction assembly and a cover locking assembly are installed; the cover suction assembly comprises a cover suction air disc 312 connected with an external air source, and a cover suction air nozzle 314 connected with the cover suction air disc 312 and extending out of the door group housing 311; the cover suction air nozzle 314 is positionally corresponding to the suction hole 512 on the box cover 51; the cover locking assembly comprises a cover locking drive 315, a cover locking connecting rod 316 installed on the moving end of the cover locking drive 315, and a cover locking rotating rod 313 rotatably installed on the door group housing 311; the two ends of the cover locking connecting rod 316 are connected with one end of the cover locking rotating rod 313, and the other end of the cover locking rotating rod 313 penetrates through the door group housing 311 to lock the locking groove 511 on the box cover 51; under the drive of the door group drive 37, the opening box door group 31 approaches the wafer box 5, and then the cover suction assembly and the cover locking assembly perform the suction, unlocking and locking actions on the box cover 51; the cover suction air disc 312 is installed with the cover suction air nozzle 314 to vacuum-suck and position the suction hole 512 on the back of the box cover 51; the cover locking drive 315 is a pneumatic cylinder or an electric cylinder, the movement of the execution end of which drives the cover locking connecting rod 316 to move left and right, and the two ends of the cover locking connecting rod 316 are rotatably installed with the cover locking rotating rod 313; the cover locking rotating rod 313 is initially inserted into the locking groove 511, and after being rotated, the cover locking rotating rod 313 clamps the locking groove 511 on the back of the box cover 51 to lock the wafer box cover; when the opening box door group 31 is driven by the power assembly 32 to perform the lifting action, the opening box door group 31 can realize the double-insurance clamping of the wafer box cover through suction and locking.

[0046] In the embodiment, the edge of the door group housing 311 is further provided with a door group buffer block 317; the door group buffer block 317 can reduce unnecessary shaking and vibration when the detection frame group 35 and the opening box door group 31 contact and collide.

[0047] In the embodiment, the detection frame group 35 comprises a frame group connecting plate 351 slidably mounted on the lifting bottom plate 332, and a frame 352 vertically mounted on the frame group connecting plate 351; the end of the frame group connecting plate 351 is provided with a frame group limiting rod 354, which is located inside the lifting vertical plate 331; in the embodiment, the in-place detector 38 is mounted on the top of the frame 352; and the frame 352 is further provided with a frame anti-collision strip 353 beside the in-place detector 352; the detection frame group 35 is used for pre-fixing and judging the lifting position; when the lifting is in place, the frame group connecting plate 351 is driven to slide by the execution end of the frame group driving 36, and then the frame 352 approaches the wafer box; at this time, whether the detection frame group 35 as a whole reaches the predetermined position is judged by the in-place detector 38; the frame anti-collision strip 353 is provided to ensure that the hardware structure is used for anti-collision warning in case of accident.

[0048] In the embodiment, the power assembly 3 comprises a lifting motor 321, a lifting lead screw 322 mounted on the lifting motor 321, and a lifting block 323 assembled on the lifting lead screw 322; the lifting block 323 is connected with the lifting frame body 33.

[0049] In the embodiment, the bottom of the frame body assembly 1 is further provided with a moving frame plate 21 and a moving wheel group 22 mounted on the lower end surface of the moving frame plate 21.

[0050] The specific embodiments described herein are merely illustrative of the spirit of the present application. Those skilled in the art of the present application can make various modifications or supplements to the described specific embodiments or replace them with similar ways, without deviating from the scope defined by the spirit of the present application.

Claims

1. A dual station load unloader for wafer cassettes, characterized by, The application relates to a wafer box opening device, which comprises a frame assembly (1) provided with at least two box opening stations, each of which comprises a loading assembly (4) installed on the frame assembly (1) and used for loading a wafer box (5), and a lifting box opening assembly (3) installed on the frame assembly (1) and used for opening a box cover (51). The frame assembly (1) comprises a back plate (12), the lifting box opening assembly (3) is installed on the back plate (12), and a maintenance box plate (11) is arranged outside the lifting box opening assembly (3); the lower end surface of the loading assembly (4) is connected with the upper end of the maintenance box plate (11). In the box opening action, the loading assembly (4) carries and locks a box bottom (52), and the lifting box opening assembly (3) drives the box cover (51) to realize lifting action.

2. The dual position load unloader for a wafer cassette of claim 1, wherein, The loading assembly (4) comprises a loading chassis (41) installed on the maintenance box plate (11), a box loading platform (43) slidingly installed on the loading chassis (41), a loading drive (42) for driving the box loading platform (43) to move, and a pressing piece (46) installed below the box loading platform (43) and matched with a pressing groove of the box bottom (52).

3. The dual position load unloader for a wafer cassette of claim 2, wherein, The box loading platform (43) comprises an operation area (431) and a loading area (432); the operation area (431) is through the edge and thickness direction of the corresponding box loading platform (43) and is used for reserving the operation space of a mechanical arm; the loading area (432) is used for carrying the wafer box (5); and a plurality of positioning pins (44) for positioning the box bottom (52) and a pressure sensor (45) corresponding to the box bottom (52) are arranged on the loading area (432).

4. The dual position load unloader for a wafer cassette of claim 2, wherein, The pressing piece (46) comprises a pressing drive (461) installed on the lower end surface of the box loading platform (43), a pressing connecting rod (462) connected with the execution end of the pressing drive (461), and a pressing rod (463) installed at the end of the pressing connecting rod (462).

5. The dual position load unloader for a wafer cassette of claim 2, wherein, The loading drive (42) is installed in the loading chassis (41), and the telescopic end of the loading drive (42) is connected with the box loading platform (43) through a loading connecting block (421); the upper end surface of the box loading platform (43) and the loading chassis (41) are slidingly connected through matched sliding blocks and sliding rails.

6. The dual position load unloader for a wafer cassette of claim 1, wherein, The lifting box opening assembly (3) comprises a box opening door group (31), a lifting frame (33) for installing the box opening door group (31), and a power assembly (32) for driving the lifting frame (33) to reciprocate; the lifting frame (33) is provided with a detection frame group (35), the top of the detection frame group (35) is provided with a position detector (38) for detecting whether the lifting action is in place; the lifting frame (33) is further provided with a door group drive (37) for driving the box opening door group (31) to approach the wafer box and a frame group drive (36) for driving the detection frame group (35) to approach the wafer box.

7. The dual position load unloader for a wafer cassette of claim 6, wherein, The lifting frame body (33) comprises a lifting bottom plate (332) and a lifting vertical plate (331); the door group drive (37) is installed on the lifting vertical plate (331), and the telescopic end of the door group drive (37) is connected with the box opening door group (31) through the door group connecting frame (34) penetrating through the lifting vertical plate (331); the frame group drive (36) is installed on the lifting bottom plate (332), and the telescopic end of the frame group drive (36) is connected with the detection frame group (35) and drives the frame group drive (36) to slide on the lifting bottom plate (332); the door group connecting frame (34) comprises a door group connecting plate (341), the door group connecting plate (341) is installed on the lifting vertical plate (331) through a connecting guide rod (343), and the door group connecting plate (341) is connected with the box opening door group (31) through a door group connecting rod (342).

8. The dual position load unloader for a wafer cassette of claim 6, wherein, The box opening door group (31) comprises a door group shell (311), a cover suction assembly and a cover locking assembly installed in the door group shell (311); the cover suction assembly comprises a suction air disc (312) connected with an external air source and a cover suction air nozzle (314) connected on the cover suction air disc (312) and extending out of the door group shell (311); the cover suction air nozzle (314) is positionally corresponding to a suction hole (512) on the box cover (51).

9. The dual position load unloader for a wafer cassette of claim 8, wherein, The cover locking assembly comprises a cover locking drive (315), a cover locking connecting rod (316) installed on the movement end of the cover locking drive (315), and a cover locking rotating rod (313) rotationally installed on the door group shell (311); the two ends of the cover locking connecting rod (316) are connected with one end of the cover locking rotating rod (313), and the other end of the cover locking rotating rod (313) penetrates through the door group shell (311) and is used for locking a locking groove (511) on the box cover (51).

10. The dual position load unloader for a wafer cassette of claim 1, wherein, The bottom of the frame body assembly (1) is further provided with a moving frame plate (21) and a moving wheel group (22) installed on the lower end face of the moving frame plate (21).

Images