Wafer box opening lifting assembly

Abstract

The utility model relates to the technical field of semiconductors, in particular to a wafer box opening lifting assembly which comprises a box opening door group, a lifting frame body used for installing the box opening door group and a power assembly used for driving the lifting frame body to reciprocate. The lifting frame body is provided with a detection frame set, and the top of the detection frame set is provided with an in-place detector used for detecting whether the lifting action is in place or not. The lifting frame body is also provided with a door group driver for driving the box opening door group to be close to the wafer box and a frame group driver for driving the detection frame group to be close to the wafer box; according to the wafer box opening lifting assembly, the overall structure is simple, the overall operation action is simple, the transformation cost is controllable, the locking and unlocking operation of the box cover is combined with the lifting frame body, and integration and simplification of the structure are achieved; and the lifting frame body which moves stably is used as a platform of the whole lifting action, so that the stability and the safety of the opening and closing actions of the wafer box cover are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor, concretely is a wafer box opening lifting subassembly. BACKGROUND

[0002] Wafer box is the storage device for temporarily storing wafers during wafer transfer and maintaining its sealed state. Wafer box usually includes a box body with a side opening, a box cover that can seal and cover the side opening, and a bottom plate arranged at the bottom of the box body, and the box cover can be completely separated from the box body. The commonly used wafer box is front opening unified pod (FOUP)

[0003] Usually, a load port for wafer box is arranged in front of the wafer process equipment, and is matched with wafer box transfer robot and process equipment wafer transfer robot to realize wafer taking and placing.

[0004] Currently, multiple load ports are arranged side by side in front of the wafer process equipment, but due to the working radius of the robot, this method requires corresponding number of robots to be arranged in front and back of the load port, especially multiple wafer transfer robots need to be arranged in the wafer process equipment, which has relatively high installation space and debugging time cost.

[0005] For the working condition of multi-station opening box requirement, the uniformity and consistency of opening box action between multiple stations are required to be higher, and the precision and high consistency of opening box and related action of each station need to be ensured. UTILITY MODEL CONTENTS

[0006] The utility model aims at providing a wafer box opening lifting subassembly with simple structure, small volume, stable consistency and strong expansibility.

[0007] To achieve the above purpose, the utility model provides the following technical scheme.

[0008] A wafer box opening lifting subassembly includes an opening door group, a lifting frame body for installing the opening door group, and a power assembly for driving the lifting frame body to reciprocate; the lifting frame body is installed with a detection frame group, the top of the detection frame group is provided with a position detector for detecting whether the lifting action is in place; the lifting frame body is also installed with a door group drive for driving the opening door group to approach the wafer box and a frame group drive for driving the detection frame group to approach the wafer box;

[0009] During the lifting opening process, the power assembly drives the lifting frame body to realize the height change of the opening door group and the detection frame group, whether the detection frame group is in place is recognized and detected, the opening door group is used for unlocking and grabbing the wafer box cover, and then the opening and closing action of the box cover is realized.

[0010] Further, the lifting frame body comprises a lifting bottom plate and a lifting vertical plate; the door group drive is installed on the lifting vertical plate, and the telescopic end of the door group drive is connected with the opening box door group through the door group connecting frame and the lifting vertical plate; the frame group drive is installed on the lifting bottom plate, and the telescopic end of the frame group drive is connected with the detection frame group and drives the frame group drive to slide on the lifting bottom plate.

[0011] Further, the door group connecting frame comprises a door group connecting plate, which is installed on the lifting vertical plate through a connecting guide rod, and is connected with the opening box door group through a door group connecting rod.

[0012] Further, the opening box door group comprises a door group shell, a suction cover assembly and a lock cover assembly installed in the door group shell.

[0013] Further, the suction cover assembly comprises a suction cover air disc connected with an external air source and a suction cover air nozzle connected with the suction cover air disc and extending out of the door group shell; the suction cover air nozzle is positionally corresponding to a suction hole on the wafer box cover.

[0014] Further, the lock cover assembly comprises a lock cover drive, a lock cover connecting rod installed on the movement end of the lock cover drive, and a lock cover rotating rod rotatably installed on the door group shell; one end of the lock cover connecting rod is connected with one end of the lock cover rotating rod, and the other end of the lock cover rotating rod penetrates through the door group shell and is used for locking the box cover.

[0015] Further, the edge of the door group shell is further provided with a door group buffer block.

[0016] Further, the detection frame group comprises a frame group connecting plate slidably installed on the lifting bottom plate and a frame vertically installed on the frame group connecting plate; the end of the frame group connecting plate is provided with a frame group limiting rod, and the frame group limiting rod is located on the inner side of the lifting vertical plate.

[0017] Further, the in-place detector is installed on the top of the frame; and a frame anti-collision strip is further arranged beside the in-place detector.

[0018] Further, the power assembly comprises a lifting motor, a lifting lead screw installed on the lifting motor, and a lifting block assembled on the lifting lead screw; the lifting block is connected with the lifting frame body.

[0019] Compared with the prior art, the utility model has the beneficial effects as follows:

[0020] The utility model discloses a whole structure schematic diagram, and the utility model discloses a wafer box opening and lifting assembly, which comprises a back plate, a lifting frame body, a power assembly, a box opening door group and a detection frame.

[0021] The wafer box opening and lifting assembly has a simple overall structure, simple overall operation action, controllable transformation cost, combined locking and unlocking operation of the box cover with the lifting frame body, realized integrated simplification of the structure, uses the motion stable lifting frame body as the platform of the overall lifting action, and improves the stability and safety of the wafer box cover in the opening and closing action. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is the whole structure schematic diagram of the utility model;

[0023] Figure 2 It is the oblique view schematic diagram of the utility model;

[0024] Figure 3 It is the internal structure schematic diagram of the box opening door group of the utility model;

[0025] Figure 4 It is the structure schematic diagram of the lifting frame body part hides behind of the utility model;

[0026] Figure 5 It is the schematic diagram of the cover locking and unlocking rod of the utility model. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only a part of the embodiments of the utility model, not all the embodiments of the utility model.

[0028] REFERENCE Figures 1-5As shown, a wafer box opening and lifting assembly includes an opening door group 31, a lifting frame body 33 for mounting the opening door group 31, and a power assembly 32 for driving the lifting frame body 33 to reciprocate; the lifting frame body 33 is mounted with a detection frame group 35, the top of the detection frame group 35 is provided with a position detector 38 for detecting whether the lifting action is in place; the lifting frame body 33 is also mounted with a door group drive 37 for driving the opening door group 31 to approach the wafer box and a frame group drive 36 for driving the detection frame group 35 to approach the wafer box;

[0029] During the lifting opening process, the power assembly 32 drives the lifting frame body 33 to change the height of the opening door group 31 and the detection frame group 35, and the detection frame group 35 identifies whether it is in place, and the opening door group 31 is used to unlock and grasp the wafer box cover, thereby realizing the opening and closing action of the box cover.

[0030] In actual use, the lifting frame body 33 is slidably mounted on the back plate in the form of a sliding rail, and is driven by the power assembly 32 to reciprocate and lift; the opening door group 31 and the detection frame 35 are mounted on the lifting frame body 33, and during the lifting process, the opening door group 31 and the detection frame group 35 will be brought to the specified height position; after reaching the preset height, the wafer box is detected by the position detector 38, and the wafer box cover is unlocked and grasped by the opening door group 31, the power assembly 32 continues to work, and the wafer box is further lifted by the opening door group 31, thereby realizing the opening action of the wafer box cover; after other operation is completed, the lifting frame body 33 is lowered by the power assembly 32 to realize the lowering of the wafer box cover, the opening door group 31 locks the box cover, and the opening and closing action of the whole box cover is completed.

[0031] The wafer box opening and lifting assembly has a simple overall structure, simple overall operation action, controllable transformation cost, combines the locking and unlocking operations of the box cover with the lifting frame body, realizes the integration and simplification of the structure, uses the motion-stable lifting frame body as the platform for the overall lifting action, and improves the stability and safety of the wafer box cover in the opening and closing action.

[0032] In the embodiment, the lifting frame body 33 includes a lifting bottom plate 332 and a lifting vertical plate 331; the door group drive 37 is mounted on the lifting vertical plate 331, and the telescopic end of the door group drive 37 passes through the lifting vertical plate 331 to be connected with the opening door group 31 through a door group connecting frame 34; the frame group drive 36 is mounted on the lifting bottom plate 332, and the telescopic end of the frame group drive 36 is connected with the detection frame group 35 and drives the frame group drive 36 to slide on the lifting bottom plate 332. The lifting vertical plate 331 is slidably connected with the back plate through a sliding rail; the stability of the overall lifting operation of the lifting frame body 33 is ensured; the door group drive 37 and the frame group drive 36 are electric cylinders or air cylinders to control the distance between the opening door group 31 and the detection frame group 35 and the wafer box;

[0033] In the embodiment, the door group connecting frame 34 comprises a door group connecting plate 341, which is installed with a connecting guide rod 343 and a lifting vertical plate 331, and is connected with the box opening door group 31 through a door group connecting rod 342; the door group connecting plate 341 is connected with the telescopic end of the door group drive 37, and is slidingly installed on the lifting vertical plate 331 through the connecting guide rod 343; the door group connecting plate 341 is fixedly connected with the box opening door group 31 through the door group connecting rod 342, so as to ensure that the box opening door group 31 can stably realize approaching and moving away from the wafer box.

[0034] In the embodiment, the door group connecting frame 34 comprises a door group connecting plate 341, which is installed with a connecting guide rod 343 and a lifting vertical plate 331, and is connected with the box opening door group 31 through a door group connecting rod 342; the door group connecting plate 341 is connected with the telescopic end of the door group drive 37, and is slidingly installed on the lifting vertical plate 331 through the connecting guide rod 343; the door group connecting plate 341 is fixedly connected with the box opening door group 31 through the door group connecting rod 342, so as to ensure that the box opening door group 31 can stably realize approaching and moving away from the wafer box.

[0035] In the embodiment, the edge of the door group shell 311 is further provided with a door group buffer block 317; the door group buffer block 317 can reduce unnecessary shaking and vibration when the detection frame group 35 and the box opening door group 31 are in contact and collision.

[0036] In the embodiment, the detection frame group 35 comprises a frame group connecting plate 351 slidingly installed on the lifting bottom plate 332, and a frame 352 vertically installed on the frame group connecting plate 351; the end of the frame group connecting plate 351 is provided with a frame group limiting rod 354, and the frame group limiting rod 354 is located inside the lifting vertical plate 331; in the embodiment, the in-place detector 38 is installed on the top of the frame 352; and a frame anti-collision strip 353 is further provided beside the in-place detector 38; the detection frame group 35 is used for pre-fixing and judging the lifting position, when the lifting is in place, the frame group connecting plate 351 is driven to slide by the execution end of the frame group driving 36, and then the frame 352 approaches the wafer box; at this time, whether the detection frame group 35 as a whole reaches the predetermined position is judged by the in-place detector 38; the frame anti-collision strip 353 is provided to ensure that the hardware structure is used for anti-collision warning in case of accident.

[0037] In the embodiment, the power assembly 3 comprises a lifting motor 321, a lifting lead screw 322 installed on the lifting motor 321, and a lifting block 323 assembled on the lifting lead screw 322; the lifting block 323 is connected with the lifting frame body 33.

[0038] The specific embodiments described herein are merely illustrative of the spirit of the present application. Those skilled in the art to which the present application belongs can make various modifications or supplements to the described specific embodiments or replace them with similar ways, but will not deviate from the scope defined by the spirit of the present application.

Claims

1. A wafer cassette opening and lifting assembly, characterized in that, The application relates to a lifting door group (31), a lifting frame body (33) for mounting the lifting door group (31), and a power assembly (32) for driving the lifting frame body (33) to reciprocate; the lifting frame body (33) is provided with a detection frame group (35), the top of the detection frame group (35) is provided with a to-position detector (38) for detecting whether the lifting action is in place; the lifting frame body (33) is further provided with a door group drive (37) for driving the lifting door group (31) to approach a wafer box and a frame group drive (36) for driving the detection frame group (35) to approach the wafer box. During the lifting opening process, the power assembly (32) drives the lifting frame body (33) to change the height of the lifting door group (31) and the detection frame group (35), the detection frame group (35) is used for identifying whether the detection is in place, the lifting door group (31) is used for unlocking and grabbing the wafer box cover, and then the opening and closing action of the box cover is realized.

2. The FOUP opening and lifting assembly of claim 1, wherein, The lifting frame body (33) comprises a lifting bottom plate (332) and a lifting vertical plate (331); the door group drive (37) is installed on the lifting vertical plate (331), and the telescopic end of the door group drive (37) penetrates through the lifting vertical plate (331) and is connected with the lifting door group (31) through a door group connecting frame (34); the frame group drive (36) is installed on the lifting bottom plate (332), and the telescopic end of the frame group drive (36) is connected with the detection frame group (35) and drives the frame group drive (36) to slide on the lifting bottom plate (332).

3. The FOUP opening and lifting assembly of claim 2, wherein, The door group connecting frame (34) comprises a door group connecting plate (341), the door group connecting plate (341) is installed through a connecting guide rod (343) and the lifting vertical plate (331), and the door group connecting plate (341) is connected with the lifting door group (31) through a door group connecting rod (342).

4. The FOUP opening and lifting assembly of claim 1, wherein, The lifting door group (31) comprises a door group shell (311), a cover suction assembly and a cover locking assembly installed in the door group shell (311).

5. The FOUP opening and lifting assembly of claim 4, wherein, The cover suction assembly comprises a cover suction air disc (312) connected with an external air source and a cover suction air nozzle (314) connected on the cover suction air disc (312) and extending out of the door group shell (311); the cover suction air nozzle (314) corresponds to the suction hole position on the wafer box cover.

6. The FOUP opening and lifting assembly of claim 4, wherein, The cover locking assembly comprises a cover locking drive (315), a cover locking connecting rod (316) installed on the movement end of the cover locking drive (315), and a cover locking rotating rod (313) rotatably installed on the door group shell (311); the two ends of the cover locking connecting rod (316) are connected with one end of the cover locking rotating rod (313), and the other end of the cover locking rotating rod (313) penetrates through the door group shell (311) and is used for locking the box cover.

7. The FOUP opening and lifting assembly of claim 4, wherein, The edge of the door group shell (311) is further provided with a door group buffer block (317).

8. The FOUP opening and lifting assembly of claim 2, wherein, The detection frame group (35) comprises a frame group connecting plate (351) slidably installed on the lifting bottom plate (332) and a frame (352) vertically installed on the frame group connecting plate (351); the tail end of the frame group connecting plate (351) is provided with a frame group limiting rod (354), and the frame group limiting rod (354) is located on the inner side of the lifting vertical plate (331).

9. The FOUP opening and lifting assembly of claim 8, wherein, A position detector (38) is mounted on the top of the frame (352), and a frame anti-collision strip (353) is arranged beside the position detector (38).

10. The FOUP opening and lifting assembly of claim 1, wherein, The power assembly (32) comprises a lifting motor (321), a lifting screw rod (322) mounted on the lifting motor (321), and a lifting block (323) assembled on the lifting screw rod (322), wherein the lifting block (323) is connected with the lifting frame body (33).

Images