Paddle adjusting device and processing equipment

Abstract

The utility model provides a paddle adjusting device and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem of product rollover caused by easy rollover of a paddle assembly. The paddle adjusting device comprises a paddle head frame assembly; the hanging rings are connected with the paddle head frame assembly, each hanging ring is provided with a first through hole and an opening for disconnecting the side wall of the hanging ring, and each hanging ring is provided with a first end located on one side of the opening and a second end located on the other side of the opening; each rotating block is arranged in the first through hole of the corresponding hanging ring, each rotating block is provided with a second through hole extending in the first horizontal direction, and each paddle assembly penetrates through the second through hole of the corresponding rotating block; and the first end and the second end of each lifting ring are connected through the at least one first screw joint piece. The rotating angle of the paddle assembly can be adjusted by rotating the at least one rotating block, so that the upper surface of the paddle assembly is adjusted to be in a horizontal state, and the risk of rollover of the boat structure is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and in particular to a paddle adjusting device and a processing equipment. BACKGROUND

[0002] When a process furnace is used to process products such as semiconductor or photovoltaic materials, a silicon carbide paddle is used to place a boat structure carrying the products into a reaction furnace tube for processing, and the boat structure is taken out after the processing is completed. During the process of taking and placing the boat structure in the reaction furnace tube by the silicon carbide paddle, if the pose of the silicon carbide paddle has a deviation, or the boat structure slides in the reaction furnace tube, the silicon carbide paddle will collide with the boat structure and / or the reaction furnace tube, thereby causing the equipment to malfunction, reducing the use efficiency of the equipment, and also causing some products to be reworked and scrapped.

[0003] In related technologies, an adjusting mechanism carries the middle part and the tail end of the silicon carbide paddle by two supporting blocks, and a screw that can be adjusted up and down is arranged to abut against the supporting block carrying the tail end. By adjusting the height of the screw, the pitch attitude of the paddle can be adjusted, so as to change the position of the boat structure entering the reaction furnace tube. However, this structure can only adjust the pitch attitude of the silicon carbide paddle, and cannot adjust the lateral overturning angle of the silicon carbide paddle. If the silicon carbide paddle overturns laterally, the boat structure is prone to roll over. CONTENT OF THE UTILITY MODEL

[0004] To solve the above technical problems, the present application is proposed. The paddle adjusting device and the processing equipment are provided by the embodiments of the present application.

[0005] In a first aspect, an embodiment of the present application provides a paddle adjusting device configured to adjust the attitude of at least one paddle assembly, each paddle assembly extending along a first horizontal direction, comprising: a paddle head frame assembly; at least one hanging ring connected with the paddle head frame assembly, each hanging ring having a first through hole extending along the first horizontal direction and having a circular cross-sectional shape, each hanging ring further having an opening disconnecting the side wall of the hanging ring, so that each hanging ring has a first end located on one side of the opening and a second end located on the other side of the opening; at least one rotating block, each rotating block being arranged in the first through hole of one hanging ring, the vertical cross section of each rotating block in a second horizontal direction being circular, the second horizontal direction being perpendicular to the first horizontal direction, each rotating block being rotatable relative to the one hanging ring, each rotating block having a second through hole extending along the first horizontal direction, each paddle assembly passing through the second through hole of at least one rotating block; and at least one first screw element, the first end and the second end of each hanging ring being connected by the at least one first screw element.

[0006] In some embodiments, the number of the eyelets is at least two, the at least two eyelets are arranged in M rows and N columns along the first horizontal direction and the second horizontal direction on the paddle head frame assembly, M and N are positive integers, and M is greater than or equal to 2; wherein each paddle assembly sequentially passes through the second through hole of the rotating block in the first through hole of each eyelet arranged along the first horizontal direction.

[0007] In some embodiments, each paddle assembly has a first end, a second end, and a middle section between the first end and the second end along the first horizontal direction, the bottom of the paddle head frame assembly has at least one first threaded portion extending along the vertical direction; at least one eyelet in each column of eyelets is configured to carry the first end of one paddle assembly; at least another eyelet in each column of eyelets is configured to carry the middle section of one paddle assembly and is rotatably connected with the bottom of the paddle head frame assembly; wherein the paddle adjusting device further comprises: at least one second screwing member, the first end of each second screwing member is screwed with one first threaded portion, and the second end of each second screwing member abuts against at least one eyelet in each column of eyelets.

[0008] In some embodiments, the paddle head frame assembly comprises: a paddle head frame having a second threaded portion extending along the second horizontal direction; at least one first adjusting block having at least one third threaded portion extending along the second horizontal direction and at least one fourth threaded portion extending along the second horizontal direction; at least one third screwing member screwed with one third threaded portion and abutting against the paddle head frame; at least one fourth screwing member screwed with one fourth threaded portion and screwed with the second threaded portion; a bottom plate connected with the at least one first adjusting block and connected with the at least one eyelet.

[0009] In some embodiments, the paddle head frame assembly further has a fifth threaded portion extending along the vertical direction; wherein the paddle adjusting device further comprises: a fifth screwing member screwed with the fifth threaded portion; a second adjusting block connected with the linear module for transmission, the linear module is configured to drive the second adjusting block to move, the second adjusting block is located below the fifth screwing member, and the fifth screwing member further abuts against the upper surface of the second adjusting block.

[0010] In some embodiments, each eyelet has at least one first countersunk hole penetrating through the sidewall of each eyelet, and each rotating block has at least one sixth threaded portion penetrating through the sidewall of each rotating block; wherein the paddle adjusting device further comprises: at least one set of clamping plate assemblies, each set of clamping plate assemblies is arranged in one second through hole, each set of clamping plate assemblies comprises at least one clamping plate, and the at least one clamping plate contacts with the sidewall of one paddle assembly; at least one sixth screwing member, each sixth screwing member passes through one first countersunk hole, is screwed with one sixth threaded portion, and abuts against one clamping plate to apply a pushing force to the paddle assembly by the one clamping plate.

[0011] In some embodiments, each paddle assembly has a rectangular cross section, and each clamping plate assembly includes four clamping plates, each clamping plate being in contact with one side wall of one paddle assembly and configured to apply a pushing force to one side wall of one paddle assembly.

[0012] In some embodiments, each eye ring has a first groove at a first end and a second groove at a second end, and the first groove and the second groove of each eye ring form a first counterbore.

[0013] In some embodiments, the number of eye rings is four, and the four eye rings are arranged in two rows and two columns along the first horizontal direction and the second horizontal direction.

[0014] In some embodiments, the number of eye rings is four, and the four eye rings are arranged in two rows and two columns along the first horizontal direction and the second horizontal direction.

[0015] The paddle adjusting device and the processing equipment provided by the embodiments of the present application can adjust the rotation angle of the paddle assembly by rotating at least one rotating block, so as to adjust the upper surface of the paddle assembly to a horizontal state, thereby reducing the risk of overturning of the boat structure. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description of embodiments of the present application, taken in conjunction with the accompanying drawings. The drawings provided in the disclosure serve to provide a further understanding of the embodiments of the present application, constitute a part of the specification and are used to explain the present application together with the specification, but do not limit the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The structure schematic diagram of the paddle adjusting device and the paddle assembly provided by an exemplary embodiment of the present application is shown.

[0018] Figure 2 The structure schematic diagram of the paddle adjusting device and the paddle assembly provided by another exemplary embodiment of the present application is shown.

[0019] Figure 3 The structure schematic diagram of the paddle adjusting device and the paddle assembly provided by another exemplary embodiment of the present application is shown.

[0020] Figure 4 The structure schematic diagram of the paddle adjusting device and the paddle assembly provided by an exemplary embodiment of the present application is shown. Figure 1A local enlarged view of the paddle adjusting device and the paddle assembly in the A area is shown.

[0021] Figure 5 A structural schematic diagram of a processing device provided by an exemplary embodiment of the present application is shown. Figure 3 A local enlarged view of the paddle adjusting device and the paddle assembly in the B area is shown.

[0022] Figure 6 A structural schematic diagram of a processing device provided by an exemplary embodiment of the present application is shown.

[0023] Reference signs:

[0024] 100, paddle adjusting device; 101, paddle head frame assembly; 1013, paddle head frame; 10131, second threaded part; 10132, crossbeam; 10133, second counterbore; 1014, first adjusting block; 10141, fourth threaded part; 1015, third threaded part; 1016, bottom plate; 102, lifting ring; 1021, first end of lifting ring; 1022, second end of lifting ring; 10221, third through hole; 1023, opening; 1024, first counterbore; 1025, first recess; 1026, second recess; 103, rotating block; 104, second threaded part; 105, rotating shaft; 106, connecting block; 107, locking nut; 108, fifth threaded part; 109, second adjusting block; 110, clamping plate; 200, paddle assembly; 201, first end of paddle assembly; 202, second end of paddle assembly; 203, middle section of paddle assembly; 300, processing device; 301, linear module; 302, reaction furnace. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0026] Figure 1 A structural schematic diagram of a paddle adjusting device and a paddle assembly provided by an exemplary embodiment of the present application is shown, Figure 2 A structural schematic diagram of a paddle adjusting device and a paddle assembly provided by another exemplary embodiment of the present application is shown, Figure 3 A structural schematic diagram of a paddle adjusting device and a paddle assembly provided by still another exemplary embodiment of the present application is shown, Figure 4 A structural schematic diagram of a processing device provided by an exemplary embodiment of the present application is shown. Figure 1 A local enlarged view of the paddle adjusting device and the paddle assembly in the A area is shown.

[0027] AsFigures 1-4 As shown, the embodiment of the present application provides a paddle adjusting device 100 configured to adjust the posture of at least one paddle assembly 200, each paddle assembly 200 extending along a first horizontal direction (i.e. the X direction in the figure), the paddle adjusting device 100 comprising: a paddle head frame assembly 101, at least one hanging ring 102, at least one rotating block 103, and at least one first screwing piece. The at least one hanging ring 102 is connected with the paddle head frame assembly 101, each hanging ring 102 having a first through hole extending along the first horizontal direction and having a circular cross-sectional shape, each hanging ring 102 further having an opening 1023 breaking the side wall of the hanging ring 102, so that each hanging ring 102 has a first end 1021 located at one side of the opening 1023 and a second end 1022 located at the other side of the opening. Each rotating block 103 is arranged in the first through hole of one hanging ring 102, each rotating block 103 being rotatable relative to the one hanging ring 102, each rotating block 103 having a second through hole extending along the first horizontal direction, and each paddle assembly 200 passing through the second through hole of the at least one rotating block 103. The first end 1021 and the second end 1022 of each hanging ring 102 are connected by the at least one first screwing piece. Figures 1-3 Figure 1 Figure 3

[0028] Exemplarily, the first end 1021 of each hanging ring 102 has a seventh threaded part, such as a seventh threaded hole, the seventh threaded part being a thread in the seventh threaded hole, the second end 1022 of each hanging ring 102 has a third through hole 10221, and the first screwing piece can be a screw or a bolt, the first screwing piece passing through the third through hole 10221 and being screwed with the seventh threaded part. The at least one hanging ring 102 can be connected to the bottom of the bottom plate 1016 described below.

[0029] In actual application, since the first through hole has a circular cross-sectional shape and the rotating block 103 has a circular outer contour in the vertical section in the second horizontal direction, the rotating block 103 can rotate freely in the first through hole. If the paddle assembly 200 is laterally inclined and the upper surface of the paddle assembly 200 has an angle with the horizontal plane, the rotating block 103 can be rotated to drive the paddle assembly 200 to rotate laterally, so as to adjust the paddle assembly 200 to the horizontal state. Then, the first end 1021 and the second end 1022 of the hanging ring 102 are locked by the first screwing piece, so as to fix the rotating block 103. Through this structure, the lateral angle of the paddle assembly 200 can be adjusted flexibly, the lateral inclination of the paddle assembly 200 is avoided, and thus the risk of the boat structure overturning is reduced.

[0030] In some embodiments, as​​​Figures 1-3 As shown, the number of lifting rings 102 is at least two. At least two lifting rings 102 are arranged in M ​​rows and N columns along a first horizontal direction and a second horizontal direction on the propeller head assembly, where M and N are both positive integers, and M is greater than or equal to 2. Each propeller assembly 200 sequentially passes through the second through hole of the rotating block 103 within the first through hole of a row of lifting rings 102 spaced apart along the first horizontal direction.

[0031] By using at least two rotating blocks 103 to support a paddle assembly 200, the paddle assembly 200 can be supported more stably. In practical applications, for any paddle assembly 200, the at least two rotating blocks 103 through which the paddle assembly 200 passes can be adjusted to adjust the paddle assembly 200 to a horizontal state.

[0032] In some embodiments, such as Figure 2 As shown, each propeller assembly 200 has a first end 201, a second end 202, and an intermediate section 203 located between the first end 201 and the second end 202 in a first horizontal direction. The bottom of the propeller head assembly 101 has at least one first threaded portion extending in a vertical direction. At least one ring 102 in each row of rings 102 is configured to carry the first end 201 of a propeller assembly 200. At least another ring 102 in each row of rings 102 is configured to carry the intermediate section 203 of a propeller assembly 200 and is rotatably connected to the bottom of the propeller head assembly 101. The propeller adjustment device 100 further includes at least one second screw connector 104, the first end of each second screw connector 104 being screwed to a first threaded portion, and the second end of each second screw connector 104 abutting against at least one ring 102 in each row of rings.

[0033] For example, such as Figure 2 and Figure 3 As shown, the bottom of the propeller head assembly 101 has at least one first threaded hole extending in a vertical direction, and each first threaded portion is a thread within a first threaded hole. The second screw connector 104 can be a screw, bolt, stud, or foot cup. The propeller adjustment device 100 may further include a rotating shaft 105 and a connecting block 106. For at least one other ring 102 in each row of rings 102, the top of the ring 102 has at least one fourth through hole extending in a second horizontal direction, the rotating shaft 105 passes through at least one fourth through hole to allow the ring 102 to rotate about the rotating shaft 105, the connecting block 106 has a fifth through hole extending in the second horizontal direction, the rotating shaft 105 also passes through the fifth through hole, and the connecting block 106 is connected to the bottom of the propeller head assembly 101 (as described later in the base plate 1016).

[0034] In practical applications, by rotating the second screwing member 104, the screwing position of the second screwing member 104 and the first threaded part is adjusted, i.e. the height of the second screwing member 104 is adjusted, so that the pitch attitude of the paddle assembly 200 can be flexibly adjusted, and the paddle assembly 200 can enter the reaction furnace in a suitable attitude, avoiding the paddle assembly 200 from colliding with the boat structure when the product is taken out in the reaction furnace, causing the product to be scrapped or the equipment to be damaged.

[0035] In some embodiments, as shown in Figure 2 The paddle adjusting device 100 further includes a locking nut 107, which is screwed with the second screwing member 104 and is located above the bottom of the paddle head frame assembly 101 (above the bottom plate 1016 as described below), and is configured to fasten the second screwing member 104.

[0036] Figure 5 The paddle adjusting device and the paddle assembly provided by the exemplary embodiments of the present application are shown in Figure 3 The paddle adjusting device and the paddle assembly are shown in a partial enlarged view of the B area.

[0037] In some embodiments, as shown in Figure 3 and Figure 5 The paddle head frame assembly 101 includes a paddle head frame 1013, at least one first adjusting block 1014, at least one third screwing member 1015, at least one fourth screwing member, and a bottom plate 1016. The paddle head frame 1013 has a second threaded part 10131 extending along the second horizontal direction. Each first adjusting block 1014 has at least one third threaded part extending along the second horizontal direction, and at least one fourth threaded part 10141 extending along the second horizontal direction. Each third screwing member 1015 is screwed with one third threaded part and abuts against the paddle head frame 1013. Each fourth screwing member is screwed with one fourth threaded part 10141 and is screwed with the second threaded part 10131. The bottom plate 1016 is connected with the at least one first adjusting block 1014 and is connected with the at least one lifting ring 102.

[0038] Exemplarily, the paddle head frame 1013 can be composed of at least one plate structure and / or at least one strip structure, for example, the paddle head frame 1013 can have a crossbeam 10132 extending along a first horizontal direction, and the crossbeam 10132 can have a second threaded portion 10131. The paddle head frame 1013 has a second threaded hole extending along a second horizontal direction, and the second threaded portion 10131 can be a thread in the second threaded hole. The first adjusting block 1014 has at least one third threaded hole extending along the second horizontal direction, and at least one fourth threaded hole extending along the second horizontal direction, a third threaded portion is a thread in the third threaded hole, and a fourth threaded portion 10141 is a thread in the fourth threaded hole. The third screwing member 1015 can be a screw or a bolt. The fourth screwing member can be a screw or a bolt. The bottom plate 1016 is connected to the bottom of the first adjusting block 1014, and the at least one lifting ring 102 is connected to the bottom of the bottom plate 1016.

[0039] In practical applications, by rotating the third screwing member 1015, adjusting the screwing position of the third screwing member 1015 and the third threaded portion, and rotating the fourth screwing member, adjusting the screwing position of the fourth screwing member and the second threaded portion 10131, the position of the first adjusting block 1014 relative to the paddle head frame 1013 in the second horizontal direction can be adjusted, so as to adjust the position of the lifting ring 102 and the paddle assembly 200 in the second horizontal direction. Therefore, through this structure, the position of the paddle assembly 200 in the second horizontal direction can be flexibly adjusted, so that the paddle assembly 200 enters the reaction furnace at a suitable position, avoiding the paddle assembly 200 colliding with the boat structure when taking out the product in the reaction furnace, causing the product to be scrapped or the equipment to be damaged.

[0040] In some embodiments, as shown in Figure 2 The paddle head frame assembly 101 also has a fifth threaded portion extending along a vertical direction. The paddle adjusting device 100 further comprises a fifth screwing member 108 and a second adjusting block 109. The fifth screwing member 108 is screwed with the fifth threaded portion. The second adjusting block 109 is connected with the linear module in transmission, and the linear module is configured to drive the second adjusting block 109 to move. The second adjusting block 109 is located below the fifth screwing member 108, and the fifth screwing member 108 also abuts against the upper surface of the second adjusting block 109.

[0041] Exemplarily, as shown in Figure 2 and Figure 3As shown, the paddle holder assembly 101 (e.g., the paddle holder 1013) has a fifth threaded hole extending in the vertical direction, and the fifth threaded part is a thread in the fifth threaded hole. The paddle holder 1013 has a second countersunk hole 10133 extending in the vertical direction, and the fifth threaded hole is located below the second countersunk hole 10133. The second countersunk hole 10133 is in communication with the fifth threaded hole, and the fifth screw piece 108 can be screwed into the second countersunk hole 10133 and screwed with the thread of the fifth threaded hole. The linear module includes a track and a sliding table, and the sliding table can slide along the track. The paddle holder assembly 101 (e.g., the paddle holder 1013) can be connected with the sliding table.

[0042] In practical applications, the fifth screw piece 108 is rotated to adjust the screwing position of the fifth screw piece 108 and the fifth threaded part, that is, to adjust the height of the fifth screw piece 108. The height of the paddle holder assembly 101 can be adjusted, so that the height of the lifting ring 102 and the paddle assembly 200 can be flexibly adjusted. The paddle assembly 200 can enter the reaction furnace at a suitable position to avoid the paddle assembly 200 colliding with the boat structure when taking out the product in the reaction furnace, causing the product to be scrapped or the equipment to be damaged.

[0043] In some embodiments, as shown, Figure 4 As shown, each lifting ring 102 has at least one first countersunk hole 1024 penetrating the side wall of each lifting ring 102, and each rotating block 103 has at least one sixth threaded part penetrating the side wall of each rotating block 103. The paddle adjusting device 100 further comprises at least one set of clamping plate assemblies and at least one sixth screw piece. Each set of clamping plate assemblies is arranged in a second through hole, and each set of clamping plate assemblies comprises at least one clamping plate 110 in contact with the side wall of one paddle assembly 200. Each sixth screw piece penetrates one first countersunk hole 1024, is screwed with one sixth threaded part, and abuts against one clamping plate 110 to make the one clamping plate 110 apply a pushing force to the paddle assembly 200.

[0044] For example, each rotating block 103 has at least one sixth threaded hole penetrating the side wall of each rotating block 103, and the sixth threaded part is a thread in the sixth threaded hole. The paddle assembly 200 comprises a paddle and a paddle cylinder, and the paddle cylinder is sleeved outside the paddle. The clamping plate 110 is in contact with the paddle cylinder.

[0045] In the above embodiments, by making the at least one sixth screw piece abut against the at least one clamping plate 110, the at least one clamping plate 110 can clamp the paddle assembly 200, so as to stably fix the paddle assembly 200.

[0046] In some embodiments, the cross section of each paddle assembly 200 is rectangular, and each clamping plate assembly comprises four clamping plates 110. Each clamping plate 110 is in contact with one side wall of one paddle assembly 200 and is configured to apply a pushing force to one side wall of one paddle assembly 200.

[0047] Exemplarily, the second through hole has a rectangular cross-sectional shape, each clamping plate 110 has opposite first and second surfaces, the first surface of each clamping plate 110 is in contact with an inner wall of the second through hole, and the second surface of each clamping plate 110 is in contact with a side wall of the paddle assembly 200.

[0048] With this structure, the clamping plate 110 can stably clamp the paddle assembly 200.

[0049] In some embodiments, as shown in Figure 3 each lifting ring 102 has a first recess 1025 at the first end 1021 and a second recess 1026 at the second end 1022, and the first recess 1025 and the second recess 1026 of each lifting ring 102 form a first counterbore 1024. With this structure, the first counterbore 1024 can also be arranged at the opening 1023, so that the sixth screw member passes through the first counterbore 1024 and tightly abuts against the clamping plate 110.

[0050] In some embodiments, the number of lifting rings 102 is four, and the four lifting rings 102 are arranged in two rows and two columns along the first and second horizontal directions. If two lifting rings 102 located in the same first horizontal direction are taken as a row and two lifting rings 102 located in the same second horizontal direction are taken as a column, one row of lifting rings 102 can carry one paddle assembly 200. With this structure, the paddle adjusting device 100 can simultaneously carry two paddle assemblies 200.

[0051] Figure 6 Fig. 1 shows a structural schematic diagram of a processing equipment provided by an exemplary embodiment of the present application.

[0052] Based on the same concept, as shown in Figure 6 the present application also provides a processing equipment 300, which comprises at least one paddle assembly 200, the paddle adjusting device 100 of any of the above embodiments, a linear module 301, and a reaction furnace 302. Each paddle assembly 200 is configured to carry a product. The paddle adjusting device 100 is connected with the at least one paddle assembly 200 and is configured to adjust the posture of the at least one paddle assembly 200. The linear module 301 is in transmission connection with the paddle adjusting device 100 and is configured to drive the paddle adjusting device 100 to move. The reaction furnace 302 has a reaction cavity configured to accommodate the product carried by the at least one paddle assembly 200 and to process the product.

[0053] The above describes the basic principles of the present application in combination with specific embodiments, but it needs to be pointed out that the advantages, benefits, effects and the like mentioned in the present application are only examples and are not limiting, and these advantages, benefits, effects and the like cannot be considered as necessary for each embodiment of the present application. In addition, the above specific details disclosed are only for the purpose of example and understanding, and are not limiting, and the above details do not limit the present application to be necessarily implemented with the above specific details.

[0054] The block diagrams of the devices, apparatuses, equipment, systems involved in the present application are only illustrative examples and are not intended to require or imply the connection, arrangement, configuration shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "contain", "have" and the like are open-ended words, which mean "including but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0055] It also needs to be pointed out that in the devices, equipment and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be considered as equivalent solutions of the present application.

[0056] The above description of the disclosed aspects is provided so that any person skilled in the art can make or use the present application. Various modifications to these aspects will be apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but is intended to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0057] The above description has been given for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A paddle adjustment device, characterized in that, The paddle adjusting device is configured to adjust the attitude of at least one paddle assembly, each of the paddle assemblies extending along a first horizontal direction, and comprises: a paddle head frame assembly; at least one hanger connected to the paddle head frame assembly, each of the hangers having a first through hole extending along the first horizontal direction and having a circular cross-sectional shape, each of the hangers further having an opening breaking the sidewall of the hanger, so that each of the hangers has a first end located on one side of the opening and a second end located on the other side of the opening; at least one rotating block, each of the rotating blocks being arranged in the first through hole of one of the hangers, each of the rotating blocks having a circular outer contour in a vertical cross section along a second horizontal direction, the second horizontal direction being perpendicular to the first horizontal direction, each of the rotating blocks being rotatable relative to the one of the hangers, each of the rotating blocks having a second through hole extending along the first horizontal direction, each of the paddle assemblies passing through the second through hole of at least one of the rotating blocks; at least one first screwing member, the first end and the second end of each of the hangers being connected by at least one of the first screwing members.

2. The paddle adjustment device of claim 1, wherein, The number of the hangers is at least two, and the at least two hangers are arranged in M rows and N columns along the first horizontal direction and the second horizontal direction on the paddle head frame assembly, M and N are both positive integers, and M is greater than or equal to 2; wherein each of the paddle assemblies passes through the second through hole of the rotating block in the first through hole of each of the hangers arranged along the first horizontal direction in a column.

3. The paddle adjustment device of claim 2, wherein, Each of the paddle assemblies has a first end, a second end and a middle section located between the first end and the second end along the first horizontal direction, and the bottom of the paddle head frame assembly has at least one first threaded portion extending along a vertical direction; at least one of the hangers in each column of the hangers is configured to bear the first end of one of the paddle assemblies; at least another one of the hangers in each column of the hangers is configured to bear the middle section of one of the paddle assemblies and is rotatably connected to the bottom of the paddle head frame assembly; wherein the paddle adjusting device further comprises: at least one second screwing member, the first end of each of the second screwing members being screwed with one of the first threaded portions, and the second end of each of the second screwing members abutting against at least one of the hangers in each column of the hangers.

4. The paddle adjustment device of any one of claims 1 to 3, wherein, The paddle head frame assembly comprises: a paddle head frame having a second threaded portion extending along a second horizontal direction; at least one first adjusting block, each of the first adjusting blocks having at least one third threaded portion extending along the second horizontal direction and at least one fourth threaded portion extending along the second horizontal direction; at least one third screwing member, each of the third screwing members being screwed with one of the third threaded portions and abutting against the paddle head frame; at least one fourth screwing member, each of the fourth screwing members being screwed with one of the fourth threaded portions and the second threaded portion; a bottom plate connected to at least one of the first adjusting blocks and connected to at least one of the hangers.

5. The paddle adjustment device of any one of claims 1 to 3, wherein, The paddle head frame assembly further has a fifth threaded portion extending along a vertical direction; wherein the paddle adjusting device further comprises: a fifth screwing member screwed with the fifth threaded portion. A second adjusting block is in transmission connection with the linear module, the linear module is configured to drive the second adjusting block to move, and the second adjusting block is located below the fifth screw element, and the fifth screw element is in abutment with the upper surface of the second adjusting block.

6. The paddle adjustment device of any one of claims 1 to 3, wherein, Each of the lifting rings has at least one first countersunk hole penetrating through the sidewall of each of the lifting rings, and each of the rotating blocks has at least one sixth threaded part penetrating through the sidewall of each of the rotating blocks; The paddle adjusting device further comprises: At least one set of clamping plate assemblies, each set of the clamping plate assemblies is arranged in one of the second through holes, and each set of the clamping plate assemblies comprises at least one clamping plate, and the at least one clamping plate is in contact with the sidewall of one of the paddle assemblies. At least one sixth screw element, each of the sixth screw elements passes through one of the first countersunk holes, is in threaded connection with one of the sixth threaded parts, and is in abutment with one of the clamping plates, so that the one clamping plate applies a pushing force to the paddle assembly.

7. The paddle adjustment device of claim 6, wherein, Each of the paddle assemblies has a rectangular cross section, each of the clamping plate assemblies comprises four clamping plates, each of the clamping plates is in contact with one sidewall of one of the paddle assemblies and is configured to apply a pushing force to the sidewall of the paddle assembly.

8. The paddle adjustment device of claim 7, wherein, The first end of each of the lifting rings has a first recess, the second end of each of the lifting rings has a second recess, and the first recess and the second recess of each of the lifting rings form one of the first countersunk holes.

9. The paddle adjustment device of claim 2, wherein, The number of the lifting rings is four, and the four lifting rings are arranged in two rows and two columns along the first horizontal direction and the second horizontal direction.

10. A processing apparatus characterized by comprising: The paddle adjusting device comprises: At least one paddle assembly, each of the paddle assemblies is configured to carry a product; The paddle adjusting device according to any one of claims 1-9 is connected with at least one of the paddle assemblies and is configured to adjust the posture of at least one of the paddle assemblies; A linear module is in transmission connection with the paddle adjusting device and is configured to drive the paddle adjusting device to move; A reaction furnace has a reaction cavity configured to accommodate the product carried by at least one of the paddle assemblies and to process the product.

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