Ignition starting device of plasma reaction cavity and impedance matcher

Abstract

The utility model belongs to the technical field of impedance matchers, and particularly discloses a high-voltage ignition starting device of a plasma reaction cavity and an impedance matcher, the ignition starting device is applied to the plasma reaction cavity and comprises a control module, a driving module, an ignition module and a matching module, the control module is used for controlling the ignition module, and the driving module is used for driving the ignition module. When the ignition module is started, ignition voltage is provided for the plasma reaction cavity through the radio frequency power supply, no extra power supply input is needed, and meanwhile the control module controls the driving module to drive the matching module to provide impedance matching signals for the plasma cavity. Therefore, the ignition starting device provided by the utility model can realize rapid starting of the plasma reaction cavity, and provides impedance matching signals after ignition starting.

Description

TECHNICAL FIELD

[0001] The utility model belongs to impedance matcher technical field, concretely relates to a kind of ignition igniting device and impedance matcher of plasma reaction cavity. BACKGROUND

[0002] Ignition igniting of plasma reaction cavity refers to in the process of plasma generation, start plasma by specific method and equipment, to carry out subsequent application, such as plasma processing, etching, deposition etc. Ignition igniting device of plasma reaction cavity affects the generation speed, quality performance of plasma to some extent.

[0003] The direct input of radio frequency signal of existing plasma cavity cannot be successfully ignited when high vacuum degree and lower cavity pressure, thus additional ignition source is needed to ignite plasma cavity first, and then impedance matching work is carried out. UTILITY MODEL CONTENT

[0004] The technical problem to be solved by the utility model is to overcome the technical problem of ignition igniting failure of plasma reaction cavity in prior art, to provide a kind of high-pressure ignition igniting device and impedance matcher of plasma reaction cavity.

[0005] The utility model provides a kind of ignition igniting device, it is applied to plasma reaction cavity, including control module, drive module, ignition module and matching module;

[0006] The first control end of the control module is connected with the input end of the drive module, for sending the control signal to the drive module;

[0007] The second control end of the control module is connected with the signal input end of the ignition module, for sending ignition signal to the ignition module;

[0008] The control end of the drive module is connected with the controlled end of the matching module, for controlling the matching module according to the control signal;

[0009] The ignition module is used to provide ignition voltage to plasma reaction cavity, and the output end of the ignition module is connected with the output end of the matching module;The power input end of the ignition module is connected with radio frequency power supply;

[0010] The input end and the output end of the matching module are connected with radio frequency power supply and plasma reaction cavity respectively, for receiving power signal of radio frequency power supply and transmitting to plasma reaction cavity.

[0011] Further, the sampling module is further included, the detection end of the sampling module is connected with the input end of the matching module, and the state parameter of the input end of the matching module is acquired.

[0012] Further, the sampling module includes an electrical quantity sensor and a sampling controller connected with each other, the input end of the electrical quantity sensor is connected with the radio frequency power supply, and the detection end is connected with the input end of the matching module; the output end of the electrical quantity sensor is connected with the sampling controller, and the input end of the control module is connected with the sampling controller.

[0013] Further, the matching module includes a first adjustable capacitor, a second adjustable capacitor and a first inductor, the drive module drives the controlled end of the first adjustable capacitor and the controlled end of the second adjustable capacitor, the second end of the first adjustable capacitor and the first end of the second adjustable capacitor serve as the input end of the matching module, the first end of the first adjustable capacitor is grounded, the second end of the second adjustable capacitor is connected with the first end of the first inductor, and the second end of the first inductor serves as the output end of the matching module.

[0014] Further, the ignition module includes a relay and a transformer, the signal input end of the relay is connected with the second control end of the control module, the power input end and the power output end of the relay are connected with the power output end of the radio frequency power supply and the input winding of the transformer respectively; one end of the output winding of the transformer serves as the output end of the ignition module, and the other end of the output winding of the transformer is grounded.

[0015] Further, the control module includes a rectifier and a control unit, the input end and the output end of the rectifier are connected with the industrial frequency power supply and the input end of the control unit respectively.

[0016] Further, the transformer is a high-frequency high-voltage transformer.

[0017] Further, the second control end of the control module is connected with the controlled end of the relay through an RS-232 interface.

[0018] An impedance matching device, the impedance matching device includes the ignition starting device.

[0019] Beneficial effects: the utility model discloses a kind of ignition pilot device, applied to plasma reaction cavity, including control module, drive module, ignition module and matching module, control module is used to control ignition module, when ignition module starts, radio frequency power supply is provided to plasma reaction cavity with ignition voltage, without additional power input, while control module controls the drive module and drives matching module to provide impedance matching signal for plasma reaction cavity, so that the ignition pilot device provided by the utility model can realize the quick pilot of plasma reaction cavity, and provide impedance matching signal after ignition pilot. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0021] Figure 1 It is a schematic block diagram of the overall structure of the utility model;

[0022] Figure 2 It is a schematic block diagram of the specific structure of the utility model.

[0023] Reference signs:

[0024] 1, control module; 2, drive module; 3, ignition module; 4, matching module; 5, sampling module; 6, power frequency power supply;

[0025] 11, control unit; 12, rectifier; 31, relay; 32, transformer; 41, first adjustable capacitor; 42, second adjustable capacitor; 43, first inductor; 51, sampling controller; 52, electrical quantity sensor. DETAILED DESCRIPTION

[0026] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below in conjunction with the drawings. In the following description, a lot of specific details are set forth in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application, therefore the present application is not limited by the specific embodiments disclosed below.

[0027] In the description of the present application, it is understood that the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can be explicitly or implicitly included at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0028] In the present application, unless otherwise expressly specified and limited, the terms "mounting", "connection", "connection", "fixing" and other terms should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise expressly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0029] Embodiment one:

[0030] Referring to Figure 1 and Figure 2 The utility model provides a kind of ignition pilot device, wherein dotted arrow indicates control signal, it is applied to plasma reaction cavity, including control module 1, drive module 2, ignition module 3 and matching module 4;

[0031] The first control end of control module 1 is connected to the input end of drive module 2, for sending control signal to drive module 2;

[0032] The second control end of control module 1 is connected to the signal input end of ignition module 3, for sending ignition signal to ignition module 3;

[0033] The control end of drive module 2 is connected with the controlled end of matching module 4, for controlling matching module 4 according to control signal;

[0034] Ignition module 3 is used to provide ignition voltage to plasma reaction cavity, and the output end of ignition module 3 is connected with the output end of matching module 4;The power input end of ignition module 3 is connected with radio frequency power supply;

[0035] The input end and the output end of matching module 4 are connected with radio frequency power supply and plasma reaction cavity respectively, for receiving power signal of radio frequency power supply and transmitting to plasma reaction cavity.

[0036] As a further improvement of the embodiment, a sampling module 5 is further included, the detection end of the sampling module 5 is connected with the input end of the matching module 4, for obtaining the state parameters of the input end of the matching module 4, the output end of the sampling module 5 is connected with the control module 1, for providing the corresponding detection signal to the control module 1. The sampling module 5 includes an electrical quantity sensor 52 and a sampling controller 51 connected with each other, the input end of the electrical quantity sensor 52 is connected with the radio frequency power supply, the detection end is connected with the input end of the matching module 4; the output end of the electrical quantity sensor 52 is connected with the sampling controller 51, and the sampling controller 51 is connected with the input end of the control module 1.

[0037] In the embodiment, the electrical quantity sensor 52 can be a current sensor, a voltage sensor or a voltage and current sensor. As a preferred embodiment, the electrical quantity sensor 52 is a voltage and current sensor, for obtaining the voltage and current parameters of the input end of the matching module 4. In the embodiment, the sampling controller 51 can be a CPU, an MCU, a single-chip microcomputer or an FPGA. As a preferred embodiment, the sampling controller 51 is an FPGA, the PFGA controls the sampling work of the voltage and current sensor, obtains the sampling parameters and outputs to the control module 1.

[0038] Specifically, the matching module 4 includes a first adjustable capacitor 41, a second adjustable capacitor 42 and a first inductor 43, the drive module 2 drives the controlled end of the first adjustable capacitor 41 and the controlled end of the second adjustable capacitor 42, the second end of the first adjustable capacitor 41 and the first end of the second adjustable capacitor 42 serve as the input end of the matching module 4, the first end of the first adjustable capacitor 41 is grounded, which is marked as GND in the figure, the second end of the second adjustable capacitor 42 is connected with the first end of the first inductor 43, and the second end of the first inductor 43 serves as the output end of the matching module 4. In the embodiment, the shell of the matching module 4 is grounded. In the embodiment, the drive module 2 includes a motor, which is used to adjust the capacitance values of the first adjustable capacitor 41 and the second adjustable capacitor 42 respectively. Figure 2

[0039] In the embodiment, the ignition module 3 includes a relay 31 and a transformer 31, the signal input end of the relay 31 is connected with the second control end of the control module 1, the power input end and the power output end of the relay 31 are connected with the power output end of the radio frequency power supply and the input winding of the transformer 31 respectively; one end of the output winding of the transformer 31 serves as the output end of the ignition module 3, and the other end of the output winding of the transformer 31 is grounded.

[0040] In the embodiment, the control module 1 includes a rectifier 12 and a control unit 11, the input end and the output end of the rectifier 12 are connected with the power frequency power supply 6 and the input end of the control unit 11 respectively. In the embodiment, the power frequency power supply 6 is a high-voltage alternating current power supply, and the rectifier 12 converts the high-voltage alternating current power supply into a low-voltage direct current power supply to provide working voltage for the control module 1. ​

[0041] Specifically, the transformer 31 is a high-frequency high-voltage transformer 31.

[0042] In the embodiment, the second control end of the control module 1 is connected with the controlled end of the relay 31 through a communication interface, which can be an RS232, RS485, RS422, UART, SPI, I2C interface. As preferred in the embodiment, the communication interface is an RS232 interface.

[0043] Embodiment two:

[0044] The embodiment provides an impedance matcher, which comprises the ignition starter device of embodiment one.

[0045] The technical features of the above-described embodiments can be combined in any manner. To make the description concise, all possible combinations of the technical features in the above-described embodiments are not described, but as long as the combinations of the technical features do not exist, they should be considered as the scope of the description.

[0046] The above-described embodiments only express several implementation manners of the application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the patent application scope. It should be pointed out that for ordinary skilled persons in the art, several modifications and improvements can be made without departing from the concept of the application, and these all belong to the protection scope of the application. Therefore, the patent protection scope of the application should be subject to the appended claims.

Claims

1. An ignition pilot device applied to a plasma reaction chamber, characterized in that, The ignition starter comprises a control module, a driving module, an ignition module and a matching module. The first control end of the control module is connected to the input end of the driving module, for sending a control signal to the driving module. The second control end of the control module is connected to the signal input end of the ignition module, for sending an ignition signal to the ignition module. The control end of the driving module is connected to the controlled end of the matching module, for controlling the matching module according to the control signal. The ignition module is used for providing an ignition voltage to a plasma reaction cavity, and the output end of the ignition module is connected to the output end of the matching module. The power input end of the ignition module is connected to a radio frequency power source.

2. An ignition pilot device according to claim 1, characterised in that The input end and the output end of the matching module are respectively connected to the radio frequency power source and the plasma reaction cavity, for receiving a power signal of the radio frequency power source and transmitting to the plasma reaction cavity.

3. An ignition pilot device according to claim 2, wherein The sampling module is further included, the detection end of the sampling module is connected to the input end of the matching module, for acquiring a state parameter of the input end of the matching module, and the output end of the sampling module is connected to the control module, for providing a corresponding detection signal to the control module.

4. An ignition pilot device according to claim 1, wherein The sampling module comprises an electrical quantity sensor and a sampling controller connected to each other, the input end of the electrical quantity sensor is connected to the radio frequency power source, and the detection end is connected to the input end of the matching module; the output end of the electrical quantity sensor is connected to the sampling controller, and the sampling controller is connected to the input end of the control module.

5. An ignition pilot device according to claim 1, wherein The matching module comprises a first adjustable capacitor, a second adjustable capacitor and a first inductor, the driving module drives the controlled end of the first adjustable capacitor and the controlled end of the second adjustable capacitor, the second end of the first adjustable capacitor and the first end of the second adjustable capacitor serve as the input end of the matching module, the first end of the first adjustable capacitor is grounded, the second end of the second adjustable capacitor is connected to the first end of the first inductor, and the second end of the first inductor serves as the output end of the matching module.

6. An ignition pilot device according to claim 1, wherein The ignition module comprises a relay and a transformer, the signal input end of the relay is connected to the second control end of the control module, the power input end and the power output end of the relay are respectively connected to the power output end of the radio frequency power source and the input winding of the transformer, one end of the output winding of the transformer serves as the output end of the ignition module, and the other end of the output winding of the transformer is grounded.

7. An ignition pilot device according to claim 5, wherein The control module comprises a rectifier and a control unit, the input end and the output end of the rectifier are respectively connected to a power frequency power source and the input end of the control unit.

8. An ignition pilot device according to claim 5, wherein The transformer is a high-frequency high-voltage transformer.

9. An impedance matcher, characterized by The second control end of the control module is connected to the controlled end of the relay through a communication interface. The impedance matcher comprises the ignition starter of any one of claims 1-8.

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