Overload detection assembly, material propelling device and plasma cleaning machine thereof

Abstract

The overload detection assembly comprises a guide rail, a driving assembly and a cross beam, at least one pushing piece is arranged on the cross beam in the length direction of the cross beam, a sliding seat is fixed to one end of the cross beam and connected with the guide rail in a sliding mode, and the overload detection assembly is installed at the other end of the cross beam. The overload detection assembly is in transmission fit with the driving assembly, the cross beam can slide in the length direction of the guide rail under the action of the driving assembly, when materials are blocked or run unsmoothly, namely overload occurs, the connecting sliding block retreats to press the compression spring so as to protect a product from being damaged, and the detection shaft is separated from the photoelectric sensor to generate an induction signal. According to the automatic material pushing device, automatic material pushing is achieved, manual intervention is greatly reduced, labor cost and quality problems caused by human factors are reduced, and the automatic material pushing device is simple in mechanical structure, low in cost and convenient to maintain in the later period.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of plasma cleaning machine, concretely relates to an overload detection assembly, material propelling device and plasma cleaning machine thereof. BACKGROUND

[0002] The plasma cleaning machine is a kind of equipment using plasma to effectively remove organic contaminants on the surface of material, to realize cleaning, coating and other purposes, and as a kind of new cleaning technology, the plasma cleaning machine can achieve the effect that conventional cleaning scheme cannot achieve, and the manufacturing of semiconductor chip has very high requirements on surface cleanliness and roughness, and the plasma cleaning technology can accurately remove photoresist, organic contaminants and the like without damaging the surface of chip, to provide good surface conditions for subsequent photoetching, etching, doping and other processes, and ensure the quality and performance of chip.

[0003] In modern industrial production, the degree of automation directly affects production efficiency, product quality and production cost, so various industries are constantly pursuing the automation and intelligentization of production process to improve competitiveness.

[0004] The material propelling device is used to push material into the plasma cleaning machine during chip plasma cleaning, since the plasma cleaning machine generally cleans chip, and chip is relatively easy to be damaged, therefore the material propelling device is provided with a thrust overload detection device to stop material pushing when material is stuck, to form protection. UTILITY MODEL CONTENTS

[0005] In view of the above problems existing in the prior art, the utility model provides an overload detection assembly, material propelling device and plasma cleaning machine thereof, which comprise a guide rail, a driving assembly and a crossbeam, the crossbeam is provided with at least one pushing piece along the length direction thereof, one end of the crossbeam is fixed with a sliding seat, the sliding seat is slidably connected with the guide rail, the other end of the crossbeam is provided with an overload detection assembly, the overload detection assembly is in transmission cooperation with the driving assembly, and the crossbeam can slide along the length direction of the guide rail under the action of the driving assembly, when material is stuck or runs disorderly, the connecting sliding block reverses to compress the spring, to protect the product from being damaged, the detection shaft is separated from the photoelectric sensor to generate an induction signal, and the photoelectric sensor transmits overload on-off quantity to an upper computer.

[0006] In order to solve the above technical problems, the utility model adopts the following technical scheme:

[0007] An overload detection assembly comprises:

[0008] A bottom plate is fixed with a first end plate and a second end plate, and the first end plate and the second end plate are oppositely arranged on the same side of the bottom plate.

[0009] A guide structure mounted on the base plate, the guide structure being located between the first end plate and the second end plate; and

[0010] A connecting slider that is slidably connected to the guide structure; a detection unit is fixedly installed on the second end plate; and a return unit is fixedly installed on the first end plate.

[0011] The connecting slider is in contact with the return unit on one side. Under the action of the return unit, the connecting slider can cooperate with the detection unit, and the detection unit can be triggered when the connecting slider slides away from the detection unit and reaches the set position.

[0012] Furthermore, the detection unit includes a photoelectric sensor fixed on the second end plate and a detection shaft, the detection shaft being fixed on the connecting slider, and the detection shaft being configured in conjunction with the photoelectric sensor.

[0013] Furthermore, the return unit includes a spring guide shaft and a compression spring. The spring guide shaft is fixed to the first end plate, and the end of the spring guide shaft away from the first end plate extends into the limiting hole opened in the connecting slider. The compression spring is sleeved on the spring guide shaft, and the compression spring can cause the connecting slider to tend to move away from the first end plate.

[0014] Furthermore, the guide structure is a linear slide rail.

[0015] Furthermore, the detection unit can also be a pressure sensor.

[0016] Furthermore, this utility model also claims protection for a material propulsion device, including a guide rail, a drive assembly, and a crossbeam. The crossbeam is provided with at least one pusher along its length direction. A sliding seat is fixed at one end of the crossbeam and is slidably connected to the guide rail. Any one of the above-mentioned overload detection components is installed at the other end of the crossbeam. The overload detection component is in transmission cooperation with the drive assembly. Under the action of the drive assembly, the crossbeam can slide along the length direction of the guide rail.

[0017] Furthermore, the drive assembly includes a linear module and a drive motor mounted at the end of the linear module, wherein the linear module and the guide rail are arranged in parallel.

[0018] In addition, this utility model also claims protection for a plasma cleaner equipped with any of the aforementioned material propulsion devices.

[0019] Compared with existing technologies, the beneficial effects of this solution are:

[0020] The utility model provides a kind of overload detection assembly, material propelling device and its plasma cleaning machine, including guide rail, drive assembly and crossbeam, crossbeam is provided at least one pusher along its length direction, crossbeam one end fixed sliding seat, sliding seat with the guide rail sliding connection, crossbeam other end is equipped with overload detection assembly, overload detection assembly and drive assembly transmission cooperation, under the effect of drive assembly the crossbeam can be along guide rail length direction sliding, when material is jammed or run is not smooth, i.e. when overload occurs, connecting slider retreats and compresses spring to protect product from being destroyed, detection shaft and photoelectric sensor are separated to generate induction signal, photoelectric sensor overload switch quantity is uploaded to host computer, the utility model realizes the material propelling of automation, greatly reduces manual intervention, reduces manpower cost and quality problem caused by human factor, and, the utility model mechanical structure is relatively simple, cost is lower, and post-maintenance is convenient. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is material propelling device structure schematic view;

[0022] Figure 2 It is overload detection assembly structure schematic view;

[0023] Figure 3 It is overload detection assembly sectional view;

[0024] Figure 4 It is one kind of movement state schematic view of overload detection assembly.

[0025] Figure legend is in turn: guide rail 1, drive assembly 2, linear module 21, drive motor 22, moving seat 23, crossbeam 3, pusher 31, sliding seat 32, overload detection assembly 4, bottom plate 41, first end plate 42, second end plate 43, guide structure 44, connecting slider 45, photoelectric sensor 46, detection shaft 461, spring guide shaft 47, compression spring 48. DETAILED DESCRIPTION

[0026] The utility model is further explained in detail in connection with the drawings.

[0027] A kind of overload detection assembly, as Figure 2 As shown, comprising:

[0028] Bottom plate 41, the first end plate 42 and the second end plate 43 are fixed in the bottom plate 41, the first end plate 42 and the second end plate 43 are oppositely arranged and located in the same side of the bottom plate 41;

[0029] Guide structure 44 installed on the bottom plate 41, the guide structure 44 is located between the first end plate 42 and the second end plate 43;And

[0030] The connecting slider 45 is slidably connected to the guide structure 44; the second end plate 43 is fixedly installed with a detection unit; and the first end plate 42 is fixedly installed with a return unit.

[0031] The connecting slider 45 abuts against the return unit on one side. Under the action of the return unit, the connecting slider 45 can cooperate with the detection unit, and the detection unit can be triggered when the connecting slider 45 slides away from the detection unit and reaches the set position.

[0032] According to a specific embodiment of this utility model, a first end plate 42 and a second end plate 43 are fixedly installed on the upper part of the base plate 41. Specifically, the first end plate 42 and the second end plate 43 can be respectively located at two ends of the base plate 41. A connecting slider 45 is slidably engaged with a guide structure 44, allowing the connecting slider 45 to move closer to the first end plate 42 (away from the second end plate 43) or away from the first end plate 42 (closer to the second end plate 43). Under the push of the return unit, the connecting slider 45 can cooperate with a detection unit mounted on the second end plate 43. When the connecting slider 45 receives external force and is pushed towards the first end plate 42, compressing the compression spring 48, the connecting slider 45 moves away from the detection unit and reaches a preset position, such as... Figure 4 As shown, the detection unit can be triggered to generate a signal.

[0033] Furthermore, the detection unit includes a photoelectric sensor 46 fixed on the second end plate 43 and a detection shaft 461. The detection shaft 461 is fixed on the connecting slider 45, and the detection shaft 461 is configured to cooperate with the photoelectric sensor 46. This embodiment provides a specific structure for the detection unit. The end of the detection shaft 461 away from the connecting slider 45 is inserted into the photoelectric sensor 46. When the connecting slider 45 moves the detection shaft 461, the end of the detection shaft 461 disengages from the hole in the photoelectric sensor 46.

[0034] Furthermore, such as Figure 3 As shown, the return unit includes a spring guide shaft 47 and a compression spring 48. The spring guide shaft 47 is fixed on the first end plate 42. The end of the spring guide shaft 47 away from the first end plate 42 extends into the limiting hole opened in the connecting slider 45. The compression spring 48 is sleeved on the spring guide shaft 47. Under the action of the compression spring 48, the connecting slider 45 can tend to move away from the first end plate 42.

[0035] According to a specific embodiment of this utility model, the spring guide shaft 47 is arranged parallel to the base plate 41. A limiting hole is formed in the connecting slider 45, and one end of the spring guide shaft 47 extends into the limiting hole. This provides better stability for the installation of the compression spring 48. The elastic coefficient of the compression spring 48 can be selected according to the weight (friction) of the product; no specific limitation is made here. The spring guide shaft 47 is parallel to the detection shaft 461. The guide structure 44 is a linear slide rail. The guide structure 44 can also be a guide rod structure. The guide rod and the connecting slider 45 slide in cooperation. This embodiment uses a linear slide rail structure. The linear slide rail and the spring guide shaft 47 are arranged parallel to each other. The linear slide rail is located below the connecting slider 45 and is fixed to the base plate 41 by bolts. Existing structures can be used for the linear slide rail. The length of the linear slide rail is not limited here and depends on actual production needs.

[0036] Furthermore, this embodiment provides another detection unit structure, namely, the detection unit can also be a pressure sensor. Specifically, during installation, the connecting slider 45 can be pushed against the pressure sensor by the compression spring 48. By setting the value of the pressure sensor, when the connecting slider 45 is subjected to external force, the pressure sensor generates a signal after reaching the set value.

[0037] In addition, this utility model also claims protection for a material propulsion device, such as Figure 1 As shown, the device includes a guide rail 1, a drive assembly 2, and a crossbeam 3. The crossbeam 3 has at least one pusher 31 along its length. One end of the crossbeam 3 is fixed with a sliding seat 32, which is slidably connected to the guide rail 1. The other end of the crossbeam 3 is equipped with any of the above-mentioned overload detection components 4. The overload detection component 4 is in a transmission cooperation with the drive assembly 2. Under the action of the drive assembly 2, the crossbeam 3 can slide along the length of the guide rail 1.

[0038] According to a specific embodiment of the present invention, the guide rail 1 can adopt the structure of an existing linear slide rail. The length of the guide rail 1 is greater than the length of the guide structure 44. The crossbeam 3 is set perpendicular to the guide rail 1 and is driven to move along the guide rail 1 by the drive component 2. At least one pusher 31 is set on the moving side of the crossbeam 3 along its length direction. Specifically, the crossbeam 3 has a corresponding threaded hole, and the pusher 31 is fixed by thread fixing. The pusher 31 is used to push the material to move. The pusher 31 can be a push rod or a push plate, etc., depending on the actual product structure.

[0039] One end of the guide rail 1 is slidably connected to the sliding seat 32. The specific structure of the sliding seat 32 is not limited. The sliding seat 32 is installed in the height direction so that the crossbeam 3 is located above the guide rail 1 and the drive assembly 2. In this embodiment, the overload detection assembly 4 is fixedly installed on the sliding seat 32. The drive assembly 2 drives the crossbeam 3 to move along the guide rail 1. When the product encounters resistance, the pusher 31 will compress the compression spring 48 when it is subjected to external force, so that the crossbeam 3 drives the connecting slider 45 to move along the guide structure 44 until the detection shaft 461 disengages from the hole of the photoelectric sensor 46. At this time, the photoelectric sensor 46 sends a signal.

[0040] Furthermore, the drive assembly 2 includes a linear module 21 and a drive motor 22 installed at the end of the linear module 21. The linear module 21 and the guide rail 1 are arranged in parallel. The drive motor 22 can be a servo motor or a stepper motor. The linear module 21 has a movable seat 23. The base plate 41 of the overload detection assembly 4 is bolted to the movable seat 23. After the drive motor 22 is working, the movable seat 23 can move along the guide rail 1, driving the crossbeam 3 to move along the crossbeam 3.

[0041] In addition, this utility model also claims protection for a plasma cleaner equipped with any of the aforementioned material propulsion devices.

[0042] The working principle of this utility model is as follows: the drive motor 22 drives the crossbeam 3 to move, and the push rod pushes the material forward. When the material is not stuck or runs smoothly, that is, when there is no overload, the detection shaft 461 and the photoelectric sensor 46 will not disengage from the sensing detection. The photoelectric sensor 46 uploads the no-overload switch quantity to the host computer.

[0043] When materials jam or the operation is not smooth, i.e., when an overload occurs, such as Figure 4 As shown, the connecting slider 45 retracts to compress the spring 48, thereby protecting the product from damage. The detection shaft 461 disengages from the photoelectric sensor 46 to generate a sensing signal. The photoelectric sensor 46 then transmits the overload switch quantity to the host computer.

[0044] Finally, it should be noted that in the description of this utility model, the terms "vertical," "upper," "lower," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0045] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0046] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An overload detection component, characterized in that, include: A base plate, wherein a first end plate and a second end plate are fixedly attached to the base plate, and the first end plate and the second end plate are disposed opposite to each other and located on the same side of the base plate; A guide structure mounted on the base plate, the guide structure being located between the first end plate and the second end plate; and A connecting slider that is slidably connected to the guide structure; a detection unit is fixedly installed on the second end plate; and a return unit is fixedly installed on the first end plate. The connecting slider is in contact with the return unit on one side. Under the action of the return unit, the connecting slider can cooperate with the detection unit, and the detection unit can be triggered when the connecting slider slides away from the detection unit and reaches the set position.

2. The overload detection component according to claim 1, characterized in that, The detection unit includes a photoelectric sensor fixed on the second end plate and a detection shaft. The detection shaft is fixed on the connecting slider and is configured to cooperate with the photoelectric sensor.

3. The overload detection component according to claim 2, characterized in that, The return unit includes a spring guide shaft and a compression spring. The spring guide shaft is fixed to the first end plate, and the end of the spring guide shaft away from the first end plate extends into the limiting hole opened in the connecting slider. The compression spring is sleeved on the spring guide shaft, and the compression spring can cause the connecting slider to tend to move away from the first end plate.

4. An overload detection component according to any one of claims 1-3, characterized in that, The guide structure is a linear slide rail.

5. An overload detection component according to claim 1, characterized in that, The detection unit can also be a pressure sensor.

6. A material propulsion device, characterized in that, The device includes a guide rail, a drive assembly, and a crossbeam. The crossbeam has at least one pusher along its length. One end of the crossbeam is fixed with a sliding seat, which is slidably connected to the guide rail. The other end of the crossbeam is equipped with an overload detection assembly as described in any one of claims 1-5. The overload detection assembly is in transmission cooperation with the drive assembly, and the crossbeam can slide along the length of the guide rail under the action of the drive assembly.

7. The material propulsion device according to claim 6, characterized in that, The drive assembly includes a linear module and a drive motor mounted at the end of the linear module, wherein the linear module and the guide rail are arranged in parallel.

8. A plasma cleaner, characterized in that, The device is equipped with the material propulsion device according to any one of claims 1-7.

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