Evaporation equipment with multi-temperature-zone evaporation tank

Abstract

The embodiment of the utility model provides evaporation equipment with multi-temperature-zone evaporation tanks, which comprises a plurality of adjacent evaporation tanks, each evaporation tank is connected with a corresponding heating body, and the set temperatures of different heating bodies are different. According to the technical scheme, a plurality of evaporation tanks are arranged, and each evaporation tank can independently control the temperature, so that different temperature zones are formed, and when the composite current collector is prepared, a low-melting-point metal film material can be added into the evaporation tank in the low-temperature zone besides a conventional metal film material such as aluminum or copper and the like is placed in the evaporation tank in the high-temperature zone; therefore, simultaneous evaporation of various film materials with different melting points is completed, and various use requirements are met.

Description

TECHNICAL FIELD

[0001] The utility model relates to electroplating technical field especially, relates to a kind of evaporation equipment, more specifically, a kind of evaporation equipment with multi-temperature zone evaporating tank. BACKGROUND

[0002] The evaporating tank of the existing evaporation equipment is mainly designed to match aluminum or copper as film material, which is placed in the crucible on the evaporating tank in advance, and then evaporated by heating to complete evaporation. With the development of technology, when preparing composite current collector, in addition to the main metal such as aluminum or copper as film material, sometimes low-melting-point metal with a melting point lower than aluminum or copper is added as film material as needed, which requires placing low-melting-point metal film material in some crucibles.

[0003] In the process of realizing the utility model, the inventor finds at least the following problems in the prior art:

[0004] In the case of preparing composite current collector, since the evaporating tank of the traditional evaporation equipment is designed according to the temperature of aluminum or copper, it cannot perfectly match low-melting-point metal, that is, the temperature of the evaporating tank cannot meet the requirements of high-melting-point metal film material and low-melting-point metal film material at the same time, thereby causing quality problems of the composite current collector. Therefore, how to improve the structure of the evaporation equipment so that it can match multiple film materials with different melting points at the same time and eliminate quality problems in the evaporation process is a problem to be solved. UTILITY MODEL CONTENTS

[0005] The utility model embodiment provides an evaporation equipment with multi-temperature zone evaporating tank to solve the problem that the existing evaporation equipment cannot match metal film materials with different melting points at the same time.

[0006] To achieve the above purpose, the utility model embodiment provides an evaporation equipment with multi-temperature zone evaporating tank, which comprises a plurality of adjacent evaporating tanks; each evaporating tank is connected with a corresponding heating body, and the set temperature of different heating bodies is different.

[0007] Further, the evaporation equipment with multi-temperature zone evaporating tank comprises a first evaporating tank and a second evaporating tank, a plurality of first crucible placing holes are formed on the first evaporating tank, and a plurality of second crucible placing holes are formed on the second evaporating tank.

[0008] Further, the size of the first crucible placing hole is the same as that of the second crucible placing hole.

[0009] Further, the effective evaporation area of the first evaporating tank is larger than that of the second evaporating tank, and the set temperature of the heating body connected with the first evaporating tank is higher than that of the heating body connected with the second evaporating tank.

[0010] Further, the number of the first crucible placing holes is more than the number of the second crucible placing holes.

[0011] Further, the first evaporation groove is located directly below the cooling main roller, and the top surface of the second evaporation groove is higher than the top surface of the first evaporation groove.

[0012] Further, the heating body is a graphite electrode.

[0013] Further, the first evaporation groove and the second evaporation groove are both horizontally arranged in a U-shaped structure, and the U-shaped openings of the first evaporation groove and the second evaporation groove are oppositely directed.

[0014] Further, a partition plate is arranged between the first evaporation groove and the second evaporation groove.

[0015] Further, a cooling pipeline is arranged in the partition plate.

[0016] The above technical solution has the following beneficial effects:

[0017] In the technical solution, the evaporation device has multiple evaporation grooves, and each evaporation groove can independently control temperature, thereby forming different temperature zones. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0019] Figure 1 is a structural schematic view of the evaporation device with multiple temperature zones according to an embodiment of the present application;

[0020] Figure 2 is a schematic view of the position relationship between the evaporation groove and the cooling main roller according to an embodiment of the present application;

[0021] The drawings show that: 1, the second evaporation groove; 2, the first evaporation groove; 3, the second crucible placing hole; 4, the partition plate; 5, the water inlet; 6, the water outlet; 7, the cooling main roller; 8, the first crucible placing hole. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0023] As shown in Figure 1 The utility model discloses an evaporation slot with multiple temperature zones, which comprises a plurality of adjacent evaporation slots; each evaporation slot is connected with a corresponding heating body, and the set temperature of different heating bodies is different.

[0024] To solve the foregoing problems, in the embodiments of the utility model, a plurality of evaporation slots are arranged in the vacuum chamber of the evaporation equipment, the structures of all the evaporation slots are similar, each evaporation slot is connected with a corresponding heating body, the different temperatures of the heating bodies are set by a temperature controller (not shown in the figure), so that the heating and cooling temperature control of each evaporation slot are independent, and the independent temperature zone control can be performed according to the processing requirements. In this way, the metal film materials with the same temperature level can share an evaporation slot, so that the metal film materials with different temperature levels are completely separated, each kind of metal film material can be heated to the matching temperature, so that the evaporation is successfully completed, and the quality of the finished product is ensured.

[0025] Further, according to the actual needs, the most preferred mode is to arrange two evaporation slots, i.e. a first evaporation slot 2 (also referred to as a high-temperature zone evaporation slot) and a second evaporation slot 1 (also referred to as a low-temperature zone evaporation slot), and the two evaporation slots are adjacent and share an evaporation slot body. In order to hold the film material, a plurality of first crucible placing holes 8 are arranged on the first evaporation slot 2 for accommodating the first crucible, and a plurality of second crucible placing holes 3 are arranged on the second evaporation slot 1 for accommodating the second crucible.

[0026] Further, the first crucible and the second crucible can be of different specifications or the same specification, and when they are the same, they have good interchangeability, which facilitates on-site production and maintenance. Therefore, in the present application, the crucibles of the same specification are preferably used, and at this time, the diameters, depths and other sizes of the corresponding crucible placing holes can also be the same, so the size of the first crucible placing hole 8 is preferably the same as the size of the second crucible placing hole 3.

[0027] Further, since the second evaporation tank 1 is used to evaporate zinc, tin and other metal film materials with lower melting point than aluminum or copper, the effective evaporation area thereof should be smaller; while the film material of the first evaporation tank 2 is the main source of the product conductive layer coating, the actual coating thickness formed thereby should be much larger than the coating thickness evaporated by the second evaporation tank 1, so the effective evaporation area thereof should be larger, therefore, in the present application, the effective evaporation area of the first evaporation tank 2 is larger than that of the second evaporation tank 1. At the same time, the first evaporation tank 2 is used to evaporate aluminum or copper, so the temperature thereof should be higher than that of the second evaporation tank 1, therefore, the temperature of the heating body of the first evaporation tank 2 should be set higher than that of the heating body of the second evaporation tank 1.

[0028] Further, since the film material is placed in the crucible, and the two evaporation tanks adopt the same specification crucible, in order to realize that the effective evaporation area of the first evaporation tank 2 is larger than that of the second evaporation tank 1, the number of the first crucible placing holes 8 should be larger than that of the second crucible placing holes 3.

[0029] Further, as shown in Figure 2 the actual situation, the first evaporation tank 2 is preferably arranged directly below the cooling main roller 7; when the drum coating is carried out (one side of the film to be evaporated faces the evaporation tank, and the other side is combined with the cooling main roller 7), in order to ensure the evaporation effect, it is necessary to ensure that the film material of the second evaporation tank 1 and the film material of the first evaporation tank 2 are kept at the same or close distance from the film material to be evaporated, that is, the distance from the top surface of the second evaporation tank 1 to the cooling main roller 7 should be the same or close to the distance from the top surface of the first evaporation tank 2 to the cooling main roller 7, so Figure 2 it can be seen from the above that, since the horizontal distance between the second evaporation tank 1 and the cooling main roller 7 is far, the top surface position of the second evaporation tank 1 needs to be higher than that of the first evaporation tank 2.

[0030] Further, in the embodiment of the present application, the graphite electrode is used as the heating body in the manner of the prior art, and the two ends of the graphite electrode are connected with the positive and negative poles of the power supply through the conductive clamping plates. The graphite electrode is densely covered with the crucible placing holes (including the first crucible placing holes 8 and the second crucible placing holes 3), which can be well combined with the crucible, thereby ensuring the heating efficiency of the film material. The evaporation tank comprises, from top to bottom, an upper ceramic layer, an upper graphite carbon felt layer, a graphite electrode, a lower ceramic layer, a lower graphite carbon felt layer and a white cotton layer, the white cotton layer is arranged to adjust the height of the graphite electrode, the ceramic layer and the graphite carbon felt layer are mainly used for heat preservation and insulation, to avoid damage to the tank body, equipment and the like caused by the heat generated by the graphite electrode, and meanwhile, the upper ceramic layer and the upper graphite carbon felt layer are both provided with through holes matched with the crucible placing holes, and the upper ceramic layer and the upper graphite carbon felt layer also have the effect of preventing the evaporation film material, sputtering material or falling material from being left on the graphite electrode to cause damage to the graphite electrode.

[0031] Further, the first evaporation tank 2 and the second evaporation tank 1 are both horizontally arranged U-shaped structures, and the U-shaped opening of the first evaporation tank 2 and the U-shaped opening of the second evaporation tank 1 face opposite directions, that is, the two evaporation tanks are arranged back to back, that is, the two ends of the U-shaped structure of the first evaporation tank 2 extend from one side of the tank body, and the two ends of the U-shaped structure of the second evaporation tank 1 extend from the other side of the tank body, so that the track interference of the first evaporation tank 2 and the second evaporation tank 1 when connecting the external circuit can be avoided.

[0032] Further, a partition plate 4 is further arranged between the first evaporation tank 2 and the second evaporation tank 1, the partition plate 4 is made of silicate refractory material or ceramic material, or the same material as the evaporation tank body (with a cooling pipe), and is used to isolate the two evaporation tanks from each other so that they do not affect each other, thereby forming different temperature zones of high and low temperatures for the first evaporation tank 2 and the second evaporation tank 1 to adapt to different film material evaporation requirements.

[0033] Further, in order to ensure that the partition plate 4 can play a temperature isolation role, the temperature of the partition plate 4 should be avoided to be too high, and for this purpose, a cooling pipe can be arranged in the partition plate 4, as shown in the figure, one end of the partition plate 4 is provided with a cooling medium inlet 5 and a cooling medium outlet 6 which are in communication with the cooling pipe, so that the cooling medium (such as water, or oil, or ethylene glycol, or glycerol) in the cooling pipe can be in and out, realizing rapid and efficient temperature control. Figure 1

[0034] In this specific embodiment, the evaporation equipment has multiple evaporation tanks, and each evaporation tank can be independently temperature-controlled, thereby forming different temperature zones of high and low temperatures, and when preparing a composite current collector, in addition to placing conventional metal film materials such as aluminum or copper in the high-temperature zone evaporation tank, low-melting-point metal film materials can also be added in the low-temperature zone evaporation tank, so that film materials with different melting points can all be evaporated at a specific temperature, ensuring the evaporation quality.

[0035] In the above detailed description, various features are combined together in a single embodiment to simplify the disclosure. Such disclosure method should not be interpreted as reflecting the intention that the embodiments of the claimed subject matter require more features than those clearly stated in each claim. On the contrary, as reflected in the appended claims, the utility model is in a state of less than all the features of the disclosed single embodiment. Therefore, the appended claims are hereby incorporated into the detailed description, wherein each claim is separately as a separate preferred embodiment of the utility model.

[0036] ​For any person skilled in the art, various modifications of the embodiments described above will be readily apparent and the generic principles defined herein can be applied to other embodiments without departing from the spirit and scope of the disclosure. Thus, the present disclosure is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0037] The above detailed description sets forth the purpose, technical solutions and beneficial effects of the present application. It should be understood that the above is only a specific implementation of the present application and is not intended to limit the protection scope of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. An evaporation apparatus having a multi-temperature-zone evaporation tank, characterized by comprising: The evaporation slot has multiple adjacent evaporation slots, each of which is connected with a corresponding heating body, and the set temperature of different heating bodies is different; The evaporation equipment with multiple temperature zone evaporation slots comprises a first evaporation slot (2) and a second evaporation slot (1), the first evaporation slot (2) is provided with multiple first crucible placing holes (8), and the second evaporation slot (1) is provided with multiple second crucible placing holes (3); The size of the first crucible placing hole (8) is the same as that of the second crucible placing hole (3); The effective evaporation area of the first evaporation slot (2) is larger than that of the second evaporation slot (1), and the set temperature of the heating body connected with the first evaporation slot (2) is higher than that of the heating body connected with the second evaporation slot (1).

2. The evaporation apparatus having a multi-temperature zone evaporation tank according to claim 1, wherein, The number of the first crucible placing hole (8) is more than that of the second crucible placing hole (3).

3. The evaporation apparatus with a multi-temperature-zone evaporation slot according to claim 1 or 2, characterized in that, The first evaporation slot (2) is located directly below the cooling main roller (7), and the top surface position of the second evaporation slot (1) is higher than that of the first evaporation slot (2).

4. The evaporation apparatus with multi-temperature-zone evaporation slots according to any one of claims 1-2, wherein, The heating body is a graphite electrode.

5. The evaporation apparatus with multi-temperature-zone evaporation slots according to any one of claims 1-2, wherein, The first evaporation slot (2) and the second evaporation slot (1) are both horizontally arranged in U-shaped structure, and the U-shaped opening of the first evaporation slot (2) and the U-shaped opening of the second evaporation slot (1) face opposite directions.

6. The evaporation apparatus with multi-temperature-zone evaporation slots as claimed in any one of claims 1-2, wherein, A partition plate (4) is further arranged between the first evaporation slot (2) and the second evaporation slot (1).

7. The evaporation apparatus with multi-temperature-zone evaporation slots according to claim 6, wherein, The partition plate (4) is provided with a cooling pipeline.

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