Connecting mechanism and crystal pulling furnace

Abstract

The utility model provides a connecting mechanism and a crystal pulling furnace, the connecting mechanism comprises a connecting disc fixed to the periphery of an auxiliary furnace chamber of the crystal pulling furnace, the connecting disc is provided with an open groove extending along the circumferential direction of the auxiliary furnace chamber, and the open groove comprises a large groove width part and a small groove width part; the pin shaft is fixed on the isolating valve chamber below the auxiliary furnace chamber and comprises a large shaft diameter part and a small shaft diameter part below the large shaft diameter part, the radial size of the large shaft diameter part is smaller than the width of the large groove width part and larger than the width of the small groove width part, and the radial size of the small shaft diameter part is smaller than the width of the small groove width part; and the driving unit is used for driving the auxiliary furnace chamber to rotate between a first position and a second position around the longitudinal axis of the auxiliary furnace chamber relative to the isolating valve chamber, in the first position, the small shaft diameter part of the pin shaft is located in the large groove width part of the open groove, and in the second position, the small shaft diameter part of the pin shaft is located in the small groove width part of the open groove.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor production especially relates to a connecting mechanism and crystal pulling furnace. BACKGROUND

[0002] A single crystal furnace is a special equipment for semiconductor material growth, and is widely used in the fields of integrated circuits, optoelectronic devices and the like. Its core process is to melt polycrystalline materials such as polycrystalline silicon by using a graphite heater in a high-purity, high-vacuum environment, and then to grow dislocation-free single crystal silicon by slowly lifting the seed crystal. The single crystal furnace has a complex structure, involves multiple fields such as precision transmission, high-temperature control, vacuum sealing, automatic control and computer, and requires that each motion mechanism be free of vibration, creeping and pollution. The environment for crystal growth needs to be resistant to high temperature, vacuum and leakage-free, and the chamber material needs to be pollution-free and closely combined with the thermal system and the crystal growth process. The main components of the single crystal furnace include a rack support system, a transmission system, a vacuum chamber system, a vacuum acquisition system, a cooling system and other auxiliary systems. The vacuum chamber system adopts a double-layer water-cooled structure welded by stainless steel, has excellent properties such as low leakage, high temperature resistance, corrosion resistance and small deformation, and is an important component of the single crystal furnace.

[0003] In the operation process of the single crystal furnace, when the crystal growth is completed and the crystal rod needs to be taken out, the secondary chamber needs to be lifted and rotated upward, and at this time the isolation valve chamber does not need to be lifted, and the secondary chamber and the isolation valve chamber are in a separated state. However, when the hot field needs to be disassembled, the polycrystalline silicon needs to be loaded, or the furnace needs to be cleaned, not only the secondary chamber needs to be lifted and rotated upward, but also the isolation valve chamber needs to be lifted and rotated upward. In the existing single crystal furnace, the upward lifting and rotating mechanism of the secondary chamber and the upward lifting and rotating mechanism of the isolation valve chamber are independent transmission mechanisms. Although this design meets the operation requirements to some extent, it also brings many problems.

[0004] Since the upward lifting and rotating mechanisms of the secondary chamber and the isolation valve chamber are independent, the operator needs to control the two sets of mechanisms respectively, which increases the operation difficulty and the probability of errors. For example, if the operator mistakenly lifts the isolation valve chamber without rotating the secondary chamber to the right position, the isolation valve chamber and the secondary chamber may collide, causing a safety accident. The two independent transmission mechanisms need more components and complex assembly processes, which not only increases the manufacturing cost of the equipment, but also increases the maintenance cost of the equipment. In addition, the independent transmission mechanisms need to occupy more space, further increasing the overall cost of the equipment. In the actual production process, after the secondary chamber is lifted and rotated upward, the lifting and rotation of the isolation valve chamber need to wait for a certain period of time, which causes time waste in the production process and reduces the production efficiency. Especially in large-scale production, this time waste will accumulate, affecting the production benefit of the enterprise. SUMMARY

[0005] The utility model provides a kind of connecting mechanism and crystal pulling furnace, can realize the individual promotion and turning of the auxiliary furnace chamber of crystal pulling furnace and the auxiliary furnace chamber and isolation valve chamber of crystal pulling furnace are promoted and turned together by a set of mechanism.

[0006] The technical scheme of the utility model is as follows:

[0007] Firstly, the utility model provides a kind of connecting mechanism, and the connecting mechanism includes:

[0008] Connecting disc fixed to the outer periphery of the auxiliary furnace chamber of crystal pulling furnace, the connecting disc is formed with the slot extending along the circumference of the auxiliary furnace chamber, and the slot includes a wide slot part and a narrow slot part;

[0009] Pin shaft fixed on the isolation valve chamber below the auxiliary furnace chamber, the pin shaft includes a large diameter part and a small diameter part below the large diameter part, the radial dimension of the large diameter part is less than the width of the wide slot part and greater than the width of the narrow slot part, and the radial dimension of the small diameter part is less than the width of the narrow slot part;

[0010] Driving unit, the driving unit is used to drive the auxiliary furnace chamber to rotate around its longitudinal axis between a first position and a second position relative to the isolation valve chamber, in the first position, the small diameter part of the pin shaft is located in the wide slot part of the slot, and in the second position, the small diameter part of the pin shaft is located in the narrow slot part of the slot.

[0011] In some optional examples, the connecting disc includes a first half and a second half, the first half and the second half extend along the circumference of the auxiliary furnace chamber and are connected together by a fixed plate.

[0012] In some optional examples, the connecting disc is mounted to the flange of the auxiliary furnace chamber.

[0013] In some optional examples, the driving unit includes:

[0014] Swing cylinder, the swing cylinder is fixed to the outer wall of the auxiliary furnace chamber;

[0015] Circular gear, the circular gear is connected with the output shaft of the swing cylinder;

[0016] Half circular gear, the half circular gear is fixed to the connecting disc and engaged with the circular gear.

[0017] In some optional examples, the swing cylinder is fixed to the outer wall of the auxiliary furnace chamber by swing cylinder fixing block.

[0018] In some optional examples, the connecting disc is further formed with a guide groove extending along the circumference of the auxiliary furnace chamber, and a guide shaft is further fixed on the isolation valve chamber and inserted into the guide groove to guide the rotation of the auxiliary furnace chamber relative to the isolation valve chamber.

[0019] In some optional examples, the number of the slots and the number of the pin shafts are both four and evenly distributed in the circumference of the auxiliary furnace chamber.

[0020] In some optional examples, the number of the guide grooves and the number of the guide shafts are both two and evenly distributed in the circumference of the auxiliary furnace chamber.

[0021] In some optional examples, the large slot width part and the small slot width part of the slot transition to each other in a gradual manner to avoid stress concentration.

[0022] In the second aspect, the utility model provides a crystal pulling furnace, the crystal pulling furnace includes the connecting mechanism according to first aspect.

[0023] The utility model provides a kind of connecting mechanism and crystal pulling furnace, the operation of auxiliary furnace chamber and isolation valve chamber is integrated into a lifting rotary mechanism, the operating efficiency and safety of crystal pulling furnace are significantly improved. When only auxiliary furnace chamber is needed to act, it is placed in first position by driving unit, the small shaft diameter part of pin shaft is located in the large slot width part of slot, auxiliary furnace chamber can independently act, isolation valve chamber remains stationary, and operation process is simplified. When synchronous action is needed, auxiliary furnace chamber is placed in second position, the small shaft diameter part of pin shaft is located in small slot width part, and isolation valve chamber is driven to act synchronously, and operation steps are reduced. This design avoids collision risk caused by improper operation, significantly improves the safety of equipment. Compared with the prior art of two independent transmission mechanisms, the utility model realizes independent or synchronous operation using only a single mechanism, reduces the number of parts, reduces manufacturing and maintenance costs, simplifies assembly process, reduces space occupation, improves space utilization. At the same time, operation time is reduced, the probability of misoperation is reduced, and production efficiency is improved. Compact structure, low failure rate, easy maintenance, further improve the reliability of equipment. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is the assembly front view schematic drawing of the connecting mechanism of the crystal pulling furnace provided by the utility model embodiment.

[0025] Figure 2 It is the top view schematic drawing of the connecting disc and driving unit of the connecting mechanism provided by the utility model embodiment.

[0026] Figure 3 It is the exploded front view schematic drawing of the connecting mechanism of the crystal pulling furnace provided by the utility model embodiment.

[0027] Figure 4 A top view schematic diagram of the connecting mechanism in a locked state provided by the embodiment of the utility model.

[0028] Figure 5 A top view schematic diagram of the connecting mechanism in a separated state provided by the embodiment of the utility model.

[0029] Figure 6 A front view schematic diagram of the driving unit of the connecting mechanism provided by the embodiment of the utility model. DETAILED DESCRIPTION

[0030] The technical solutions in the utility model will be clearly and completely described below in combination with the drawings in the disclosure.

[0031] In the operation process of the single crystal furnace, there are obvious differences in the operation requirements of the sub-chamber and the isolation valve chamber. On the one hand, after the crystal growth is completed, the crystal rod is taken out, the secondary feeding or the slag removal operation only needs the sub-chamber to be lifted and rotated open, and the isolation valve chamber remains stationary. On the other hand, when the hot field is disassembled, the polycrystalline silicon material is loaded or the furnace is cleaned, the sub-chamber and the isolation valve chamber need to be lifted and rotated open synchronously. However, in the existing design of the single crystal furnace, the lifting and rotating mechanisms of the sub-chamber and the isolation valve chamber are completely independent. Although this design can meet different operation requirements, it also brings many problems. First, the independent transmission mechanism complicates the operation process. The operator needs to control the lifting and rotation of the sub-chamber and the isolation valve chamber respectively, which not only increases the operation difficulty, but also easily causes safety accidents due to misoperation. For example, when the sub-chamber is lifted but not rotated in place, if the isolation valve chamber is misoperated to be lifted, it may cause the two to collide, causing equipment damage or even personal injury. Second, the two independent transmission mechanisms require more parts and complex assembly process, which not only increases the manufacturing cost of the equipment, but also increases the maintenance cost of the equipment. In addition, the independent transmission mechanism needs to occupy more space, further increasing the overall cost of the equipment. Finally, in the actual production process, since the operation of the sub-chamber and the isolation valve chamber needs to be carried out in steps, it leads to time waste in the production process, reducing the production efficiency. Especially in large-scale production, this time waste will accumulate, affecting the production benefit of the enterprise.

[0032] In view of the above problems, the utility model provides a connecting mechanism, which aims to integrate the lifting and rotating mechanisms of the sub-chamber and the isolation valve chamber into a system through an innovative design, thereby simplifying the operation process, reducing the cost, and improving the production efficiency. Through ingenious design, the connecting mechanism realizes flexible switching of the sub-chamber and the isolation valve chamber under different operation requirements, which can ensure synchronous action of the two when needed and independent action when needed, effectively solving the problems existing in the prior art.

[0033] Specifically, referring to Figures 1 to 5The utility model embodiment provides a connecting mechanism 10, this connecting mechanism 10 can include connecting disc 11, pin shaft 12 and drive unit 13.

[0034] As will be appreciated Figure 2 and in conjunction with Figure 1 and Figure 3 As will be appreciated, the connecting disc 11 is fixed to the outer periphery of the sub-chamber 20 of the crystal pulling furnace 1, and the connecting disc 11 is formed with a slot 110 extending along the circumference of the sub-chamber 20, the slot 110 including a wide slot portion 110B and a narrow slot portion 110S.

[0035] As will be appreciated Figure 2 and in conjunction with Figure 1 As will be appreciated, the pin shaft 12 is fixed to the isolating valve chamber 30 below the sub-chamber 20, and the pin shaft 12 includes a large diameter portion 12B and a small diameter portion 12S below the large diameter portion 12B, the radial dimension of the large diameter portion 12B being smaller than the width of the wide slot portion 110B and larger than the width of the narrow slot portion 110S, and the radial dimension of the small diameter portion 12S being smaller than the width of the narrow slot portion 110S.

[0036] As will be appreciated Figure 2 and in conjunction with Figure 1 and Figure 3 As will be appreciated, the drive unit 13 is configured to drive the sub-chamber 20 to rotate about its longitudinal axis X between a first position shown in Figure 5 and a second position shown in Figure 4 with respect to the isolating valve chamber 30, in the first position, the small diameter portion 12S of the pin shaft 12 is located in the wide slot portion 110B of the slot 110, and in the second position, the small diameter portion 12S of the pin shaft 12 is located in the narrow slot portion 110S of the slot 110.

[0037] When only the sub-chamber 20 needs to be lifted and rotated, the drive unit 13 is configured to place the sub-chamber 20 in the first position. At this time, the small diameter portion 12S of the pin shaft 12 is located in the wide slot portion 110B of the slot 110. Since the width of the wide slot portion 110B is sufficient to accommodate the small diameter portion 12S of the pin shaft 12, the pin shaft 12 can freely exit the slot 110 during the lifting and rotation of the sub-chamber 20, and the sub-chamber 20 can move independently while the isolating valve chamber 30 remains stationary. This design meets the needs of operations such as taking out the crystal rod after the crystal growth is completed, secondary charging, or slag removal, avoids unnecessary equipment movement, and simplifies the operation process.

[0038] When the auxiliary furnace chamber 20 and the isolation valve chamber 30 need to be lifted and rotated synchronously, the auxiliary furnace chamber 20 is placed in the second position by the driving unit 13. At this time, the small shaft diameter part 12S of the pin shaft 12 is located in the small slot width part 110S of the slot 110. Since the width of the small slot width part 110S is smaller than the radial dimension of the small shaft diameter part 12S of the pin shaft 12, the pin shaft 12 cannot leave the slot 110, so that the isolation valve chamber 30 is lifted and rotated synchronously. This design meets the needs of operations such as disassembling the hot field, loading polysilicon material, or cleaning the furnace, ensures that the auxiliary furnace chamber 20 and the isolation valve chamber 30 can act synchronously, reduces the operation steps, and improves the operation efficiency.

[0039] By integrating the operations of the auxiliary furnace chamber 20 and the isolation valve chamber 30 into one lifting and rotating mechanism, the risk of collision between the auxiliary furnace chamber 20 and the isolation valve chamber 30 due to improper operation is avoided. In the prior art, since the lifting and rotating mechanisms of the auxiliary furnace chamber 20 and the isolation valve chamber 30 are independent, the operator needs to control two sets of mechanisms respectively, which is easy to cause safety accidents due to misoperation. The present application precisely controls the position of the auxiliary furnace chamber 20 through the driving unit 13, ensures the correct action of the auxiliary furnace chamber 20 and the isolation valve chamber 30 in different operation modes, and significantly improves the safety of the equipment.

[0040] The present application can realize independent or synchronous operation of the auxiliary furnace chamber 20 and the isolation valve chamber 30 using only a single lifting and rotating mechanism, which significantly reduces the number of parts compared to the prior art which requires two independent transmission mechanisms. This not only reduces the manufacturing cost of the equipment, but also reduces the maintenance cost of the equipment. Due to the reduction in the number of parts, the assembly process is also simplified. In the prior art, two independent transmission mechanisms require complex assembly processes, while the connecting mechanism 10 of the present application has a compact structure and a simpler assembly process, further reducing the manufacturing cost of the equipment. Independent transmission mechanisms require more space, while the connecting mechanism 10 of the present application ingeniously integrates the operations of the auxiliary furnace chamber 20 and the isolation valve chamber 30 into one system, reducing the overall space occupation of the equipment. This not only improves the space utilization of the equipment, but also provides the possibility for further miniaturization of the equipment.

[0041] In the prior art, when the auxiliary furnace chamber 20 and the isolation valve chamber 30 need to be operated synchronously, two sets of independent transmission mechanisms need to be controlled respectively, which not only increases the operation difficulty, but also causes the operation time to be prolonged. The single lifting and rotating mechanism of the utility model realizes synchronous operation, reduces the operation steps, and significantly shortens the operation time. In the actual production process, the step-by-step operation of the auxiliary furnace chamber 20 and the isolation valve chamber 30 in the prior art will cause a certain waiting time, thereby reducing the production efficiency. The utility model quickly switches the position of the auxiliary furnace chamber 20 through the driving unit 13, realizes the rapid synchronous action of the auxiliary furnace chamber 20 and the isolation valve chamber 30, reduces the waiting time, and improves the production efficiency. Due to the simplification of the operation process, the probability of operation error of the operator is significantly reduced. This not only improves the operation efficiency of the equipment, but also reduces the equipment downtime caused by misoperation, and further improves the production efficiency.

[0042] The connecting mechanism 10 of the utility model has a compact structure and a reduced number of parts, and the probability of mechanical failure is also reduced accordingly. Compared with the two sets of complex transmission mechanisms in the prior art, the single lifting and rotating mechanism of the utility model is more reliable, and the equipment downtime caused by mechanical failure is reduced. Due to the reduction in the number of parts and the simplification of the assembly process, the maintenance of the equipment is more convenient. Maintenance personnel can quickly locate and solve problems, reduce the maintenance time and cost of the equipment, and further improve the reliability of the equipment.

[0043] In some embodiments of the utility model, referring to Figure 2 , the connecting disc 11 can include a first half 11A and a second half 11B, the first half 11A and the second half 11B extend along the circumference of the auxiliary furnace chamber 20 and are connected together through the fixed plate 14.

[0044] Due to the two-halves design of the connecting disc 11, the first half 11A and the second half 11B can be connected together through the fixing plate 14. This design makes it easier to fix the connecting disc 11 to the outer periphery of the sub-chamber 20 of the crystal pulling furnace 1. Specifically, during installation, the first half 11A and the second half 11B are placed on the outer periphery of the sub-chamber 20 respectively along the radial direction of the sub-chamber 20, and then the two are connected and fixed through the fixing plate 14. This installation method avoids the complex operation of needing to be fitted along the axial direction of the sub-chamber 20, greatly simplifying the installation process. Traditional single connecting discs usually need to be fitted along the axial direction of the sub-chamber 20, which not only complicates the operation, but also makes it difficult to install due to space limitations. The two-halves design of the connecting disc 11 can be quickly positioned and fixed, significantly reducing the installation time and improving the assembly efficiency of the equipment. When the connecting disc 11 needs to be maintained or replaced, the two-halves design also brings convenience. By loosening the connection of the fixing plate 14, the first half 11A and the second half 11B can be disassembled respectively without complex axial disassembly operation. This design allows maintenance personnel to check and repair more quickly, reducing equipment downtime. The two-halves design of the connecting disc 11 has greater flexibility in adapting to sub-chambers 20 of different sizes. Since the positions of the first half 11A and the second half 11B can be adjusted separately, it can better adapt to the shape of the outer periphery of the sub-chamber 20, ensuring the close fit between the connecting disc 11 and the sub-chamber 20. By designing the connecting disc 11 as two halves and connecting them through the fixing plate 14, it can ensure that the connecting disc 11 is uniformly stressed on the outer periphery of the sub-chamber 20. This design avoids the uneven stress problem that may exist in single connecting discs, thereby improving the structural stability of the connecting disc 11. The use of the fixing plate 14 not only connects the first half 11A and the second half 11B, but also enhances the structural strength of the entire connecting disc 11. This design makes the connecting disc 11 work more stably when subjected to the force generated during the lifting and rotation of the sub-chamber 20, reducing the risk of failure caused by structural deformation.

[0045] In some embodiments of the present application, referring to Figure 3 , the connecting disc 11 can be installed to the flange 21 of the sub-chamber 20.

[0046] By mounting the connecting disc 11 to the flange 21 of the secondary furnace chamber 20, the connecting disc 11 can be provided with stable support in the axial direction of the secondary furnace chamber 20. The flange 21, as a part of the structure of the secondary furnace chamber 20, generally has high strength and stability, and can effectively resist the force that the connecting disc 11 may be subjected to in the axial direction. This design ensures that the fixation of the connecting disc 11 on the secondary furnace chamber 20 is more reliable, and even if vibration or other external force interference occurs during the operation of the equipment, the connecting disc 11 is not easy to loosen or displace. The flange 21 generally has a standardized size and structure, which makes the installation process of the connecting disc 11 more standardized and accurate. Through cooperation with the flange 21, the positional deviation of the connecting disc 11 caused by inaccurate installation can be reduced, thereby improving the assembly accuracy and operation stability of the entire connecting mechanism 10. The design of the flange 21 can generally ensure that the force distribution of the connecting disc 11 on the secondary furnace chamber 20 is more uniform. Through the close cooperation of the connecting disc 11 and the flange 21, the force generated during the lifting and rotating of the secondary furnace chamber 20 can be uniformly transmitted to the entire connecting disc 11 structure, avoiding structural deformation or damage caused by excessive local stress. The flange 21, as an important component of the secondary furnace chamber 20, can provide additional support for the connecting disc 11. This design not only enhances the structural strength of the connecting disc 11 itself, but also improves the overall stability of the entire connecting mechanism 10 during operation, reducing the risk of failure caused by unstable structure.

[0047] In some embodiments of the present application, referring to Figure 2 and Figure 6 , the driving unit 13 can include:

[0048] The swing cylinder 131 is fixed to the outer wall of the secondary furnace chamber 20.

[0049] The circular gear 132 is connected to the output shaft of the swing cylinder 131.

[0050] The half circular gear 133 is fixed to the connecting disc 11 and engaged with the circular gear 132.

[0051] This design fully utilizes the advantages of gear transmission, providing an efficient, precise and reliable driving method for the connection and operation of the secondary furnace chamber 20 and the isolation valve chamber 30. Specifically, gear transmission has high precision characteristics, which can accurately control the position of the secondary furnace chamber 20 relative to the isolation valve chamber 30. By driving the circular gear 132 to rotate through the swing cylinder 131, the semi-circular gear 133 is driven to rotate, realizing the switching of the connecting disc 11 between the first position (the large slot width part 110B of the slot 110) and the second position (the small slot width part 110S of the slot 110). This precise position control ensures that the pin shaft 12 can cooperate with the slot 110 at the correct position, thereby realizing the synchronous or independent action of the secondary furnace chamber 20 and the isolation valve chamber 30. The gear transmission system can provide high repeat positioning accuracy, which means that each time the operation is performed, the secondary furnace chamber 20 and the isolation valve chamber 30 can accurately return to the predetermined position. This is crucial for the stable operation of the single crystal furnace, especially when frequent switching of operation modes (such as independent action and synchronous action) is required. Gear transmission can efficiently transmit large torque, ensuring sufficient power support during the lifting and rotation of the secondary furnace chamber 20. The swing cylinder 131 transmits power to the connecting disc 11 through the circular gear 132 and the semi-circular gear 133, which can effectively amplify the torque to meet the high torque demand during equipment operation. The gear transmission system has a compact structure and occupies a small space, which is suitable for use in single crystal furnaces with limited space. Compared with other transmission methods (such as hydraulic or belt transmission), gear transmission can achieve efficient power transmission in a small space while maintaining the overall compactness of the equipment.

[0052] In some embodiments of the present utility model, referring to Figure 6 , the swing cylinder 131 can be fixed to the outer wall of the secondary furnace chamber 20 through the swing cylinder fixing block 134.

[0053] By fixing the swing cylinder 131 on the outer wall of the secondary furnace chamber 20 through the swing cylinder fixing block 134, it can be ensured that the swing cylinder 131 will not displace or loosen during operation due to vibration or external force. This firm fixing method provides stable support for the swing cylinder 131, enabling it to reliably output power and drive the circular gear 132 to rotate. The design of the swing cylinder fixing block 134 allows accurate adjustment of the position of the swing cylinder 131 during installation, thereby reducing installation errors. This precise installation method can ensure that the output shaft of the swing cylinder 131 is more tightly connected with the circular gear 132, improving the transmission efficiency of the entire drive system.

[0054] In some embodiments of the present utility model, referring to Figure 2 , the connecting disc 11 can also be formed with a guide groove 112 extending along the circumference of the secondary furnace chamber 20, and a guide shaft 15 can also be fixed on the isolation valve chamber 30, which is inserted into the guide groove 112 to guide the rotation of the secondary furnace chamber 20 relative to the isolation valve chamber 30.

[0055] The guide shaft 15 is inserted into the guide slot 112, providing precise guidance for the rotation of the secondary furnace chamber 20. This guiding mechanism can effectively reduce the shaking and deviation of the secondary furnace chamber 20 during rotation, ensuring smooth rotation. For example, during the lifting and rotation of the secondary furnace chamber 20, the guide shaft 15 slides along the guide slot 112, effectively constraining the motion trajectory of the secondary furnace chamber 20, avoiding irregular motion caused by external forces or vibrations. Through the cooperation of the guide shaft 15 and the guide slot 112, the transmission of vibrations between the secondary furnace chamber 20 and the isolation valve chamber 30 can be reduced. This design makes the secondary furnace chamber 20 more stable during rotation, reducing the risk of equipment wear and failure caused by vibrations. The cooperation of the guide shaft 15 and the guide slot 112 provides a reliable mechanical constraint for the secondary furnace chamber 20. This constraint mechanism can ensure that the secondary furnace chamber 20 always maintains the correct posture during rotation, reducing the risk of failure caused by mechanical looseness or failure. For example, even if some vibrations or impacts occur during equipment operation, the cooperation of the guide shaft 15 and the guide slot 112 can ensure the stable rotation of the secondary furnace chamber 20. Through the cooperation of the guide shaft 15 and the guide slot 112, the rotation of the secondary furnace chamber 20 is more stable, thereby improving the stability of the entire system. This stability is crucial for the efficient operation of the single crystal furnace, especially in operations that require precise control of the relative positions of the secondary furnace chamber 20 and the isolation valve chamber 30.

[0056] In some embodiments of the present application, referring to Figure 2 , the number of slots 110 and pin shafts 12 can be four and evenly distributed in the circumferential direction of the secondary furnace chamber 20.

[0057] By evenly distributing four slots 110 and four pin shafts 12 around the circumference of the secondary furnace chamber 20, the force between the secondary furnace chamber 20 and the isolation valve chamber 30 can be more evenly distributed. This even distribution of force can reduce the risk of local overload and avoid structural deformation or damage caused by uneven force. For example, when the secondary furnace chamber 20 and the isolation valve chamber 30 are synchronously lifted and rotated, the force between each pin shaft 12 and the corresponding slot 110 can be evenly shared, ensuring that the entire system is evenly stressed. Evenly distributed slots 110 and pin shafts 12 can effectively reduce stress concentration. Stress concentration is usually a structural weakness caused by excessive concentration of force in a local area, which can cause fatigue cracks or fractures during operation. Through the evenly distributed structural design, stress concentration can be significantly reduced, improving the service life and reliability of the equipment. Four evenly distributed slots 110 and pin shafts 12 can provide multiple stable connection points, enhancing the stability of the connection between the secondary furnace chamber 20 and the isolation valve chamber 30. This multi-point connection design can ensure that the relative position between the secondary furnace chamber 20 and the isolation valve chamber 30 remains stable during lifting and rotation, reducing the risk of failure caused by loose or failed connections. Even if one or more connection points are slightly worn or fail, the other connection points can still continue to bear the force, ensuring normal operation of the system. This design improves the redundancy of the system and enhances the reliability of the equipment under complex working conditions.

[0058] In some embodiments of the present application, referring to Figure 2 , the number of guide slots 112 and guide shafts 15 can both be two and evenly distributed around the circumference of the secondary furnace chamber 20.

[0059] By evenly distributing two guide slots 112 and two guide shafts 15 around the circumference of the secondary furnace chamber 20, this symmetrical distribution can ensure that the force on the secondary furnace chamber 20 during rotation is balanced. When the guide shafts 15 slide in the guide slots 112, the forces on both sides can balance each other, avoiding deviation or shaking caused by unilateral force, thereby significantly improving the stability of the guiding process. Symmetrically distributed guide slots 112 and guide shafts 15 can effectively reduce the movement deviation of the secondary furnace chamber 20 during rotation. This design ensures that the secondary furnace chamber 20 maintains the correct posture during lifting and rotation, reducing the risk of equipment wear and failure caused by movement deviation. Symmetrically distributed guide slots 112 and guide shafts 15 can ensure the smoothness of the secondary furnace chamber 20 during rotation. Since the guide shafts 15 on both sides slide in the guide slots 112 simultaneously, the movement trajectory of the secondary furnace chamber 20 is more stable, reducing vibration and impact, making the entire rotation process more stable. The symmetrical design can effectively reduce vibration transmission. During the rotation of the secondary furnace chamber 20, the cooperation of the guide shafts 15 and guide slots 112 on both sides can absorb and disperse vibrations, reducing the impact of vibrations on other parts of the equipment, thereby improving the overall smoothness of the equipment.

[0060] In some embodiments of the present application, referring to Figure 2 The large slot width part 110B and the small slot width part 110S of the slot 110 can be gradually transitioned to each other to avoid stress concentration.

[0061] By using a gradual transition design between the large slot width part 110B and the small slot width part 110S, the stress concentration phenomenon caused by sudden changes in slot width can be effectively reduced. Stress concentration usually occurs at the geometric discontinuity of the structure, which can cause material fatigue and crack. The gradual transition design can make the stress evenly distributed in the slot width change area, thereby significantly reducing stress concentration and improving the structural strength and service life of the connecting disc 11. Reducing stress concentration not only reduces the risk of damage to the connecting disc 11 due to fatigue, but also improves the reliability of the entire connecting mechanism. This design enables the connecting disc 11 to withstand repeated loads without cracking or breaking during long-term operation, thereby ensuring stable operation of the equipment.

[0062] Referring to Figure 1 The present application also provides a crystal pulling furnace 1, which can include a connecting mechanism 10 according to the above embodiments.

[0063] Through the connecting mechanism 10, the operation of the sub-furnace chamber 20 and the isolation valve chamber 30 of the crystal pulling furnace 1 is more flexible and efficient. For example, when the sub-furnace chamber 20 needs to act independently, the connecting mechanism 10 can quickly switch to the first position, allowing the sub-furnace chamber 20 to be independently lifted and rotated; when the sub-furnace chamber 20 and the isolation valve chamber 30 need to act synchronously, the connecting mechanism 10 can quickly switch to the second position, achieving synchronous lifting and rotation of the two. This flexible operation mode reduces downtime and improves production efficiency. In traditional crystal pulling furnaces, the operation of the sub-furnace chamber 20 and the isolation valve chamber 30 needs to be performed in steps, which results in time waste during production. The connecting mechanism 10 of the present application realizes flexible switching of the sub-furnace chamber 20 and the isolation valve chamber 30 through a set of lifting and rotating mechanism, reducing waiting time and significantly improving production efficiency.

[0064] It should be noted that the technical solutions disclosed in the present application can be combined arbitrarily without conflict.

[0065] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any skilled person in the art can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A connecting mechanism, characterized in that, The connecting mechanism includes: A connecting plate fixed to the outer periphery of the auxiliary furnace chamber of the crystal pulling furnace, the connecting plate having a slot extending circumferentially along the auxiliary furnace chamber, the slot including a large slot width portion and a small slot width portion; A pin fixed to the isolation valve chamber below the auxiliary furnace chamber, the pin comprising a large shaft diameter portion and a small shaft diameter portion below the large shaft diameter portion, the radial dimension of the large shaft diameter portion being smaller than the width of the large slot width portion and larger than the width of the small slot width portion, the radial dimension of the small shaft diameter portion being smaller than the width of the small slot width portion; A drive unit is used to drive the auxiliary furnace chamber to rotate about its own longitudinal axis between a first position and a second position relative to the isolation valve chamber. In the first position, the small diameter portion of the pin is located in the large width portion of the slot, and in the second position, the small diameter portion of the pin is located in the small width portion of the slot.

2. The connecting mechanism according to claim 1, characterized in that, The connecting plate includes a first half and a second half, which extend circumferentially along the auxiliary furnace chamber and are connected together by a fixing plate.

3. The connecting mechanism according to claim 1, characterized in that, The connecting plate is installed to the flange of the auxiliary furnace chamber.

4. The connecting mechanism according to claim 1, characterized in that, The driving unit includes: A swing cylinder, which is fixed to the outer wall of the auxiliary furnace chamber; A spur gear, which is connected to the output shaft of the swing cylinder; A semi-circular gear, which is fixed to the connecting disc and meshes with the circular gear.

5. The connecting mechanism according to claim 4, characterized in that, The swing cylinder is fixed to the outer wall of the auxiliary furnace chamber by a swing cylinder fixing block.

6. The connecting mechanism according to claim 1, characterized in that, The connecting plate also forms a guide groove extending circumferentially along the auxiliary furnace chamber, and a guide shaft is fixed on the isolation valve chamber. The guide shaft is inserted into the guide groove to guide the auxiliary furnace chamber to rotate relative to the isolation valve chamber.

7. The connecting mechanism according to claim 1, characterized in that, The number of slots and pins are both four, and they are evenly distributed around the circumference of the auxiliary furnace chamber.

8. The connecting mechanism according to claim 6, characterized in that, The number of guide grooves and guide shafts is two, and they are evenly distributed around the circumference of the auxiliary furnace chamber.

9. The connecting mechanism according to claim 6, characterized in that, The wide and narrow sections of the slot are gradually transitioned to each other to avoid stress concentration.

10. A crystal pulling furnace, characterized in that, The crystal pulling furnace includes a connecting mechanism according to any one of claims 1 to 9.

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