Hanging tool turnover mechanism

Abstract

The embodiment of the utility model discloses a hanger turnover mechanism. The hanger overturning mechanism comprises a rotating base, a rotating frame, a rotating driving part, a conveying assembly and a bearing frame. The rotating driving part is installed on the rotating base, the rotating frame is rotationally connected with the rotating base through a rotating shaft extending in the first direction, and the rotating driving part is used for driving the rotating frame to rotate by a set angle; the bearing frame comprises a bearing plane and a limiting structure, the bearing plane is used for placing the hanging tool, and the limiting structure is arranged on the bearing plane and used for limiting the peripheral side of the hanging tool. According to the embodiment of the invention, through the arrangement of the bearing frame and the transmission assembly, the hanging tool can stably move from one end of the rotating frame to the other end of the rotating frame in the second direction, so that the hanging tool does not need to be manually carried, the cost is reduced, the efficiency is improved, and meanwhile, the safety and the positioning precision of the hanging tool can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electroplating equipment, and particularly relates to a hanger overturning mechanism. BACKGROUND

[0002] Wafer electroplating is a commonly used process step in semiconductor manufacturing, which is used to form a thin film or coating on the surface of a wafer. It can change the electrical, chemical or physical properties of the wafer by depositing metal or other materials on the surface of the wafer, thereby achieving a specific function.

[0003] In the electroplating work, the hanger often needs to be overturned and loaded in the horizontal position and the vertical position. The existing wafer vertical electroplating equipment cannot realize the automatic overturning and loading of the hanger, and can only be manually moved to the specified position and then grabbed by the mechanical hand. Since the hanger is heavy, manual handling is difficult, not only the efficiency is low, but also the safety problem in the handling process needs to be solved. CONTENT OF THE INVENTION

[0004] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides a hanger overturning mechanism to solve the problems of low work efficiency and safety hazards of the traditional wafer vertical electroplating equipment.

[0005] In a first aspect, the present application provides a hanger overturning mechanism, comprising: a rotating base, a rotating frame, a rotating drive, a transmission assembly and a bearing frame;

[0006] The rotating drive is installed on the rotating base, the rotating frame is rotationally connected with the rotating base through a rotating shaft extending in a first direction, and the rotating drive is used to drive the rotating frame to rotate by a set angle.

[0007] The bearing frame comprises a bearing plane and a limiting structure, the bearing plane is used to place the hanger, the limiting structure is arranged on the bearing plane and is used to limit the circumferential side of the hanger, the bearing frame is slidingly matched with the rotating frame, and the transmission assembly is arranged on the rotating frame and is used to drive the bearing frame to slide on the rotating frame in a second direction.

[0008] Based on the hanger overturning mechanism, through the setting of the bearing frame and the transmission assembly, the hanger can be smoothly moved from one end to the other end of the rotating frame along the second direction, so that manual handling of the hanger is not required, the cost is reduced, the efficiency is improved, the safety and the positioning accuracy of the hanger are improved, and meanwhile, the rotating drive member is used to drive the rotating frame to rotate around the rotating shaft, so as to realize the switching of the hanger between the horizontal and vertical positions, thereby enabling the hanger overturning mechanism to realize the automatic overturning and feeding action after receiving the hanger on the mechanical arm. Based on the above bearing frame, the limiting structure can be used to limit and fix the circumferential side of the hanger, so as to improve the stability of the hanger on the bearing frame and avoid the hanger from falling off the bearing frame when moving along the second direction and rotating around the rotating shaft in the first direction.

[0009] Optionally, the rotating frame comprises a first base frame, a second base frame and a top plate, the first base frame, the second base frame and the top plate surround to form a triangular support, and the bearing frame is slidingly arranged on the top plate.

[0010] Further, based on the above rotating frame, the special structure of the triangle can be used to improve the strength of the rotating frame and ensure the stability of the rotating frame when rotating or bearing the hanger. The first base frame and the second base frame can also be arranged in the shape of a pyramid below the top plate, further improving the structural strength of the entire rotating frame.

[0011] Optionally, the top plate is provided with a sliding assembly extending along the second direction, and the bearing frame slides on the sliding assembly.

[0012] Further, based on the above sliding assembly, the wear between the bearing frame and the top plate can be reduced, the influence of the vibration generated by the sliding of the bearing frame on the hanger can also be reduced, and the sliding speed of the bearing frame can be improved, thereby improving the transportation efficiency of the hanger.

[0013] Optionally, the top plate is provided with a guide rail extending along the second direction, and the bearing frame is in sliding cooperation with the guide rail and is limited and cooperated in a direction perpendicular to the second direction.

[0014] Further, based on the above guide rail, the stability and reliability of the bearing frame during sliding can be ensured, and the bearing frame can be prevented from being separated from the top plate when sliding on the top plate.

[0015] Optionally, at least one end of the top plate along the second direction is provided with a position sensor.

[0016] Further, based on the above position sensor, the rotating drive member can be automatically signaled when the bearing frame reaches the specified position, thereby realizing the automatic overturning and feeding action. The transportation accuracy of the hanger can be improved, and the efficiency can also be improved.

[0017] Optionally, the limiting structure comprises two guide strips extending along the second direction, and a guide limiting groove is formed between the two guide strips and slidably matches the hanger, and the width of the guide limiting groove matches the width of the hanger.

[0018] Further, based on the guide strips, the two guide strips can be located at two side edges of the hanger in the first direction and abut against the hanger, and the two guide strips extend along the second direction, so that the hanger can stably slide, thereby improving the stability of the hanger when moving to the carrier.

[0019] Optionally, the guide strips are provided with guide-in portions at the ends along the second direction.

[0020] Further, based on the two guide-in portions, the guide-in portions can provide a guiding effect, a friction-reducing effect or other effects that can facilitate the hanger to enter the guide limiting groove when the hanger just contacts the guide strips, as long as the hanger can quickly and efficiently slide to the specified position on the carrier in the correct posture and the correct direction (the second direction).

[0021] Optionally, the distance between the guide-in portions on the two guide strips gradually decreases along the entering direction of the hanger.

[0022] Further, based on the guide-in portions, the hanger can more easily slide into the guide limiting groove, the alignment accuracy of the hanger is reduced, and the automatic feeding efficiency of the hanger is further improved.

[0023] Optionally, the limiting structure comprises at least two circumferential limiting points, and the at least two circumferential limiting points are arranged at intervals along the circumference of the hanger.

[0024] Further, based on the arrangement of the circumferential limiting points, when the hanger slides along the guide limiting groove to the specified position on the carrier, the circumferential limiting points can be used to limit and fix the hanger, so as to avoid the hanger from continuing to slide. It needs to be noted that, in the direction of gravity, the guide limiting groove is located at the same height position as the circumferential limiting points, or is located at a higher height position than the circumferential limiting points, that is, when the hanger is turned to a vertical state, the at least two circumferential limiting points can support the hanger from below.

[0025] Optionally, the limiting structure further comprises an end face limiting point, and the end face limiting point has a set gap with the carrier plane, the set gap matches the thickness of the hanger, and the end face limiting point abuts against at least part of the top end face of the hanger.

[0026] Further, based on the end face limiting point, the hanger can be further prevented from falling off the carrier during automatic turning and feeding, and the safety and reliability are improved.

[0027] Additional aspects and advantages of the present application will be made apparent by the following description and the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0028] The disclosure of the present application will become more apparent from the following description in conjunction with the accompanying drawings. It is readily understood by the skilled in the art that the drawings are only for the purpose of illustration and are not intended to limit the scope of protection of the present application. In addition, similar numerals are used to indicate similar components in the drawings, in which:

[0029] Figure 1 Structure diagram of the hanger overturning mechanism described in the embodiments of the present application;

[0030] Figure 2 Top view of the hanger overturning mechanism described in the embodiments of the present application;

[0031] Figure 3 Front view of the hanger overturning mechanism described in the embodiments of the present application;

[0032] Figure 4 Side view of the hanger overturning mechanism described in the embodiments of the present application.

[0033] BRIEF DESCRIPTION OF DRAWINGS

[0034] 1, rotating base; 2, rotating frame; 21, first chassis; 22, second chassis; 23, top plate; 231, sliding assembly; 232, guide rail; 233, in-place sensor; 3, rotating driving member; 4, conveying assembly; 5, bearing frame; 51, bearing plane; 521, guide bar; 5211, circumferential side limiting surface; 5212, end surface limiting surface; 522, circumferential side limiting point; 523, end surface limiting point; 6, hanger. DETAILED DESCRIPTION

[0035] Some embodiments of the present application will be described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present application, and are not intended to limit the scope of protection of the present application.

[0036] In electroplating work, the hanger often needs to be flipped for loading in horizontal and vertical positions. The existing wafer vertical electroplating equipment cannot realize automatic flipping and loading of the hanger, and can only manually move the hanger to a specified position and then be grabbed by a mechanical hand. Since the hanger is heavy, manual handling is difficult, not only the efficiency is low, but also the safety problem in the handling process needs to be solved.

[0037] Based on this, the application provides a hanger overturning mechanism. Through the arrangement of the bearing frame and the transmission assembly, the hanger can move smoothly from one end to the other end of the rotating frame in the second direction, so that manual handling of the hanger is not required, the cost is reduced, the efficiency is improved, the safety and the positioning accuracy of the hanger are improved, and the hanger overturning mechanism can realize automatic overturning and feeding after receiving the hanger on the mechanical arm.

[0038] The application will be specifically described below through specific embodiments.

[0039] Referring to Figures 1 to 4 The hanger overturning mechanism provided by the embodiment includes a rotating base 1, a rotating frame 2, a rotating drive 3, a transmission assembly 4, and a bearing frame 5. The rotating drive 3 is installed on the rotating base 1. The rotating frame 2 is rotationally connected to the rotating base 1 through a rotating shaft extending in the first direction. The rotating drive 3 is used to drive the rotating frame 2 to rotate by a set angle. The bearing frame 5 includes a bearing plane 51 and a limiting structure. The bearing plane 51 is used to place the hanger 6. The limiting structure is arranged on the bearing plane 51 and is used to limit the circumferential side of the hanger 6. The bearing frame 5 is in sliding fit with the rotating frame 2. The transmission assembly 4 is arranged on the rotating frame 2 and is used to drive the bearing frame 5 to slide in the second direction on the rotating frame 2.

[0040] The hanger overturning mechanism provided by the embodiment can make the hanger 6 move smoothly from one end to the other end of the rotating frame 2 in the second direction, so that manual handling of the hanger 6 is not required, the cost is reduced, the efficiency is improved, the safety and the positioning accuracy of the hanger 6 are improved, and the hanger overturning mechanism can realize automatic overturning and feeding after receiving the hanger 6 on the mechanical arm. Based on the bearing frame 5, the limiting structure can be used to limit and fix the circumferential side of the hanger 6, improve the stability of the hanger 6 on the bearing frame 5, and avoid the hanger 6 from falling off the bearing frame 5 when moving in the second direction and rotating around the rotating shaft in the first direction.

[0041] In some embodiments, the transmission assembly 4 can be a gas cylinder, an electric cylinder, a motor, a lead screw, or the like, as long as it can drive the bearing frame 5 to reciprocate in the second direction on the rotating frame 2.

[0042] In some embodiments, the rotating frame 2 comprises a first base frame 21, a second base frame 22 and a top plate 23, the first base frame 21, the second base frame 22 and the top plate 23 form a triangular support, and the carrying frame 5 is slidingly arranged on the top plate 23, wherein the projection of the first base frame 21, the second base frame 22 and the top plate 23 in the first direction is a triangle.

[0043] Based on the rotating frame 2 described above, the strength of the rotating frame 2 can be improved by using the special structure of the triangle, and the stability of the rotating frame 2 during rotation or carrying the hanger 6 can be ensured. The first base frame 21 and the second base frame 22 can also be arranged in the shape of a pyramid or the like below the top plate 23, further improving the structural strength of the entire rotating frame 2.

[0044] Continuing to refer to Figure 3 As shown in the figure, the rotating frame 2 is connected with the output shaft of the rotating drive 3 through the connection between the first base frame 21 and the second base frame 22, that is, the vertex of the rotating frame 2 opposite to the side where the top plate 23 is located is connected with the output shaft of the rotating drive 3. It should be noted that the connection between the first base frame 21 and the second base frame 22 has a connection edge extending in the first direction, which can be sleeved outside the output shaft of the rotating drive 3 and connected in transmission by means of spline or the like. It can also serve as the rotating shaft of the rotating frame 2, improving the connection strength between the rotating frame 2 and the rotating base 1. At this time, the connection edge is only connected in transmission with the output shaft of the rotating drive 3 at its end.

[0045] Continuing to refer to Figures 1 to 3 As shown in the figure, the top plate 23 is provided with a sliding assembly 231 extending in the second direction, and the carrying frame 5 slides on the sliding assembly 231. It should be noted that the second direction refers to a direction always parallel to the top plate 23, and when the top plate 23 is turned over, the second direction also changes. Moreover, the second direction does not refer to a single direction, but refers to a direction extending from one end of the top plate 23 to the other end. The sliding assembly 231 refers to a sliding structure for reducing the friction between the carrying frame 5 and the top plate 23, which can be a smooth strip, a ball, a roller or the like.

[0046] Based on the sliding assembly 231 described above, the wear between the carrying frame 5 and the top plate 23 can be reduced, and at the same time the influence of the vibration generated by the sliding of the carrying frame 5 on the hanger 6 can also be reduced. In addition, the sliding speed of the carrying frame 5 can be improved, and the transportation efficiency of the hanger 6 can be improved.

[0047] In some embodiments, the top plate 23 is provided with guide rails 232 extending in the second direction, the carrier 5 is in sliding fit with the guide rails 232 and is in limit fit in a direction perpendicular to the second direction, wherein the first direction can be perpendicular to the second direction, the carrier 5 can be provided with a sliding groove in sliding fit with the guide rails 232 and slides on the guide rails 232, as long as the guide rails 232 and the carrier 5 can be in limit fit in the first direction, further, the two ends of the guide rails 232 can be provided with end limit, so that the carrier 5 cannot continue to slide when sliding to the two limit positions and disengages from the guide rails 232.

[0048] Based on the above guide rails 232, the stability and reliability of the carrier 5 during sliding can be ensured, and the carrier 5 can be prevented from disengaging from the top plate 23 when sliding on the top plate 23.

[0049] Continuing to refer to Figures 1 to 4 As shown in the figure, the top plate 23 is provided with a position sensor 233 at at least one end in the second direction, both ends of the top plate 23 can be provided with a position sensor 233 for detecting whether the carrier 5 moves to the limit position of the top plate 23 in the second direction, when the carrier 5 moves to the limit position on the top plate 23, the position sensor 233 can detect that the carrier 5 has moved to the position and give a signal to the rotary drive 3, so that the rotary drive 3 drives the rotary frame 2 to rotate to the horizontal or vertical state, wherein the rotary drive 3 can be a motor with an encoder or a stepper motor or other structure capable of driving the rotary frame 2 to rotate.

[0050] Based on the above position sensor 233, when the carrier 5 moves to the specified position, the rotary drive 3 can be automatically signaled, and the automatic overturning and feeding action can be realized, which not only improves the transportation accuracy of the hanger 6, but also improves the efficiency.

[0051] In some embodiments, the limit structure includes two guide bars 521 extending in the second direction, and a guide limit groove in sliding fit with the hanger 6 is formed between the two guide bars 521, and the width of the guide limit groove matches the width of the hanger 6.

[0052] Wherein, the two guide bars 521 can be respectively located on the two side edges of the hanger 6 in the first direction and abut against the hanger 6, and the two guide bars 521 extend in the second direction, so that the hanger 6 can slide stably, thereby improving the stability of the hanger 6 when moving to the carrier 5.

[0053] In some embodiments, the end of the guide strip 521 in the second direction is provided with a guide-in portion, specifically, the end opposite to the end of the hanger 6 when inserted, through which the hanger 6 can be guided when it just contacts the guide strip 521, to reduce friction or other effects that can facilitate the hanger 6 to enter the guide limiting groove, as long as it can ensure that the hanger 6 slides to the specified position on the carrier 5 in the correct posture and direction (second direction) quickly and efficiently. Specifically, the guide-in portion can be coated with a low-friction coating or provided with a beveled guide structure, etc.

[0054] In some embodiments, the distance between the guide-in portions on the two guide strips 521 gradually decreases in the direction of entry of the hanger 6, and further, the minimum distance between the two guide-in portions matches the width of the hanger 6 in the first direction, thereby avoiding the hanger 6 from being stuck by the guide strip 521. The two guide-in portions can be two beveled structures or two arc-shaped structures, or one of them can be a beveled or arc-shaped structure, as long as it can provide a guiding effect for the insertion end of the hanger 6.

[0055] Based on the above guide-in portion, the hanger 6 can be more easily slid into the guide limiting groove, reducing the alignment accuracy of the hanger 6 and further improving the automatic feeding efficiency of the hanger 6.

[0056] In further embodiments, the limiting structure includes at least two circumferential limiting points 522 arranged at intervals along the circumference of the hanger 6.

[0057] Based on the above arrangement of the circumferential limiting points 522, when the hanger 6 slides along the guide limiting groove to the specified position on the carrier 5, the circumferential limiting points 522 can be used to limit and fix the hanger 6, avoiding the hanger 6 from continuing to slide. It should be noted that in the direction of gravity, the guide limiting groove is located at the same height position as the circumferential limiting points 522, or at a higher height position than the circumferential limiting points 522, that is, when the hanger 6 is turned to a vertical state, the at least two circumferential limiting points 522 can support the hanger 6 below.

[0058] Optionally, the limiting structure further includes an end face limiting point 523, which has a set gap with the bearing plane 51, and the set gap matches the thickness of the hanger 6. The end face limiting point 523 abuts against at least part of the top end face of the hanger 6. Further, the end face limiting point 523 can be formed by an independent structure on the carrier 5, or directly formed by a limiting block processed with the circumferential limiting points 522 or further processed by the guide strip 521. The limiting block and / or the guide strip 521 can be an L-shaped structure, which forms the circumferential limiting points 522 at the position opposite to the circumferential surface of the hanger 6, and forms the end face limiting point 523 at the position opposite to the end face of the hanger 6.

[0059] Further, based on the above-mentioned end face limiting point 523, the hanger 6 can be further prevented from falling off the carrier 5 during automatic overturning and feeding, thereby improving safety and reliability.

[0060] With continued reference to Figure 1 and Figure 4 As shown, the L-shaped guide strip 521 forms a circumferential side limiting surface 5211 opposite the circumferential side of the hanger 6, and forms an end face limiting surface 5212 opposite the end face of the hanger 6, wherein the circumferential side limiting surface 5211 is away from one end of the hanger 6, and / or the end face limiting surface 5212 is away from one end of the hanger 6, and each is provided with a hanger guide structure gradually away from the guide limiting groove, which is a slope guide structure or an arc guide structure with gradually smaller opening distance in the insertion direction of the hanger 6, thereby further improving the probability of the hanger 6 entering the guide limiting groove.

[0061] In the description of the present specification, the description of the terms “one embodiment”, “some embodiments”, “an example”, “a specific example”, or “some examples” and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily mean the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0062] In addition, the terms “first”, “second” are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with “first”, “second” can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of “a plurality of” is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0063] Although the embodiments of the present application have been shown and described above, it can be understood that the above-mentioned embodiments are exemplary and cannot be understood as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above-mentioned embodiments within the scope of the present application.

Claims

1. A hanger flipping mechanism, characterized by, The utility model relates to a rotary hanger conveying device, including: Rotary base (1), rotary frame (2), rotary drive (3), transmission assembly (4) and bearing frame (5); Rotary drive (3) is installed on rotary base (1), rotary frame (2) is rotated with rotary base (1) through the rotation axis along the first direction extension rotation connection, and rotary drive (3) is used to drive rotary frame (2) rotation set angle; Bearing frame (5) includes bearing plane (51) and limiting structure, bearing plane (51) is used to place hanger (6), limiting structure sets up on bearing plane (51), and is used to limit the circumferential side of hanger (6), bearing frame (5) is slidably connected with rotary frame (2), and transmission assembly (4) sets up on rotary frame (2) and is used to drive bearing frame (5) on rotary frame (2) along the second direction sliding.

2. The hanger flipping mechanism of claim 1, wherein, Rotary frame (2) includes first chassis (21), second chassis (22) and top plate (23), and first chassis (21), second chassis (22) and top plate (23) form a triangular support around, and bearing frame (5) is slidably arranged on top plate (23).

3. The hanger flipping mechanism of claim 2, wherein, Top plate (23) is provided with sliding assembly (231) extending along the second direction, and bearing frame (5) slides on sliding assembly (231).

4. The hanger flipping mechanism of claim 2, wherein, Top plate (23) is provided with guide rail (232) extending along the second direction, bearing frame (5) is slidably connected with guide rail (232) and is limitedly connected in the direction perpendicular to the second direction.

5. The hanger flipping mechanism of claim 2, wherein, At least one end of top plate (23) along the second direction is provided with a position sensor (233).

6. The hanger flipping mechanism of any one of claims 1 to 5, wherein, The limiting structure includes two guide bars (521) extending along the second direction, and a guide limiting groove slidably connected with the hanger (6) is formed between the two guide bars (521), and the width of the guide limiting groove matches the width of the hanger (6).

7. The hanger flipping mechanism of claim 6, wherein, The end of the guide bar (521) along the second direction is provided with a guide portion.

8. The hanger flipping mechanism of claim 7, wherein, The distance between the guide portions on the two guide bars (521) gradually decreases in the direction of entry of the hanger (6).

9. The hanger flipping mechanism of claim 6, wherein, The limiting structure includes at least two circumferential limiting points (522), and the at least two circumferential limiting points (522) are arranged at intervals along the circumferential direction of the hanger (6).

10. The hanger flipping mechanism of claim 9, wherein, The limiting structure further includes an end face limiting point (523), and the end face limiting point (523) has a set gap with the bearing plane (51), the set gap matches the thickness of the hanger (6), and the end face limiting point (523) abuts against at least part of the top end face of the hanger (6).

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