Semiconductor vacuum equipment pipeline connecting piece

Abstract

The utility model discloses a pipeline connecting piece for semiconductor vacuum equipment, which relates to the technical field of semiconductor vacuum equipment and comprises a concave seat and a protection box, the protection box is fixedly connected to the surface of one end of the concave seat, a baffle is clamped on one side of the outer surface of the protection box, and bearings are fixedly mounted in two sides of the concave seat. A connecting column is fixedly connected to the outer surface of the concave base, a fixing plate is fixedly installed on the upper surface of the connecting column, a moving assembly is arranged in the concave base, and a butt joint assembly is arranged above the concave base. According to the pipeline butt-joint device, through the arrangement of the moving assembly and the rotation of the threaded column in the moving assembly, moving of the two ends meshed with the outer surface of the threaded column is achieved, moving butt joint of two pipelines needing to be connected is achieved, manual positioning butt joint is avoided, the positioning butt joint efficiency is improved, and the connecting efficiency is improved; and the second threads are meshed with first threads arranged on the outer surface of the first connecting pipeline, so that stable pipeline connection is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor vacuum equipment pipeline connecting piece. BACKGROUND

[0002] The semiconductor vacuum equipment is a series of equipment for creating and maintaining a specific vacuum environment to meet various semiconductor process requirements in the semiconductor manufacturing process, and the semiconductor vacuum equipment needs a connecting piece to install the connected pipeline.

[0003] At present, the connection of the pipeline generally needs a special connecting flange mechanism, and the rubber pipeline generally needs an intermediate pipeline connection, and the commonly used way is to connect two rubber pipes to a metal pipe, which is not only inconvenient to disassemble and assemble, but also has poor connection effect, often causes water leakage or air leakage, and the connection is easy to break, which has great limitations.

[0004] A pipeline connecting piece disclosed in Chinese patent CN212203477U, the pipeline connecting piece, including mounting plate and located connecting pipe on both sides of mounting plate, the inner diameter of connecting pipe is continuously increased from the end where the mounting plate is located to the other end, the outer wall of connecting pipe is fixedly provided with clamping block for supporting pipe around the circumferential direction, the connecting pipe is provided with reinforcing ring, the reinforcing ring is fixedly connected on the mounting plate and has elastic deformation as a whole due to the multiple strip-shaped grooves formed on the other end of the reinforcing ring, and the reinforcing ring is provided with a clamp.

[0005] When the above-mentioned device connects the pipelines, the two pipelines are directly connected, which is easy to cause positioning deviation and makes the butt joint of the pipelines not smooth, the butt joint efficiency of the two pipelines is low, and the connection is more troublesome, most of the pipeline connecting pieces are usually operated troublesome and not convenient to use.

[0006] Therefore, a semiconductor vacuum equipment pipeline connecting piece is proposed to solve the above problems. UTILITY MODEL CONTENTS

[0007] The utility model discloses a semiconductor vacuum equipment pipeline connecting piece.

[0008] The utility model discloses a semiconductor vacuum equipment pipeline connecting piece.

[0009] The utility model provides a semiconductor vacuum equipment pipe connecting piece, including concave seat and protection box, protection box fixedly connected with concave seat one end surface, the outer surface of protection box one side is clamped and has the baffle, the inside fixed mounting of both sides of concave seat has bearing, the outer surface fixedly connected with connecting column of concave seat, the fixed plate of connecting column upper surface fixed mounting has, and the fixed plate upper surface is provided with a plurality of bolt holes, the inside setting of concave seat has moving assembly, the butt joint assembly of concave seat top is provided with.

[0010] Further, the moving assembly includes a connecting rod fixedly connected to the inner wall of the protection box, a driving bevel gear rotatably mounted on one end surface of the connecting rod, a handle fixedly connected to one end surface of the driving bevel gear, a driven bevel gear rotatably mounted on one side of the inner wall of the protection box, and the driven bevel gear is engaged with the driving bevel gear, a threaded column mounted on the inner wall of the concave seat, the inner ring of the bearing is fixedly connected to the outer surface of both ends of the threaded column, one end surface of the threaded column is fixedly connected to one end surface of the driven bevel gear, a moving block engaged with the outer surface of the threaded column, and a fixed block fixedly connected to the upper surface of the moving block.

[0011] Further, the threaded column is provided with two sections of reverse threads, the moving blocks are symmetrically distributed on the outer surfaces of both sides of the threaded column, and an installation hole is formed through one side of the outer surface of each moving block.

[0012] Further, the butt joint assembly includes a positioning module and a connecting module, the positioning module includes a connecting box fixedly installed on the upper surface of the fixed block, a placement hole is formed through one side of the outer surface of the connecting box, a positioning hole is formed in one side of the outer surface of the connecting box, a positioning rod is mounted in the positioning hole, and the positioning rod is connected to the connecting boxes distributed on both sides.

[0013] Further, the connecting module includes a first connecting pipe placed in the placement hole formed through one side of the outer surface of the connecting box on one side, a first thread is formed on one side of the outer surface of the first connecting pipe, a second connecting pipe is placed in the placement hole formed through one side of the outer surface of the connecting box on the other side, a sealing ring is fixedly connected to the connecting place of the outer surface of the second connecting pipe and the connecting box on this side, a connecting sleeve is movably connected in the placement hole on this side, a second thread is formed on one side of the inner wall of the connecting sleeve, and a connecting sealing ring is fixedly installed on the outer surface of the connecting sleeve.

[0014] Further, one end of the first connecting pipe is butt jointed with one end of the second connecting pipe, the diameter of the connecting sleeve is larger than the diameter of the first connecting pipe, and the first thread and the second thread are engaged with each other.

[0015] The utility model discloses the following beneficial effects:

[0016] The utility model discloses, through setting up mobile subassembly, the rotation of threaded post in mobile subassembly, realize the mobile mobile of engaging in the both ends of threaded post outer surface, realize the mobile butt joint of the two pipelines of needing to connect, avoid manual positioning butt joint, improve the positioning butt joint efficiency, improve the connection efficiency, through setting up butt joint subassembly, the butt joint connection of one end of two pipelines is carried out in the inside setting up of connecting box simultaneously, rotates the connecting sleeve, makes the first thread of the second thread of connecting sleeve inner wall setting and the first thread of the first connecting pipeline outer surface setting engages, realizes the connection between the second connecting pipeline and the first connecting pipeline stable, and the connecting sealing ring is fixedly installed on the outer surface of connecting sleeve simultaneously, can realize the sealing treatment of the threaded connection, improves the connection effect. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is the first visual angle structure schematic drawing of the utility model;

[0018] Figure 2 It is the second visual angle structure schematic drawing of the utility model;

[0019] Figure 3 It is the mobile subassembly structure schematic drawing of the utility model;

[0020] Figure 4 It is the butt joint subassembly structure schematic drawing of the utility model.

[0021] Sign significance: 1, concave seat;101, connecting column;102, fixed plate;103, bolt hole;2, protection box;201, baffle;3, bearing;4, mobile subassembly;401, handle;402, driving bevel gear;403, connecting rod;404, driven bevel gear;405, threaded post;406, moving block;407, mounting hole;408, fixed block;5, butt joint subassembly;501, connecting box;502, placing hole;503, positioning hole;504, positioning rod;505, first connecting pipeline;506, first thread;507, second connecting pipeline;508, sealing ring;509, connecting sleeve;510, second thread;511, connecting sealing ring. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical scheme and advantage of the utility model embodiment clearer, below, the technical scheme in the utility model embodiment will be clearly and completely described with the drawings in the utility model embodiment, obviously, the described embodiment is a part of the embodiment of the utility model, instead of all the embodiment. The components of the utility model embodiment described and shown in the drawing here can be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the application provided in the drawings is not intended to limit the scope of the application claimed, but merely represents selected embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the application.

[0024] It should be noted that: similar signs and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0025] The electrical components appearing in the text are all connected with the main controller and 220V mains of the outside world, and the main controller can be a conventional known device such as a computer for control.

[0026] In the description of the embodiments of the application, it should be pointed out that the positions or location relationships indicated by the terms "inner", "outer", "upper", etc. are based on the positions or location relationships shown in the drawings, or the positions or location relationships commonly placed when the application product is used, which are only for the convenience of describing the application and simplifying the description, and cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, structure and operation, therefore, it cannot be understood as a limitation on the application.

[0027] As shown in Figures 1-4 A semiconductor vacuum equipment pipe connecting piece, including a concave seat 1 and a protection box 2, the protection box 2 is fixedly connected to one end surface of the concave seat 1, the protection box 2 is clamped with a baffle 201 on one side of the outer surface, the concave seat 1 is fixedly installed with a bearing 3 inside both sides, the concave seat 1 is fixedly connected with a connecting column 101 on the outer surface, the connecting column 101 is fixedly installed with a fixed plate 102 on the upper surface, and a plurality of bolt holes 103 are arranged on the upper surface of the fixed plate 102, the concave seat 1 is provided with a moving assembly 4 inside, and the concave seat 1 is provided with a butt joint assembly 5 above; the two pipes to be connected are placed in the butt joint assembly 5 arranged above the concave seat 1, the position of the two pipes is adjusted by operating the moving assembly 4, the butt joint connection is realized, the bolt is inserted into the bolt hole 103, the position of the fixed plate 102 is fixed, and the installation of the concave seat 1 is realized.

[0028] The moving assembly 4 comprises a connecting rod 403 fixedly connected to the inner wall of the protection box 2, a driving bevel gear 402 rotatably mounted on one end surface of the connecting rod 403, a handle 401 fixedly connected to one end surface of the driving bevel gear 402, a driven bevel gear 404 rotatably mounted on one side of the inner wall of the protection box 2 and engaged with the driving bevel gear 402, a threaded column 405 mounted in the inner wall of the concave seat 1 and fixedly connected to the inner ring of the bearing 3 at both ends of the outer surface, and fixedly connected to one end surface of the driven bevel gear 404 at one end surface of the threaded column 405, a moving block 406 engaged with the outer surface of the threaded column 405, and a fixed block 408 fixedly connected to the upper surface of the moving block 406; the handle 401 is rotated to drive the driving bevel gear 402 to rotate, and through the engagement, the driving bevel gear 402 drives the connecting rod 403 to rotate, so that the threaded column 405 is rotated, and the moving blocks 406 engaged on both sides of the outer surface of the threaded column 405 are moved towards each other, and through the movement of the fixed block 408, the first connecting pipeline 505 and the second connecting pipeline 507 placed on both sides are moved towards each other.

[0029] The threaded column 405 is provided with two sections of reverse threads, the moving blocks 406 are symmetrically distributed on both sides of the outer surface of the threaded column 405, one side of the outer surface of the moving block 406 penetrates through the mounting hole 407, and the moving block 406 is connected to the outer surface of the threaded column 405 through the mounting hole 407; when the threaded column 405 is rotated, the moving blocks 406 engaged on both sides of the outer surface of the threaded column 405 are moved, the threaded column 405 provided with two sections of reverse threads is rotated, the moving blocks 406 on both sides are moved towards each other, the fixed block 408 is moved, and the first connecting pipeline 505 and the second connecting pipeline 507 placed on both sides are moved towards each other and connected in a butt joint manner.

[0030] The butt joint assembly 5 comprises a positioning module and a connecting module, the positioning module comprises a connecting box 501 fixedly installed on the upper surface of the fixed block 408, a placement hole 502 penetrates through one side of the outer surface of the connecting box 501, a positioning hole 503 is arranged on one side of the outer surface of the connecting box 501, a positioning rod 504 is mounted in the positioning hole 503, and the positioning rod 504 is connected to the connecting boxes 501 distributed on both sides; when the connecting box 501 moves with the fixed block 408, the connecting box 501 simultaneously slides and is limited on the outer surface of the positioning hole 503, so that the movement path of the connecting box 501 is kept stable.

[0031] The connecting module comprises a first connecting pipe 505 placed in a placement hole 502 penetrating through one side of the outer surface of a connecting box 501, a first thread 506 is arranged on one side of the outer surface of the first connecting pipe 505, a second connecting pipe 507 is placed in a placement hole 502 penetrating through one side of the outer surface of the connecting box 501 on the other side, a sealing ring 508 is fixedly connected to the outer surface of the connecting box 501 at the connecting position of the second connecting pipe 507, a connecting sleeve 509 is movably connected in the placement hole 502 on the same side, a second thread 510 is arranged on one side of the inner wall of the connecting sleeve 509, and a connecting sealing ring 511 is fixedly installed on the outer surface of the connecting sleeve 509; the first thread 506 and the second thread 510 are engaged, so that one end of the connecting sleeve 509 is sleeved on one side of the outer surface of the first connecting pipe 505, and the connecting sealing ring 511 can seal the connecting position.

[0032] One end of the first connecting pipe 505 is connected to one end of the second connecting pipe 507, the diameter of the connecting sleeve 509 is greater than the diameter of the first connecting pipe 505, and the first thread 506 and the second thread 510 are arranged in meshing mode;

[0033] In conclusion, the semiconductor vacuum equipment pipe connecting piece is characterized in that the first connecting pipe 505 and the second connecting pipe 507 are placed in the placement holes 502 penetrating through one side of the outer surface of the connecting boxes 501 arranged on both sides, the handle 401 drives the driving bevel gear 402 to rotate through meshing, the driving bevel gear 402 drives the connecting rod 403 to rotate, thereby driving the threaded column 405 to rotate, so that the moving blocks 406 meshing on both sides of the outer surface of the threaded column 405 move towards each other, the fixed blocks 408 are driven to move, the first connecting pipe 505 and the second connecting pipe 507 placed on both sides move towards each other, the connecting box 501 is limited in sliding on the outer surface of the positioning hole 503, the moving path is stable, after one end of the first connecting pipe 505 enters the placement hole 502 penetrating through one side of the outer surface of the connecting box 501 on the other side, the connecting sleeve 509 is pulled, the connecting sleeve 509 moves towards one end of the first connecting pipe 505, the connecting sleeve 509 is rotated, the second thread 510 and the first thread 506 are meshed and connected, and the connection between the second connecting pipe 507 and the first connecting pipe 505 is completed.

[0034] The basic principle, main features and advantages of the semiconductor vacuum equipment pipe connecting piece are shown and described above. It should be understood by those skilled in the art that the semiconductor vacuum equipment pipe connecting piece is not limited by the above embodiments, and the above embodiments and descriptions in the specification are only the principles of the semiconductor vacuum equipment pipe connecting piece. Various changes and improvements can be made without departing from the spirit and scope of the semiconductor vacuum equipment pipe connecting piece, and these changes and improvements all fall within the scope of the semiconductor vacuum equipment pipe connecting piece claimed. The protection scope required by the semiconductor vacuum equipment pipe connecting piece is defined by the appended claims and their equivalents.

Claims

1. A semiconductor vacuum equipment pipe connector, comprising a concave seat (1) and a protective box (2), wherein the protective box (2) is fixedly connected to one end surface of the concave seat (1), a baffle (201) is snapped onto one side of the outer surface of the protective box (2), bearings (3) are fixedly installed inside both sides of the concave seat (1), a connecting post (101) is fixedly connected to the outer surface of the concave seat (1), a fixing plate (102) is fixedly installed on the upper surface of the connecting post (101), and a plurality of bolt holes (103) are provided on the upper surface of the fixing plate (102), characterized in that: The concave seat (1) is internally provided with a moving assembly (4), and the concave seat (1) is provided with a docking assembly (5) above.

2. A semiconductor vacuum device pipe connection according to claim 1, characterized in that: The moving assembly (4) comprises a connecting rod (403) fixedly connected to the inner wall of the protection box (2), one end surface of the connecting rod (403) is rotatably provided with a driving bevel gear (402), one end surface of the driving bevel gear (402) is fixedly connected with a handle (401), one side of the inner wall of the protection box (2) is rotatably provided with a driven bevel gear (404), the driven bevel gear (404) is engaged with the driving bevel gear (402), a threaded column (405) is installed on the inner wall of the concave seat (1), the inner circle of the bearing (3) is fixedly connected with the outer surfaces of the two ends of the threaded column (405), one end surface of the threaded column (405) is fixedly connected with one end surface of the driven bevel gear (404), the outer surface of the threaded column (405) is engaged with a moving block (406), and the upper surface of the moving block (406) is fixedly connected with a fixed block (408).

3. A semiconductor vacuum device pipe connection according to claim 2, characterized in that: The threaded column (405) is provided with two sections of reverse threads, the moving blocks (406) are symmetrically distributed on the outer surfaces of the two sides of the threaded column (405), one side of the outer surface of the moving block (406) penetrates an installation hole (407), and the moving block (406) is connected with the outer surface of the threaded column (405) through the installation hole (407).

4. A semiconductor vacuum device feedthrough according to claim 1, characterized in that: The docking assembly (5) comprises a positioning module and a connecting module, the positioning module comprises a connecting box (501) fixedly installed on the upper surface of the fixed block (408), one side of the outer surface of the connecting box (501) penetrates a placing hole (502), one side of the outer surface of the connecting box (501) is provided with a positioning hole (503), a positioning rod (504) is installed in the positioning hole (503), and the positioning rod (504) is connected with the connecting boxes (501) distributed on the two sides.

5. A semiconductor vacuum device pipe connection according to claim 4, characterized in that: The connecting module comprises a first connecting pipeline (505) placed in the placing hole (502) penetrating one side of the outer surface of the connecting box (501) on one side, a first thread (506) is arranged on one side of the outer surface of the first connecting pipeline (505), a second connecting pipeline (507) is placed in the placing hole (502) penetrating one side of the outer surface of the connecting box (501) on the other side, a sealing ring (508) is fixedly connected with the connecting box (501) at the side where the second connecting pipeline (507) is connected, a connecting sleeve (509) is movably connected in the placing hole (502) on the side, a second thread (510) is arranged on one side of the inner wall of the connecting sleeve (509), and a connecting sealing ring (511) is fixedly installed on the outer surface of the connecting sleeve (509).

6. A semiconductor vacuum device feedthrough according to claim 5, characterized in that: One end of the first connecting pipeline (505) is docked with one end of the second connecting pipeline (507), the diameter of the connecting sleeve (509) is greater than that of the first connecting pipeline (505), and the first thread (506) and the second thread (510) are engaged with each other.

Images