Etching machine

Abstract

The utility model relates to an etching machine. The etching machine comprises a machine table connecting column; the tray assembly is used for placing workpieces; the connecting piece comprises a machine table connecting piece and a tray connecting piece which are connected with each other, the machine table connecting piece is connected with the machine table connecting column, the tray connecting piece can support the tray assembly, the machine table connecting piece is made of an insulating material, and the tray connecting piece and the machine table connecting column are connected to the two opposite sides of the machine table connecting piece respectively; the machine table connecting piece can prevent the conductive polymer generated between the connecting piece and the tray assembly from being attached to the machine table connecting column and is used for separating the electric connection between the conductive polymer on the tray connecting piece and the machine table connecting column. Effective isolation of conductive polymers that may be generated around the tray assembly is achieved. Therefore, even if the tray assembly generates conductive polymers in the machining process, the conductive polymers cannot be directly conducted to the machine table connecting column through the tray connecting piece, so that the overload phenomenon caused by plasma bombardment is avoided, and the production safety is improved.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of etching equipment, in particular, to an etching machine. BACKGROUND

[0002] The connecting structure of the tray part of the plasma etching machine can play the functions of tray conveying buffer and tray position fixing. However, a large amount of conductive polymer is generated in the etching cavity during the etching process of the etching machine. The conductive polymer is formed by the plasma chemical reaction of special gases such as chlorine and boron trichloride. The conductive polymer will adhere to the surface of the component. When the polymer adheres to the surface and covers relatively thick, the connecting structure between the tray and the machine table and the cavity will be conducted through the polymer, and the conductive phenomenon will occur. The connecting structure will be broken down and burned by plasma discharge. CONTENT OF THE UTILITY MODEL

[0003] The purpose of the present disclosure is to provide an etching machine to solve the problem that the conductive polymer will conduct the connecting structure between the tray and the machine table, and the connecting structure will be burned.

[0004] In order to achieve the above purpose, the present disclosure provides an etching machine, comprising:

[0005] A machine table connecting column;

[0006] A tray assembly for placing workpieces; and

[0007] A connecting piece comprising a machine table connecting piece and a tray connecting piece connected to each other, the machine table connecting piece is connected to the machine table connecting column, and the tray connecting piece can support the tray assembly,

[0008] The machine table connecting piece is made of insulating material, and the tray connecting piece and the machine table connecting column are connected to opposite sides of the machine table connecting piece, respectively. The machine table connecting piece can prevent the conductive polymer generated between the connecting piece and the tray assembly from adhering to the machine table connecting column, and is used to cut off the electrical connection between the conductive polymer on the tray connecting piece and the machine table connecting column.

[0009] Optionally, the machine table connecting piece comprises:

[0010] A first connecting section, the machine table connecting column is connected to the first connecting section; and

[0011] A second connecting section, the second connecting section is in L-shaped structure, the longitudinal section of the L-shaped structure is connected to the side of the first connecting section away from the machine table connecting column, and the transverse section of the L-shaped structure is connected to the tray connecting piece.

[0012] Optionally, the longitudinal segment of the L-shaped structure is located at a side of the first connecting segment away from the tray assembly, so that the opening formed by the L-shaped structure and the first connecting segment faces the tray assembly.

[0013] Optionally, the tray connecting piece is connected at a side of the horizontal segment away from the machine table connecting piece.

[0014] Optionally, the first connecting segment and the second connecting segment are integrally formed.

[0015] Optionally, the machine table connecting piece further comprises a fastener, which is screwed through the first connecting segment and the machine table connecting column.

[0016] Optionally, the tray connecting piece is a stepped structure, and an end of the tray connecting piece that bears the tray assembly is lower in height than an end of the tray connecting piece that connects the machine table connecting piece.

[0017] Optionally, a side of the machine table connecting piece away from the tray assembly is formed with a clearance.

[0018] Optionally, the number of the connecting pieces is multiple, and the connecting pieces are circumferentially and evenly arranged at the edge of the tray assembly.

[0019] Optionally, the multiple connecting pieces are evenly arranged.

[0020] Through the above technical solution, the tray connecting piece and the machine table connecting column on the etching machine table body are respectively connected at opposite sides of the machine table connecting piece, so that the tray connecting piece can be connected with the machine table body of the etching machine, and the machine table connecting piece is made of insulating material, which not only directly cuts off the conduction between the machine table connecting column and the tray connecting piece, but also directly cuts off the attachment of the conductive polymer generated near the tray assembly on the machine table connecting column, and also cuts off the conduction between the machine table connecting column and the conductive polymer attached to the tray connecting piece, thereby effectively isolating the conductive polymer that may be generated around the tray assembly. Even if the tray assembly generates conductive polymer during processing, these substances cannot directly conduct to the machine table connecting column through the tray connecting piece, thereby avoiding the overload phenomenon caused by plasma bombardment, solving the burning problem caused by plasma discharge, and improving the production safety.

[0021] Other features and advantages of the present disclosure will be described in detail in the following detailed description section. BRIEF DESCRIPTION OF DRAWINGS

[0022] The accompanying drawings are included to provide a further understanding of the present disclosure and constitute a part of the specification, and are used together with the following detailed description to explain the present disclosure, but do not constitute a limitation on the present disclosure. In the drawings:

[0023] Figure 1 is a schematic view of an etching machine according to an embodiment of the present disclosure.

[0024] Figure 2 is a schematic view of another perspective of a connecting piece of an etching machine according to an embodiment of the present disclosure.

[0025] Legend of reference signs

[0026] 1 - machine connecting column; 2 - tray assembly; 3 - connecting piece; 31 - machine connecting piece; 310 - avoiding opening; 311 - first connecting section; 312 - second connecting section; 313 - fastener; 32 - tray connecting piece; 4 - conductive polymer. DETAILED DESCRIPTION

[0027] The specific embodiments of the present disclosure will be described in detail hereinafter with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely intended to explain and illustrate the present disclosure, and are not intended to limit the present disclosure.

[0028] In the present disclosure, the orientation words such as "upper" and "lower" are defined with respect to the arrangement direction of the etching machine when it is actually used, and the orientation words such as "inner" and "outer" are defined with respect to the outline of the corresponding components. The use of the terms "first", "second", and the like is intended to distinguish different components, and does not have sequential and important meanings. In addition, in the following description, the same reference signs in different drawings represent the same or similar elements, unless otherwise explained.

[0029] According to an embodiment of the present disclosure, as shown in Figure 1 and Figure 2 , an etching machine is provided, which includes a machine connecting column 1, a tray assembly 2, and a connecting piece 3. The tray assembly 2 can be used to place workpieces. The connecting piece 3 can include a machine connecting piece 31 and a tray connecting piece 32 connected to each other, the machine connecting piece 31 connects the machine connecting column 1, and the tray connecting piece 32 is capable of receiving the tray assembly 2, wherein the machine connecting piece 31 is made of insulating material, and the tray connecting piece 32 and the machine connecting column 1 are connected to opposite sides of the machine connecting piece 31, respectively, the machine connecting piece 31 is capable of preventing the conductive polymer 4 generated between the connecting piece 3 and the tray assembly 2 from adhering to the machine connecting column 1, and is used to isolate the electrical connection between the conductive polymer 4 on the tray connecting piece 32 and the machine connecting column 1.

[0030] By the above technical solution, the tray connecting piece 32 and the machine connecting column 1 on the machine body of the etching machine are respectively connected on the opposite sides of the machine connecting piece 31, so that the tray connecting piece 32 can be connected with the machine body of the etching machine, and the machine connecting piece 31 is made of insulating material, which can not only directly cut off the conduction between the machine connecting column 1 and the tray connecting piece 32, but also directly cut off the attachment of the conductive polymer 4 generated near the tray assembly 2 on the machine connecting column 1, and can also cut off the conduction between the machine connecting column 1 and the conductive polymer 4 attached to the tray connecting piece 32, thereby realizing effective isolation of the conductive polymer 4 that may be generated around the tray assembly 2. It is ensured that even if the tray assembly 2 generates conductive polymer 4 during processing, these substances cannot directly conduct to the machine connecting column 1 through the tray connecting piece 32, thereby avoiding the overload phenomenon caused by plasma bombardment, solving the burning problem caused by plasma discharge, and improving the production safety.

[0031] It should be noted that the machine connecting piece 31 can be made of insulating resin material, or made of insulating ceramic material, and the present disclosure does not limit the same. The number of connecting pieces 3 can be multiple, and they are circumferentially spaced apart at the edge of the tray assembly 2. In this way, the tray assembly 2 can be supported and fixed in all directions. This arrangement not only improves the stability of the tray assembly 2, but also reduces the risk of workpiece displacement caused by vibration or external force. In addition, the multiple connecting pieces 3 can also be arranged at equal intervals, so that the stress of the tray assembly 2 during processing is more uniform, thereby improving the processing precision and product quality.

[0032] Further, as shown in Figure 1 and Figure 2 , the machine connecting piece 31 includes a first connecting segment 311 and a second connecting segment 312. The machine connecting column 1 can be connected to the first connecting segment 311, one end of the second connecting segment 312 is connected to the side of the first connecting segment 311 away from the machine connecting column 1, and the other end can be connected with the tray connecting piece 32. Here, the first connecting segment 311 and the second connecting segment 312 can be welded, clamped or integrally formed. When the first connecting segment 311 and the second connecting segment 312 are integrally formed, not only can the production process of the machine connecting piece 31 be simplified, but also the overall strength of the machine connecting piece 31 can be improved, thereby avoiding the stress concentration problem caused by the welding or bolt connection between the connecting pieces, thereby prolonging the service life of the machine connecting piece 31. In addition, the integrally formed structure can make the machine connecting piece 31 more stable and reliable when bearing the gravity of the tray assembly 2 and the workpiece thereon, thereby ensuring the long-term stable operation of the etching machine.

[0033] Further, as shown in Figure 1As shown, the second connecting section 312 can be in L-shaped structure, the longitudinal section of the L-shaped structure can be connected with the first connecting section 311, and the transverse section of the L-shaped structure can be connected with the tray connecting piece 32. The design of the L-shaped structure can increase the distance between the tray connecting piece 32 and the machine connecting column 1. The increase of the distance can help to reduce the thickness of the conductive polymer 4 attached on the connecting piece 3 around the tray assembly 2.

[0034] In addition, since the second connecting section 312 is in L-shaped structure, when the longitudinal section of the L-shaped structure is located on the side of the first connecting section 311 away from the tray assembly 2, the opening formed by the L-shaped structure and the first connecting section 311 can be directed towards the tray assembly 2, so that the L-shaped structure and the first connecting section 311 can form a concave surface, thereby further extending the attachment path of the conductive polymer 4, which can further reduce the thickness and the conductivity of the conductive polymer 4, and at the same time, it also increases the selectable resistance range of the machine connecting piece 31, and improves the selectability of the machine connecting piece 31.

[0035] Further, as shown in Figure 1 and Figure 2 the tray connecting piece 32 can be connected on the side of the transverse section away from the machine connecting piece 31, which can not only improve the insulation distance between the tray connecting piece 32 and the machine connecting piece 31, but also can reduce the attachment probability of the conductive polymer 4, thereby reducing the conduction probability and further improving the insulation effect of the machine connecting piece 31.

[0036] Specifically, for the connection mode of the machine connecting piece 31 and the machine connecting column 1, as shown in Figure 1 and Figure 2As shown, the machine table connecting piece 31 can further include a fastener 313 which is screwed through the first connecting section 311 and the machine table connecting column 1. The fastener 313 can be a bolt, and the bottom of the machine table connecting column 1 can be formed with a threaded hole, and the first connecting section 311 is formed with a through hole for the rod of the bolt to pass through. The bolt is screwed until the head of the bolt abuts against the side of the first connecting section 311 away from the machine table connecting column 1, thereby fixing the first connecting section 311 on the machine table connecting column 1. The fastener 313 can also be a screw rod and a nut structure, wherein one end of the screw rod can be fixed on the machine table connecting column 1, and the first connecting section 311 is formed with a through hole for the screw rod to pass through. The nut is sleeved on the screw rod and screwed until the nut abuts against the side of the first connecting section 311 away from the machine table connecting column 1, thereby fixing the first connecting section 311 on the machine table connecting column 1. The threaded connection is simple and easy to implement, and has high connection strength and stability, which can avoid the problem of connection loosening caused by vibration or external force. It should be noted that the tray connecting piece 32 and the machine table connecting piece 31 can also be connected by a fastener, which can be a bolt as described above, or a screw rod and nut structure. In addition, the machine table connecting piece 31 and the machine table connecting column 1 can also be connected by clamping or pin shaft fixing, which is not limited in the present disclosure.

[0037] According to an embodiment of the present disclosure, as shown in Figure 1 As shown, the side of the machine table connecting piece 31 away from the tray assembly 2 can be formed with a avoiding opening 310, so that the machine table connecting piece 31 can avoid other components in the machine table, thereby avoiding installation difficulties or operation failures caused by space conflicts. Here, the avoiding opening 310 can be provided on the first connecting section 311 as described above, or on the second connecting section 312, which is not limited in the present disclosure.

[0038] According to an embodiment of the present disclosure, the tray connecting piece 32 can have a stepped structure, and the end of the tray connecting piece 32 carrying the tray assembly 2 can be lower than the end of the tray connecting piece 32 connecting the machine table connecting piece 31 in the height direction. The stepped structure can enable the tray assembly 2 to be stably placed on the tray connecting piece 32, meet the placement requirements of the tray assembly 2, improve the stability and reliability of the connection, and avoid the problems of workpiece damage or processing precision reduction caused by unstable placement. At the same time, the stepped structure also increases the contact area between the tray connecting piece 32 and the tray assembly 2, thereby improving the stability of the connection.

[0039] The preferred embodiments of the present disclosure are described in detail above with reference to the drawings, but the present disclosure is not limited to the specific details in the above-described embodiments. Within the technical concept of the present disclosure, various simple modifications can be made to the technical solutions of the present disclosure, and these simple modifications all belong to the protection scope of the present disclosure.

[0040] It should be further noted that various specific technical features described in the above specific embodiments can be combined in any suitable manner, and the disclosure will not be repeated here for various possible combinations.

[0041] In addition, various different embodiments of the disclosure can also be combined with each other as long as they do not contradict the idea of the disclosure, and they should also be considered as disclosed by the disclosure.

Claims

1. An etching machine characterized by, The utility model relates to a connecting piece for a tray assembly, comprising: a machine table connecting column; a tray assembly for placing workpieces; and a connecting piece comprising a machine table connecting piece and a tray connecting piece connected to each other, the machine table connecting piece being connected to the machine table connecting column, and the tray connecting piece being capable of supporting the tray assembly, wherein the machine table connecting piece is made of an insulating material, and the tray connecting piece and the machine table connecting column are respectively connected to opposite sides of the machine table connecting piece, the machine table connecting piece being capable of preventing the conductive polymer generated between the connecting piece and the tray assembly from adhering to the machine table connecting column and being used for isolating the electric connection between the conductive polymer on the tray connecting piece and the machine table connecting column. The machine table connecting piece comprises:

2. The etching machine of claim 1, wherein, a first connecting section, the machine table connecting column being connected to the first connecting section; and a second connecting section, the second connecting section being in an L-shaped structure, the longitudinal section of the L-shaped structure being connected to a side of the first connecting section away from the machine table connecting column, and the transverse section of the L-shaped structure being connected to the tray connecting piece. The longitudinal section of the L-shaped structure is located at a side of the first connecting section away from the tray assembly, so that the opening formed by the L-shaped structure and the first connecting section faces the tray assembly.

3. The etching machine of claim 2, wherein, The tray connecting piece is connected to a side of the transverse section away from the machine table connecting piece.

4. The etching machine of claim 2, wherein, The first connecting section and the second connecting section are in an integral molding structure.

5. The etching machine of claim 2, wherein, The machine table connecting piece further comprises a fastener, the fastener being threadedly connected to the machine table connecting column through the first connecting section.

6. The etching machine of claim 2, wherein, The tray connecting piece is in a stepped structure, one end of the tray connecting piece carrying the tray assembly being lower than the other end of the tray connecting piece connected to the machine table connecting piece in the height direction.

7. The etching machine of claim 1, wherein, The side of the machine table connecting piece away from the tray assembly is formed with a clearance.

8. The etching machine of claim 1, wherein, The number of the connecting pieces is multiple, and the connecting pieces are circumferentially and equidistantly arranged at the edge of the tray assembly.

9. The etching machine of any one of claims 1-8, wherein, The multiple connecting pieces are equidistantly arranged.

10. The etching machine of claim 9, wherein, ​

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