Sputtering target material polishing clamp

Abstract

The utility model discloses a sputtering target material polishing clamp which comprises a working table and further comprises a fixing assembly arranged on the working table and used for fixing a sputtering target material in the grinding process, the fixing assembly comprises a bottom plate fixedly connected to the working table, the bottom plate is connected with a fixing cylinder through a plurality of connecting columns, and the fixing cylinder is fixedly connected with the working table. Each fixing cylinder is provided with a positioning assembly for positioning a sputtering target material, a plurality of arc-shaped clamping plates are arranged on the side wall of each fixing cylinder, and each fixing cylinder is provided with a driving assembly for driving each arc-shaped clamping plate. Through the arrangement of the fixing assembly, the multi-point clamping of the sputtering target material is formed while the sputtering target material made of a material with poorer magnetism is clamped and fixed, so that the clamping force is uniformly distributed on the circumferential surface of the sputtering target material, and the risk of clamping deformation of the sputtering target material caused by stress concentration is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to sputtering target material polishing technical field, specifically is a kind of sputtering target material polishing fixture. BACKGROUND

[0002] When using numerical control grinding machine to carry out plane grinding processing to sputtering target material, since part sputtering target material is relatively soft, in order to avoid surface deformation due to stress concentration in grinding process, the form of magnetic attraction is usually used to fix sputtering target material, but part metal target (such as aluminum, copper, titanium, etc.) is limited due to poor magnetism, and in the grinding process, the cutting force and friction force between grinding tool and sputtering target material are generated, and since the magnetic clamping force is relatively limited, sputtering target material is prone to displacement or vibration during grinding, thereby affecting grinding processing precision.

[0003] Therefore, a sputtering target material polishing fixture is needed to solve the above problems. UTILITY MODEL CONTENT

[0004] To achieve the above object, the utility model provides the following technical scheme: a kind of sputtering target material polishing fixture, including workbench, still including the fixed component for being set in workbench and being used to fix sputtering target material during grinding process;

[0005] The fixed component includes the bottom plate fixedly connected to the workbench, the bottom plate is connected with fixed cylinder by multiple connecting columns, each fixed cylinder is provided with a positioning assembly for positioning sputtering target material, each fixed cylinder side wall is provided with multiple arc clamps, each fixed cylinder is provided with a driving assembly for driving each arc clamp, and the bottom plate is provided with a linkage assembly for synchronously driving each group of arc clamps.

[0006] The driving assembly includes multiple driving boxes fixedly connected to the side wall of the fixed cylinder, each driving box is rotatably connected with a threaded rod, the threaded rod side wall is threadedly connected with a driving plate, each driving box is provided with a driving hole on the side away from the bottom plate, each driving hole is slidably connected with an L-shaped plate, one end of each L-shaped plate is connected with the driving plate, the other end of each L-shaped plate is connected with the arc clamp, and the fixed cylinder is provided with a rotating assembly for synchronously rotating each threaded rod.

[0007] The rotating assembly includes a rotating ring rotatably connected to the fixed cylinder, the rotating ring is fixedly connected with multiple groups of rotating teeth on the side close to the arc clamp, each threaded rod side wall is fixedly connected with a driving gear, each driving box side wall is provided with an avoiding hole, each driving rotating tooth is slidably connected to the avoiding hole and is meshingly arranged with the driving gear.

[0008] The linkage assembly comprises a plurality of L-shaped support plates fixedly connected to the bottom plate on the side away from the workbench, one end of each of the L-shaped support plates is fixedly connected with a round plate, the round plate is connected with a first bevel gear through a rotating rod, one end of each of the threaded rods close to the rotating rod is fixedly connected with a second bevel gear, each of the second bevel gears is arranged in meshing with the first bevel gear, and the side of the round plate away from the bottom plate is provided with a motor.

[0009] The positioning assembly comprises a positioning rod fixedly connected to the bottom wall of the fixed cylinder, and the side of the positioning rod away from the bottom plate is provided with a positioning plate.

[0010] The positioning rod and the positioning plate are connected through a countersunk bolt.

[0011] Compared with the prior art, the utility model has the advantages that:

[0012] The utility model discloses a fixing assembly is arranged, and the cooperation of drive assembly and rotating assembly is realized to the sputtering target material of poor magnetic material's sputtering target material clamping fixation is fixed, utilizes the circumferential distribution of multiple arc clamps simultaneously, forms the multiple point clamping of sputtering target material, makes the clamping force evenly distributes in the circumferential surface of sputtering target material, makes the pressure that target material received in the circumferential direction is approximately equal, thereby reduce the risk of sputtering target material clamping deformation caused by stress concentration, simultaneously, under the action of linkage assembly, the synchronous clamping fixation of multiple sputtering target materials can be realized, thereby realizes the synchronous grinding processing of multiple sputtering target materials, improves the efficiency of multiple sputtering target material clamping fixation and grinding. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is the whole structure schematic diagram of the utility model;

[0014] Figure 2 It is the drive assembly structure schematic diagram of the utility model;

[0015] Figure 3 It is Figure 2 It is the enlarged view of A in the middle;

[0016] Figure 4 It is the positioning assembly structure schematic diagram of the utility model;

[0017] Figure 5 It is the linkage assembly structure schematic diagram of the utility model.

[0018] In the figure: 1, workbench; 201, bottom plate; 202, connecting column; 203, fixed cylinder; 204, arc-shaped clamping plate; 301, drive box; 302, threaded rod; 303, drive plate; 304, drive hole; 305, L-shaped plate; 401, rotating ring; 402, rotating tooth; 403, avoiding hole; 404, drive gear; 501, L-shaped support plate; 502, round plate; 503, rotating rod; 504, first bevel gear; 505, second bevel gear; 506, motor; 601, positioning rod; 602, positioning plate; 603, countersunk bolt. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0020] Embodiment 1

[0021] Please refer to Figures 1-5 , a sputtering target material polishing clamp in the figure, comprising a workbench 1, further comprising a fixing assembly arranged on the workbench 1 for fixing the sputtering target material during grinding;

[0022] The fixing assembly comprises a bottom plate 201 fixedly connected to the workbench 1, the bottom plate 201 is connected with a fixed cylinder 203 through a plurality of connecting columns 202, each fixed cylinder 203 is provided with a positioning assembly for positioning the sputtering target material, the sidewall of each fixed cylinder 203 is provided with a plurality of arc-shaped clamping plates 204, one side of each arc-shaped clamping plate 204 close to each other is provided with a flexible protective pad, each fixed cylinder 203 is provided with a driving assembly for driving each arc-shaped clamping plate 204, and the bottom plate 201 is provided with a linkage assembly for synchronously driving each group of arc-shaped clamping plates 204;

[0023] It should be noted here that: through the arrangement of the fixing assembly, under the cooperation of the driving assembly and the rotating assembly, the sputtering target material of poor magnetism is clamped and fixed, and at the same time, the circumferential distribution of the plurality of arc-shaped clamping plates 204 forms multi-point clamping of the sputtering target material, so that the clamping force is uniformly distributed on the circumferential surface of the sputtering target material, so that the pressure received by the target material in the circumferential direction is approximately equal, thereby reducing the risk of clamping deformation of the sputtering target material caused by stress concentration, and at the same time, under the action of the linkage assembly, synchronous clamping and fixing of multiple sputtering target materials can be realized, so that synchronous grinding processing of multiple sputtering target materials is realized, and the efficiency of clamping and fixing and grinding of multiple sputtering target materials is improved.

[0024] It is worth noting that this application is primarily aimed at cylindrical sputtering targets.

[0025] Please see Figure 2 and Figure 3 The driving assembly shown in the figure includes multiple driving boxes 301 fixedly connected to the side wall of the fixed cylinder 203. Each driving box 301 is rotatably connected to a threaded rod 302. A driving plate 303 is threadedly connected to the side wall of the threaded rod 302. Each driving box 301 has a driving hole 304 on the side away from the bottom plate 201. Each driving hole 304 is slidably connected to an L-shaped plate 305. One end of each L-shaped plate 305 is connected to the driving plate 303, and the other end of each L-shaped plate 305 is connected to the arc-shaped clamping plate 204. The fixed cylinder 203 is provided with a rotating assembly for synchronously rotating each threaded rod 302.

[0026] It should be noted here that the configuration of the drive component facilitates the movement of the arc-shaped clamp 204 towards or away from the sputtering target.

[0027] Please see Figure 2 and Figure 3 The rotating assembly shown in the figure includes a rotating ring 401 rotatably connected to the fixed cylinder 203. Multiple sets of rotating teeth 402 are fixedly connected to the side of the rotating ring 401 near the arc-shaped clamp 204. Each threaded rod 302 has a drive gear 404 fixedly connected to its side wall. Each drive box 301 has a clearance hole 403 on its side wall. Each drive rotating tooth 402 is slidably connected to the clearance hole 403 and meshes with the drive gear 404.

[0028] It should be noted that the rotating component facilitates the synchronous rotation of the various threaded rods 302 distributed around the circumference, thereby enabling the various circumferentially distributed arc-shaped clamps 204 to move synchronously closer to or further away from each other.

[0029] Please see Figure 1 and Figure 5 The linkage assembly shown in the figure includes multiple L-shaped support plates 501 fixedly connected to the side of the base plate 201 away from the worktable 1. A circular plate 502 is fixedly connected to one end of each L-shaped support plate 501 that is close to each other. The circular plate 502 is connected to a first bevel gear 504 through a rotating rod 503. A second bevel gear 505 is fixedly connected to one end of each threaded rod 302 that is close to the rotating rod 503. Each second bevel gear 505 is meshed with the first bevel gear 504. A motor 506 is provided on the side of the circular plate 502 away from the base plate 201. The output end of the motor 506 is connected to the rotating rod 503.

[0030] It should be noted that the linkage component facilitates the synchronous rotation of the relative threaded rods 302, thereby achieving synchronous clamping and fixing of multiple sputtering targets. This improves the efficiency of clamping, fixing, and grinding multiple sputtering targets while simultaneously achieving synchronous grinding of multiple sputtering targets.

[0031] Working principle: When grinding sputtering targets (cylindrical type), multiple sputtering targets are first placed in the fixed cylinder 203. Then, the motor 506 is started, which drives the first bevel gear 504 on the side wall of the rotating rod 503 to rotate. Then, under the mutual meshing transmission of the first bevel gear 504 and each second bevel gear 505, the corresponding threaded rods 302 are driven to rotate.

[0032] During the rotation of the respective threaded rods 302, the drive gears 404 on the sidewalls will rotate synchronously. Under the meshing transmission action of the drive gears 404 and the rotating gears 402, the threaded rods 302 arranged in a ring will rotate synchronously. Thus, under the meshing transmission action of the threaded rods 302 and the drive plate 303, and the guiding action of the L-shaped plate 305 and the drive hole 304, the respective arc-shaped clamping plates 204 will move closer to each other. When the respective arc-shaped clamping plates 204 abut against the sidewall of the sputtering target, the rotation of the motor 506 can be stopped. Under the clamping action of 4, while clamping and fixing sputtering targets with poor magnetic properties, the circumferential distribution of multiple arc-shaped clamping plates 204 forms multi-point clamping of the sputtering targets, so that the clamping force is evenly distributed on the circumferential surface of the sputtering targets, making the pressure on the targets in the circumferential direction approximately equal, thereby reducing the risk of sputtering targets being deformed due to stress concentration. At the same time, under the action of the linkage component, multiple sputtering targets can be clamped and fixed synchronously, thereby improving the efficiency of clamping, fixing and grinding multiple sputtering targets while realizing synchronous grinding of multiple sputtering targets.

[0033] Example 2

[0034] Please see Figure 4 This embodiment further illustrates Example 1. The positioning component shown in the figure includes a positioning rod 601 fixedly connected to the bottom wall of the fixed cylinder 203. A positioning plate 602 is provided on the side of the positioning rod 601 away from the bottom plate 201. The positioning rod 601 and the positioning plate 602 are connected by countersunk bolts 603.

[0035] It should be noted here that the positioning components are used to position sputtering targets of different thicknesses, so that the grinding plane of the sputtering target is higher than the arc-shaped clamp 204, thereby ensuring the safety and completeness of the sputtering target grinding.

[0036] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A sputtering target grinding fixture, characterized in that: The utility model relates to a sputtering target material grinding device, including workbench (1), Still include: set up in workbench (1) for the fixed component of sputtering target material during grinding is fixed, The fixed component includes the bottom plate (201) fixedly connected with the workbench (1), the bottom plate (201) is connected with the fixed cylinder (203) through a plurality of connecting columns (202), each fixed cylinder (203) is equipped with the positioning assembly for positioning sputtering target material, Wherein, each fixed cylinder (203) side wall is equipped with a plurality of arc clamping plates (204), and the fixed cylinder (203) is equipped with the drive assembly for driving each arc clamping plate (204). Secondly, the bottom plate (201) is equipped with the linkage assembly for the synchronous drive of each group of arc clamping plates (204).

2. The sputtering target polishing jig according to claim 1, wherein: The drive assembly includes a plurality of drive boxes (301) fixedly connected with the side wall of the fixed cylinder (203), each drive box (301) is rotatably connected with a threaded rod (302), the side wall of the threaded rod (302) is threadedly connected with a drive plate (303), each drive box (301) is equipped with a drive hole (304) on the side away from the bottom plate (201), each drive hole (304) is slidably connected with an L-shaped plate (305), one end of each L-shaped plate (305) is connected with the drive plate (303), the other end of each L-shaped plate (305) is connected with the arc clamping plate (204), and the fixed cylinder (203) is equipped with a rotating assembly for the synchronous rotation of each threaded rod (302).

3. The sputtering target polishing jig according to claim 2, wherein: The rotating assembly includes a rotating ring (401) rotatably connected with the fixed cylinder (203), a plurality of rotating teeth (402) are fixedly connected with the side of the rotating ring (401) close to the arc clamping plate (204), each threaded rod (302) is fixedly connected with a drive gear (404), each drive box (301) is equipped with an avoiding hole (403) on the side wall, each drive rotating tooth (402) is slidably connected with the avoiding hole (403) and is meshed with the drive gear (404).

4. The sputtering target polishing jig according to claim 3, wherein: The linkage assembly includes a plurality of L-shaped support plates (501) fixedly connected with the side of the bottom plate (201) away from the workbench (1), each L-shaped support plate (501) is fixedly connected with a circular plate (502) at the end close to each other, the circular plate (502) is connected with a first bevel gear (504) through a rotating rod (503), each threaded rod (302) is fixedly connected with a second bevel gear (505) at the end close to the rotating rod (503), each second bevel gear (505) and the first bevel gear (504) are meshed with each other, and the side of the circular plate (502) away from the bottom plate (201) is provided with a motor (506), and the output end of the motor (506) is connected with the rotating rod (503).

5. The sputtering target polishing jig according to claim 4, wherein: The positioning assembly includes a positioning rod (601) fixedly connected with the bottom wall of the fixed cylinder (203), and the side of the positioning rod (601) away from the bottom plate (201) is provided with a positioning plate (602).

6. The sputtering target polishing jig according to claim 5, wherein: The positioning rod (601) and the positioning plate (602) are connected through a countersunk bolt (603).

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