Diffusion furnace door for solar cell production

Abstract

The utility model discloses a diffusion furnace door for solar cell production, which comprises a metal furnace door, a quartz furnace door is arranged on the metal furnace door, a connecting structure is arranged between the metal furnace door and the quartz furnace door, the connecting structure comprises a first supporting plate for disassembling the quartz furnace door, and the first supporting plate is detachably arranged on the metal furnace door. A quartz furnace door is installed on the side, away from the metal furnace door, of the first supporting plate, the connecting structure comprises a first connecting part used for connecting the metal furnace door and the first supporting plate and a second connecting part used for connecting the quartz furnace door and the first supporting plate, and the second connecting part comprises a plurality of first connecting blocks; and the first connecting block is fixedly connected to the quartz furnace door. Compared with the prior art, when the metal furnace door and the quartz furnace door are separated in order to clean the metal furnace door on the outer side, the situation that the quartz furnace door on the inner side is broken due to uneven stress is reduced as much as possible, and the service life of the diffusion furnace door is prolonged.

Description

Technical Field

[0001] This utility model belongs to the field of diffusion furnace technology, specifically relating to a diffusion furnace door for solar cell production. Background Technology

[0002] A diffusion furnace heats the gas inside the furnace using heating elements to achieve the required temperature and pressure conditions for processing semiconductor materials. The furnace door is a crucial component, primarily used to prevent gas leakage and protect the furnace environment. Diffusion furnace doors generally consist of an outer metal door and an inner quartz door. The metal door mainly serves to resist external environmental impacts and protect the high-temperature internal environment, while the quartz door possesses excellent high-temperature and corrosion resistance, directly contacting the diffusion atmosphere within the furnace chamber.

[0003] However, the side of the metal furnace door closest to the quartz furnace door is in a high-temperature, easily oxidized environment. Under such conditions, the metal furnace door is prone to oxidation and rust. The metal slag produced by the rust will reduce the sealing performance of the furnace door, causing heat loss and polluting the environment inside the furnace.

[0004] To prevent the diffusion furnace from being affected by rust on the metal furnace door, when rust is found on the metal furnace door, it is generally necessary to remove the inner quartz furnace door and remove or even replace the outer metal furnace door. Since the inner quartz furnace door is connected to the outer metal furnace door by bolts, and because quartz itself has high hardness and low toughness, if the workers overtighten the bolts during the installation of the quartz furnace door, the inner quartz furnace door may break due to uneven stress.

[0005] Therefore, in order to address the above-mentioned technical problems, it is necessary to provide a diffusion furnace door for solar cell production. Utility Model Content

[0006] The purpose of this invention is to provide a diffusion furnace door for solar cell production, which can solve the problems mentioned in the background art.

[0007] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:

[0008] A diffusion furnace door for solar cell production includes a metal furnace door with a quartz furnace door mounted on it. A connecting structure is installed between the metal furnace door and the quartz furnace door. The connecting structure includes a first support plate for disassembling the quartz furnace door. The first support plate is detachably mounted on the metal furnace door, and the quartz furnace door is mounted on the side of the first support plate away from the metal furnace door.

[0009] In one or more embodiments of the present invention, the connection structure includes a first connecting component for connecting a metal furnace door and a first support plate and a second connecting component for connecting a quartz furnace door and a first support plate.

[0010] In one or more embodiments of the present invention, the second connecting component includes a plurality of first connecting blocks, the first connecting blocks being fixedly connected to the quartz furnace door, and the first connecting blocks being equipped with first connecting bolts that match the first support plate.

[0011] In one or more embodiments of the present invention, the second connecting component includes a plurality of arc-shaped support plates that match the quartz furnace door, and the arc-shaped support plates are fixedly connected to the first support plate.

[0012] In one or more embodiments of this utility model, a second mounting groove matching the arc-shaped support plate is provided on the first support plate.

[0013] In one or more embodiments of the present invention, the first connecting component includes a plurality of second connecting blocks, the second connecting blocks being fixedly connected to the first support plate, and the second connecting blocks being equipped with second connecting bolts that match the metal furnace door.

[0014] In one or more embodiments of this utility model, a first positioning plate is installed on the side of the first support plate near the metal furnace door, the first positioning plate is fixedly connected to the first support plate, and a first mounting groove matching the first positioning plate is provided on the metal furnace door.

[0015] In one or more embodiments of this utility model, a heat insulation layer is installed on the first positioning plate, and the heat insulation layer is located between the first positioning plate and the metal furnace door.

[0016] In one or more embodiments of this utility model, an explosion-proof layer is installed inside the quartz furnace door.

[0017] In one or more embodiments of this utility model, a sealing ring is installed on the side of the metal furnace door near the quartz furnace door.

[0018] Compared with the prior art, the diffusion furnace door for solar cell production of this utility model can largely avoid the inner quartz furnace door from breaking due to uneven force when the metal furnace door is disassembled and the quartz furnace door is separated by the first support plate in order to clean the outer metal furnace door, thus extending the service life of the diffusion furnace door. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the overall structure of a diffusion furnace door for solar cell production according to the first embodiment of the present invention;

[0021] Figure 2 This is an exploded cross-sectional view of the door of a diffusion furnace for solar cell production according to the first embodiment of this utility model;

[0022] Figure 3 This is a schematic diagram of the quartz furnace door in the first embodiment of the present invention;

[0023] Figure 4 This is a schematic diagram of the connection structure in the first embodiment of the present invention.

[0024] Explanation of key figure labels:

[0025] 1. Metal furnace door; 101. First mounting groove; 2. Quartz furnace door; 201. First connecting block; 202. First connecting bolt; 203. Explosion-proof layer; 301. First support plate; 302. Second mounting groove; 303. Arc-shaped support plate; 304. Second connecting block; 305. Second connecting bolt; 306. First positioning plate; 307. Insulation layer; 4. Sealing ring. Detailed Implementation

[0026] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0027] like Figures 1-2As shown in the figure, a diffusion furnace door for solar cell production according to one embodiment of the present invention includes a metal furnace door 1, a quartz furnace door 2 installed on the metal furnace door 1, and a connecting structure installed between the metal furnace door 1 and the quartz furnace door 2. When the surface of the metal furnace door 1 rusts, resulting in a small gap in the sealing surface after the furnace door is closed, gas or heat inside the furnace may leak into the external environment, affecting the processing effect of the diffusion furnace on the components. Therefore, it is necessary to remove the inner quartz furnace door 2 to remove rust or replace the outer metal furnace door 1. If the quartz furnace door 2 does not need to be replaced, the operator only needs to remove the connecting structure from the metal furnace door 1 to remove the quartz furnace door 2 from the metal furnace door 1. This reduces the disassembly and assembly of the inner quartz furnace door 2 during rust removal or replacement of the metal furnace door 1, thereby reducing the possibility of the quartz furnace door 2 breaking due to uneven stress during disassembly and assembly.

[0028] The connecting structure includes a first support plate 301 for disassembling the quartz furnace door 2. The first support plate 301 is detachably installed on the metal furnace door 1, and the quartz furnace door 2 is installed on the side of the first support plate 301 away from the metal furnace door 1. When workers need to remove rust from the metal furnace door 1, the first support plate 301 is removed from the metal furnace door 1 to remove the rust. Compared to directly removing the quartz furnace door 2 to remove rust from the metal furnace door 1, the object to be removed is the first support plate 301, and the quartz furnace door 2 is not directly subjected to force. This minimizes the possibility of uneven force on the quartz furnace door 2 and breakage during the direct removal and installation of the quartz furnace door 2.

[0029] like Figures 2-4 As shown, the connection structure includes a first connecting component for connecting the metal furnace door 1 and the first support plate 301, and a second connecting component for connecting the quartz furnace door 2 and the first support plate 301. The first connecting component is used to remove the first support plate 301 from the metal furnace door 1. When the quartz furnace door 2 is damaged due to vibration and impact from the external environment, the second connecting component is used to install a new quartz furnace door 2 on the first support plate 301, facilitating the installation of the quartz furnace door 2.

[0030] like Figures 2-3 As shown, the second connecting component includes multiple first connecting blocks 201, which are fixedly connected to the quartz furnace door 2. First connecting bolts 202, matching the first support plate 301, are installed on the first connecting blocks 201. When the quartz furnace door 2 is damaged due to vibration and impact from the external environment, the first connecting blocks 201 on the quartz furnace door 2 are installed onto the first support plate 301 using the first connecting bolts 202, thus completing the replacement of the quartz furnace door 2.

[0031] like Figure 4As shown, the second connecting component includes several arc-shaped support plates 303 that match the quartz furnace door 2. The arc-shaped support plates 303 are fixedly connected to the first support plate 301. The arc-shaped support plates 303 can support the quartz furnace door 2 in the longitudinal direction, allowing the quartz furnace door 2 to be subjected to force as evenly as possible. That is, when the quartz furnace door 2 is installed on the metal furnace door 1 in an upright position, the arc-shaped support plates 303 lift a portion of the quartz furnace door 2, thereby distributing the pressure at the connection between the quartz furnace door 2 and the first support plate 301, minimizing uneven force distribution when the quartz furnace door 2 is in an upright position, and helping to extend the service life of the quartz furnace door 2.

[0032] like Figure 4 As shown, the first support plate 301 has a second mounting groove 302 that matches the quartz furnace door 2. Since the quartz furnace door 2 is relatively heavy, it is inconvenient for workers to adjust its position when moving it to the installation position. Therefore, aligning the quartz furnace door 2 with the second mounting groove 302 before installation can improve the accuracy of its position, reduce the amount of subsequent adjustments, and thus improve the ease of replacement. Furthermore, when the first connecting block 201 on the quartz furnace door 2 fails to align with the corresponding threaded hole (not shown in the diagram) on the first support plate 301, rotating the quartz furnace door 2 within the second mounting groove 302 can minimize the risk of the quartz furnace door 2 shifting position during rotation.

[0033] like Figure 2 , Figure 4 As shown, the first connecting component includes multiple second connecting blocks 304, which are fixedly connected to the first support plate 301. Second connecting bolts 305, matching the metal furnace door 1, are installed on the second connecting blocks 304. Removing the second connecting bolts 305 from the second connecting blocks 304 separates the metal furnace door 1 from the first support plate 301. At this point, the quartz furnace door 2 is not removed, thus preventing damage to the quartz furnace door 2.

[0034] like Figure 2 , Figure 4 As shown, a first positioning plate 306 is installed on the side of the first support plate 301 near the metal furnace door 1. The first positioning plate 306 is fixedly connected to the first support plate 301. A first mounting groove 101 matching the first positioning plate 306 is provided on the metal furnace door 1. After the operator removes the rust from the surface of the metal furnace door 1, when installing the first support plate 301 onto the metal furnace door 1, aligning the first mounting groove 101 and the first positioning plate 306 allows for the positioning of the first support plate 301, enabling the installation of the first support plate 301 as quickly as possible.

[0035] like Figure 2As shown, an insulation layer 307 is installed on the first positioning plate 306, and the insulation layer 307 is located between the first positioning plate 306 and the metal furnace door 1. The insulation layer 307 can enhance the insulation performance of the furnace door, help reduce the temperature difference inside the furnace, and improve the heating efficiency and uniformity of the diffusion furnace.

[0036] like Figure 2 As shown, an explosion-proof layer 203, which can be a polyimide layer, is installed inside the quartz furnace door 2. When the quartz furnace door 2 is impacted and breaks, the polyimide layer can act as an adhesive to hold the quartz furnace door 2 together. If the quartz furnace door 2 breaks during disassembly or assembly, the polyimide layer can reduce the risk of injury to workers caused by flying quartz fragments. If the quartz furnace door 2 breaks inside the furnace, the polyimide layer can reduce the flying of quartz fragments inside the furnace, thereby reducing the difficulty for workers to clean up quartz fragments inside the furnace.

[0037] like Figure 1 As shown, a sealing ring 4 is installed on the side of the metal furnace door 1 near the quartz furnace door 2. The sealing ring 4 ensures the sealing performance of the furnace door. This helps to reduce heat loss inside the furnace and is beneficial to increasing the heating power of the diffusion furnace.

[0038] During use, when rust removal is required on the metal furnace door 1, the first support plate 301 can be removed by rotating the second connecting bolt 305, separating the quartz furnace door 2 from the metal furnace door 1. This facilitates rust removal for the metal furnace door 1. Furthermore, because the torque generated by the second connecting bolt 305 is not transmitted to the quartz furnace door 2 when separating the metal furnace door 1 and the quartz furnace door 2 by rotating the second connecting bolt 305, damage to the quartz furnace door 2 is avoided when installing and removing it using the first support plate 301. In other words, using the first support plate 301 to install and remove the quartz furnace door 2 largely prevents the quartz furnace door 2 from breaking due to uneven stress.

[0039] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0040] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A furnace door for a diffusion furnace for solar cell production, characterized by, The utility model relates to a metal furnace door with a quartz furnace door, a connecting structure between the metal furnace door and the quartz furnace door, and a first support plate for disassembling the quartz furnace door. The connecting structure comprises a first connecting component for connecting the metal furnace door and the first support plate and a second connecting component for connecting the quartz furnace door and the first support plate. The second connecting component comprises a plurality of first connecting blocks fixedly connected to the quartz furnace door, and the first connecting blocks are provided with first connecting bolts matched with the first support plate.

2. The furnace door for a diffusion furnace for solar cell production according to claim 1, characterized in that, The second connecting component comprises a plurality of arc-shaped support plates matched with the quartz furnace door, and the arc-shaped support plates are fixedly connected to the first support plate.

3. The furnace door for a diffusion furnace for solar cell production according to claim 2, characterized in that, The first support plate is provided with a second mounting groove matched with the arc-shaped support plates.

4. The furnace door for a diffusion furnace for solar cell production according to claim 2 or 3, characterized in that, The first connecting component comprises a plurality of second connecting blocks fixedly connected to the first support plate, and the second connecting blocks are provided with second connecting bolts matched with the metal furnace door.

5. The furnace door for a diffusion furnace for solar cell production according to claim 4, characterized in that, The first support plate is provided with a first positioning plate fixedly connected to the first support plate on the side close to the metal furnace door, and the metal furnace door is provided with a first mounting groove matched with the first positioning plate.

6. The furnace door for a diffusion furnace for solar cell production according to claim 2, characterized in that, The first positioning plate is provided with a heat preservation layer between the first positioning plate and the metal furnace door.

7. The furnace door for a diffusion furnace for solar cell production according to claim 1, characterized in that, The quartz furnace door is provided with an explosion-proof layer.

8. The furnace door for a diffusion furnace for solar cell production according to claim 7, characterized in that, The metal furnace door is provided with a sealing ring on the side close to the quartz furnace door.

9. The furnace door for a diffusion furnace for solar cell production according to claim 1, characterized in that, ​ 10. The furnace door for a diffusion furnace for solar cell production according to claim 1, characterized in that, ​

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