Heating unit and etching cavity

Abstract

The utility model provides a heating unit, which comprises a housing used for forming a heating space with a dome of an etching cavity, a heating module used for heating the dome, and a temperature measuring module used for monitoring the surface temperature of the dome in real time and generating temperature data, and the control unit is used for receiving the temperature data and controlling the heating power of the heating module according to the temperature data. According to the heating unit, through cooperation of the heating module, the temperature measuring module and the control unit, balance control over the surface temperature of the dome is achieved, the uniformity of the surface temperature of the dome is effectively improved, and then the problem that etching machining of wafers is affected due to falling of polymers is effectively solved; the utility model further provides an etching cavity, the etching cavity comprises the heating unit, and the heating unit is arranged on the etching cavity, so that the problem that the etching processing of a wafer is influenced by polymer falling is effectively solved, and the product yield is greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to etching equipment technical field especially, relates to a kind of heating unit and etching cavity. BACKGROUND

[0002] Polymer (such as fluorocarbon-containing polymer or silicon-containing polymer) is usually generated in the etching process of wafer, and the polymer can form a deposition layer by depositing on the dome surface of etching cavity. Because the temperature is not uniform at each part of the dome surface, the deposition degree of the polymer on the dome is not the same, which leads to the phenomenon that part of the deposition layer at the lower temperature part of the dome peels off from the dome. The peeled polymer can fall on the wafer, block the etching process, and thus cause the wafer to be abnormal to different degrees or even be scrapped, which seriously affects the processing and production of the wafer. The present application aims to provide a heating unit for uniformly heating the dome of the etching cavity to improve the temperature uniformity of the dome surface and thus reduce the probability of the deposited polymer peeling off. SUMMARY

[0003] The utility model discloses a heating unit and an etching cavity to solve the technical problem that the polymer deposited on the dome of the etching cavity peels off and affects the etching processing of the wafer.

[0004] To achieve the above-mentioned purpose, the first aspect of the utility model provides a heating unit for heating the dome of the etching cavity, comprising:

[0005] A housing is used to form a heating space with the dome of the etching cavity.

[0006] A heating module is arranged in the heating space for heating the dome.

[0007] A temperature measurement module is arranged in the heating space for real-time monitoring of the surface temperature of the dome and generating corresponding temperature data.

[0008] A control unit is electrically connected with the temperature measurement module and the heating module respectively for receiving the temperature data and controlling the heating power of the heating module according to the temperature data.

[0009] Through the above technical solution, the technical effect achieved is that the temperature measurement module is added in the heating unit to real-time monitor the surface temperature of the dome, and the measured temperature data is fed back to the control unit, the control unit controls the heating power of the heating module according to the temperature data, increases or decreases the power of the heating module, and thus realizes the temperature balance of the dome surface, which can effectively prevent the polymer deposited on the dome from falling off and affecting the etching processing of the wafer.

[0010] Preferably, the installation part is further provided, which is arranged inside the cover and connected with the cover, and has a concave surface; and a plurality of heating modules are arranged on the concave surface.

[0011] Through the above technical solutions, the technical effects are realized: the installation part is arranged to facilitate the installation of the heating module; a plurality of heating modules are arranged to facilitate uniform heating of different parts of the dome at the same time; further, the concave surface is arranged on the installation part, and a plurality of heating modules are arranged on the concave surface, so that the distance from each heating module to the dome is equal, which is more conducive to uniform heating of different parts of the dome, thereby improving the uniformity of the surface temperature of the dome.

[0012] Preferably, a plurality of temperature measurement modules are arranged, and the plurality of heating modules and the plurality of temperature measurement modules are arranged on the concave surface; and the heating modules and the temperature measurement modules are arranged at intervals.

[0013] Through the above technical solutions, the technical effects are realized: the plurality of heating modules and the plurality of temperature measurement modules are arranged on the concave surface, which on one hand facilitates uniform heating of different parts of the dome at the same time, and on the other hand can monitor the surface temperature of different parts of the dome in real time through the plurality of temperature measurement modules, and adjust the heating power of each heating module in real time through the control unit, thereby further improving the uniformity of the surface temperature of the dome.

[0014] Preferably, a turbulence assembly is further provided, which is arranged in the heating space and used for disturbing the air in the heating space.

[0015] Through the above technical solutions, the technical effects are realized: the turbulence assembly arranged in the heating space can effectively promote the flow of air in the heating space, thereby realizing uniform temperature in the heating space and improving the temperature uniformity of the dome.

[0016] Preferably, the installation part divides the heating space into an upper space and a lower space.

[0017] An air flow channel is arranged on the installation part, and the air flow channel communicates the upper space and the lower space.

[0018] The turbulence assembly includes a plurality of nozzles, which are arranged in the upper space and used for spraying gas toward the air flow channel to disturb the gas in the lower space.

[0019] By the technical scheme, the following technical effects are realized: the airflow passage is arranged on the mounting piece, so that the upper space and the lower space can be effectively communicated, thereby facilitating the airflow communication of the upper space and the lower space and promoting the temperature balance of the heating space; the multiple nozzles are arranged to spray gas to the airflow passage, so that the gas in the heating space can be efficiently disturbed, thereby realizing the uniform temperature of each part in the heating space and more facilitating the improvement of the temperature uniformity of the dome.

[0020] Preferably, the multiple nozzles are uniformly and spacedly arranged at the top of the shell.

[0021] By the technical scheme, the following technical effects are realized: the multiple nozzles are uniformly and spacedly arranged at the top of the shell, so that the airflow in the heating space can be uniformly disturbed, thereby quickly realizing the temperature balance of the heating space.

[0022] Preferably, the heating unit further comprises an edge auxiliary heating module arranged at the bottom of the heating unit and used for heating the edge part of the dome; the edge auxiliary heating module is electrically connected with the control unit.

[0023] By the technical scheme, the following technical effects are realized: since the dome is in the shape of a circular arc, the bottom part of the dome is less heated than the top part and the middle part; by arranging the edge auxiliary heating module, the bottom part of the dome can be heated to a set value and be consistent with the temperature of other parts of the dome, so that the polymer deposition of the outer ring of the dome is more stable, thereby reducing or avoiding the peeling of the polymer and improving the product yield.

[0024] Preferably, the edge auxiliary heating module is in the shape of a ring.

[0025] By the technical scheme, the following technical effects are realized: the edge auxiliary heating module is arranged in the shape of a ring, so that the edge auxiliary heating module can better match the bottom part of the dome.

[0026] The second aspect of the utility model provides a kind of etching cavity, including cavity body and the dome being set in the top of the cavity body;Further include the heating unit as described in the first aspect of the utility model;The heating unit is set in the top of the cavity body, for monitoring and control the temperature of the dome surface.

[0027] By the technical scheme, the following technical effects are realized: the heating unit is arranged in the top of the cavity body, so that the dome can be uniformly heated, thereby effectively improving the uniformity of the temperature of the dome surface, effectively improving the problem that the etching processing of wafer is affected by the peeling of polymer, and thereby greatly improving product yield.

[0028] Preferably, the edge auxiliary heating module is arranged between the dome and the cavity body and located at the annular edge of the bottom part of the dome.

[0029] Through the technical scheme, the technical effects are realized: by arranging the edge auxiliary heating module between the dome and the cavity body, the bottom of the dome is heated to a set value, and the temperature of other parts of the dome is consistent, so that the polymer deposition of the outer ring of the dome is more stable, thereby reducing or avoiding the peeling of the polymer, and the product yield is improved. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 A structure diagram of a heating unit of an embodiment of the present application is shown in the figure.

[0031] Figure 2 A structure diagram of an etching cavity of an embodiment of the present application is shown in the figure.

[0032] Element number explanation:

[0033] 1 - cover; 11 - heating space; 12 - upper space; 13 - lower space;

[0034] 2 - heating module; 21 - mounting; 211 - concave surface;

[0035] 3 - temperature measurement module;

[0036] 4 - nozzle;

[0037] 5 - edge auxiliary heating module;

[0038] 6 - etching cavity; 61 - dome; 62 - cavity body. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical scheme and advantages of the present application clearer, the technical scheme in the embodiment of the present application will be described clearly and completely below in combination with the drawings of the present application. All other embodiments obtained by those skilled in the art without creative labor based on the embodiments in the present application belong to the scope of protection of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meaning by those skilled in the art to which the present application belongs. The words such as "include" and the like used herein mean that the elements or objects before the words cover the elements or objects listed after the words and their equivalents, and do not exclude other elements or objects. In this paper, "connection" can be direct connection or indirect connection, that is, connection through an intermediate object, unless otherwise specified.

[0040] Please refer to Figure 1 The first embodiment of the present application provides a heating unit for heating the dome 61 of the etching cavity 6.

[0041] The heating unit comprises a housing 1, a heating module 2, a temperature measuring module 3 and a control unit.

[0042] The housing 1 is used to form a heating space 11 with the dome 61 of the etching cavity 6.

[0043] The heating module 2 is arranged in the heating space 11 and is used to heat the dome 61. In this embodiment, the heating module 2 is a variable-power heating lamp group, and the related products are well known to those skilled in the art, which will not be described here.

[0044] The temperature measuring module 3 is arranged in the heating space 11 and is used to monitor the surface temperature of the dome 61 in real time and generate corresponding temperature data. In this embodiment, the temperature measuring module 3 is an infrared temperature measuring module 3.

[0045] The control unit (not shown in the figure) is electrically connected with the temperature measuring module 3 and the heating module 2 respectively, is used to receive the temperature data, and controls the heating power of the heating module 2 according to the temperature data.

[0046] In this design scheme, the temperature measuring module 3 is added in the heating unit to monitor the surface temperature of the dome 61 in real time, and the measured temperature data is fed back to the control unit. The control unit controls the heating power of the heating module 2 according to the temperature data, increases or decreases the power of the heating module 2, and then realizes the temperature balance of the surface of the dome 61, which can effectively prevent the polymer deposited on the dome 61 from affecting the etching processing of the wafer.

[0047] In this embodiment, a mounting member 21 is further included. The mounting member 21 is arranged inside the housing 1 and is connected with the housing 1. The mounting member 21 has a concave surface 211. The concave surface 211 is fitted with the convex surface of the dome 61. A plurality of heating modules 2 are arranged on the concave surface 211.

[0048] In this design scheme, a plurality of heating modules 2 are arranged to facilitate uniform heating of different parts of the dome 61. Further, the concave surface 211 is arranged on the mounting member 21, and a plurality of heating modules 2 are arranged on the concave surface 211, so that the distances from each heating module 2 to the dome 61 are equal, which is more conducive to uniform heating of different parts of the dome 61, thereby improving the uniformity of the surface temperature of the dome 61.

[0049] In this embodiment, a plurality of temperature measuring modules 3 are arranged. A plurality of heating modules 2 and a plurality of temperature measuring modules 3 are arranged on the concave surface 211. The heating modules 2 and the temperature measuring modules 3 are arranged at intervals.

[0050] In the design scheme, the plurality of heating modules 2 and the plurality of temperature measuring modules 3 are arranged on the concave surface 211, which facilitates uniform heating of different parts of the dome 61 at the same time, and the surface temperatures of different parts of the dome 61 can be monitored in real time through the plurality of temperature measuring modules 3, and the heating power of each heating module 2 can be adjusted in real time through the control unit, thereby further improving the uniformity of the surface temperature of the dome 61.

[0051] In the embodiment, a turbulence assembly is further included, which is arranged in the heating space 11 and is used for disturbing the air in the heating space 11. In the design scheme, the air flow in the heating space 11 can be effectively promoted by arranging the turbulence assembly in the heating space 11, thereby achieving uniform temperature in the heating space 11 and improving the temperature uniformity of the dome 61.

[0052] In the embodiment, the mounting member 21 divides the heating space 11 into an upper space 12 and a lower space 13.

[0053] The mounting member 21 is provided with an air flow channel (not shown in the drawings), which communicates the upper space 12 and the lower space 13. The turbulence assembly includes three nozzles 4, which are arranged in the upper space 12 and are used for spraying gas towards the air flow channel to disturb the gas in the lower space 13. It is worth mentioning that the number of nozzles 4 can be set according to the degree of winding of the heating space 11 in specific practice. In the embodiment, the nozzles 4 are externally connected to a gas compression device, and compressed gas is sprayed into the heating space 11 from the nozzles 4.

[0054] In the embodiment, the mounting member 21 is a hollow structure, and the hollow part serves as the air flow channel.

[0055] In the design scheme, the air flow channel can effectively communicate the upper space 12 and the lower space 13, thereby facilitating the flow of gas in the upper space 12 and the lower space 13 and promoting the temperature balance of the heating space 11. By spraying gas towards the air flow channel through the plurality of nozzles 4, the gas in the heating space 11 can be efficiently disturbed, thereby achieving uniform temperature in the heating space 11 and further improving the temperature uniformity of the dome 61.

[0056] In the embodiment, the plurality of nozzles 4 are uniformly and spacedly arranged at the top of the housing 1. In the design scheme, the plurality of nozzles 4 are uniformly and spacedly arranged at the top of the housing 1, which can uniformly disturb the air flow in the heating space 11, thereby quickly achieving the temperature balance of the heating space 11.

[0057] In the embodiment, the edge auxiliary heating module 5 is arranged at the bottom of the heating unit and used for heating the edge part of the dome 61; the edge auxiliary heating module 5 is electrically connected with the control unit. In the design scheme, since the dome 61 is in the shape of a circular arc, the bottom part of the dome 61 is less heated than the top part and the middle part. By increasing the edge auxiliary heating module 5, the heating of the bottom part of the dome 61 can reach the set value, and the temperature of the bottom part of the dome 61 is consistent with the temperature of other parts of the dome 61, so that the polymer deposition of the outer ring of the dome 61 is more stable, thereby reducing or avoiding the peeling of the polymer, and the product yield is improved.

[0058] In the embodiment, the edge auxiliary heating module 5 is an electric auxiliary heating module and has a ring structure. By arranging the edge auxiliary heating module 5 in a ring structure, the edge auxiliary heating module 5 can better adapt to the bottom part of the dome 61.

[0059] The second embodiment of the utility model provides a kind of etching cavity 6, including cavity body 62 and the dome 61 being arranged at the top of the cavity body 62;Further include the heating unit as described in embodiment 1;The heating unit is arranged at the top of the cavity body 62, for monitoring and control the temperature of the surface of the dome 61.

[0060] In the design scheme, by arranging the heating unit at the top of the cavity body 62, the dome 61 can be uniformly heated and effectively controlled, so that the temperature of the surface of the dome 61 is balanced, which is beneficial to the deposition of polymer on the dome 61 during wafer processing, effectively improving the problem that the wafer etching process is affected by the peeling of polymer.

[0061] In the embodiment, the edge auxiliary heating module 5 is arranged between the dome 61 and the cavity body 62 and located at the ring-shaped edge of the bottom part of the dome 61. In the design scheme, by arranging the edge auxiliary heating module 5 between the dome 61 and the cavity body 62, the heating of the bottom part of the dome 61 can reach the set value, and the temperature of the bottom part of the dome 61 is consistent with the temperature of other parts of the dome 61, so that the polymer deposition of the outer ring of the dome 61 is more stable, thereby reducing or avoiding the peeling of the polymer, and the product yield is improved.

[0062] In conclusion, the utility model discloses a heating unit is increased in the temperature measuring module and control unit in the heating unit to the surface temperature of the dome is monitored in real time, and the temperature data measured is fed back to the control unit, and the control unit controls the heating power of the heating module according to the temperature data, and the power of the heating module is increased or reduced, and then the temperature balance of the dome surface is realized, can effectively prevent the polymer deposited on the dome from falling off and affecting the etching processing of wafer, through the concave surface of the mounting piece is set up, and a plurality of heating modules are arranged on the concave surface, the distance of each heating module to the dome can be equal, and then the different parts of the dome are more evenly heated, thereby improving the uniformity of the dome surface temperature. Therefore, the utility model effectively overcomes the various shortcomings in the prior art and has a high industrial utilization value.

[0063] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited to this, any change or replacement within the technical scope disclosed in the present application should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A heating unit for heating the dome of an etching cavity; characterized in that, include: A housing, used to form a heating space with the dome of the etching cavity; A heating module is disposed in the heating space for heating the dome; A temperature measuring module is installed in the heating space to monitor the surface temperature of the dome in real time and generate corresponding temperature data. The control unit is electrically connected to both the temperature measuring module and the heating module, and is used to receive the temperature data and control the heating power of the heating module according to the temperature data.

2. The heating unit according to claim 1, characterized in that: It also includes a mounting component; the mounting component is disposed inside the housing and connected to the housing, and the mounting component has a concave surface; Multiple heating modules are spaced apart on the concave surface.

3. The heating unit according to claim 2, characterized in that: The temperature measuring module is provided in multiple ways, and the multiple heating modules and the multiple temperature measuring modules are all disposed on the concave surface; the heating modules and the temperature measuring modules are arranged at intervals.

4. The heating unit according to claim 2, characterized in that: It also includes a turbulence-disrupting component, which is disposed in the heating space and is used to turbulent the air in the heating space.

5. The heating unit according to claim 4, characterized in that: The mounting component divides the heating space into an upper space and a lower space; The mounting component is provided with an airflow channel, which connects the upper space and the lower space; The turbulence-disrupting component includes multiple nozzles disposed in the upper space for injecting gas into the airflow channel to disturb the gas in the lower space.

6. The heating unit according to claim 5, characterized in that: The plurality of nozzles are evenly spaced on the top of the casing.

7. The heating unit according to any one of claims 1-6, characterized in that: It also includes an edge auxiliary heating module, which is disposed at the bottom of the heating unit and is used to heat the edge of the dome; the edge auxiliary heating module is electrically connected to the control unit.

8. The heating unit according to claim 7, characterized in that: The edge auxiliary heating module has a ring structure.

9. An etch chamber, comprising: It includes a cavity body and a dome disposed at the top of the cavity body; it also includes a heating unit as described in any one of claims 1-8; the heating unit is disposed at the top of the cavity body and is used to monitor and control the temperature of the dome surface.

10. The etch chamber of claim 9, wherein: An edge-assisted heating module is disposed between the dome and the cavity body, and is located at the annular edge at the bottom of the dome.

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