Cleaning device

Abstract

The utility model relates to the field of semiconductors, in particular to a cleaning device which comprises a cleaning millstone and an air exhaust assembly, the air exhaust assembly comprises an air exhaust pipe, the air exhaust pipe is provided with an air exhaust end and an air exhaust end, and the air exhaust end is used for being connected to a vacuum generator; a cleaning channel is formed in the cleaning millstone, the two ends of the cleaning channel extend to the first surface and the second surface of the cleaning millstone correspondingly, the air exhaust end of the air exhaust pipe communicates with the cleaning channel, and the cleaning millstone can move relative to the electrostatic chuck so that pollutants on the electrostatic chuck can be separated from the electrostatic chuck through friction of the first surface of the cleaning millstone. In the cleaning process of the cleaning device, the air exhaust assembly can suck away the pollutants, in the cleaning process of the cleaning device, the air exhaust assembly can thoroughly suck away the pollutants disengaged from the electrostatic chuck in time, and the cleaning effect is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor, specifically provide a cleaning device. BACKGROUND

[0002] In the semiconductor manufacturing process, the photoetching machine is one of the key equipments, and the wafer chuck table, a core component of the photoetching machine, is used to fix the wafer during work. The wafer chuck table includes an electrostatic chuck, which is used to directly contact the wafer. Due to the heat treatment, photoetching uniform glue and sputtering deposition and other processes in wafer manufacturing, residual substances may be left on the back of the wafer. If these residual substances cannot be completely cleaned, some sticky residues may adhere to the electrostatic chuck, causing local convex deformation of the wafer, thereby causing problems such as photoetching exposure out-of-focus, and further affecting product yield.

[0003] For the sticky residues on the electrostatic chuck, the existing cleaning method of the electrostatic chuck mainly relies on manual use of a dust-free cloth and alcohol for wiping. This method is not only inefficient, but also requires the operator to use a large force to remove the sticky substances on the electrostatic chuck during the wiping process. Over a long period of time, the electrostatic chuck may be deformed, thereby affecting the process and production. In addition, due to the lack of timely and complete cleaning, contaminants may splash onto other components of the photoetching machine during the production process, thereby causing certain pollution to the photoetching machine. In addition, the sticky substances may also adhere to the cleaning disc of the photoetching machine, thereby possibly contaminating the electrostatic chuck again when the cleaning disc cleans the electrostatic chuck. Moreover, the cleaning of the cleaning disc requires opening the cavity of the photoetching machine, which not only consumes time and effort, but also may introduce external contaminants, affecting the stability of the equipment and the production environment.

[0004] Therefore, there is a need in the art for a new technical solution to solve the above problems. UTILITY MODEL CONTENTS

[0005] The utility model aims to solve the above technical problems, that is, at least the electrostatic chuck can be efficiently cleaned. In addition, the sticky substances adhering to the cleaning disc of the photoetching machine can be reduced, the opening of the cavity of the cleaning disc of the equipment is reduced, and the downtime of the equipment is reduced.

[0006] In a first aspect, the utility model provides a cleaning device, which can be used to clean the electrostatic chuck of a photoetching machine. The cleaning device includes: an air extraction assembly, which includes an air extraction pipe having an air extraction end and an exhaust end, the exhaust end being connected to a vacuum generator; and a cleaning grinding disc, which is provided with a cleaning channel, the first end of the cleaning channel extending to the first surface of the cleaning grinding disc, the second end of the cleaning channel extending to the second surface of the cleaning grinding disc, and the air extraction end of the air extraction assembly being in communication with the second end of the cleaning channel; wherein the cleaning grinding disc can move relative to the electrostatic chuck to cause the contaminants on the electrostatic chuck to be separated from the electrostatic chuck through the friction of the first surface thereof, and the air extraction assembly can suck away the contaminants.

[0007] In the above technical scheme, the cleaning mill can move relative to the electrostatic chuck, so that the pollutants on the electrostatic chuck are separated from the electrostatic chuck by the friction of the first surface, and the cleaning channel of the cleaning mill is communicated with the suction end of the suction assembly, so that the pollutants can be sucked away in time and thoroughly during the cleaning process of the cleaning device, thereby achieving efficient cleaning of the electrostatic chuck, reducing the sticky substances on the cleaning disc of the photolithography machine, reducing the opening cleaning of the equipment cleaning disc, and reducing the equipment downtime.

[0008] In the above preferred technical scheme of the cleaning device, the cleaning channel is provided with a cleaning pipe, the first end of the cleaning pipe extends to the first surface, and the second end of the cleaning pipe is communicated with the suction end of the suction pipe.

[0009] In the above technical scheme, the cleaning pipe is arranged in the cleaning channel, so that the suction end of the suction pipe is prevented from being disconnected from the cleaning channel during use of the cleaning device, and the sealing performance of the cleaning device is improved.

[0010] In the above preferred technical scheme of the cleaning device, the number of the cleaning channels is multiple and is distributed along the circumference of the cleaning mill.

[0011] In the above technical scheme, the cleaning channels are arranged to be multiple and distributed along the circumference of the cleaning mill, so that the number of the cleaning channels is increased, and the cleaning efficiency is further improved.

[0012] In the above preferred technical scheme of the cleaning device, the cleaning device further comprises a fixing member provided with a through hole, the fixing member is fixedly connected with the cleaning mill, and the cleaning pipe is arranged in the through hole.

[0013] In the above preferred technical scheme of the cleaning device, the cleaning device further comprises a handle and a rod end joint bearing, the connecting rod of the rod end joint bearing is connected with the handle, and the joint bearing of the rod end joint bearing is connected to the second end of the cleaning pipe.

[0014] In the above technical scheme, the fixing member is fixedly connected with the cleaning mill, and then the handle is connected with the cleaning pipe, so that the operation of the cleaning device is facilitated.

[0015] In the above technical scheme, the handle is connected with the cleaning pipe through the rod end joint bearing, so that the flexibility of the cleaning device is improved, and the cleaning efficiency is improved.

[0016] In the above preferred technical scheme of the cleaning device, the handle is provided with a receiving groove extending along the length direction of the handle, and the suction pipe is embedded in the receiving groove.

[0017] In the above technical scheme, the air suction pipe is fixed in the accommodating groove of the handle, so that the air suction pipe is prevented from being bent, and the air suction pipe is convenient to install and disassemble.

[0018] In the above technical scheme, the air suction pipe is fixed in the accommodating groove of the handle, so that the air suction pipe is prevented from being bent, and the air suction pipe is convenient to install and disassemble.

[0019] In the above technical scheme, the air suction pipe is fixed in the accommodating groove of the handle, so that the air suction pipe is prevented from being bent, and the air suction pipe is convenient to install and disassemble.

[0020] In the above technical scheme, the air suction pipe is fixed in the accommodating groove of the handle, so that the air suction pipe is prevented from being bent, and the air suction pipe is convenient to install and disassemble.

[0021] In the above technical scheme, the air suction pipe is fixed in the accommodating groove of the handle, so that the air suction pipe is prevented from being bent, and the air suction pipe is convenient to install and disassemble.

[0022] In the above technical scheme, the air suction pipe is fixed in the accommodating groove of the handle, so that the air suction pipe is prevented from being bent, and the air suction pipe is convenient to install and disassemble.

[0023] In the above technical scheme, the air suction pipe is fixed in the accommodating groove of the handle, so that the air suction pipe is prevented from being bent, and the air suction pipe is convenient to install and disassemble.

[0024] In the above technical scheme, the air suction pipe is fixed in the accommodating groove of the handle, so that the air suction pipe is prevented from being bent, and the air suction pipe is convenient to install and disassemble.

[0025] In the above technical scheme, the air suction pipe is fixed in the accommodating groove of the handle, so that the air suction pipe is prevented from being bent, and the air suction pipe is convenient to install and disassemble. BRIEF DESCRIPTION OF DRAWINGS

[0026] The preferred embodiments of the present application will be described below with reference to the accompanying drawings, in which:

[0027] Figure 1 is a structure schematic of the cleaning device of the present application.Figure 1 ;

[0028] Figure 2 is a structure schematic of the cleaning device of the utility model Figure 2 ;

[0029] Figure 3 is a structure schematic of the cleaning device of the utility model Figure 3 ;

[0030] Figure 4 is Figure 3 sectional view of A-A in

[0031] Figure 5 is a structure explosion of the cleaning device of the utility model Figure 1 ;

[0032] Figure 6 is a structure explosion of the cleaning device of the utility model Figure 2 .

[0033] List of reference signs:

[0034] 1, fixed shell;11, containing cavity;13, through hole;14, fixed pipe;15, mounting hole;

[0035] 2, cleaning millstone;21, cleaning passage;22, cleaning pipe;

[0036] 3, handle;31, rod end joint bearing;32, containing groove;

[0037] 4, fastening screw;

[0038] 5, air suction pipe;

[0039] 6, air pipe joint. DETAILED DESCRIPTION

[0040] The preferred embodiments of the utility model are described below with reference to the drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the utility model, and are not intended to limit the protection scope of the utility model.

[0041] It should be noted that in the description of the utility model, the terms "inner", "outer", "upper", "lower", "top", "bottom", "left", "right" and other terms indicating direction or positional relationship are based on the direction or positional relationship shown in the drawings, which is only for the convenience of description, and is not intended to indicate or imply that the device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0042] Furthermore, it should be noted that in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connect," and "install" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0043] Based on the problem pointed out in the background art that the cleaning effect of manually cleaning electrostatic chucks is not good, this utility model provides a cleaning device. The purpose is to connect the air extraction end of the air extraction component to the grinding surface of the cleaning grinding disc 2 through the cleaning channel 21. During the cleaning process of the cleaning device, the air extraction component can timely and thoroughly suck away the contaminants that have detached from the electrostatic chuck, avoiding the contaminants from splashing and causing pollution when there are too many contaminants, thus improving the cleaning effect.

[0044] Specifically, such as Figures 1 to 6 As shown, the cleaning device of this utility model can be used to clean the electrostatic chuck of a lithography machine. The cleaning device includes a cleaning grinding disc 2 and an air extraction assembly. The air extraction assembly includes an air extraction pipe 5, which has an air extraction end and an air exhaust end. The air exhaust end (e.g., Figure 6 The left end shown is used to connect to a vacuum generator (not shown in the figure). The cleaning grinding disc 2 is provided with a cleaning channel 21. The first end of the cleaning channel 21 extends to the first surface of the cleaning grinding disc 2 (the bottom surface shown in the figure), and the second end of the cleaning channel 21 (the lower end shown in the figure) extends to the second surface of the cleaning grinding disc 2. The suction end of the suction pipe 5 is connected to the second end of the cleaning channel 21 (the upper end shown in the figure). The cleaning grinding disc 2 can move relative to the electrostatic chuck so that the contaminants on the electrostatic chuck can be removed from the electrostatic chuck by friction of its first surface. The suction assembly can suck away the contaminants.

[0045] Preferably, such as Figure 5 and Figure 6 As shown, the first surface of the cleaning grinding disc 2 of this invention is the surface that contacts the electrostatic chuck. Preferably, the first surface is a rough surface.

[0046] In other words, the first surface is the polishing surface of the cleaning grinding disc 2. Through the friction between the polishing surface and the electrostatic chuck, contaminants on the electrostatic chuck can be removed from the electrostatic chuck.

[0047] Preferably, such as Figure 5 and Figure 6 As shown, the second surface of the cleaning grinding disc 2 of this invention is opposite to the first surface, or it is the side surface of the cleaning grinding disc 2. Considering the convenience of processing, the second surface can be the top surface of the cleaning grinding disc 2.

[0048] In a semiconductor manufacturing process, the electrostatic chuck of a photoetching machine can be adhered with sticky contaminants, which may cause local convex deformation of a wafer if not cleaned in time, thereby affecting product yield, and the sticky substances may also be adhered to the cleaning disc of the photoetching machine, and the sticky substances adhered to the cleaning disc of the photoetching machine may further contaminate the electrostatic chuck during cleaning of the electrostatic chuck by the cleaning disc, thereby causing contamination of the electrostatic chuck. According to the cleaning device provided by the utility model, the first surface of the cleaning grinding disc 2 can rub against the electrostatic chuck when the cleaning grinding disc 2 moves relative to the electrostatic chuck, thereby grinding off the contaminants such as sticky substances remaining on the electrostatic chuck, and the cleaning channel 21 is arranged in communication with the grinding surface of the cleaning grinding disc 2, and the suction end of the suction assembly is in communication with the cleaning channel 21 of the cleaning grinding disc 2, so that the contaminants ground off are sucked away by the suction assembly, thereby avoiding that the sticky substances adhere to the cleaning disc of the photoetching machine, avoiding opening cavity cleaning of the equipment cleaning disc, reducing equipment downtime. In addition, it also avoids the contamination caused by the splashing of too much contamination, thereby improving the cleaning effect.

[0049] As shown in Figure 5 and Figure 6 exemplarily, the cleaning grinding disc 2 is in the shape of a cylinder, the first surface (grinding surface) is the bottom wall of the cleaning grinding disc 2, the second surface is the top wall of the cleaning grinding disc 2, the cleaning channel 21 can penetrate through the axis of the cleaning grinding disc 2 along the vertical direction, and the suction end of the suction assembly is in communication with the top end of the cleaning channel 21.

[0050] Preferably, as shown in Figures 1 to 6 , the cleaning device of the utility model further comprises a cleaning pipe 22, the cleaning pipe 22 is installed in the cleaning channel 21, the first end (i.e. the bottom end shown in the figure) of the cleaning pipe 22 extends to the first surface of the cleaning channel 21, and the suction end of the suction pipe 5 is in communication with the second end (i.e. the top end shown in the figure) of the cleaning pipe 22. In the shown embodiment, the top end of the cleaning pipe 22 extends beyond the top surface of the cleaning channel 21 to be in communication with the suction end of the suction pipe 5.

[0051] As shown in Figures 1 to 6 exemplarily, the bottom end of the cleaning pipe 22 of the utility model extends to the grinding surface and is flush with the grinding surface, and the suction end of the suction pipe 5 is in communication with the top end of the cleaning pipe 22. Compared with the mode that the suction end of the suction pipe 5 is in communication with the cleaning channel 21, the connection between the suction end of the suction pipe 5 and the cleaning channel 21 is prone to falling off due to vibration during use of the cleaning device, thereby causing poor air tightness and affecting suction efficiency. By connecting the suction end of the suction pipe 5 with the cleaning pipe 22, i.e. directly extending the suction end of the suction pipe 5 into the grinding surface, the problems such as connection falling off caused by vibration of the cleaning device can be avoided, and the air tightness of the cleaning device is enhanced.

[0052] Preferably, the number of the cleaning channels 21 is multiple and is distributed along the circumference of the cleaning grinding disc 2.

[0053] That is, the cleaning grinding disc 2 can be provided with multiple cleaning channels 21 communicating with the polishing surface, the cleaning tube 22 is arranged in each of the multiple cleaning channels 21, and the suction end of the suction assembly is sealingly connected to the multiple cleaning tubes 22 in the multiple cleaning channels 21, thereby increasing the number of the cleaning channels 21 and the cleaning tubes 22, increasing the cleaning area, and improving the cleaning efficiency.

[0054] In order to avoid damage to the electrostatic chuck of the photoetching machine during the cleaning process, preferably, the hardness of the cleaning grinding disc 2 is lower than that of the electrostatic chuck. In some embodiments, when the electrostatic chuck is made of silicon nitride, the cleaning grinding disc 2 can be made of a ceramic material with a hardness lower than that of silicon nitride, such as zirconium oxide (ZrO2). In other embodiments, the cleaning grinding disc 2 can also be made of a polymer material (such as rubber) with a lower hardness.

[0055] If the cleaning grinding disc 2 is made of metal or alloy, the operator needs to exert a larger force to separate the adhesive substance, and when the cleaning grinding disc 2 is made of a ceramic material with a hardness lower than that of the electrostatic chuck, the cleaning grinding disc 2 will generate particles when it moves relative to the electrostatic chuck, so the operator only needs to exert a smaller force to separate the adhesive substance on the electrostatic chuck, thereby generating little heat. This not only avoids damage to the electrostatic chuck, but also avoids deformation of the electrostatic chuck due to excessive heat. In addition, the chemical stability of the ceramic material also ensures that it will not react adversely with the chemicals used in the cleaning process.

[0056] Preferably, as shown in Figures 1 to 6 The cleaning device of the utility model further includes a fixing member, the fixing member is fixedly connected with the cleaning grinding disc 2, and the fixing member is provided with a through hole, the top end of the cleaning tube 22 is arranged in the through hole 13 to communicate with the suction end of the suction pipe 5.

[0057] Preferably, as shown in Figures 1 to 6 The cleaning device of the utility model further includes a rod end joint bearing 31 (also known as a fish eye joint) and a handle 3, the connecting rod of the rod end joint bearing 31 is connected with the handle 3, and the joint bearing of the rod end joint bearing 31 is connected to the top end of the cleaning tube 22. In other embodiments, the joint bearing of the rod end joint bearing 31 can also be connected to the fixing member, as long as the handle 3 can be fixed.

[0058] Exemplarily, as shown in Figures 1 to 6 The joint bearing sleeve of the rod end joint bearing 31 is arranged on the cleaning tube 22 and is fixedly connected with the cleaning tube 22, and the connecting rod of the rod end joint bearing 31 is fixedly connected with the handle 3.

[0059] It should be noted that the utility model does not limit the connecting mode of the rod end joint bearing 31 and the handle 3, for example, the rod end joint bearing 31 can be inserted or welded with the handle 3 by the person skilled in the art, and the adjustment and change of the specific connecting mode of the rod end joint bearing 31 and the handle 3 do not deviate from the principle and scope of the utility model, and should be limited within the protection scope of the utility model.

[0060] It should be noted that the handle 3 is made of lightweight high-strength aluminum alloy, has high strength and rigidity, and reduces operation fatigue.

[0061] In addition, it should be noted that the utility model does not limit the structure of the fixing part, for example, the fixing part can be set as a shell, and the cleaning mill 2 is installed in the shell, or the fixing part can be set as a fixed plate, and the cleaning mill 2 is installed on the fixed plate, and the adjustment and change of the specific structure of the fixing part do not deviate from the principle and scope of the utility model, and should be limited within the protection scope of the utility model.

[0062] Preferably, as shown in Figures 4 to 6 The fixing part of the utility model is a fixed shell 1, the fixed shell 1 has an accommodating cavity 11 with an open top, the cleaning mill 2 is installed in the accommodating cavity 11, and the bottom end of the cleaning mill 2 protrudes from the accommodating cavity 11. In some embodiments, the thickness of the cleaning mill 2 is greater than the depth of the accommodating cavity 11, so that the bottom end of the cleaning mill 2 protrudes from the accommodating cavity 11. In other embodiments provided with the cleaning pipe 22, the thickness of the cleaning mill 2 can be less than or equal to the depth of the accommodating cavity 11. In some embodiments, the shape of the accommodating cavity 11 of the fixed shell 1 can be consistent with the shape of the part of the cleaning mill 2 in the accommodating cavity 11, so as to ensure the sealing between the fixed shell 1 and the cleaning mill 2. In addition, in this embodiment, the through hole 13 of the fixed shell 1 communicates with the accommodating cavity 11 and overlaps the cleaning channel 21 up and down, so as to facilitate the passing of the cleaning pipe.

[0063] Exemplarily, as shown in Figures 1 to 6As shown, the fixed shell 1 is in the shape of a cylinder, and the cleaning mill 2 is also in the shape of a cylinder and is installed in the accommodating cavity 11, that is, the polishing surface of the cleaning mill 2 protrudes outside the fixed shell 1, and the fixed shell 1 can protect the cleaning mill 2, and meanwhile, the fixed shell 1 does not affect the relative movement between the cleaning mill 2 and the electrostatic chuck. The through hole 13 is arranged at the center position of the top wall of the fixed shell 1 and is arranged in correspondence with the top end of the cleaning channel 21. The fixed shell 1 is provided with the fixed pipe 14 which is located on the through hole 13 and is in communication with the through hole 13, and the top end of the cleaning pipe 22 passes through the through hole 13 and the fixed pipe 14 in sequence, and the cleaning pipe 22 can be inserted and fixed to the fixed pipe 14, and the joint bearing of the rod end joint bearing 31 is fixedly connected with the top end of the cleaning pipe 22.

[0064] It should be noted that the top wall and the side wall of the cleaning mill 2 can be attached to the inner wall of the accommodating cavity 11 of the fixed shell 1, but due to the installation (for example, the pressing of the fastening screw mentioned below) and the processing error of the cleaning mill 2 and the fixed shell 1, a gap will be generated between the top wall and the side wall of the cleaning mill 2 and the fixed shell 1, thereby causing poor air tightness at this position. When the scheme of connecting the suction end of the suction pipe 5 with the cleaning channel 21 (that is, without the cleaning pipe 22) is adopted, due to the processing error or installation problem, the suction assembly can perform suction through the above-mentioned gap, thereby seriously affecting the cleaning efficiency of the cleaning device. In order to overcome the above-mentioned defects, the cleaning pipe 22 is arranged in the cleaning channel 21, so that suction is performed through the cleaning pipe 22 to generate adsorption force during the cleaning process, that is, even if there is a gap between the top wall and the side wall of the cleaning mill 2 and the fixed shell 1, the cleaning can be more efficiently performed, thereby effectively ensuring the air tightness of the cleaning device and improving the cleaning effect. Accordingly, the cleaning pipe 22 is arranged, so that the shape of the accommodating cavity 11 of the fixed shell 1 can also be inconsistent with the shape of the part of the cleaning mill 2 located in the accommodating cavity 11, as long as the cleaning mill 2 can be fixed in the accommodating cavity 11.

[0065] Preferably, as shown in Figure 5 and Figure 6 The utility model discloses a fixed shell 1 is provided with the installation hole 15 on the side wall, and the cleaning device further includes the fastener (for example, the fastening screw), and the fastener is installed in the installation hole 15 and bears on the side of the cleaning mill 2, to fix the cleaning mill 2 in the accommodating cavity 11.

[0066] Exemplarily, as shown in Figure 5 and Figure 6As shown, the fixed shell 1 is in the shape of a cylinder, four mounting holes 15 are arranged on the circumferential wall of the fixed shell 1, the mounting holes 15 are provided with threads, four fastening screws 4 can be screwed into the mounting holes 15 and pressed on the side wall of the cleaning grinding disc 2, so that the cleaning grinding disc 2 is fixed in the containing cavity 11. When the grinding surface of the cleaning grinding disc 2 is seriously worn, loosen the fastening screws 4, and move the bottom end of the cleaning grinding disc 2 out of the containing cavity 11 by a part, so that the service life of the cleaning grinding disc 2 can be prolonged.

[0067] It should be noted that the number of mounting holes 15 and fastening screws 4 is not limited in the utility model, for example, the mounting holes 15 and fastening screws 4 can be arranged as three groups or five groups or the like by those skilled in the art, and the adjustment and change of the specific number of mounting holes 15 and fastening screws 4 do not deviate from the principle and scope of the utility model, and should be limited within the protection scope of the utility model.

[0068] Preferably, as shown in Figure 5 and Figure 6 In some embodiments, the handle 3 is provided with a containing groove 32 extending along the length direction of the handle 3, and the air suction pipe 5 is located in the containing groove 32.

[0069] Exemplarily, as shown in Figure 5 and Figure 6 The connecting end of the air suction pipe 5 and the cleaning pipe 22 is in the shape of a semicircle, which can facilitate the connection of the air suction pipe 5 and the cleaning pipe 22 and avoid bending, the other end of the air suction pipe 5 is in communication with the vacuum generator, the vacuum generator can perform air suction through the air suction pipe 5, the top arm of the handle 3 is provided with a containing groove 32 extending along the length direction of the handle 3, and a part of the air suction pipe 5 is fixedly installed in the containing groove 32, so that the bending of the air suction pipe 5 can be reduced during the grinding process, and the air suction pipe 5 is protected.

[0070] It should be noted that the type of the vacuum generator is not limited in the utility model, for example, the vacuum generator can be arranged as an air suction device, or the vacuum generator can be arranged as a vacuum interface of a photolithography machine or the like, and the adjustment and change of the specific type of the vacuum generator do not deviate from the principle and scope of the utility model, and should be limited within the protection scope of the utility model.

[0071] Preferably, as shown in Figure 5 and Figure 6 The air suction assembly of the utility model further comprises an air pipe joint 6, and the air suction end of the air suction pipe 5 is in communication with the cleaning pipe 22 through the air pipe joint 6.

[0072] Exemplarily, as shown in Figure 5 and Figure 6As shown, the air suction pipe 5 is generally provided as a hose, the air suction pipe 5 is directly sleeved on the cleaning pipe 22 and is easy to fall off and bend, thereby affecting the air suction effect, the air pipe joint 6 is a hard pipe, the top end of the air pipe joint 6 is fastened with the air suction pipe 5, the bottom end of the air pipe joint 6 is communicated with the cleaning pipe 22, the air pipe joint 6 is inserted with the cleaning pipe 22, a sealing ring is arranged between the air pipe joint 6 and the cleaning pipe 22, and the sealing ring is good in sealing performance and convenient to install and disassemble.

[0073] Those skilled in the art will appreciate that a combination of features of different embodiments implies within the scope of the application and forms different embodiments, although some embodiments described herein include certain features than others do not. For example, in the claims of the application, any of the claimed embodiments can be used in any combination.

[0074] So far, the technical scheme of the utility model has been described in combination with the preferred embodiments shown in the drawings, but those skilled in the art can easily understand that the protection scope of the utility model is obviously not limited to these specific embodiments. Those skilled in the art can make equivalent changes or replacements to the related technical features without departing from the principles of the utility model, and the technical schemes after the changes or replacements will fall within the protection scope of the utility model.

Claims

1. A cleaning device, which can be used to clean an electrostatic chuck of a lithography machine, characterized in that, The cleaning device comprises: an air suction assembly comprising an air suction pipe having an air suction end and an air exhaust end for being connected to a vacuum generator; and a cleaning mill having a cleaning channel, a first end of the cleaning channel extending to a first surface of the cleaning mill, a second end of the cleaning channel extending to a second surface of the cleaning mill, the air suction end of the air suction pipe being in communication with the second end of the cleaning channel; wherein the cleaning mill is movable relative to an electrostatic chuck to cause contaminants on the electrostatic chuck to be detached from the electrostatic chuck by friction of the first surface thereof, and the air suction assembly is capable of sucking away the contaminants; the cleaning channel is provided with a cleaning pipe, a first end of the cleaning pipe extending to the first surface, and a second end of the cleaning pipe being in communication with the air suction end of the air suction pipe; the cleaning device further comprises a fixing member provided with a through hole, the fixing member being fixedly connected with the cleaning mill, and the cleaning pipe being arranged in the through hole; the fixing member is a fixing shell having an accommodating cavity with an open end, and the cleaning mill is arranged in the accommodating cavity.

2. The cleaning device of claim 1, wherein, The number of the cleaning channels is plural and the cleaning channels are distributed along a circumferential direction of the cleaning mill.

3. The cleaning device of claim 1, wherein, The cleaning device further comprises a handle and a rod end joint bearing, a connecting rod of the rod end joint bearing being connected with the handle, and a joint bearing of the rod end joint bearing being connected to the second end of the cleaning pipe.

4. The cleaning device of claim 3, wherein, The handle is provided with an accommodating groove extending along a length direction of the handle, and the air suction pipe is embedded in the accommodating groove.

5. The cleaning device of claim 4, wherein, The air suction assembly further comprises a gas pipe joint, and the air suction end of the air suction pipe is in communication with the cleaning pipe through the gas pipe joint.

6. The cleaning device of claim 1, wherein, One end of the cleaning mill having the first surface protrudes out of the accommodating cavity.

7. The cleaning device of claim 1, wherein, The fixing shell is provided with a mounting hole on a side wall thereof, and the cleaning device further comprises a fastener arranged in the mounting hole and abutting against a side surface of the cleaning mill to fix the cleaning mill in the accommodating cavity.

8. The cleaning device of any one of claims 1 to 7, wherein, The first surface of the cleaning mill is a rough surface; and / or The second surface of the cleaning mill is opposite to the first surface or is a side surface of the cleaning mill.

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