Carrier plate level manipulator and transportation device

Abstract

The utility model discloses a carrier plate level manipulator and a transportation device, comprising: an erection assembly comprising a first erection piece and a second erection piece which are oppositely arranged along a first horizontal direction; the distance adjusting assembly is deployed on the erecting assembly and is suitable for activating the first erecting piece and the second erecting piece to face each other or deviate from each other in the first horizontal direction; the mechanical arm clamp assembly is located between the first erecting piece and the second erecting piece and comprises a first mechanical arm clamp and a second mechanical arm clamp which are oppositely arranged in the first horizontal direction; the number of the drivers is two, the two drivers are arranged on the first erecting piece and the second erecting piece correspondingly, and the first mechanical arm clamp and the second mechanical arm clamp are in transmission connection with the different drivers correspondingly; the two drivers are suitable for cooperating to activate the first mechanical arm clamp and the second mechanical arm clamp to face each other or deviate from each other in the first horizontal direction, so that the carrier plate level mechanical arm captures or releases the carrier plate. By means of the structure, the stroke of the driver does not need to be increased, the driving device is still suitable for carrier plates of various sizes, and cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor packaging, and in particular to a carrier-based robotic arm and transportation device. Background Technology

[0002] For example, BGA (Battery Grid Arrangement) and FC (Flip Chip) are semiconductor packaging processes based on die-attach / die-bonding of IC substrates, which involve robotic arms transferring IC substrates. Conventional robotic arms typically consist of two opposing grippers and a driver to activate them to move towards or away from each other to capture or release the substrate. Admittedly, with this structure, the maximum distance between the two grippers depends on the driver's stroke. Therefore, to ensure the robotic arm can adequately adapt to substrates of different sizes, the driver must employ a long-stroke electric motor or structure. However, this increases the manufacturing cost of the robotic arm.

[0003] Therefore, it is necessary to improve the existing technology to overcome the aforementioned defects. Utility Model Content

[0004] The purpose of this invention is to provide a carrier-based robotic arm and transport device that can adapt to various sizes of carriers while avoiding increasing the stroke of the driver and reducing the production cost of the robotic arm and transport device.

[0005] The purpose of this utility model is achieved through the following technical solution: a carrier-based robotic arm, comprising:

[0006] The erection assembly includes a first erection component and a second erection component arranged opposite to each other along a first horizontal direction;

[0007] An adjustment component, deployed on the mounting component, is adapted to activate the first mounting member and the second mounting member to face each other or move away from each other along a first horizontal direction;

[0008] A robotic gripper assembly is located between the first mounting member and the second mounting member, and includes a first robotic gripper and a second robotic gripper arranged opposite to each other along a first horizontal direction;

[0009] The actuators are of two quantity, and the two actuators are respectively deployed on the first frame and the second frame. The first robotic gripper and the second robotic gripper are respectively connected to the different actuators for transmission.

[0010] The second actuator is adapted to collaboratively activate the first and second robotic grippers to face or move away from each other along a first horizontal direction to capture or release the carrier plate.

[0011] Furthermore, the mounting assembly includes a first sliding joint, which comprises:

[0012] Stationary elements are arranged along a first horizontal direction;

[0013] The sliding element can be movably deployed on the stationary element along a first horizontal direction;

[0014] The number of sliding elements is two, and the first mounting member and the second mounting member are respectively connected to different sliding elements.

[0015] Furthermore, there are two first sliding pairs, which are respectively deployed on both sides of the first mounting component and the second mounting component in the second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction.

[0016] Furthermore, the first robotic gripper is arranged adjacent to the first mounting component, and the second robotic gripper is arranged adjacent to the second mounting component. A second sliding pair is provided between the first robotic gripper and the first mounting component, and between the second robotic gripper and the second mounting component. The second sliding pair is adapted to guide the first robotic gripper and / or the second robotic gripper to change their position along the first horizontal direction.

[0017] Furthermore, the adjustable distance assembly is located above the middle section of the first mounting component and / or the second mounting component in the second horizontal direction, which is perpendicular to the first horizontal direction. The mounting component includes a base frame connected to the stationary element, and the adjustable distance assembly is deployed on the base frame.

[0018] Furthermore, the distance adjustment component includes:

[0019] The base is connected to the base frame;

[0020] A positive and negative threaded rod is rotatably deployed on the base, its axis being parallel to a first horizontal direction, and includes a first rod portion and a second rod portion with opposite thread directions;

[0021] Two lead screw nuts are provided, and the two lead screw nuts are respectively fitted onto the first rod part and the second rod part;

[0022] The operating part is connected to one end of the positive and negative threaded rod;

[0023] The first mounting component and the second mounting component are respectively connected to different lead screw nuts.

[0024] Furthermore, the mounting assembly includes a base frame connected to the stationary element, and the carrier-level manipulator includes a pressure element deployed on the base frame, the pressure element being located between the first manipulator gripper and the second manipulator gripper, and adapted to abut against the carrier plate.

[0025] Furthermore, the pressure-applying element is recessed inward from its bottom surface to form at least one mounting hole, and the carrier-level manipulator includes a pick-up device deployed in the mounting hole, the pick-up device being adapted to be received in the mounting hole.

[0026] Furthermore, the pressure-applying element is connected to the base frame; or, the pressure-applying element is movably deployed on the base frame, and the carrier-level manipulator includes a drive structure adapted to activate the lifting and lowering of the pressure-applying element.

[0027] In addition, this utility model provides a transportation device, comprising:

[0028] Multi-joint robotic arm;

[0029] The aforementioned carrier-based robotic arm is deployed at the end of the multi-joint robotic arm;

[0030] A vision sensor is deployed at the end of the multi-jointed robotic arm.

[0031] Compared with the prior art, the present invention has the following advantages: The mounting component of the present invention includes a first mounting member and a second mounting member arranged opposite to each other along a first horizontal direction. Two actuators are respectively deployed on the first mounting member and the second mounting member. The first robotic gripper and the second robotic gripper are respectively connected to different actuators for transmission. Thus, the two actuators are suitable for cooperating to activate the first robotic gripper and the second robotic gripper to face each other or move away from each other along the first horizontal direction to capture or release the carrier plate. The distance adjustment component is deployed on the mounting component and is suitable for activating the first mounting member and the second mounting member to face each other or move away from each other along the first horizontal direction to change the relative position of the two actuators in the first horizontal direction. Thus, it is not necessary to increase the stroke of the actuators, and the carrier plate-level robotic arm is still sufficient to adapt to more carrier plates of various sizes, thereby effectively reducing the production cost of the robotic arm and the transportation device. Attached Figure Description

[0032] Figure 1 This is a structural schematic diagram of the carrier-based robotic arm of this utility model.

[0033] Figure 2 yes Figure 1 A structural diagram in another direction.

[0034] Figure 3 This is a structural schematic diagram of the transportation device of this utility model.

[0035] Explanation of reference numerals in the attached figures:

[0036] 100. Erection assembly; 110. First erector; 120. Second erector; 130. First sliding pair; 131. Stationary element; 132. Sliding element; 1321. Flange; 133. Limiting ring; 140. Second sliding pair; 150. Base frame; 200. Adjustment assembly; 210. Base; 220. Positive and negative threaded screw; 230. Screw nut; 240. Operating part; 310. First robotic gripper; 311. Connecting element; 312. Finger tip; 3121. Wedge; 320. Second robotic gripper; 400. Driver; 500. Pressure element; 510. Mounting hole; 600. Pickup device; 700. Multi-joint robotic arm; 710. Lateral actuator; 720. Lifting actuator; 800. Vision sensor. Detailed Implementation

[0037] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0038] The terms “comprising” and “having”, and any variations thereof, used in this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0039] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0040] Please see Figure 1 and Figure 2As shown, a carrier-level manipulator corresponding to a preferred embodiment of the present invention includes: a mounting assembly 100, including a first mounting member 110 and a second mounting member 120 arranged opposite to each other along a first horizontal direction; an adjustment assembly 200, deployed on the mounting assembly 100, adapted to activate the first mounting member 110 and the second mounting member 120 to face each other or move away from each other along the first horizontal direction; a manipulator gripper assembly, located between the first mounting member 110 and the second mounting member 120, including a first manipulator gripper 310 and a second manipulator gripper 320 arranged opposite to each other along the first horizontal direction; and two actuators 400, the two actuators 400 being deployed on the first mounting member 110 and the second mounting member 120 respectively, and the first manipulator gripper 310 and the second manipulator gripper 320 being connected to different actuators 400 for transmission.

[0041] Specifically, the two actuators 400 are adapted to cooperate to activate the first robotic gripper 310 and the second robotic gripper 320 to face each other or move away from each other along the first horizontal direction, so that the carrier-level robot can capture or release the carrier plate; the pitch adjustment assembly 200 is adapted to activate the first mounting member 110 and the second mounting member 120 to face each other or move away from each other along the first horizontal direction, so as to change the relative position of the two actuators 400 along the first horizontal direction. In this way, it is not necessary to increase the stroke of the actuators 400, and the carrier-level robot can still accommodate more carrier plates of various sizes, thereby reducing the production cost of the robot and the transportation device.

[0042] Furthermore, the mounting assembly 100 includes a first sliding pair 130, which includes a stationary element 131 and a sliding element 132. The stationary element 131 is arranged along a first horizontal direction, and the sliding element 132 is movably deployed on the stationary element 131 along the first horizontal direction. Admittedly, there are two sliding elements 132, and the first mounting member 110 and the second mounting member 120 are respectively connected to different sliding elements 132.

[0043] More specifically, the stationary element 131 can be a guide post or a slide rail. In this embodiment, the stationary element 131 is preferably a guide post to simplify the structure and facilitate installation. Both the first mounting member 110 and the second mounting member 120 have a through-hole extending along a first horizontal direction, the contour of which matches the outer edge shape of the sliding element 132. Specifically, the sliding element 132 is a guide sleeve fitted around the outer periphery of the stationary element 131 and passing through the through-hole, with a flange portion 1321 protruding from one end of its outer periphery. The flange portion 1321 is located outside the first mounting member 110 or the second mounting member 120, and is fastened to the outer wall of the first mounting member 110 or the second mounting member 120 by threads. In this embodiment, the flange portion 1321 is preferably fitted to the outer wall of the first mounting member 110, which is away from the second mounting member 120, or to the outer wall of the second mounting member 120, which is away from the first mounting member 110, to facilitate the installation of the flange portion 1321. Preferably, both ends of the stationary element 131 are provided with limiting rings 133 to prevent the sliding element 132 from detaching from the stationary element 131.

[0044] The first support component 110 and the second support component 120 have similar structures, both being elongated blocks with their length direction parallel to the second horizontal direction. Indeed, the second horizontal direction is perpendicular to the first horizontal direction. In this embodiment, there are two first sliding pairs 130, which are respectively deployed on both sides of the first support component 110 and the second support component 120 in the second horizontal direction to provide balanced support for the first support component 110 and the second support component 120, guiding them to move smoothly towards or away from each other.

[0045] Furthermore, the first robotic gripper 310 and the second robotic gripper 320 are located within a frame formed by the first mounting member 110, the second mounting member 120, and the first sliding pair 130. Indeed, the first robotic gripper 310 is arranged adjacent to the first mounting member 110, and the second robotic gripper 320 is arranged adjacent to the second mounting member 120. The actuator 400 deployed on the first mounting member 110 is connected to the first robotic gripper 310, and the actuator 400 deployed on the second mounting member 120 is connected to the second robotic gripper 320. The actuator 400, deployed on the first mounting member 110 and / or the second mounting member 120, is specifically a linear cylinder or electric cylinder arranged along a first horizontal direction. In this embodiment, the actuator 400 is preferably a cylinder to simplify the structure and reduce the production cost of the carrier-level robotic gripper and transport device.

[0046] More specifically, the first robotic gripper 310 and the second robotic gripper 320 have similar structures. Taking the first robotic gripper 310 as an example, it includes a connecting element 311 and fingertips 312. The connecting element 311 is elongated and its length direction is parallel to a second horizontal direction. The fingertips 312 are deployed on the connecting element 311, with one end extending downward beyond the connecting element 311. The number of fingertips 312 connected to the connecting element 311 is at least one, preferably two, and they are spaced apart along the length direction of the connecting element 311. Preferably, the two fingertips 312 are deployed at opposite ends of the connecting element 311, so that fewer fingertips 312 come into contact with the sides of the carrier plate, which is sufficient to ensure that the carrier-level robotic gripper reliably captures the carrier plate.

[0047] Understandably, the carrier plate is mostly rectangular. Once the carrier plate is captured, its short side is parallel to the first horizontal direction and its long side is parallel to the second horizontal direction, so that the fingertip 312 fits against the long side of the carrier plate, and the first robotic gripper 310 and the second robotic gripper 320 are adapted to cooperate to reliably capture the carrier plate.

[0048] The fingertip 312 has a wedge 3121 away from the connecting element 311, and the side of the wedge 3121 that contacts the side of the carrier plate is specifically an inclined surface. More specifically, a first horizontal direction and a second horizontal direction intersect to define a plane, and the inclined surface extends downward and intersects the orthogonal plane of this plane, so that the inclined surface of the first robotic gripper 310 is inclined towards the first mounting member 110. Similarly, the inclined surface of the second robotic gripper 320 is inclined towards the second mounting member 120. With the aforementioned structure, when it is necessary to capture stacked carrier plates, the wedge 3121 of the fingertip 312 only contacts the side of the top stacked carrier plate to avoid accidentally touching the other carrier plates. Preferably, anti-slip elements or textures are deployed on the inclined surfaces of the first robotic gripper 310 and / or the second robotic gripper 320 to increase the coefficient of friction between the inclined surface and the side of the carrier plate, so that the fingertip 312 is still effective even if the contact area between the inclined surface and the carrier plate is small.

[0049] Preferably, a second sliding pair 140 is provided between the first robotic gripper 310 and the first mounting member 110, and between the second robotic gripper 320 and the second mounting member 120. The second sliding pair 140 is adapted to provide balanced support for the first robotic gripper 310 and / or the second robotic gripper 320, and to guide the first robotic gripper 310 and / or the second robotic gripper 320 to change their position along the first horizontal direction. Admittedly, the second sliding pair 140 and the first sliding pair 130 have similar structures, and will not be described in detail here. In this embodiment, there are two stationary elements 131 and two first sliding pairs 130. Conversely, there are four stationary elements (not shown in the figures) and four second sliding pairs 140 in the second sliding pair 140. Two second sliding pairs 140 are deployed on both sides of the first robotic gripper 310 in the second horizontal direction, and the other two second sliding pairs 140 are deployed on both sides of the second robotic gripper 320 in the second horizontal direction. This improves the guiding effect of the second sliding pair 140, ensuring a stable and durable transmission connection between the first robotic gripper 310 and the second robotic gripper 320 and their respective corresponding drivers 400.

[0050] Furthermore, the pitch adjustment assembly 200 is specifically designed based on a forward and reverse threaded rod. Preferably, the pitch adjustment assembly 200 is located above the middle section of the first mounting member 110 and / or the second mounting member 120 in the second horizontal direction. More specifically, the mounting assembly 100 includes a base frame 150, which is connected to the stationary element 131, and the pitch adjustment assembly 200 is deployed on the base frame 150. In this embodiment, the base frame 150 is connected to the stationary elements 131 respectively deployed on both sides of the first mounting member 110 and the second mounting member 120 in the second horizontal direction to enhance the coupling of the carrier-level manipulator components.

[0051] Preferably, the base frame 150 is movably deployed on the stationary element 131, such that a slight movement of the base frame 150 in the first horizontal direction is sufficient to change the position of the adjusting assembly 200 in the first horizontal direction, thus avoiding interference from the first mounting member 110 and the second mounting member 120, and facilitating installation. Indeed, the base frame 150 and the stationary element 131 are preferably relatively stable by threaded fastening. In this embodiment, the base frame 150 is preferably stable at or near the middle section of the stationary element 131, and the first mounting member 110 or the second mounting member 120 is adapted to move between the ends of the base frame 150 and the stationary element 131 to face each other or move away from each other.

[0052] Furthermore, the pitch adjustment assembly 200 includes a base 210, a threaded rod 220, a threaded nut 230, and an operating part 240. The base 210 is connected to the base frame 150. The threaded rod 220 is rotatably deployed on the base 210. The threaded nut 230 is sleeved on the outer periphery of the threaded rod 220. The operating part 240 is connected to one end of the threaded rod 220. More specifically, the threaded rod 220 is axially parallel to the first horizontal direction and includes a first rod portion and a second rod portion with opposite thread directions. There are two threaded nuts 230, which are respectively sleeved on the first rod portion and the second rod portion. The first mounting member 110 and the second mounting member 120 are respectively connected to different threaded nuts 230. With the aforementioned structure, the operating unit 240 is triggered, thereby activating the two lead screw nuts 230 to face each other or move away from each other along the positive and negative threaded screws 220, which in turn drive the first mounting member 110 and the second mounting member 120 to face each other or move away from each other. In this embodiment, the operating unit 240 is preferably rotary, so triggering the operating unit 240 indicates rotating the rotary control.

[0053] It is understood that a positioning structure (not shown) is provided between the base 210 and the base frame 150, so that the base 210 can change its position relative to the base frame 150 along the second horizontal direction to facilitate the installation of the adjustment assembly 200. Admittedly, the positioning structure is a conventional structure in the art (e.g., a sliding pair), and will not be described in detail here.

[0054] Furthermore, the carrier-level manipulator includes a pressure element 500 deployed on the base 150. The pressure element 500 is located between the first manipulator gripper 310 and the second manipulator gripper 320. Once the fingertip 312 is in contact with the edge of the carrier plate, the pressure element 500 is adapted to abut against the carrier plate, particularly the bottom surface of the pressure element 500 is adapted to abut against the upper surface of the carrier plate to prevent warping of the carrier plate. Preferably, the first manipulator gripper 310, the pressure element 500, and the second manipulator gripper 320 are arranged along a first horizontal direction. The pressure element 500 is preferably located between or near the first manipulator gripper 310 and the second manipulator gripper 320 to improve the anti-warping effect of the carrier plate. Alternatively, the pressure element 500 is connected to the base 150; or, the pressure element 500 is movably deployed on the base 150, and the carrier-level manipulator includes a drive structure (not shown) adapted to activate the lifting and lowering of the pressure element 500.

[0055] Furthermore, since the carrier plates are stacked and in direct contact with each other, adjacent carrier plates are at risk of damage due to friction, electrostatic discharge (ESD), etc. In a preferred embodiment, the pressure element 500 is recessed inward from its bottom surface to form at least one mounting hole 510, and the carrier-level robot includes a picker 600 deployed in the mounting hole 510. Admittedly, the picker 600 is adapted to be received in the mounting hole 510 to avoid affecting the contact between the pressure element 500 and the upper surface of the carrier plate. More specifically, the picker 600 is preferably a vacuum nozzle. The pressure element 500 is elongated and its length direction is parallel to the second horizontal direction. Preferably, the mounting hole 510 extends vertically through the pressure element 500 to facilitate the installation of the picker 600. In this embodiment, there are two pickers 600, which are respectively deployed on both sides of the pressure element 500 in the second horizontal direction.

[0056] With the aforementioned structure, spacers (e.g., padding paper) can be deployed between adjacent carriers to prevent damage to adjacent carriers. Specifically, before capturing a carrier, the pickup 600 is adapted to generate negative pressure within the mounting hole 510, so that the pressure element 500 adsorbs the spacers, and then the carrier-level robot removes the spacers.

[0057] In addition, this utility model provides a transportation device, please refer to [link / reference]. Figure 3 As shown, the system includes a multi-joint robotic arm 700, a vision sensor 800, and the aforementioned carrier-level robotic hand. The base frame 150 and the vision sensor 800 are both deployed at the end of the multi-joint robotic arm 700, thus enabling the multi-joint robotic arm 700 to activate the carrier-level robotic hand and the vision sensor 800 to move horizontally and / or vertically to transfer a carrier plate or separator. The vision sensor 800 is adapted to determine that the stacked object to be transferred is a carrier plate or separator, thus the carrier-level robotic hand performs the corresponding operation. In this embodiment, the multi-joint robotic arm 700 includes a lateral actuator 710 and a lifting actuator 720 to drive the carrier-level robotic hand and the vision sensor 800 to move horizontally and / or vertically. It is understood that the lifting actuator 720 and the lateral actuator 710 are conventional linear modules, and will not be described in detail here. Admittedly, in other embodiments, the transport device of the multi-joint robotic arm 700 is still suitable for moving transfer plates even without the lateral actuator 710 or the lifting actuator 720.

[0058] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A carrier board level robot, characterized in that, The utility model relates to a kind of distance-adjusting assembly and erecting assembly, including: Erecting assembly (100), including first erecting piece (110) and second erecting piece (120) in first horizontal direction relative arrangement; Distance-adjusting assembly (200), deployment in the erecting assembly (100), is suitable for activating the first erecting piece (110) and the second erecting piece (120) along first horizontal direction face or away from each other; Mechanical hand tongs assembly, between the first erecting piece (110) and the second erecting piece (120), it includes first mechanical hand tongs (310) and second mechanical hand tongs (320) in first horizontal direction relative arrangement; Driver (400), quantity is two, two the driver (400) is respectively deployed in the first erecting piece (110) and the second erecting piece (120), the first mechanical hand tongs (310) and the second mechanical hand tongs (320) are respectively with different the driver (400) transmission connection; Wherein, two the driver (400) is suitable for cooperation activation the first mechanical hand tongs (310) and the second mechanical hand tongs (320) along first horizontal direction face or away from each other, to capture or release carrier plate.

2. The panel level robot as recited in claim 1, wherein, The erecting assembly (100) includes first sliding pair (130), it includes: Stationary element (131), along first horizontal direction arrangement; Sliding element (132), can be movably deployed on the stationary element (131) along first horizontal direction; Wherein, the sliding element (132) quantity is two, the first erecting piece (110) and the second erecting piece (120) are respectively with different the sliding element (132) interface.

3. The panel level robot as set forth in claim 2, wherein, The first sliding pair (130) quantity is two, two the first sliding pair (130) is respectively deployed in the first erecting piece (110) and second erecting piece (120) in second horizontal direction both sides, second horizontal direction is perpendicular to first horizontal direction.

4. The panel level robot as recited in claim 1, wherein, The first mechanical hand tongs (310) and the first erecting piece (110) are adjacent arrangement, the second mechanical hand tongs (320) and the second erecting piece (120) are adjacent arrangement, the first mechanical hand tongs (310) and the first erecting piece (110) between and the second mechanical hand tongs (320) and the second erecting piece (120) between are equipped with second sliding pair (140), the second sliding pair (140) is suitable for guiding the first mechanical hand tongs (310) and the second mechanical hand tongs (320) along first horizontal direction change its position.

5. The panel level robot as recited in claim 2, wherein, The distance-adjusting assembly (200) is located in the first erecting piece (110) and / or the second erecting piece (120) in second horizontal direction middle section, second horizontal direction is perpendicular to first horizontal direction, the erecting assembly (100) includes with the stationary element (131) interface base frame (150), the distance-adjusting assembly (200) is deployed in the base frame (150).

6. The panel level robot as set forth in claim 5, wherein, The distance-adjusting assembly (200) includes: Base (210), with the base frame (150) interface; A positive and negative toothed screw rod (220) is rotatably arranged on the base (210) and has a first rod portion and a second rod portion with opposite screw directions; Two screw nuts (230) are arranged on the first rod portion and the second rod portion respectively; An operation portion (240) is connected to one end of the positive and negative toothed screw rod (220); The first and second erecting members (110, 120) are connected to different screw nuts (230).

7. The panel level robot as recited in claim 2, wherein, The erecting assembly (100) further comprises a base frame (150) connected to the stationary element (131), and the wafer-level robot comprises a pressing element (500) arranged on the base frame (150), which is located between the first and second robot grippers (310, 320) and is adapted to abut against a wafer.

8. The panel level robot as set forth in claim 7, wherein, The pressing element (500) is recessed inward from its bottom surface to form at least one mounting hole (510), and the wafer-level robot comprises a pick-up device (600) arranged in the mounting hole (510), which is adapted to be accommodated in the mounting hole (510).

9. The panel level robot as recited in claim 7, wherein, The pressing element (500) is connected to the base frame (150), or the pressing element (500) is movably arranged on the base frame (150), and the wafer-level robot comprises a driving structure for activating the pressing element (500) to move up and down.

10. A transport device, characterized by The wafer-level robot comprises: A multi-joint robot arm (700); The wafer-level robot according to any one of claims 1 to 9 is arranged at the end of the multi-joint robot arm (700). A vision sensor (800) is arranged at the end of the multi-joint robot arm (700).

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