Vacuum coating equipment

Abstract

The utility model provides vacuum coating equipment which comprises an outer cavity, one end of the outer cavity is provided with a first opening, and the other opposite end of the outer cavity is provided with an outer layer extraction opening which protrudes outwards away from the first opening and is communicated with downstream equipment and the interior of the outer cavity; the middle-layer isolation cylinder is arranged in the outer cavity, one end of the middle-layer isolation cylinder is provided with a second opening, and the other end of the middle-layer isolation cylinder is provided with a middle-layer air outlet embedded into the outer-layer extraction opening The inner-layer isolation cylinder is arranged in the middle-layer isolation cylinder, a third opening is formed in one end of the inner-layer isolation cylinder, and an inner-layer air outlet embedded into the middle-layer air outlet is formed in the other opposite end of the inner-layer The two opposite ends of the material carrier are provided with an air inlet opening and an air outlet opening correspondingly, the material carrier enters and exits the inner-layer isolation cylinder through the first opening, the second opening and the third opening, and when the material carrier is arranged in the inner-layer isolation cylinder, the air inlet opening and the air outlet opening face the first opening and the outer-layer extraction opening correspondingly; the furnace door cover is mounted at the first opening; the spraying device is arranged in the outer cavity, located between the first opening and the second opening and used for spraying reaction gas to the target substrate in the material carrier.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum coating equipment for photovoltaic cells, and in particular to a vacuum coating equipment. Background Technology

[0002] With the continuous development of the photovoltaic industry and the continuous iteration of solar cell technology, atomic layer deposition (ALD) technology is being used more and more widely in solar cell manufacturing processes. ALD technology can achieve large-area film deposition on the surface of solar cells, and its coating has good uniformity, with the advantages of dense film formation and no pinholes. In addition, high-efficiency crystalline silicon cells are an important future development trend of the photovoltaic cell industry, and adding an ALD coating process to its manufacturing process for surface passivation can effectively increase the photoelectric conversion efficiency of these solar cells.

[0003] However, existing vacuum coating equipment, including ALD coating equipment, has the following drawbacks:

[0004] (1) Existing vacuum coating equipment is prone to the deposition of reaction dust in different states within its reaction chamber, and the reaction chamber is also easily exposed to residual precursors (reaction gases), resulting in contamination of the reaction chamber, shortening the equipment maintenance cycle, and in severe cases, even leading to deterioration of process performance and a decrease in product yield. To solve this problem, existing technologies typically configure the reaction chamber of vacuum coating equipment as a dual-chamber structure, with the inner chamber serving as the reaction area and an inert gas being introduced into the outer chamber for sealing. This aims to confine the reaction dust generated to the inner chamber, thus achieving the effect that only the inner chamber needs maintenance (the inner chamber does not need to withstand one atmosphere of pressure and has a lighter structure, making it easier and cheaper to maintain than the outer chamber). However, in actual applications, the sealing of the inert gas in this type of vacuum coating equipment is not reliable, causing the outer chamber to still be easily contaminated by the reaction dust, resulting in both the inner and outer chambers still requiring frequent maintenance simultaneously.

[0005] (2) In existing ALD vacuum coating equipment, different precursors (reactant gases) are easily encountered in time and overlap in space in the transport path before entering the reaction area of ​​their respective reaction chambers after being output from the special gas pipeline. If different precursors encounter each other in time, they will react directly, thereby generating dust in the relevant and subsequent reaction areas, causing blockage of the reaction chamber, affecting the process effect, or even causing the coating process to fail; as for spatial overlap, the existing technology usually adopts an extended purging process to reduce dust generation, but this extended purging process cannot completely avoid dust generation and leads to a longer coating cycle and reduced production capacity.

[0006] Therefore, how to reduce the contact between reaction dust and precursors and the reaction chamber, so as to shorten the maintenance cycle of ALD vacuum coating equipment, is a technical problem that urgently needs to be solved in this field. Utility Model Content

[0007] This invention proposes a vacuum coating equipment to solve the technical problem that in existing ALD vacuum coating equipment, reaction dust and precursors easily come into contact with the reaction chamber, thereby extending the equipment's maintenance cycle.

[0008] To solve the above problems, the technical solution adopted by this utility model is as follows:

[0009] This utility model provides a vacuum coating equipment, comprising:

[0010] The outer cavity has a first opening at one end and an outer air extraction port at the opposite end that protrudes outward from the first opening and connects the downstream equipment with the interior of the outer cavity.

[0011] The middle layer isolation cylinder is located in the outer cavity. One end of the cylinder has a second opening, and the opposite end of the cylinder has a middle layer air outlet that is embedded in the outer layer air extraction port.

[0012] The inner isolation cylinder is located in the middle isolation cylinder. One end of the inner isolation cylinder has a third opening, and the other end of the inner isolation cylinder has an inner air outlet that is embedded in the middle air outlet.

[0013] The material carrier has an air inlet and an air outlet at its opposite ends. The material carrier enters and exits the inner isolation cylinder through the first, second and third openings. When the material carrier is placed in the inner isolation cylinder, the air inlet and the air outlet face the first opening and the outer air extraction port respectively.

[0014] The furnace door cover is installed at the first opening and is used to open and close the outer cavity;

[0015] A spraying device, located in the outer cavity and between the first and second openings, is used to spray reactive gases onto the target substrate carried in the material carrier.

[0016] Preferably, an outer cavity is formed between the outer cavity and the middle isolation cylinder, a middle cavity is formed between the middle isolation cylinder and the inner isolation cylinder, and an inner cavity is formed between the inner isolation cylinder and the material carrier when the material carrier is placed in the inner isolation cylinder; a core reaction cavity for carrying the target substrate is formed inside the material carrier;

[0017] The second opening connects the outer layer compartment and the middle layer compartment and is spaced apart from the first opening; the third opening connects the middle layer compartment and the inner layer compartment and is spaced apart from the second opening; the air inlet and air outlet both connect the inner layer compartment and the core reaction chamber and are spaced apart from the third opening and the inner layer air outlet, respectively.

[0018] Preferably, the outer air extraction port includes:

[0019] The outer vent pipe is located at the other end of the outer cavity opposite to the first opening, away from the first opening. The interior of the outer vent pipe forms a corresponding exhaust pipe connecting the downstream equipment and the outer vent hole of the outer cavity.

[0020] The middle layer air outlet includes: a middle layer air outlet pipe, which is located at the other end of the middle layer isolation cylinder opposite to the second opening, protruding away from the second opening and embedded in the outer layer air extraction hole; the interior of the middle layer air outlet pipe forms a middle layer air outlet that connects the outer layer air extraction hole and the middle layer cavity.

[0021] The inner air outlet includes an inner air outlet pipe, which is located at the other end of the inner layer isolation cylinder opposite to the third opening, protruding outward away from the third opening and embedded in the middle layer air outlet hole. The interior of the inner air outlet pipe forms an inner air outlet hole that connects the middle layer air outlet hole and the inner layer cavity.

[0022] Preferably, the outer layer air extraction hole, the middle layer air outlet hole, the inner layer air outlet hole, the outer cavity, the middle layer isolation cylinder, the inner layer isolation cylinder, and the material carrier are coaxially arranged. The inner layer air outlet hole's inner layer projected area in the axial direction is greater than or equal to the difference between the middle layer air outlet hole's middle layer projected area and the inner layer projected area in the axial direction, and the difference between the middle layer projected area and the inner layer projected area is greater than or equal to the difference between the outer layer air extraction hole's outer layer projected area and the middle layer projected area in the axial direction.

[0023] Preferably, the outer cavity, the middle isolation cylinder, the inner isolation cylinder, and the material carrier are all rectangular parallelepipeds. The material carrier includes a pair of parallel spaced side plates and a top plate connected between the corresponding top ends of the pair of side plates. The corresponding ends of the pair of side plates and the top plate respectively form an air inlet and an air outlet. A bottom opening connecting the air inlet and the air outlet is formed between the corresponding bottom ends of the pair of side plates.

[0024] When the material carrier is placed in the inner isolation cylinder, it is supported on the top surface of the bottom wall of the inner isolation cylinder by the corresponding bottom ends of a pair of side plates, so that the bottom opening of the inner isolation cylinder is closed by the bottom wall.

[0025] Preferably, the bottom wall of the inner isolation cylinder is provided with an extension extending out of the third opening at one end, and the width of the extension is greater than or equal to the width of the top wall of the inner isolation cylinder.

[0026] When the material carrier is placed in the inner isolation cylinder, the air inlet is flush with the third opening, and the air outlet is spaced apart from the inner air outlet.

[0027] Furthermore, the middle layer isolation cylinder is provided with at least one set of first air supply channel and first air return channel at one end of one side wall corresponding to the second opening, and at least one set of second air supply channel and second air return channel at the other end of the middle layer isolation cylinder corresponding to the other side wall of the second opening.

[0028] Vacuum coating equipment also includes:

[0029] The first reaction gas source is located on one side of the outer cavity and is connected to the first gas supply channel and the first gas return channel respectively through the first gas supply pipeline and the first gas return pipeline;

[0030] The second reaction gas source is located on the opposite side of the outer cavity and is connected to the second gas supply channel and the second gas return channel respectively through the second gas supply pipeline and the second gas return pipeline.

[0031] The spray system includes:

[0032] The movable spray plate is installed on the end of the furnace door cover facing the outer air extraction port. The side of the movable spray plate facing away from the furnace door cover is respectively provided with a first spray air inlet hole, a first spray air return hole, a second spray air inlet hole and a second spray air return hole corresponding to the first air supply channel, the first air return channel, the second air supply channel and the second air return channel.

[0033] The movable spray plate is provided with a first gas supply pipe that connects the first spray air inlet and the first spray air return, and at least one first spray pipe connected to the first gas supply pipe. Multiple first spray holes are distributed on the first spray pipe that pass through the side of the movable spray plate facing away from the furnace door cover.

[0034] The movable spray plate is also provided with a second air supply pipe that connects the second spray air inlet and the second spray air return, and at least one second spray pipe connected to the second air supply pipe. Multiple second spray holes are distributed on the second spray pipe that pass through the side of the movable spray plate facing away from the furnace door cover.

[0035] When the furnace door is closed, the movable spray plate is parallel to and covers the second opening, and the first gas supply channel, the first gas return channel, the second gas supply channel and the second gas return channel are respectively connected to the first spray inlet hole, the first spray return hole, the second spray inlet hole and the second spray return hole.

[0036] Preferably, the first gas supply pipeline and the second gas supply pipeline are arranged in parallel at intervals at opposite ends of the movable spray plate, and multiple first spray pipelines are vertically connected to the first gas supply pipeline in parallel at intervals, and multiple second spray pipelines are vertically connected to the second gas supply pipeline in parallel at intervals, with each first spray pipeline and the second spray pipeline being arranged alternately.

[0037] When the furnace door is closed, the projection of the spray area formed by the corresponding first spray hole on each first spray pipe and the corresponding second spray hole on each second spray pipe falls into the cross-sectional area of ​​the air inlet opening and completely covers the cross-sectional area of ​​the target substrate contained in the material carrier, so that most of the first reaction gas and the second reaction gas introduced by the first reaction gas source and the second reaction gas source respectively enter the material carrier through the air inlet opening.

[0038] Furthermore, vacuum coating equipment also includes:

[0039] A special gas filtration device is connected to the outer air extraction port and is used to filter residual reaction gases discharged from the outer air extraction port.

[0040] A vacuum pump is connected downstream of the outer air extraction port of the special gas filter device and is used to evacuate the interior of the outer cavity.

[0041] The exhaust gas treatment device is connected downstream of the vacuum pump relative to the special gas filter device. It is used to treat the exhaust gas generated by the reaction of the reaction gases and discharge the treated gas to downstream equipment.

[0042] Preferably, the vacuum coating equipment is an ALD coating equipment.

[0043] Compared with the prior art, the present invention has the following beneficial effects:

[0044] The vacuum coating equipment provided by this utility model confines the reactive gas (precursor) to the inside of the material carrier as much as possible for the reaction. Utilizing a multi-stage gas isolation structure surrounding the material carrier layer by layer, the reactive gas escaping from the inlet end of the material carrier is introduced into the corresponding isolation structure at each stage. Unreacted reactive gas and waste gas generated during the reaction are guided from the inside of the corresponding isolation structure and the outlet end of the outer layer of the corresponding isolation structure embedded in the outer cavity to the outer layer of the exhaust port. Then, the unreacted reactive gas and waste gas are discharged downstream through the outer layer of the exhaust port, preventing excessive leakage of reactive gas, waste gas, and dust into the outer cavity and contamination of the outer cavity. Therefore, only the outer isolation structure and the material carrier need maintenance, while the outer cavity requires minimal maintenance, thus reducing equipment maintenance difficulty and shortening maintenance cycles. Simultaneously, the supply gas path, spray pipe path, and return gas path of different reactive gases in this vacuum coating equipment are independent and do not interfere with each other, preventing temporal and spatial overlap of different reactive gases within the equipment and avoiding dust contamination caused by the encounter of special gases. Attached Figure Description

[0045] To more clearly illustrate the technical solution proposed by this utility model, the present utility model will be described in detail below with reference to the embodiments and accompanying drawings. It should be understood that the embodiments and accompanying drawings described in the following detailed description are merely some embodiments of this utility model, and those skilled in the art can make changes to these drawings under the concept of this utility model.

[0046] Figure 1 A top cross-sectional view of an embodiment of the vacuum coating equipment provided by this utility model;

[0047] Figure 2 for Figure 1A top-down cross-sectional view of the vacuum coating equipment in the image, with some parts of the structure hidden and enlarged.

[0048] Figure 3 for Figure 2 A partially enlarged structural diagram of the vacuum coating equipment in the diagram;

[0049] Figure 4 for Figure 3 A schematic diagram of the projected cross-sections of the outer layer air extraction hole, the middle layer air outlet hole, and the inner layer air outlet hole of the vacuum coating equipment in the direction of the axis;

[0050] Figure 5 A three-dimensional structural diagram of the assembly of the material carrier and the middle isolation cylinder in an embodiment of the vacuum coating equipment provided by this utility model;

[0051] Figure 6 for Figure 1 A schematic cross-sectional view of the vacuum coating equipment along the AA direction.

[0052] Figure 7 for Figure 1 A cross-sectional view of the movable spray plate along the BB direction in the vacuum coating equipment.

[0053] The main markings in the attached figures are as follows:

[0054] 1. Outer cavity; 11. First opening; 12. Outer layer exhaust port; 121. Outer layer exhaust pipe; 122. Outer layer exhaust hole; 13. Heating device; 2. Middle layer isolation cylinder; 21. Second opening; 22. Middle layer exhaust port; 221. Middle layer exhaust pipe; 222. Middle layer exhaust hole; 23. First air supply channel; 24. First air return channel; 24. Second air supply channel; 25. Second air return channel; 3. Inner layer isolation cylinder; 31. Third opening; 32. Inner layer exhaust port; 321. Inner layer exhaust pipe; 322. Inner layer exhaust hole; 33. Bottom wall; 331. Extension; 34. Top wall; 4. Material carrier; 41. Air inlet opening; 42. Air outlet opening; 43. Top plate; 44. Side plate; 45. Bottom opening; 5. Furnace door cover; 51. Connecting bracket; 6. Spraying device; 61. Movable spray plate; 611. First spray air inlet; 612. First spray air return hole; 613. Second spray air inlet; 614. Second spray air return hole; 615. First gas supply pipeline; 616. First spray pipeline; 6161. First spray hole; 617. Second gas supply pipeline; 618. Second spray pipeline; 6181. Second spray hole; 7. First reaction gas source; 71. First gas supply pipeline; 72. First gas return pipeline; 8. Second reaction gas source; 81. Second gas supply pipeline; 82. Second gas return pipeline; 9. Special gas filtration device; 10. Vacuum pump; 101. Tail gas treatment device.

[0055] The other markings in the diagram are as follows:

[0056] C. Axis direction; D. Outer cavity; E. Middle cavity; F. Inner cavity; G. Core reaction cavity; H. Spraying area; L. Total length; M. Vehicle length; N. Extension length; S1. Inner projected area; S2. Middle projected area; S3. Outer projected area. Detailed Implementation

[0057] To make the technical problem to be solved, the technical solution and the beneficial effects of this utility model clearer, the following description is provided in conjunction with the appendix. Figure 1-7 The present invention will be further described in detail with reference to the embodiments.

[0058] Please refer to the following: Figure 1-7 The vacuum coating equipment provided by this utility model includes:

[0059] An outer cavity 1 has a first opening 11 at one end and an outer air extraction port 12 at the opposite end, which protrudes outward away from the first opening 11 and connects downstream equipment to the interior of the outer cavity 1. A middle isolation cylinder 2 is disposed in the outer cavity 1, with a second opening 21 at one end and a middle air outlet 22 embedded in the outer air extraction port 12 at the opposite end. An inner isolation cylinder 3 is disposed in the middle isolation cylinder 2, with a third opening 31 at one end and an inner air outlet 32 ​​embedded in the middle air outlet 22 at the opposite end. A material carrier 4 has air inlets 4 at both opposite ends. 1. The material carrier 4 enters and exits the inner isolation cylinder 3 through the first opening 11, the second opening 21 and the third opening 31. When the material carrier 4 is placed in the inner isolation cylinder 3, the inlet opening 41 and the outlet opening 42 are respectively aligned with the first opening 11 and the outer exhaust port 12. 5. The furnace door cover is installed at the first opening 11 and is used to open and close the internal accommodating space of the outer cavity 1. 6. The spraying device is located in the outer cavity 1 and between the first opening 11 and the second opening 21. It is used to spray reactive gas onto the target substrate (not shown in the figure) carried in the material carrier 4 to passivate the surface of the target substrate and achieve the coating process effect of the vacuum coating equipment.

[0060] The material carrier 4, inner isolation cylinder 3, and middle isolation cylinder 2 constitute a three-level isolation structure stacked sequentially inside the outer cavity 1 from the inside out. Through the multi-level (three-layer) isolation structure (material carrier 4, inner isolation cylinder 3, and middle isolation cylinder 2), the reaction gas escaping from the inlet end of the material carrier 4 is introduced into the corresponding isolation structure step by step. The unreacted reaction gas and the waste gas generated by the reaction are guided from the inside of the corresponding isolation structure and the outlet end of the corresponding isolation structure embedded in the outer exhaust port 12 to the outer exhaust port 12. Then, the unreacted reaction gas and the waste gas generated by the reaction are discharged to the downstream equipment through the outer exhaust port 12.

[0061] Therefore, the vacuum coating equipment provided by this utility model can confine the reaction gas sprayed by the spray device 6 onto the target substrate carried in the material carrier 4 to the inside of the material carrier 4 as much as possible, greatly reducing the degree of leakage of the reaction gas and the dust generated by the reaction from the gas inlet of the material carrier 4 into the outer cavity 1, avoiding contact between a large amount of dust and precursor (reaction gas) generated by the reaction and contamination of the reaction cavity, and reducing the maintenance difficulty and cycle of the vacuum coating equipment.

[0062] Meanwhile, since the outlet of the middle layer isolation cylinder 2 is embedded in the outer layer exhaust port 12 of the outlet of the outer cavity 1 through the middle layer outlet 22, and the outlet of the inner layer isolation cylinder 3 is embedded in the middle layer outlet 22 through the inner layer outlet 32, the corresponding outlets of the inner layer isolation cylinder 3 and the middle layer isolation cylinder 2 are stacked sequentially from the inside to the outside and progressively penetrate into the outer layer exhaust port 12. This allows the unreacted reaction gas and the waste gas generated by the reaction that enter the inner layer isolation cylinder 3 to first enter the middle layer outlet 22 from the inner layer outlet 32 ​​of its outlet end, and then enter the outer outlet from the middle layer outlet 22 and be discharged to the downstream equipment. At the same time, the unreacted reaction gas and the waste gas generated by the reaction that enter the middle layer isolation cylinder 2 to first enter the outer layer exhaust port 12 from the middle layer outlet 22 of its outlet end, and then be discharged to the downstream equipment from the outer outlet.

[0063] Therefore, the vacuum coating equipment provided by this utility model can also allow unreacted reactive gases and waste gases generated by the reaction to enter the material carrier 4, the inner isolation cylinder 3 and the middle isolation cylinder 2, respectively, through the corresponding outlets to enter the outlet of the next-level (outer) isolation structure. This reduces the leakage of unreacted reactive gases and waste gases generated by the reaction from the outlet of the material carrier 4 or the corresponding isolation structure to the next-level (outer) space area, further reducing the degree of leakage of reactive gases and waste gases into the outer cavity 1. This avoids a large amount of reactive gases and waste gases from contacting and contaminating the outer cavity 1, and reduces the difficulty and cycle of equipment maintenance.

[0064] Please refer to the following: Figure 1-36. In this embodiment, an outer cavity D is formed between the outer cavity 1 and the middle isolation cylinder 2, and a middle cavity E is formed between the middle isolation cylinder 2 and the inner isolation cylinder 3, located inside the outer cavity D. When the material carrier 4 is placed in the inner isolation cylinder 3, an inner cavity F is formed between the inner isolation cylinder 3 and the material carrier 4, located inside the middle cavity E. A core reaction chamber G, which is used to carry the target substrate and located inside the inner cavity F, is formed inside the material carrier 4. The spraying device 6 is disposed in the outer cavity D and located between the first opening 11 and the second opening 21.

[0065] When the material carrier 4 is placed in the inner isolation cylinder 3, the second opening 21 of the middle isolation cylinder 2 connects the outer isolation cavity D and the middle isolation cavity E, and is spaced apart from the first opening 11 of the outer cavity 1, serving as the air inlet of the middle isolation cylinder 2; the third opening 31 of the inner isolation cylinder 3 connects the middle isolation cavity E and the inner isolation cavity F, and is spaced apart from the second opening 21, serving as the air inlet of the inner isolation cylinder 3; the air inlet opening 41 and the air outlet opening 42 of the material carrier 4 are both connected to the inner isolation cavity F and the core reaction cavity G, and are spaced apart from the third opening 31 and the inner air outlet 32, respectively, serving as the air inlet and air outlet of the material carrier 4.

[0066] Please refer to the following: Figure 1-3 In this embodiment, the outer air extraction port 12 includes:

[0067] The outer vent pipe 121 is located at the other end of the outer cavity 1 opposite to the first opening 11, away from the first opening 11. The interior of the outer vent pipe 121 forms a corresponding exhaust pipe that connects to the downstream equipment and the outer vent hole 122 of the outer cavity D.

[0068] The middle air outlet 22 includes:

[0069] The middle layer vent pipe 221 protrudes outward away from the second opening 21 and is embedded in the outer layer vent hole 122 (extending into the outer layer vent hole 12) at the other end of the middle layer isolation cylinder 2 opposite to the second opening 21. The interior of the middle layer vent pipe 221 forms a middle layer vent hole 222 that connects the outer layer vent hole 122 and the middle layer cavity E.

[0070] The inner air outlet 32 ​​includes:

[0071] The inner layer vent pipe 321 protrudes outward away from the third opening 31 and is embedded in the middle layer vent hole 222 (extending into the middle layer vent hole 22) at the other end of the inner layer isolation cylinder 3 opposite to the third opening 31. The interior of the inner layer vent pipe 321 forms an inner layer vent hole 322 that connects the middle layer vent hole 222 with the inner layer cavity F.

[0072] Please refer to the following: Figure 1-35, 6. In this embodiment, the outer cavity 1, the middle isolation cylinder 2, the inner isolation cylinder 3, and the material carrier 4 are all rectangular parallelepipeds. The material carrier 4 includes a pair of parallel spaced side plates 44 and a top plate 43 connected between the corresponding top ends of the pair of side plates 44. The corresponding ends of the pair of side plates 44 and the top plate 43 respectively form the above-mentioned air inlet 41 and air outlet 42. A bottom opening 45 connecting the air inlet 41 and the air outlet 42 is formed between the corresponding bottom ends of the pair of side plates 44.

[0073] When the material carrier 4 is placed in the inner isolation cylinder 3, it is supported on the top surface of the bottom wall 33 of the inner isolation cylinder 3 by the corresponding bottom ends of a pair of side plates 44, so that the bottom wall 33 of the inner isolation cylinder 3 closes the bottom opening 45, forming the aforementioned inner cavity F between the inner isolation cylinder 3 and the material carrier 4.

[0074] Please refer to the following: Figure 1-4 In a preferred embodiment, the outer layer air extraction hole 122, the middle layer air outlet 222, the inner layer air outlet 322, the outer cavity 1, the middle layer isolation cylinder 2, the inner layer isolation cylinder 3, and the material carrier 4 are coaxially arranged with the same central axis as the center. The inner layer projection area S1 of the inner layer air outlet 322 in the axial direction C (that is, the projection of the inner layer air outlet 322 onto the outer layer air extraction hole 122 along its axial direction C and the projected cross-sectional area formed by the projection of the inner layer air outlet 322 onto the outer layer air extraction hole 122) is greater than or equal to the middle layer air outlet 122. The difference between the middle layer projected area S2 of the vent 222 along the axial direction C (i.e., the projected cross-sectional area formed by the projection of the middle layer vent 222 onto the outer layer vent 122 along its axial direction C) and the inner layer projected area S1, and the difference between the middle layer projected area S2 and the inner layer projected area S1 is greater than or equal to the difference between the outer layer projected area S3 of the outer layer vent 122 along the axial direction C (i.e., the cross-sectional area of ​​the outer layer vent 122) and the middle layer projected area S2.

[0075] As a preferred embodiment of this example, the outer layer air extraction hole 122, the middle layer air outlet hole 222, and the inner layer air outlet hole 322 are all circular holes with a circular cross-section. The inner layer projected area S1, the middle layer projected area S2, and the outer layer projected area S3 are all the areas of the circular projected cross-sections of the corresponding circular holes along their axial direction C, and S1≥S2-S1, S2-S1≥S3-S2.

[0076] Please refer to the following: Figure 1-3 In a preferred embodiment of this invention, the distance between the second opening 21 of the middle layer isolation cylinder 2 and the first opening 11 of the outer cavity 1 is 10-200mm, that is, the second opening 21 is recessed 10-200mm relative to the first opening 11, so that the air inlet end of the middle layer isolation cylinder 2 is recessed a certain distance relative to the air inlet end of the outer cavity 1.

[0077] The distance between the third opening 31 of the inner isolation cylinder 3 and the second opening 21 of the middle isolation cylinder 2 is 1-10mm, that is, the third opening 31 is recessed 1-10mm relative to the second opening 21, so that the air inlet end of the inner isolation cylinder 3 is recessed a certain distance relative to the air inlet end of the middle isolation cylinder 2.

[0078] Please refer to the following: Figure 1 , 2 5. In this embodiment, the bottom wall 33 of the inner layer isolation cylinder 3 is provided with an extension 331 extending out of the third opening 31 along its axial direction C at one end of the bottom wall 33 of the inner layer isolation cylinder 3. The width of the extension 331 is greater than or equal to the width of the top wall 34 of the inner layer isolation cylinder 3, and the extension length N of the extension 331 (i.e. the length of the extension 331 extending along the axial direction C of the inner layer isolation cylinder 3) is less than the distance between the second opening 21 and the third opening 31.

[0079] When the material carrier 4 is placed in the inner isolation cylinder 3, the air inlet 41 is flush with the third opening 31, the air outlet 42 is spaced apart from the inner air outlet 32, and the distance between the end of the extension 331 away from the third opening 31 and the air outlet 42 is greater than the distance between the air inlet 41 and the air outlet 42. That is, the distance between the end of the extension 331 away from the third opening 31 and the air outlet 42 is greater than the distance between the third opening 31 and the air outlet 42. In other words, the total length L from the end of the extension 331 away from the third opening 31 to the air outlet 42 is greater than the carrier length M of the material carrier 4, and the total length L = carrier length M + extension length N.

[0080] Please refer to the following: Figure 1 , 6 7. In this embodiment, the middle layer isolation cylinder 2 is provided with at least one set of first air supply channel 23 and first air return channel 24 at one end of one side wall corresponding to the second opening 21, and at least one set of second air supply channel 25 and second air return channel 26 at the other end of the middle layer isolation cylinder 2 corresponding to the second opening 21.

[0081] Vacuum coating equipment also includes:

[0082] The first reaction gas source 7 is located on one side of the outer cavity 1, and passes through the outer cavity 1 through the first gas supply line 71 and the first gas return line 72, respectively, and is connected to the first gas supply channel 23 and the first gas return channel 24. The second reaction gas source 8 is located on the opposite side of the outer cavity 1, and passes through the outer cavity 1 through the second gas supply line 81 and the second gas return line 82, respectively, and is connected to the second gas supply channel 25 and the second gas return channel 26.

[0083] The spray device 6 includes:

[0084] A movable spray plate 61 is installed at the end of the furnace door cover 5 facing the outer exhaust port 12 when closed. The side of the movable spray plate 61 facing away from the furnace door cover 5 is provided with a first spray inlet 611, a first spray return 612, a second spray inlet 613, and a second spray return 614, corresponding to the first air supply channel 23, the first air return channel 24, the second air supply channel 25, and the second air return channel 26. Preferably, the movable spray plate 61 is connected to the end of the furnace door cover 5 facing the outer exhaust port 12 via a connecting bracket 51.

[0085] The movable spray plate 61 is provided with a first gas supply pipe 615 that connects the first spray air inlet 611 and the first spray air return hole 612, and at least one first spray pipe 616 connected to the first gas supply pipe 615. Multiple first spray holes 6161 are distributed on the side of the movable spray plate 61 facing away from the furnace door cover 5.

[0086] The movable spray plate 61 is also provided with a second air supply pipe 617 that connects the second spray air inlet 613 and the second spray air return hole 614, and at least one second spray pipe 618 connected to the second air supply pipe 617. Multiple second spray holes 6181 are distributed on the side of the movable spray plate 61 facing away from the furnace door cover 5.

[0087] The first gas supply pipeline 71, the first gas supply channel 23, the first gas return channel 24, the second gas supply pipeline 81, the second gas supply channel 25, the second gas return channel 26, the first spray air inlet 611, the first spray air return hole 612, the first gas supply pipeline 615, the first spray pipeline 616, the second spray air inlet 613, the second spray air return hole 614, the second gas supply pipeline 617, the second spray pipeline 618, the first reaction gas source 7 and the second reaction gas source 8 are not connected to each other and are independent of each other.

[0088] When the furnace door cover 5 is closed, the movable spray plate 61 is parallel to and covers the second opening 21, and the first gas supply channel 23, the first gas return channel 24, the second gas supply channel 25 and the second gas return channel 26 are respectively connected to the first spray inlet 611, the first spray return 612, the second spray inlet 613 and the second spray return 614.

[0089] Please refer to the following: Figure 1 , 67. In a preferred embodiment of this invention, the first gas supply pipeline 615 and the second gas supply pipeline are arranged in parallel at intervals at opposite ends of the movable spray plate 61 (distributed on both sides of the axis C of the second isolation cylinder), a plurality of first spray pipelines 616 are arranged in parallel at intervals and vertically connected to the first gas supply pipeline 615, and a plurality of second spray pipelines 618 are arranged in parallel at intervals and vertically connected to the second gas supply pipeline 617, and each first spray pipeline 616 and second spray pipeline 618 are arranged alternately.

[0090] When the furnace door cover 5 is closed, the projection of the spray area H formed by the corresponding first spray hole 6161 on each of the first spray pipes 616 and the corresponding second spray hole 6181 on each of the second spray pipes 618 falls into the cross-sectional area of ​​the air inlet opening 41, and completely covers the cross-sectional area of ​​the target substrate contained in the material carrier 4. This allows most of the first and second reaction gases introduced by the first reaction gas source 7 and the second reaction gas source 8 to enter the core reaction chamber G inside the material carrier 4 through the air inlet opening 41, while only a small portion of the first and second reaction gases enter through the third opening 31. The first and second reacting gases enter the inner cavity F inside the inner isolation cylinder 3, while a smaller amount of the first and second reacting gases enter the middle cavity E inside the middle isolation cylinder 2 through the second opening 21. Only trace amounts of the first and second reacting gases enter the outer cavity D. This further confines most of the reacting gases sprayed by the spray device 6 onto the target substrate carried in the material carrier 4 to the interior of the material carrier 4, significantly reducing the leakage of reacting gases from the inlet of the material carrier 4 into the outer cavity 1. This prevents a large amount of dust and reacting gases generated during the reaction from contacting and contaminating the reaction cavity. In summary, this greatly extends the maintenance cycle of the middle isolation cylinder 2, and the outer cavity 1 requires minimal or even no maintenance.

[0091] Meanwhile, because the air intake and spraying range is limited to the cross-sectional area of ​​the target substrate in the material carrier 4, the amount of reactive gas (precursor) used is reduced, thus reducing dust generation and extending the equipment maintenance cycle. Furthermore, since the maintenance of the inner isolation cylinder 3 partially overlaps with that of the material carrier 4, the maintenance workload is also reduced. In addition, the inner isolation cylinder 3 is small in size, lightweight, and has a small surface area, making it relatively easier and more convenient to maintain.

[0092] Please refer to the following: Figure 1 , 6 7. As a more preferred embodiment of this example, the projection of the spray area H formed by the corresponding first spray hole 6161 on each first spray pipe 616 and the corresponding second spray hole 6181 on each second spray pipe 618 falls into the cross-sectional area of ​​the air inlet 41 and is slightly smaller than the cross-sectional area of ​​the air inlet 41, and coincides with the cross-sectional area of ​​the target substrate in the material carrier 4.

[0093] Therefore, the vacuum coating equipment provided by this utility model only allows air to enter through the second opening 21 (air inlet end) of the middle isolation cylinder 2 and the movable spray plate 61 between the second opening 21 and the third opening 31, ensuring that the airflow of the reaction gas does not affect the coating process in the core reaction chamber G inside the material carrier 4.

[0094] In addition, the gas supply path, spray pipeline and return path of different reactive gases (precursors) do not interfere with each other and are independent of each other, so as to prevent different reactive gases (precursors) from meeting in time and overlapping in space in the vacuum coating equipment, and avoid dust pollution of the vacuum coating equipment caused by the meeting of special gases.

[0095] Please refer to the following: Figure 1 , 6 7. In this embodiment, according to actual production needs, the size of the spray area H formed by the corresponding first spray hole 6161 on each first spray pipe 616 and the corresponding second spray hole 6181 on each second spray pipe 618, as well as the number and position of the first spray pipe 616, the first spray hole 6161, the second spray pipe 618 and the second spray hole 6181, can all be adjusted. The first air supply pipe 71, the first air supply channel 23, the first air return channel 24, the second air supply pipe 81, the second air supply channel 25, the second air return channel 26, the first spray air inlet 611, the first spray air return hole 612, the first air supply pipe 615, the second spray air inlet 613, the second spray air return hole 614, the second air supply pipe 617, as well as the first reaction gas source 7 and the second reaction gas source 8 can all be set in one or more sets at different positions of the movable spray plate 61, the middle layer isolation cylinder 2 or on opposite sides of the outer cavity 1, which will not be described in detail here.

[0096] In other embodiments (not shown in the figures), the inner surface of the opposite sidewall of the outer cavity 1 corresponding to the second opening 21 facing the outer layer cavity D is respectively provided with a pair of protrusions (not shown in the figures) extending into the outer layer cavity D and close to the end of the sidewall of the middle layer isolation cylinder 2 corresponding to the second opening 21. In this case, at least one set of first air supply channels 23 and first air return channels 24 are provided on the protrusion of one of the sidewalls of the outer cavity 1 corresponding to the second opening 21, and at least one set of second air supply channels 25 and second air return channels 26 are respectively provided on the protrusion of the opposite sidewall of the middle layer isolation cylinder 2 corresponding to the second opening 21, rather than at the ends of the two sidewalls of the middle layer isolation cylinder 2 corresponding to the second opening 21.

[0097] Please see Figure 1 In this embodiment, the vacuum coating equipment further includes:

[0098] Special gas filtration device 9, connected to the outer air extraction port 12, is used to filter residual reaction gases discharged from the outer air extraction port 12; vacuum pump 10, connected to the special gas filtration device 9 downstream of the outer air extraction port 12, is used to evacuate the interior of the outer cavity 1 to create a vacuum environment required for the vacuum coating process inside the vacuum coating equipment; exhaust gas treatment device 101, connected to the vacuum pump 10 downstream of the special gas filtration device 9, is used to treat the exhaust gas generated by the reaction of the reaction gases and discharge the treated gas that can be directly discharged to downstream equipment.

[0099] In this embodiment, the vacuum coating equipment is an ALD coating equipment.

[0100] Please see Figure 1 In this embodiment, the vacuum coating equipment further includes:

[0101] Heating device 13 is distributed in the outer cavity D formed between the outer cavity 1 and the middle isolation cylinder 2. It is used to heat the material carrier 4 and the core reaction chamber G of the material carrier 4 in the inner cavity F of the inner isolation cylinder 3 through the outer cavity D, the middle isolation cylinder 2, the middle isolation cylinder 2 and the material carrier 4 in the middle cavity E formed between the middle isolation cylinder 2 and the material carrier 4, so that the core reaction chamber G reaches the preset temperature required for the vacuum coating process.

[0102] In this embodiment, the heating device 13 may be an electric heater, heating plate or other heating device 13 commonly used in the art, which will not be described in detail here.

[0103] In this embodiment, the vacuum coating equipment further includes:

[0104] A transfer device (not shown in the figure) is used to transfer and drive the material carrier 4 and the target substrate it carries into or out of the corresponding cavities inside the outer cavity 1, the middle isolation cylinder 2 and the inner isolation cylinder 3.

[0105] In this embodiment, the transfer device can be a robotic arm or a linear transfer device, which are commonly used in the art and will not be described in detail here.

[0106] The working principle of the vacuum coating equipment provided by this utility model is as follows:

[0107] The furnace door cover 5 is opened to open the outer cavity 1. The transfer device moves the material carrier 4 carrying multiple target substrates, with the exhaust opening 42 facing the outer exhaust port 12 and the inlet opening 41 facing away from the outer exhaust port 12. Driven by the transfer device, the exhaust opening 42 of the material carrier 4 is sequentially moved through the first opening 11, the outer cavity D, and the second opening 21 into the middle cavity E. Then, the bottom ends of the pair of side plates 44 of the material carrier 4 corresponding to the exhaust opening 42 are supported on the top surface of the extension 331 of the bottom wall 33 of the inner isolation cylinder 3. Under the push of the transfer device, the material carrier... Material carrier 4 slides along extension 331 toward the bottom wall 33 of inner isolation cylinder 3, and continues along the bottom wall 33 of inner isolation cylinder 3 toward outer air extraction port 12 until the air inlet 41 of material carrier 4 is completely detached from extension 331 and flush with the third opening 31. At this time, material carrier 4 is completely placed on the bottom wall 33 of inner isolation cylinder 3 and is completely supported on the top surface of the bottom wall 33 of inner isolation cylinder 3 by the corresponding bottom ends of a pair of side plates 44, so that the bottom opening 45 of the bottom wall 33 of inner isolation cylinder 3 is closed, forming the aforementioned inner cavity F between inner isolation cylinder 3 and material carrier 4. At the same time, the air inlet 41 and air outlet 42 of material carrier 4 are respectively aligned with the first opening 11 and outer air extraction port 12. Material carrier 4 is coaxially arranged with inner isolation cylinder 3, middle isolation cylinder 2 and outer cavity 1, and each target substrate is parallel to the air inlet 41 and air outlet 42.

[0108] Close the furnace door cover 5 to seal the outer cavity 1, and connect the movable spray plate 61 in parallel and cover the second opening 21. The first air supply channel 23, the first air return channel 24, the second air supply channel 25 and the second air return channel 26 are respectively connected to the first spray air inlet 611, the first spray air return hole 612, the second spray air inlet 613 and the second spray air return hole 614.

[0109] At this time, the first reaction gas source 7 supplies the first reaction gas (precursor) to each of the first spray pipes 616 through the first supply gas path consisting of the first gas supply pipe 71, the first gas supply channel 23, the first spray inlet 611 and the first gas delivery pipe 615; the second reaction gas source 8 supplies the second reaction gas (precursor) to each of the second spray pipes 618 through the second supply gas path consisting of the second gas supply channel 25, the second spray inlet 613 and the second gas delivery pipe 617, so that the first reaction gas source 7 and the second reaction gas source 8 spray into the first opening 11 from the multiple first spray holes 6161 of each of the first spray pipes 616 and the multiple second spray holes 6181 of each of the second spray pipes 618, and enter the material carrier 4 through the air inlet opening 41 to react and coat the target substrate.

[0110] Meanwhile, the first reaction gas source 7 can recover the first reaction gas that was not sprayed in the first gas supply pipeline 615 through the first recovery gas path formed by the first spray return gas hole 612, the first return gas channel 24, and the first return gas pipeline 72. The second reaction gas source 8 can recover the first reaction gas that was not sprayed in the second gas supply pipeline 617 through the second recovery gas path formed by the second spray return gas hole 614, the second return gas channel 26, and the second return gas pipeline 82.

[0111] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Those skilled in the art should understand that any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A vacuum coating apparatus, characterized by, The utility model relates to a kind of reaction chamber, including: Outer cavity (1), one end is equipped with first open mouth (11), its opposite another end is equipped with outer layer exhaust port (12) that is convex away from the first open mouth (11), and downstream equipment is communicated with the inside of outer cavity (1); Middle layer isolation cylinder (2) is equipped in outer cavity (1), one end is equipped with second open mouth (21), its opposite another end is equipped with middle layer exhaust port (22) that is embedded in the outer layer exhaust port (12); Inner layer isolation cylinder (3) is equipped in middle layer isolation cylinder (2), one end is equipped with third open mouth (31), its opposite another end is equipped with inner layer exhaust port (32) that is embedded in the middle layer exhaust port (22); Material carrier (4) is equipped with air inlet opening (41) and air outlet opening (42) respectively at opposite ends, and it is communicated in and out in inner layer isolation cylinder (3) by first open mouth (11), second open mouth (21) and third open mouth (31), and when material carrier (4) is placed in inner layer isolation cylinder (3), the air inlet opening (41) and the air outlet opening (42) are respectively corresponding to the first open mouth (11) and the outer layer exhaust port (12); Furnace door cover (5) is installed at first open mouth (11), for opening and closing outer cavity (1); Spraying device (6) is equipped in outer cavity (1) and is located between first open mouth (11) and second open mouth (21), for spraying reaction gas to target substrate carried in material carrier (4).

2. The vacuum coating apparatus of claim 1, wherein The outer cavity (1) and middle layer isolation cylinder (2) form outer layer separation chamber (D), the middle layer isolation cylinder (2) and inner layer isolation cylinder (3) form middle layer separation chamber (E), and when the material carrier (4) is placed in the inner layer isolation cylinder (3), the inner layer isolation cylinder (3) and the material carrier (4) form inner layer separation chamber (F);The material carrier (4) forms core reaction chamber (G) for carrying the target substrate inside; The second open mouth (21) is communicated with the outer layer separation chamber (D) and the middle layer separation chamber (E), and is spaced apart from the first open mouth (11); The third open mouth (31) is communicated with middle layer separation chamber (E) and the inner layer separation chamber (F), and is spaced apart from second open mouth (21); The air inlet opening (41) and the air outlet opening (42) are communicated with the inner layer separation chamber (F) and the core reaction chamber (G), and are respectively corresponding with third open mouth (31), inner layer exhaust port (32) spaced apart.

3. The vacuum coating apparatus of claim 2, wherein the first and second electrodes are arranged in a parallel relationship. The outer layer exhaust port (12) includes: Outer layer exhaust pipe (121) is convexly arranged at the other end of the outer cavity (1) away from the first open mouth (11), and the outer layer exhaust hole (122) is formed in the inner layer separation chamber (D) and the corresponding exhaust pipe line of downstream equipment is communicated; The middle layer exhaust port (22) includes: A middle layer air outlet pipe (221) is arranged at the other end of the middle layer isolation cylinder (2) away from the second opening (21) and protrudes outwardly from the second opening (21) and is embedded in the outer layer air extraction hole (122), and the inside of the middle layer air outlet pipe (221) forms a middle layer air outlet hole (222) which communicates with the outer layer air extraction hole (122) and the middle layer isolation cavity (E); The inner layer air outlet (32) comprises: An inner layer air outlet pipe (321) is arranged at the other end of the inner layer isolation cylinder (3) away from the third opening (31) and protrudes outwardly from the third opening (31) and is embedded in the middle layer air outlet hole (222), and the inside of the inner layer air outlet pipe (321) forms an inner layer air outlet hole (322) which communicates with the middle layer air outlet hole (222) and the inner layer isolation cavity (F).

4. The vacuum coating apparatus of claim 3, wherein the first and second rotary bodies are connected to each other by a shaft. The outer layer air extraction hole (122), the middle layer air outlet hole (222), the inner layer air outlet hole (322), the outer cavity (1), the middle layer isolation cylinder (2), the inner layer isolation cylinder (3) and the material carrier (4) are coaxially arranged, the inner layer projection area (S1) of the inner layer air outlet hole (322) in the axial direction (C) is greater than or equal to the difference between the middle layer projection area (S2) of the middle layer air outlet hole (222) in the axial direction (C) and the inner layer projection area (S1), and the difference between the middle layer projection area (S2) and the inner layer projection area (S1) is greater than or equal to the difference between the outer layer projection area (S3) of the outer layer air extraction hole (122) in the axial direction (C) and the middle layer projection area (S2).

5. The vacuum coating apparatus of claim 4, wherein the first and second rotary bodies are connected to each other by a shaft. The outer cavity (1), the middle layer isolation cylinder (2), the inner layer isolation cylinder (3) and the material carrier (4) are all cuboid-shaped, the material carrier (4) comprises a pair of parallel and spaced side plates (44) and a top plate (43) connected between corresponding top ends of the pair of side plates (44), corresponding two ends of the pair of side plates (44) and the top plate (43) form the air inlet opening (41) and the air outlet opening (42) respectively, and corresponding bottom ends of the pair of side plates (44) form a bottom opening (45) which communicates with the air inlet opening (41) and the air outlet opening (42); When the material carrier (4) is placed in the inner layer isolation cylinder (3), the corresponding bottom ends of the pair of side plates (44) are supported on the top surface of the bottom wall (33) of the inner layer isolation cylinder (3), so that the bottom wall (33) of the inner layer isolation cylinder (3) closes the bottom opening (45).

6. The vacuum coating apparatus of claim 5, wherein, One end of the bottom wall (33) of the inner layer isolation cylinder (3) corresponding to the third opening (31) is provided with an extension (331) which protrudes out of the third opening (31), and the width of the extension (331) is greater than or equal to the width of the top wall (34) of the inner layer isolation cylinder (3); When the material carrier (4) is placed in the inner layer isolation cylinder (3), the air inlet opening (41) is arranged flush with the third opening (31), and the air outlet opening (42) is arranged in spaced relation with the inner layer air outlet (32).

7. The vacuum coating apparatus according to any one of claims 1 to 6, wherein The end of one side wall of the second opening (21) of the middle layer isolation cylinder (2) is provided with at least one set of first gas supply channels (23) and first gas return channels (24), and the end of the opposite side wall of the second opening (21) of the middle layer isolation cylinder (2) is provided with at least one set of second gas supply channels (25) and second gas return channels (26); The vacuum coating device further comprises: A first reaction gas source (7) is arranged on one side of the outer cavity (1) and is correspondingly connected to the first gas supply channels (23) and the first gas return channels (24) through the first gas supply pipeline (71) and the first gas return pipeline (72) respectively; A second reaction gas source (8) is arranged on the opposite side of the outer cavity (1) and is correspondingly connected to the second gas supply channels (25) and the second gas return channels (26) through the second gas supply pipeline (81) and the second gas return pipeline (82) respectively; The spraying device (6) comprises: A movable spraying plate (61) is installed on one end of the furnace door cover (5) facing the outer layer gas exhaust port (12), and the back surface of the movable spraying plate (61) is respectively provided with first spraying inlet holes (611), first spraying return holes (612), second spraying inlet holes (613) and second spraying return holes (614) corresponding to the first gas supply channels (23), the first gas return channels (24), the second gas supply channels (25) and the second gas return channels (26); The first spraying inlet holes (611) and the first spraying return holes (612) are connected through the first gas supply pipeline (615) and the first gas return pipeline (616) in the movable spraying plate (61), and at least one first spraying pipeline (616) is connected to the first gas supply pipeline (615), and a plurality of first spraying holes (6161) penetrating the back surface of the movable spraying plate (61) are distributed on the first spraying pipeline (616); The second spraying inlet holes (613) and the second spraying return holes (614) are also connected through the second gas supply pipeline (617) and the second gas return pipeline (618) in the movable spraying plate (61), and at least one second spraying pipeline (618) is connected to the second gas supply pipeline (617), and a plurality of second spraying holes (6181) penetrating the back surface of the movable spraying plate (61) are distributed on the second spraying pipeline (618); When the furnace door cover (5) is closed, the movable spraying plate (61) is parallelly butted and covers the second opening (21), and the first gas supply channels (23), the first gas return channels (24), the second gas supply channels (25) and the second gas return channels (26) are respectively connected to the first spraying inlet holes (611), the first spraying return holes (612), the second spraying inlet holes (613) and the second spraying return holes (614).

8. The vacuum coating apparatus of claim 7, wherein the first and second rotary bodies are connected to each other by a shaft. The first gas supply pipeline (615) and the second gas supply pipeline (617) are arranged in parallel and spaced apart at opposite ends of the movable spray plate (61), a plurality of first spray pipelines (616) are arranged in parallel and spaced apart and connected perpendicularly to the first gas supply pipeline (615), a plurality of second spray pipelines (618) are arranged in parallel and spaced apart and connected perpendicularly to the second gas supply pipeline (617), and each of the first spray pipelines (616) and the second spray pipelines (618) are arranged alternately; When the furnace door cover (5) is closed, the projection of the spray area (H) formed by the corresponding first spray holes (6161) on each first spray pipeline (616) and the corresponding second spray holes (6181) on the second spray pipeline (618) falls within the cross-sectional area of the gas inlet opening (41), and completely covers the cross-sectional area of the target substrate contained in the material carrier (4), so that most of the first reaction gas and the second reaction gas respectively passed through the first reaction gas source (7) and the second reaction gas source (8) enter the material carrier (4) through the gas inlet opening (41).

9. The vacuum coating apparatus according to any one of claims 1 to 6, wherein Further comprising: A special gas filtering device (9) is connected to the outer layer gas exhaust port (12) for filtering the residual reaction gas discharged from the outer layer gas exhaust port (12); A vacuum pump (10) is connected to the downstream position of the special gas filtering device (9) relative to the outer layer gas exhaust port (12) for vacuumizing the inside of the outer cavity (1); A tail gas treatment device (101) is connected to the downstream position of the vacuum pump (10) relative to the special gas filtering device (9) for treating the tail gas generated by the reaction of the reaction gas, and discharging the treated gas to the downstream equipment.

10. The vacuum coating apparatus according to any one of claims 1 to 6, wherein The vacuum coating device is an ALD coating device.

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