Chamber cover plate and horizontal HWCVD equipment

Abstract

The utility model provides a chamber cover plate and horizontal HWCVD equipment, the chamber cover plate is provided with a hot filament conductive assembly and a gas distribution device, the hot filament conductive assembly is connected with a plurality of hot filaments, the plurality of hot filaments are continuously arranged into a plurality of rows, and the gas distribution device is connected with the hot filament conductive assembly. And the air outlet of the air distribution device, the hot wire and the substrate are arranged in a manner that the air outlet, the hot wire and the substrate are arranged downwards or upwards in sequence. The hot wires are tightly spliced into a plurality of rows which are distributed at intervals, so that the hot wires can be modularly mounted on the chamber cover plate conveniently; the hot filament rows transversely penetrate through the air distribution pipes on the two sides of the carrier plate in parallel and are embedded into the cavity cover plate, meanwhile, each row-column hot filament installation strip is also embedded into the cavity cover, and the installation positions are flush with the surface of the cavity cover.

Description

Technical Field

[0001] This utility model relates to the field of hot-wire coating, and particularly to the field of single-sided Cat-CVD coating technology. Specifically, it relates to a chamber cover plate and a horizontal HWCVD equipment. Background Technology

[0002] HWCVD, also known as Cat-CVD, is a process that uses a high-temperature hot filament to decompose process gases. The decomposed process gases react with each other and are deposited on the substrate. The gas utilization rate of HJT equipment using the hot filament process is more than five times that of PECVD. It also offers numerous advantages, such as low ion bombardment deposition and significantly lower equipment complexity and cost compared to HJT equipment used in PECVD. Therefore, the industry has been actively promoting the application of hot filament technology in mass production lines for solar cells.

[0003] Currently, the uniformity of films prepared by the hot-wire method is not ideal. This phenomenon is related to multiple factors, such as airflow pattern, gas exhaust method, hot-wire arrangement, silicon wafer placement, intracavity electromagnetic field, and substrate temperature. Substrate temperature uniformity can generally be achieved below 5%, but other factors affecting film uniformity are difficult to standardize. While factors such as hot-wire arrangement and gas exhaust method are relatively easy to control, existing hot-wire arrangements are disordered, complex to install, and not conducive to modular design and installation. Utility Model Content

[0004] In order to solve the technical problems in the prior art, this utility model proposes a chamber cover plate and a horizontal HWCVD device.

[0005] The technical solution adopted in this utility model is:

[0006] This utility model proposes a chamber cover plate for a horizontal HWCVD equipment. The chamber cover plate is installed on the tank to form a chamber inside the tank. The chamber cover plate is provided with a hot wire conductive component and a gas distribution device. Multiple hot wires are connected to the hot wire conductive component, and the multiple hot wires are arranged continuously in multiple rows. The hot wires are located between the gas outlet of the gas distribution device and the substrate in the chamber, so that the gas coming out of the gas outlet is heated by the hot wires before reaching the substrate.

[0007] Furthermore, the chamber cover is installed above the tank body with the air outlet of its air distribution device facing downwards; or the chamber cover is installed at the bottom of the tank body with the air outlet of its air distribution device facing upwards.

[0008] Furthermore, the hot wire conductive assembly includes: multiple electrode assemblies insulated on the chamber cover plate and facing the inner side of the chamber, the multiple electrode assemblies being arranged in multiple rows, and the two ends of the hot wire being electrically connected to two adjacent electrode assemblies respectively.

[0009] In a preferred embodiment, each of the electrode assemblies is directly mounted in an insulated manner on the chamber cover.

[0010] In a preferred embodiment, each row of electrode assemblies is mounted on a mounting strip in an insulated manner. The inner side of the chamber cover is provided with a mounting groove corresponding to the position of the mounting strip. After installation, the mounting strip is flush with the inner side of the chamber cover.

[0011] Furthermore, the ends of two hot wires are simultaneously connected to the same electrode assembly; the ends of the two hot wires are in contact and located on the same plane; or there is a gap between the ends of the two hot wires and they are located on the same plane; or there is a gap between the ends of the two hot wires and they are located on two parallel planes.

[0012] In a preferred embodiment, the electrode assembly includes: an insulating mounting post installed on the inner side of the chamber cover plate, and a conductive head disposed at the top of the insulating mounting post.

[0013] In a preferred embodiment, the electrode assembly includes a conductive mounting post, and an insulating mounting strip for mounting the conductive mounting post is provided on the inner side of the chamber cover plate, and the conductive mounting post is conductive as a whole to realize the electrical conduction of the two hot wires.

[0014] Furthermore, the electrode assemblies at both ends of each row of electrode assemblies pass through the chamber cover plate and serve as the input electrode and output electrode of the row of electrode assemblies, respectively. The input electrode and output electrode are insulated from the chamber cover plate. The input electrode and output electrode are directly connected to the power supply, or connected in series or in parallel with the input electrode and output electrode of other rows of electrode assemblies before being connected to the power supply.

[0015] Furthermore, the gas distribution device includes: multiple main pipes arranged in parallel at intervals, and multiple branch pipes connected to two of the main pipes at each end, with air outlets or air outlet components spaced apart on the bottom surface of the branch pipes along the length direction.

[0016] In a preferred embodiment, the bottom surface of the chamber cover is provided with a groove for embedding the main pipe and the branch pipe.

[0017] In a preferred embodiment, the main pipe and the branch pipe are pre-reserved channels inside the chamber cover plate.

[0018] Furthermore, the spray pipe of each of the sub-pipes is located between two adjacent rows of hot wires and is parallel to the length extension direction of the hot wire rows.

[0019] Furthermore, after installation, the air outlet of the branch pipe and the mounting strip for installing the hot wire conductive component are flush with the inner side of the chamber cover facing the chamber, reducing airflow obstruction and scattering.

[0020] This utility model also proposes a horizontal HWCVD equipment, including: at least one tank, the aforementioned chamber cover plate installed on the tank, a carrier plate conveying device disposed in the tank, and a heater for heating. The carrier plate conveying device can convey the carrier plate to the area below the hot wire row area of ​​the chamber cover plate, and the carrier plate is used to place a substrate.

[0021] Furthermore, the trough has transmission openings on both sides for passing through the carrier plate, and the bottom of the trough has an exhaust hole; the airflow reaches the exhaust hole through the gaps in the forward and backward directions of the carrier plate, or through the gaps on both sides parallel to the transmission direction of the carrier plate, so that the airflow direction when flowing into the gap is perpendicular to the extension direction of the hot wire row composed of hot wires.

[0022] In a preferred embodiment, when the extension direction of the hot wire row is perpendicular to the conveying direction of the carrier plate, baffles are provided in the gaps on both sides of the groove located parallel to the conveying direction of the carrier plate to block the airflow, so that the airflow reaches the exhaust hole through the gaps in the forward and backward directions of the carrier plate.

[0023] In a preferred embodiment, when the extension direction of the hot wire row is parallel to the conveying direction of the carrier plate, a baffle is provided in the groove at the gap in the forward and backward directions of the carrier plate to block the airflow, so that the airflow reaches the air extraction hole through the gaps on both sides parallel to the conveying direction of the carrier plate.

[0024] Furthermore, the length direction of the substrate is consistent with the extension direction of the hot filament row.

[0025] Furthermore, the carrier plate conveying device includes: multiple roller shafts spaced apart along the conveying direction, rollers mounted on the roller shafts, a magnetic fluid assembly sealed on the inner wall of the tank and connected to the roller shafts, and a motor mounted outside the tank that drives the roller shafts to rotate via the magnetic fluid assembly.

[0026] Compared with the prior art, the present invention has the following advantages:

[0027] 1. The hot wires are tightly spliced ​​into multiple rows with intervals, which facilitates modular installation on the chamber cover;

[0028] 2. By using baffles, the gas flow around the carrier plate is directed to flow only in the forward and backward directions of the carrier plate, so that the process gas can be fully decomposed and start uniformly from the hot wire surface in the same direction, and reach the substrate surface on the carrier plate at equal distances.

[0029] 3. Move the gas distribution pipes that run across the sides of the carrier plate near the hot wire into the chamber cover plate. At the same time, each row of hot wire mounting strips is also embedded into the chamber cover, with the installation position flush with the surface of the chamber cover.

[0030] 4. Placing the substrate parallel to the hot wire along its length can improve the uniformity of the film within the substrate. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a simplified front view of the structure in an embodiment of the present utility model;

[0033] Figure 2 This is a simplified side view of the structure in an embodiment of the present utility model;

[0034] Figure 3 This is a schematic diagram of the pipe section of the gas distribution device in an embodiment of this utility model;

[0035] Figure 4 This is a schematic diagram of the electrode assembly mounted on the mounting strip in an embodiment of this utility model;

[0036] Figure 5 This is a schematic diagram of the arrangement of the heating wire and the substrate in an embodiment of this utility model.

[0037] 1. Tank body; 11. Transfer opening; 12. Air extraction port;

[0038] 2. Chamber cover plate;

[0039] 31. Electrode assembly; 32. Hot wire; 33. Mounting strip;

[0040] 4. Gas distribution device; 411. Main pipeline; 412. Branch pipeline; 42. Gas outlet;

[0041] 51. Motor; 52. Roller;

[0042] 6. Heater; 7. Baffle; 8. Carrier; 81. Substrate; 9. Process gas. Detailed Implementation

[0043] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0044] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0045] Unlike PECVD equipment, hot-wire equipment has a unique airflow direction, and zebra stripes appear when the airflow and structure are mismatched. Existing air intake methods, whether from all sides or in the normal direction of the filament plane, result in airflow around the substrate where part of the airflow is parallel to the hot-wire extension direction and part is perpendicular. This airflow pattern causes uneven concentrations of active molecules in different areas of the substrate. The intermittent arrangement of the hot wire also affects the uniformity of active molecule concentration along the gas flow path, thus affecting the uniformity of the atmosphere reaching the substrate surface for coating. The non-standard orientation of silicon wafers in hot-wire coating preparation leads to long paths for active groups from hot-wire decomposition, causing them to react with other particles during drift, easily resulting in different atmospheres at the beginning and end of the wafer, affecting intra-wafer uniformity. Mass production machines have large series lengths of hot wires and high potential differences between positive and negative electrodes, easily leading to wire breakage, film-induced conductivity loss, short circuits, and arcing. They can even cause a large migration of active molecules within the cavity under the influence of electromagnetic fields, making it difficult to achieve uniform film quality between wafers.

[0046] In existing hot-wire equipment, the hot wires are generally arranged intermittently, which affects the uniformity of the concentration of active molecules along the gas flow path, and consequently affects the uniformity of the atmosphere reaching the substrate surface for coating. Moreover, the hot wires are set in the tank in the form of a bracket, which makes the installation method complicated and inconvenient for modular installation.

[0047] In this regard, such as Figure 1 , 2 As shown, this utility model proposes a chamber cover plate. The chamber cover plate 2 is installed on the tank 1 to form a chamber inside the tank 1. The chamber cover plate 2 specifically includes: multiple hot wires 32, a hot wire conductive component, and an air distribution device. The hot wire conductive component is connected to multiple hot wires 32, and the multiple hot wires 32 are continuously arranged in multiple rows to form a continuous and uninterrupted heating line. The air outlet 43 of the air distribution device is located above the hot wires 32, and the air outlet 43 faces downward.

[0048] By directly integrating the hot wire 32 and the gas distribution device onto the chamber cover plate 2, the modular installation of the equipment can be improved, thereby increasing installation and manufacturing efficiency. At the same time, the hot wires are tightly spliced ​​and arranged in continuous rows, which can avoid affecting the uniformity of the concentration of active molecules in the gas flow path.

[0049] In other embodiments, the chamber cover plate can also be installed at the bottom of the tank, with the air outlet of its gas distribution device facing upwards. The hot wire is located between the air outlet of the gas distribution device and the substrate in the chamber. The air extraction port can also be set at the top of the tank, so that the gas coming out of the air outlet is heated by the hot wire before reaching the substrate for process reaction.

[0050] In a specific embodiment, the hot wire conductive assembly includes: multiple electrode assemblies 31, each electrode assembly 31 is insulatedly mounted on the chamber cover plate by configuring an insulating component, so that it is insulatedly connected to the chamber cover plate. The electrode assembly 31 extends vertically out of the bottom surface of the chamber cover plate 2. The multiple electrode assemblies 31 are arranged in parallel rows. Each electrode assembly 31 in each row is spaced apart. At the same time, both ends of each hot wire 32 are bent vertically upward and connected to two adjacent electrode assemblies 31 in a row. The middle part between the two ends of each hot wire 32 is perpendicular to the electrode assembly 31, and the ends of two hot wires 32 are connected to the same electrode assembly 31 at the same time, so that the multiple hot wires 32 connected to a row of electrode assemblies 31 are continuously arranged in a row to form a hot wire row.

[0051] In other embodiments, the connection between the two ends of each hot wire and the electrode assembly is not limited to the form of bending upwards. It is only necessary that the hot wires can be arranged in multiple parallel rows. Specifically, they can be electrically connected to the electrode assembly in any way, all of which are within the protection scope of this utility model.

[0052] In specific embodiments, the ends of two heating wires are connected to the same electrode assembly simultaneously. The specific positions of the two heating wires can be varied in several embodiments, as follows:

[0053] In the first embodiment, the ends of two hot wires are connected to the same electrode assembly simultaneously. The ends of the two hot wires are in contact and located on the same plane. Direct contact between the ends of the two hot wires can achieve a conductive connection.

[0054] In the second embodiment, there is a gap between the ends of the two hot wires and they are located on the same plane. In this case, the two hot wires are electrically connected mainly through a motor assembly, and the hot wires do not directly interfere with each other.

[0055] In the third embodiment, there is a gap between the ends of the two hot wires and they are located on two parallel planes, further keeping the hot wires away from each other and avoiding interference.

[0056] The electrode assembly 31 has the following two specific insulation installation methods:

[0057] In the first embodiment:

[0058] Each electrode assembly is directly mounted to the chamber cover in an insulated manner. For example, the chamber cover has corresponding holes for mounting the electrode assemblies, and the electrode assemblies have an insulating structure that is insulated from the chamber cover.

[0059] In the second embodiment:

[0060] Each row of electrode assemblies is mounted on a mounting strip in an insulated manner. Specifically, the electrode assembly is connected to the insulated mounting strip. The mounting strip has corresponding mounting holes. The chamber cover has a mounting groove corresponding to the position of the mounting strip. After the mounting strip is installed in the mounting groove, the surface of the mounting strip on which the electrode assembly is mounted is flush with the inner side of the chamber cover where the mounting groove is located (the side directly facing the substrate inside the chamber).

[0061] The present invention also proposes two embodiments for the specific structure of the electrode assembly 31, as follows:

[0062] First embodiment,

[0063] The electrode assembly includes: an insulating mounting post installed on the inner side of the chamber cover plate, and a conductive head disposed at the top of the insulating mounting post. One end of the insulating mounting post is connected to the chamber cover plate 2, specifically by a plug-in or screw connection, and the other end of the insulating mounting post is fitted with the conductive head, which can be electrically connected to the ends of the two heating wires 32, thus establishing a conductive connection between the two heating wires 32.

[0064] Preferably, the insulating mounting post is made of ceramic, i.e., a ceramic mounting post.

[0065] In the second embodiment, the electrode assembly 31 includes a conductive mounting post. The conductive mounting post is conductive and enables electrical conduction between the two heating wires connected to it. Correspondingly, the chamber cover plate 2 has a pre-reserved strip-shaped mounting groove for installing an insulating mounting strip. One end of the conductive mounting post is connected to the insulating mounting strip and is insulated (specifically, it can be connected by screws, or fixed by setting a ring-shaped soft spring on the insulating mounting strip). The other end of the conductive mounting post is directly conductively connected to the end of the heating wire 32.

[0066] Preferably, the insulating mounting plate is a ceramic mounting plate.

[0067] In a further embodiment of the two electrode assemblies 31 described above, the conductive head or conductive mounting post can be connected to the fixed end of the hot wire 32 by means of metal sheet clamping, or by screw and conductive wall (i.e., the wall surface of the conductive head or conductive mounting post) pressing connection, or by only using screw (i.e., the conductive head or conductive mounting post has screw holes) for conductive connection.

[0068] Furthermore, the conductive mounting post can be in the form of a conductive core covered with a ceramic base, or a ceramic core covered with a conductive sleeve, which increases the temperature of the conductive part and reduces the deposition of coatings.

[0069] In specific embodiments, such as Figure 1 , 2As shown, in each row of electrode assemblies 31, the two electrode assemblies 31 at both ends pass through the chamber cover plate 2 and are provided with corresponding output electrodes. That is, the output electrodes are located outside the chamber cover plate 2, and the output electrodes are electrically connected to the hot wires 32 inside the chamber through the electrode assemblies 31. The two output electrodes serve as input electrodes and output electrodes respectively. By connecting the input electrodes and output electrodes, multiple rows of hot wires 32 can be connected in series or in parallel outside the chamber.

[0070] Specifically, four rows of hot wires 32 can be connected in series, forming four groups of hot wires 32 in series. For example, the lead-out electrode on the electrode assembly 31 corresponding to the rightmost end of the first row of hot wires 32 is connected to the negative terminal of the power supply, and the lead-out electrode on the electrode assembly 31 corresponding to the rightmost end of the fourth row of hot wires 32 is connected to the positive terminal of the power supply. This method can solve the problems of wire breakage, reduce the segregation distribution of active gas components under the action of an electric field and the electrical loss caused by membrane conductivity, and improve the stability of the hot wires 32 while improving the uniformity of the membrane.

[0071] Specifically, such as Figure 4 As shown, each row of electrode assemblies 31 is mounted on a mounting strip 33 (specifically, the insulating mounting strip in the above embodiment). The mounting strip 33 has a protruding connecting piece on its side for passing through a screw and connecting to the bottom screw of the chamber cover plate 2. The chamber cover plate 2 also has a mounting groove corresponding to the position of the mounting strip 33, so that the lower surface of the mounting strip 33 is flush with the bottom surface of the chamber cover plate 2.

[0072] In specific embodiments, such as Figure 3 As shown, the gas distribution device includes two main pipes 411 and multiple branch pipes 412. The two main pipes 411 are arranged parallel to each other at intervals. The multiple branch pipes 412 are connected between the two main pipes 411 (i.e., each branch pipe 412 is connected to two main pipes 411 at both ends), and are arranged at intervals along the length of the main pipes 411. The bottom surface of the branch pipes 412 is provided with gas outlets 43 or gas outlet components at intervals along the length direction.

[0073] In other embodiments, more main ducts may be provided, such as three or four, to improve the uniformity of airflow.

[0074] The mounting structure for the gas distribution device on the chamber cover plate has several embodiments, as detailed below:

[0075] First embodiment:

[0076] The bottom surface of the chamber cover plate 2 is provided with a groove for embedding the main pipe 411 and the branch pipe 412, so that the pipes do not exceed the bottom surface of the chamber cover plate 2. A sealing plate can be installed at the groove position to cover the main pipe 411 and the branch pipe 412, so that the bottom surface of the chamber cover plate 2 remains flush. An air outlet 43 or an air outlet component (i.e., a spray pipe with an air outlet at the end) is provided on the sealing plate.

[0077] The outlet 43 of the branch pipe 412 is located above the hot wire 32. After the process gas 9 enters the vacuum chamber, it first flows in the main gas distribution pipe 411 and the branch pipe 412 to form a positive pressure state. Each gas distribution pipe has multiple small holes. Under the action of positive pressure and vacuum, it flows out of each outlet 43 evenly. Finally, it diffuses and reacts in the vacuum and gradually flows to the extraction hole.

[0078] Specifically, each branch pipe 412 is located between two adjacent rows of hot wires 32 and is parallel to the arrangement direction of the hot wires 32.

[0079] Second embodiment: The chamber cover plate 2 is provided with a reserved groove, and then the top plate is covered to cover the reserved groove to form a reserved channel. These channels serve as the main pipe and branch pipes.

[0080] Specifically, the gas distribution device also includes: a main distribution pipe, a secondary distribution pipe, and two branch distribution pipes. The main distribution pipe, secondary distribution pipe, and branch distribution pipes are installed on the outer side (the side facing away from the bottom) of the chamber cover plate 2, and the pipe body is parallel to the outer side. One end of the main distribution pipe is bent downward and connected to the special gas assembly sealing position (the special gas assembly sealing position is connected to the special gas cabinet). The other end of the main distribution pipe is connected to the middle of the secondary distribution pipe. The two ends of the secondary distribution pipe are respectively connected to the middle of the two branch distribution pipes. Each branch distribution pipe is connected to a main pipe 411 near both ends, so that the gas distribution device has multiple gas inlet points to ensure the gas flow rate requirements of the outlet holes used in the chamber.

[0081] In other embodiments, the air distribution device includes an air distribution box arranged in rows inside the chamber cover plate. The bottom surface of the air distribution box is provided with multiple air outlets, which can be arranged in an array above the hot wire.

[0082] Specifically, after installation, the ends of the spray pipes (i.e., air outlets) and the mounting strips for installing the hot wire conductive components are flush with the inner side of the chamber cover facing the chamber, which can reduce airflow obstruction and scattering.

[0083] like Figure 1 , 2 As shown, this utility model also proposes a horizontal HWCVD equipment, specifically including: at least one tank 1, a chamber cover plate 2 corresponding to each tank 1, and a carrier plate conveying device and a heater 6 disposed in the tank 1 for conveying carrier plates.

[0084] Each tank 1 has transfer openings 11 on both its left and right sides for the carrier plate to pass through. The transfer openings 11 can directly connect to another adjacent chamber, or they can be equipped with valves that can be opened and closed to ensure that the interior of the chamber can be evacuated. The upper part of the tank 1 is covered with a chamber cover plate 2, which closes the upper part of the tank 1 and forms a chamber inside. The bottom of the tank 1 is provided with an air extraction port 12, which can be used to evacuate the chamber inside the tank 1 to form a vacuum chamber.

[0085] Specifically, the carrier plate conveying device includes: roller shafts 52, rollers 52, a magnetic fluid assembly, and a motor 51. The roller shafts are arranged in parallel at intervals, sequentially from left to right within the tank 1. Rollers 52 are fitted onto the roller shafts, and the carrier plates are laid flat on the rollers 52. The carrier plates can be conveyed from left to right or from right to left via the rollers 52. The roller shafts can be connected in series via a transverse transmission gear shaft (i.e., each roller shaft has a bevel gear, and the gear shaft also has a bevel gear corresponding to each roller shaft), so that all roller shafts can move simultaneously. A magnetic fluid assembly is sealed on the inner wall of the tank 1. One end of the rotating shaft of the magnetic fluid assembly is connected to the roller shaft, and the other end extends out of the tank 1 and is connected to the motor 51. Thus, the external motor 51 drives the rollers 52 inside the tank 1 to rotate, thereby driving the carrier plates 8. The conveying direction of the carrier plates 8 can be changed by rotating the motor 51 forward and backward.

[0086] A heater 6 is located directly below the roller assembly consisting of multiple rollers for heating the chamber.

[0087] like Figure 5 As shown, multiple substrates 81 (in half-sheet form) are placed on the carrier plate. The substrates 81 can be arranged so that their length direction is consistent with the extension direction of the hot wire row, which can improve the uniformity of the film quality within the substrate.

[0088] Specifically, in order to make the airflow direction from the air distribution device perpendicular to the extension direction of the hot wire row composed of hot wires, thereby improving the heating efficiency of the hot wires, the following two embodiments are provided.

[0089] First embodiment,

[0090] like Figure 2 As shown, the extension direction of the hot filament row is perpendicular to the conveying direction of the carrier plate. Baffles are installed in the tank at the gaps on both sides parallel to the conveying direction of the carrier plate (specifically located below the conveying device and between the heater and the inner wall of the tank) to block the airflow. This ensures that the airflow from top to bottom can only reach the extraction port through the gaps in the forward and backward directions of the carrier plate (i.e., the left and right sides of the tank 1). At this point, as shown in the figure, the airflow direction above the carrier plate is perpendicular to the extension direction of the hot filament row. This allows the process gas to be fully decomposed and simultaneously originate uniformly from the same direction on the surface of the hot filament 32, reaching the surface of the substrate 81 on the carrier plate at equal intervals.

[0091] Second embodiment,

[0092] The extension direction of the hot wire row is parallel to the conveying direction of the carrier plate. Baffles are set in the gaps between the forward and backward directions of the carrier plate in the tank to block the airflow, so that the airflow reaches the exhaust hole through the gaps on both sides parallel to the conveying direction of the carrier plate. At this time, the airflow direction above the carrier plate is still perpendicular to the extension direction of the hot wire row.

[0093] This flow guide method can be used in conjunction with both reciprocating dynamic coating and static coating. During dynamic coating, the roller rotates slowly clockwise and counterclockwise to achieve the reciprocating motion of the carrier plate (achieved by the forward and reverse rotation of the motor), which can further improve uniformity as a method to change the refractive index, band gap, microstructure factor and hydrogen content of the film.

[0094] It should be noted that the terminology used above is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0095] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0096] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0097] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0098] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A chamber cover plate for a horizontal HWCVD apparatus, said chamber cover plate is mounted on a tank to form a chamber inside the tank, characterized in that, The chamber cover is provided with a hot wire conductive assembly and a gas distribution device, a plurality of hot wires are connected to the hot wire conductive assembly, and the plurality of hot wires are arranged in multiple rows in succession, and the hot wires are located between the gas outlet holes of the gas distribution device and the substrates in the chamber, so that the gas from the gas outlet holes is heated by the hot wires before reaching the substrates.

2. The chamber lid plate of claim 1, wherein, The chamber cover is installed above the groove body, and the gas outlet holes of the gas distribution device face downward; or the chamber cover is installed at the bottom of the groove body, and the gas outlet holes of the gas distribution device face upward.

3. The chamber lid plate of claim 1, wherein, The hot wire conductive assembly comprises a plurality of electrode assemblies which are insulated and arranged on the inner side of the chamber cover and face the chamber, and the plurality of electrode assemblies are arranged in multiple rows, and the two ends of the hot wires are respectively electrically connected to two adjacent electrode assemblies.

4. The chamber lid plate of claim 3, wherein, Each of the electrode assemblies is directly installed on the chamber cover in an insulated manner.

5. The chamber lid plate of claim 3, wherein, Each row of the electrode assemblies is installed on an installation strip in an insulated manner, and the inner side of the chamber cover is provided with an installation groove corresponding to the position of the installation strip, and the installation strip is installed flush with the inner side of the chamber cover.

6. The chamber lid plate of claim 3, wherein, The two ends of the two hot wires connected to the same electrode assembly are in contact and located on the same plane; or the two ends of the two hot wires have a gap and are located on the same plane; or the two ends of the two hot wires have a gap and are located on two parallel planes.

7. The chamber lid plate of claim 3, wherein, The electrode assembly comprises an insulated installation column installed on the inner side of the chamber cover, and a conductive head arranged at the top end of the insulated installation column.

8. The chamber lid plate of claim 3, wherein, The electrode assembly comprises a conductive installation column, and the inner side of the chamber cover is provided with an insulated installation strip for installing the conductive installation column, and the conductive installation column is integrally conductive to realize electrical conduction of the two hot wires.

9. The chamber lid plate of claim 3, wherein, The electrode assemblies at both ends of each row of the electrode assemblies pass through the chamber cover and respectively serve as input electrodes and output electrodes of the row of electrode assemblies, and the input electrodes and the output electrodes are insulated from the chamber cover, and the input electrodes and the output electrodes are directly connected to a power supply or are connected to a power supply after being connected in series or parallel with input electrodes and output electrodes of other rows of electrode assemblies.

10. The chamber lid of claim 1, wherein, The gas distribution device comprises a plurality of main pipes arranged in parallel at intervals, a plurality of branch pipes connected to the two ends of the main pipes respectively, and the bottom surface of the branch pipe is provided with gas outlet holes or gas outlet members along the length direction at intervals.

11. The chamber lid plate of claim 10, wherein, The bottom surface of the chamber cover is provided with a recess for embedding the main pipes and the branch pipes.

12. The chamber lid plate of claim 10, wherein, The main pipes and the branch pipes are reserved channels inside the chamber cover.

13. The chamber lid plate of claim 10, wherein, The spray pipes of the branch pipes are located between the two adjacent rows of hot wires and are parallel to the length extension direction of the hot wire rows.

14. The chamber lid plate of claim 10, wherein, The gas outlet members of the branch pipes and the installation strips for installing the hot wire conductive assembly are flush with the inner side of the chamber cover facing the chamber after installation, thereby reducing airflow resistance and scattering.

15. A horizontal HWCVD apparatus, characterized in that The chamber cover comprises: at least one groove body, a chamber cover as claimed in any one of claims 1 to 14 installed on the groove body, a carrier plate conveying device arranged in the groove body, and a heater for heating, the carrier plate conveying device can convey a carrier plate to below the chamber cover, and the carrier plate is used for placing a substrate.

16. The horizontal HWCVD apparatus according to claim 15, characterized in that Two sides of the groove body are provided with transmission openings for passing through the carrier plate, and the bottom of the groove body is provided with an air extraction hole; the air flow reaches the air extraction hole via the gap between the forward and backward directions of the carrier plate, or via the gaps on both sides parallel to the transmission direction of the carrier plate, so that the air flow direction is perpendicular to the extension direction of the hot wire row formed by the hot wires when the air flow flows to the gap.

17. The horizontal HWCVD apparatus according to claim 16, characterized in that When the extension direction of the hot wire row formed by the hot wires is perpendicular to the transmission direction of the carrier plate, baffles are arranged at the gaps on both sides parallel to the transmission direction of the carrier plate in the groove body to shield the air flow, so that the air flow reaches the air extraction hole via the gap between the forward and backward directions of the carrier plate.

18. The horizontal HWCVD apparatus according to claim 16, characterized in that When the extension direction of the hot wire row formed by the hot wires is parallel to the transmission direction of the carrier plate, baffles are arranged at the gaps between the forward and backward directions of the carrier plate in the groove body to shield the air flow, so that the air flow reaches the air extraction hole via the gaps on both sides parallel to the transmission direction of the carrier plate.

19. The horizontal HWCVD apparatus of claim 15, wherein The length direction of the substrate is consistent with the extension direction of the hot wire row.

20. The horizontal HWCVD apparatus of claim 15, wherein The carrier plate transmission device comprises a plurality of roller shafts arranged at intervals along the transmission direction, rollers arranged on the roller shafts, a magnetic fluid assembly arranged on the inner wall of the groove body and connected to the roller shafts, and a motor arranged outside the groove body and driving the roller shafts to rotate through the magnetic fluid assembly.

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