Two-way temperature control and over-temperature protection system and semiconductor vapor deposition equipment

Abstract

The embodiment of the utility model provides a double-channel temperature control and over-temperature protection system and semiconductor vapor deposition equipment. The system comprises a heater, a double-channel temperature controller, a first temperature alarm and a second temperature alarm, the heater comprises an inner side heating pipe and an outer side heating pipe, the inner side heating pipe is connected with a first double-path output thermocouple, and the outer side heating pipe is connected with a second double-path output thermocouple; one path of signal of the first double-path output thermocouple and one path of signal of the second double-path output thermocouple are both connected with the double-channel temperature controller, and the other path of signal of the first double-path output thermocouple is connected with the first temperature alarm. And the other path of signal of the second double-path output thermocouple is connected with the second temperature alarm. The system can meet the process requirements of different heating temperatures of the inner and outer heating pipes, and can realize inner and outer side double-path temperature control and double-path over-temperature protection.

Description

Technical Field

[0001] The embodiments in this specification relate to the field of vapor deposition equipment technology, and in particular to a dual-path temperature control and over-temperature protection system and a semiconductor vapor deposition equipment. Background Technology

[0002] Currently, heaters commonly used in semiconductor thin film deposition equipment only offer single-channel temperature control, meaning the inner and outer temperatures cannot be controlled independently. Furthermore, some heaters are made of ceramic, which can be damaged without proper temperature protection. Therefore, this specification aims to provide a dual-channel temperature control and over-temperature protection system, and a semiconductor vapor deposition equipment. Utility Model Content

[0003] In view of the above-mentioned problems in the prior art, the purpose of the embodiments of this specification is to provide a dual-channel temperature control and over-temperature protection system and a semiconductor vapor deposition apparatus, so as to solve the problem that the heater in the prior art can only control the temperature of a single channel and lacks an over-temperature protection mechanism, which makes the heater easy to be damaged.

[0004] To solve the above-mentioned technical problems, the specific technical solutions of the embodiments in this specification are as follows:

[0005] In one aspect, the embodiments of this specification provide a dual-channel temperature control and over-temperature protection system, including a heater, a dual-channel temperature controller, a first temperature alarm, and a second temperature alarm;

[0006] The heater includes an inner heating tube and an outer heating tube. The inner heating tube is connected to a first dual-output thermocouple, and the outer heating tube is connected to a second dual-output thermocouple.

[0007] One signal from the first dual-output thermocouple and one signal from the second dual-output thermocouple are both connected to the dual-channel temperature controller. The other signal from the first dual-output thermocouple is connected to the first temperature alarm, and the other signal from the second dual-output thermocouple is connected to the second temperature alarm.

[0008] Specifically, the positive terminals of the first and second temperature alarms are connected to the positive terminals of the dual-channel temperature controller and the DC power supply, and the negative terminals of the first and second temperature alarms are connected to the negative terminals of the dual-channel temperature controller and the DC power supply.

[0009] Specifically, a contactor is provided between the first temperature alarm and the DC power supply, and between the second temperature alarm and the DC power supply;

[0010] The first dual-output thermocouple is used to collect the first temperature of the inner heating tube and feed it back to the first temperature alarm. The first temperature alarm is used to compare the first temperature with the set limit temperature of the inner heating tube and control the on / off state of the contactor according to the comparison result.

[0011] The second dual-output thermocouple is used to collect the second temperature of the outer heating tube and feed it back to the second temperature alarm. The second temperature alarm is used to compare the second temperature with the set limit temperature of the outer heating tube and control the on / off state of the contactor according to the comparison result.

[0012] Furthermore, the system also includes a first solid-state relay and a second solid-state relay;

[0013] The dual-channel temperature controller is connected to the coils of the first solid-state relay and the second solid-state relay. The dual-channel temperature controller is used to control the power of the coil of the first solid-state relay according to the signal fed back by the first dual-output thermocouple. The dual-channel temperature controller is also used to control the power of the coil of the second solid-state relay according to the signal fed back by the second dual-output thermocouple.

[0014] Furthermore, a contact of the first solid-state relay is provided between the inner heating tube and the incoming AC power supply, and the contact of the first solid-state relay is used to control the connection and disconnection of the line between the inner heating tube and the incoming AC power supply; a contact of the second solid-state relay is provided between the outer heating tube and the incoming AC power supply, and the contact of the second solid-state relay is used to control the connection and disconnection of the line between the outer heating tube and the incoming AC power supply.

[0015] Furthermore, contactor contacts are provided between the contacts of the first solid-state relay and the incoming AC power supply, and between the contacts of the second solid-state relay and the incoming AC power supply.

[0016] Preferably, a circuit breaker is also provided between the contactor contacts and the incoming AC power supply.

[0017] Secondly, embodiments of this specification also provide a semiconductor vapor deposition apparatus, including a dual-channel temperature control and over-temperature protection system as described in the above technical solutions.

[0018] Using the above technical solution, the dual-channel temperature control and over-temperature protection system and a semiconductor vapor deposition apparatus provided in the embodiments of this specification, wherein the heater includes an inner heating tube and an outer heating tube, the temperature of which can be set according to actual process requirements, thereby meeting the needs of some vapor deposition processes that require different inner and outer heating temperatures; the inner heating tube is connected to a dual-channel temperature controller and a first temperature alarm, and the outer heating tube is connected to a dual-channel temperature controller and a second temperature alarm. The dual-channel temperature controller can realize temperature control of the inner and outer heating tubes; the first temperature alarm can realize over-temperature protection of the inner heating tube when the temperature of the inner heating tube is abnormal, and the second temperature alarm can realize over-temperature protection of the outer heating tube when the temperature of the outer heating tube is abnormal, so as to avoid damage to the heater.

[0019] To make the above and other objects, features and advantages of the embodiments of this specification more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments or prior art of this specification, the drawings used in the description of the embodiments or prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 A schematic diagram of a dual-channel temperature control and over-temperature protection system provided in an embodiment of this specification is shown.

[0022] Explanation of symbols in the attached drawings:

[0023] 10. Heater;

[0024] 11. Inner heating element;

[0025] 12. External heating element;

[0026] 20. Dual-channel temperature controller;

[0027] 31. First dual-output thermocouple;

[0028] 32. Second dual-output thermocouple;

[0029] 41. First temperature alarm;

[0030] 411. Contacts of the first temperature alarm;

[0031] 42. Second temperature alarm;

[0032] 421. Contacts of the second temperature alarm;

[0033] 50. DC power supply;

[0034] 61. Contactor coil;

[0035] 62. Contactor contacts;

[0036] 71. The coil of the first solid-state relay;

[0037] 72. The contacts of the first solid-state relay;

[0038] 81. The coil of the second solid-state relay;

[0039] 82. The contacts of the second solid-state relay;

[0040] 90. AC power supply;

[0041] 100. Circuit breaker. Detailed Implementation

[0042] The technical solutions in the embodiments of this specification will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this specification, and not all embodiments. Based on the embodiments in this specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this specification.

[0043] It should be noted that the terms "first," "second," etc., used in this specification, claims, and the foregoing drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, apparatus, product, or device that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or devices.

[0044] To address the aforementioned issues, embodiments of this specification provide a dual-channel temperature control and over-temperature protection system and a semiconductor vapor deposition apparatus, which can provide dual-channel temperature control and over-temperature protection for the heater of the semiconductor vapor deposition apparatus. Figure 1 This is a schematic diagram of a dual-channel temperature control and over-temperature protection system provided in the embodiments of this specification. Specifically, as shown... Figure 1 As shown, the dual-channel temperature control and over-temperature protection system may include:

[0045] Heater 10, dual-channel temperature controller 20, first temperature alarm 41, and second temperature alarm 42:

[0046] The heater 10 includes an inner heating tube 11 and an outer heating tube 12. The inner heating tube 11 is connected to a first dual-output thermocouple 31, and the outer heating tube 12 is connected to a second dual-output thermocouple 32.

[0047] One signal from the first dual-output thermocouple 31 and one signal from the second dual-output thermocouple 32 are both connected to the dual-channel temperature controller 20. The other signal from the first dual-output thermocouple 31 is connected to the first temperature alarm 41, and the other signal from the second dual-output thermocouple 32 is connected to the second temperature alarm 42.

[0048] This specification provides a dual-channel temperature control and over-temperature protection system, wherein the heater includes an inner heating tube and an outer heating tube, and the temperature can be set according to actual process requirements, thereby meeting the needs of some vapor deposition processes that require different inner and outer heating temperatures. The inner heating tube is connected to a dual-channel temperature controller and a first temperature alarm, and the outer heating tube is connected to a dual-channel temperature controller and a second temperature alarm. The dual-channel temperature controller enables temperature control of both the inner and outer heating tubes. In addition, the first temperature alarm enables over-temperature protection of the inner heating tube when its temperature is abnormal, and the second temperature alarm enables over-temperature protection of the outer heating tube when its temperature is abnormal, thus preventing damage to the heater.

[0049] The positive terminals of the first temperature alarm 41 and the second temperature alarm 42 are connected to the positive terminals of the dual-channel temperature controller 20 and the DC power supply 50, and the negative terminals of the first temperature alarm 41 and the second temperature alarm 42 are connected to the negative terminals of the dual-channel temperature controller 20 and the DC power supply 50.

[0050] That is, the DC power supply 50 is used to supply power to the first temperature alarm 41, the second temperature alarm 42 and the dual-channel temperature controller 20, so that the first temperature alarm 41, the second temperature alarm 42 and the dual-channel temperature controller 20 can operate normally.

[0051] A contactor coil 61 is provided between the first temperature alarm 41 and the DC power supply 50, and between the second temperature alarm 42 and the DC power supply 50; the contactor coil 61 is connected in series with the contact 411 of the first temperature alarm and the contact 421 of the second temperature alarm.

[0052] The first dual-output thermocouple 31 is used to collect the first temperature of the inner heating tube 11 and feed it back to the first temperature alarm 41. The first temperature alarm 41 is used to compare the first temperature with the set limit temperature of the inner heating tube and control the on / off state of the contactor according to the comparison result.

[0053] The second dual-output thermocouple 32 is used to collect the second temperature of the outer heating tube 12 and feed it back to the second temperature alarm 42. The second temperature alarm 42 is used to compare the second temperature with the set limit temperature of the outer heating tube and control the on / off state of the contactor according to the comparison result.

[0054] The system also includes a first solid-state relay and a second solid-state relay;

[0055] The dual-channel temperature controller 20 is connected to the coil 71 of the first solid-state relay and the coil 81 of the second solid-state relay. The dual-channel temperature controller 20 is used to control the power of the coil 71 of the first solid-state relay according to the signal fed back by the first dual-output thermocouple 31. The dual-channel temperature controller 20 is also used to control the power of the coil 81 of the second solid-state relay according to the signal fed back by the second dual-output thermocouple 32.

[0056] A contact 72 of the first solid-state relay is provided between the inner heating tube 11 and the incoming AC power supply 90. The contact 72 of the first solid-state relay is used to control the connection and disconnection of the circuit between the inner heating tube 11 and the incoming AC power supply 90. A contact 82 of the second solid-state relay is provided between the outer heating tube 12 and the incoming AC power supply 90. The contact 82 of the second solid-state relay is used to control the connection and disconnection of the circuit between the outer heating tube 12 and the incoming AC power supply 90.

[0057] A contactor contact 62 is provided between the contact 72 of the first solid-state relay and the AC power supply 90, and between the contact 82 of the second solid-state relay and the AC power supply 90. The AC power supply 90 is used to supply power to the inner heating tube 11 and the outer heating tube 12.

[0058] Specifically, the first dual-output thermocouple 31 collects the first temperature of the inner heating tube 11 in real time and feeds it back to the first temperature alarm. When the first temperature is greater than the preset limit temperature of the inner heating tube, the contact 411 of the first temperature alarm is disconnected, thereby controlling the contactor coil 61, and then controlling the contactor contact 62 to disconnect, so that the AC power supply 90 disconnects the power supply to the inner heating tube 11 and the outer heating tube 12, and the inner heating tube 11 and the outer heating tube 12 stop heating.

[0059] Similarly, the second dual-output thermocouple 32 collects the second temperature of the outer heating tube 12 in real time and feeds it back to the second temperature alarm 42. When the second temperature is greater than the preset limit temperature of the outer heating tube, the contact 421 of the second temperature alarm is disconnected, and then the corresponding contactor contact 62 is disconnected through the contactor coil 61, so that the inner heating tube 11 and the outer heating tube 12 stop heating.

[0060] Therefore, regardless of whether the inner or outer heating element overheats, the contactor contact 62 will be disconnected, ensuring that the heater is not damaged.

[0061] When the signal fed back by the first dual-output thermocouple 31 indicates that the temperature of the inner heating tube 11 is high, the dual-channel temperature controller 20 can adjust the power of the coil 71 of the first solid-state relay, thereby controlling the opening and closing of the contacts 72 of the first solid-state relay. When the temperature of the inner heating tube 11 is high, the contacts 72 of the first solid-state relay can be disconnected to indirectly control the heating operation of the inner heating tube 11 (at this time, the heating operation of the outer heating tube is not affected).

[0062] Similarly, when the signal from the second dual-output thermocouple 32 indicates that the temperature of the outer heating tube 12 is high, the dual-channel temperature controller 20 can adjust the power of the coil 81 of the second solid-state relay, thereby controlling the on / off state of the contacts 82 of the second solid-state relay. When the temperature of the outer heating tube 12 is high, the contacts 82 of the second solid-state relay can be disconnected to stop the heating operation of the outer heating tube 12 (at this time, the heating operation of the inner heating tube is unaffected).

[0063] Therefore, the dual-channel temperature control and over-temperature protection system provided in the embodiments of this specification can realize dual-channel temperature control and dual-channel over-temperature protection.

[0064] Furthermore, in this embodiment of the specification, a circuit breaker 100 is also provided between the contactor contact 62 and the incoming AC power supply 90. The circuit breaker 100 can provide short-circuit protection; when a short circuit occurs in the line, it can quickly melt and protect upstream and downstream equipment.

[0065] To further clarify the dual-channel temperature control and over-temperature protection system provided in the embodiments of this specification, the working process of the dual-channel temperature control and over-temperature protection system is further described here, which may include the following steps:

[0066] 1) Set the working temperature of the inner heating element and the working temperature of the outer heating element on the dual-channel thermostat;

[0067] 2) Set the limit temperature of the inner heating element on the first temperature alarm and set the limit temperature of the outer heating element on the second temperature alarm.

[0068] 3) Close the circuit breaker to allow the inner and outer heaters to operate;

[0069] 4) Dual-channel temperature controller starts;

[0070] 5) The first and second solid-state relays operate under the control of a dual-channel temperature controller to indirectly control the heating of the inner and outer heating tubes;

[0071] 6) The first and second temperature alarms work to monitor the inner and outer heater temperatures obtained by the first dual-output thermocouple and the second dual-output thermocouple in real time, and compare them with the set over-temperature limit temperature. When the heating tube on either side exceeds the temperature limit, the contactor is disconnected to protect the heater from damage.

[0072] 7) After the process is completed, the dual-channel temperature controller shuts off the heating.

[0073] This specification also provides a semiconductor vapor deposition apparatus, which includes a dual-channel temperature control and over-temperature protection system as described in the above technical solutions.

[0074] It should be noted that, in the embodiments of this specification, the use of the terms "comprising" or "including" to describe combinations of elements, components, parts, or steps herein also contemplates embodiments essentially composed of these elements, components, parts, or steps. The use of the term "may" herein is intended to indicate that any described attribute "may" include is optional. Multiple elements, components, parts, or steps can be provided by a single integrated element, component, part, or step. Alternatively, a single integrated element, component, part, or step can be divided into multiple separate elements, components, parts, or steps. The use of "a" or "an" to describe an element, component, part, or step does not imply exclusion of other elements, components, parts, or steps.

[0075] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from the others. Similar or identical parts between embodiments can be referred to interchangeably. The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A two-path temperature control and over-temperature protection system, characterized in that, The system comprises a heater (10), a double-channel temperature controller (20), a first temperature alarm (41) and a second temperature alarm (42); The heater (10) comprises an inner heating pipe (11) and an outer heating pipe (12), the inner heating pipe (11) is connected with a first double-output thermocouple (31), and the outer heating pipe (12) is connected with a second double-output thermocouple (32); One signal of the first double-output thermocouple (31) and one signal of the second double-output thermocouple (32) are connected with the double-channel temperature controller (20), another signal of the first double-output thermocouple (31) is connected with the first temperature alarm (41), and another signal of the second double-output thermocouple (32) is connected with the second temperature alarm (42).

2. The dual-path temperature control and over-temperature protection system of claim 1, wherein, The positive pole of the first temperature alarm (41) and the positive pole of the second temperature alarm (42) are connected with the positive pole of the double-channel temperature controller (20) and the positive pole of a direct current power supply (50), and the negative pole of the first temperature alarm (41) and the negative pole of the second temperature alarm (42) are connected with the negative pole of the double-channel temperature controller (20) and the negative pole of the direct current power supply (50).

3. The dual-path temperature control and over-temperature protection system of claim 2, wherein, A contactor is arranged between the first temperature alarm (41) and the direct current power supply (50) and between the second temperature alarm (42) and the direct current power supply (50); The first double-output thermocouple (31) is used for collecting a first temperature of the inner heating pipe (11) and feeding back to the first temperature alarm (41), the first temperature alarm (41) is used for comparing the first temperature with a set limit temperature of the inner heating pipe and controlling the on-off of the contactor according to a comparison result; The second double-output thermocouple (32) is used for collecting a second temperature of the outer heating pipe (12) and feeding back to the second temperature alarm (42), and the second temperature alarm (42) is used for comparing the second temperature with a set limit temperature of the outer heating pipe and controlling the on-off of the contactor according to a comparison result.

4. The dual-path temperature control and over-temperature protection system of claim 1, wherein, The system further comprises a first solid-state relay and a second solid-state relay; The double-channel temperature controller (20) is connected with a coil (71) of the first solid-state relay and a coil (81) of the second solid-state relay, the double-channel temperature controller (20) is used for controlling the power of the coil (71) of the first solid-state relay according to a signal fed back by the first double-output thermocouple (31), and the double-channel temperature controller (20) is further used for controlling the power of the coil (81) of the second solid-state relay according to a signal fed back by the second double-output thermocouple (32).

5. The two-path temperature control and over-temperature protection system of claim 4, wherein, The contact (72) of the first solid-state relay is arranged between the inner heating tube (11) and the incoming AC power supply (90), and is used to control the on-off of the circuit between the inner heating tube (11) and the incoming AC power supply (90); the contact (82) of the second solid-state relay is arranged between the outer heating tube (12) and the incoming AC power supply (90), and is used to control the on-off of the circuit between the outer heating tube (12) and the incoming AC power supply (90).

6. The two-path temperature control and over-temperature protection system of claim 5, wherein, The contact (72) of the first solid-state relay and the contact (82) of the second solid-state relay are both arranged between the incoming AC power supply (90) and the contact (62) of the contactor.

7. The two-path temperature control and over-temperature protection system of claim 6, wherein, A circuit breaker (100) is further arranged between the contact (62) of the contactor and the incoming AC power supply (90).

8. A semiconductor vapor deposition apparatus characterized by comprising: A double-path temperature control and over-temperature protection system is provided, which comprises the system according to any one of claims 1 to 7.

Images