Precision detection equipment for large-aperture reflecting mirror surface

Abstract

The utility model provides precision detection equipment for a large-aperture reflecting mirror surface, which comprises a horizontally arranged rack, the rack is sequentially provided with a cross beam and a rotating platform from top to bottom, the cross beam is provided with a horizontal sliding chute and a moving module capable of translating along the sliding chute, and the rotating platform can be used for horizontally placing the reflecting mirror; the rotating platform comprises a rotating seat and a rotating table, a plurality of pairs of movable clamping blocks are arranged on the rotating table, and the plurality of pairs of clamping blocks can horizontally and oppositely move on the rotating table so as to clamp the reflecting mirror; a telescopic rotating mechanism is further arranged on the moving module, the telescopic rotating mechanism comprises an electric telescopic rod vertically arranged at the bottom of the moving module and a mounting seat which is arranged at the tail end of the electric telescopic rod and can rotate and be locked, and a detection device is arranged on the mounting seat; a clamping device is further arranged on one side of the moving module, and the clamping device can lock the moving module at a designated position on the cross beam, so that high-precision detection and stable clamping of the large-aperture reflector are achieved.

Description

Technical Field

[0001] This utility model relates to the accuracy testing of mirror surfaces, and more particularly to a device for the accuracy testing of large-diameter reflective mirror surfaces. Background Technology

[0002] The primary function of mirror precision inspection is to ensure the surface quality of optical components to meet the performance requirements of high-precision optical systems. By inspecting surface flatness, roughness, and defects, the optical performance of the mirror, such as reflectivity, transmittance, and image quality, can be evaluated. High-precision mirror inspection can detect minute surface imperfections, preventing these defects from affecting the overall performance of the optical system, especially in high-precision applications such as lasers, astronomical telescopes, and microscopes. Furthermore, mirror precision inspection helps optimize manufacturing processes, improve product yield, and reduce production costs. In conclusion, mirror precision inspection is a crucial step in ensuring the quality and performance of optical components, and it is of great significance to scientific research, industrial production, and high-end technology applications.

[0003] An existing technology includes a device for testing the accuracy of large-aperture reflective mirrors, such as Chinese Patent Application No. CN202023295422.6. This utility model proposes a device for testing the accuracy of large-aperture reflective mirrors, including a worktable. A level is fixedly mounted in the middle of the lower end of the worktable, and a controller is fixedly mounted on the right side of the lower end of the worktable. The worktable has graduation lines engraved on its upper end, and a sliding groove is formed on the upper end of the worktable. Clamping blocks are slidably mounted on both sides of the sliding groove, and a large-aperture reflective mirror is clamped in the middle of the clamping blocks. Lifting and measuring devices are fixedly mounted at both ends of the upper side of the worktable. Circular holes are formed at both ends of the worktable, and a fine-tuning device is horizontally rotated in the middle of the circular holes. A height adjustment mechanism is engaged at the lower end of the fine-tuning device and fixedly mounted at both ends of the lower side of the worktable. The solution includes a level, a fine-tuning device, and an adjustment mechanism, which can adjust the left and right height of the worktable according to the display structure of the level, keeping the worktable level and ensuring the measurement accuracy of the mirror accuracy testing device.

[0004] However, the above-mentioned existing technology has the following problems: the mirror accuracy detection device is fixed on the lower side of the crossbeam, and the mirror accuracy detection device can only perform accuracy detection on the mirror at one angle. It cannot be adjusted or moved at multiple angles, and it cannot fully cover the mirror for detection. In addition, the mirror accuracy detection device moves up and down through electric telescopic rods on both sides of the crossbeam. The two electric telescopic rods may cause asynchronous strokes, which will result in the crossbeam not being horizontal and thus affecting the detection accuracy. Summary of the Invention

[0005] To address the problems existing in the prior art, such as "the mirror accuracy detection device is fixed to the lower side of the crossbeam, and the mirror accuracy detection device can only perform accuracy detection on the mirror at one angle, cannot be adjusted or moved at multiple angles, cannot fully cover the mirror surface for detection, and the mirror accuracy detection device can move up and down through electric telescopic rods on both sides of the crossbeam, which can easily cause errors when the travel of the telescopic rods on both sides is not synchronized," this utility model proposes a large-diameter reflective mirror accuracy detection device to solve the above problems, and the technical solution is as follows.

[0006] A device for measuring the accuracy of large-diameter reflective mirrors includes a horizontally arranged frame, on which a crossbeam and a rotating platform are arranged sequentially from top to bottom. The crossbeam is provided with a horizontal slide rail and a moving module that can move along the slide rail. The rotating platform can place the reflective mirror horizontally.

[0007] The rotating platform includes a rotating base and a rotating stage. Several pairs of movable locking blocks are provided on the rotating stage. These pairs of locking blocks can move horizontally towards each other on the rotating stage to clamp the reflector.

[0008] The mobile module is also provided with a telescopic rotation mechanism, which includes an electric telescopic rod vertically installed at the bottom of the mobile module and a mounting base installed at the end of the electric telescopic rod that can rotate and lock. The mounting base is provided with a detection device.

[0009] A clamping device is also provided on one side of the moving module, which can lock the moving module in a designated position on the crossbeam.

[0010] Furthermore, the crossbeam is a rectangular column placed horizontally above the frame, and the slide is a rectangular channel opened on both sides of the rectangular column.

[0011] Furthermore, the moving module includes a pair of sliding side plates slidably disposed in the sliding grooves on both sides. Several sliding wheels are movably embedded on the upper and lower sides of the sliding side plates. The sliding wheels reduce the friction between the sliding side plates and the sliding grooves. A connecting seat is provided above the crossbeam, and the two sides of the connecting seat are fixedly connected to the sliding side plates respectively.

[0012] Furthermore, a mounting plate is fixedly connected between the lower sides of the pair of sliding side plates, and one end of the electric telescopic rod is mounted on the mounting plate. When the electric telescopic rod extends or retracts, it can drive the mounting base to rise and fall in the vertical direction.

[0013] Furthermore, a scale line is provided below the slide groove, and a hollow observation port is provided on the sliding side plate, through which the scale line can be observed, and a magnifying lens is embedded in the hollow observation port.

[0014] Furthermore, the clamping device includes a clamping plate and a clamping bolt. The clamping plate is disposed between the crossbeam and the connecting seat, and the clamping plate is parallel to the top surface of the crossbeam. The connecting seat has a threaded hole perpendicular to the clamping plate. The clamping bolt is screwed into the threaded hole, and one end of the clamping bolt is movably connected to the clamping plate, while the other end is provided with a rotating handle for easy operation.

[0015] Furthermore, the mounting base consists of a mounting female base and a rotating block. A mounting sleeve is coaxially mounted on the rotating block, and one end of the mounting sleeve is fixedly connected to the rotating block. A first blind hole is formed in the mounting sleeve. The mounting female base has a second blind hole, and a movable block capable of rotating about the axis of the second blind hole is embedded at the end face of the second blind hole. The mounting sleeve is coaxially inserted into the second blind hole, and a tension spring is coaxially mounted in the mounting sleeve. One end of the tension spring is fixed to the end face of the first blind hole, and the other end is fixedly connected to the movable block at the second blind hole. The tension spring causes the rotating block to fit against the mounting female base. The detection device is installed at the end of the rotating block away from the mounting female base.

[0016] Furthermore, grease is injected between the mounting sleeve and the second blind hole to create resistance between the knob and the shaft, thereby achieving a damping feel.

[0017] Furthermore, a fastening bolt is coaxially and movably disposed on the movable block. The fastening bolt can rotate relative to the movable block on the axis of the movable block, but cannot move in the direction of the axis of the movable block. A threaded blind hole is opened on the rotating block coaxially. The fastening bolt is coaxially screwed into the threaded blind hole. When the fastening bolt is tightened, the rotating block can be made to fit tightly against the mounting base, so that the rotating block cannot rotate on the mounting base. When the fastening bolt is unscrewed from the threaded blind hole, the rotating block can rotate freely on the mounting base. Under the action of the tension spring, there is no risk of the rotating block falling off the mounting base.

[0018] Furthermore, the rotating platform is disc-shaped, and a number of straight grooves are formed along the diameter of the platform surface. A number of locking blocks that can move along the straight grooves and be locked at designated positions in the straight grooves are movably embedded in the straight grooves.

[0019] This invention has the following advantages: Addressing the problems in the prior art where "the mirror precision detection device is fixed to the underside of the crossbeam, and only performs precision detection on the mirror at one angle, unable to adjust or move at multiple angles, unable to provide full coverage detection of the mirror, and the mirror precision detection device moves up and down via electric telescopic rods on both sides of the crossbeam, which can easily cause errors when the travel of the two telescopic rods is asynchronous," this invention changes the vertically moving crossbeam to a vertically moving detection device to avoid errors caused by asynchronous movement of the two electric telescopic rods. A moving module on the crossbeam enables the lateral movement of the detection device relative to the reflector, and a telescopic rotation mechanism enables the vertical movement and angle adjustment of the detection device. The moving module and telescopic rotation mechanism, in conjunction with a rotatable rotating platform, enable "full coverage" detection of the reflector. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the crossbeam and moving module of this utility model;

[0022] Figure 3 This is a schematic diagram of the cross-section of the beam and the moving module of this utility model;

[0023] Figure 4 This is a top view of the rotary table of this utility model;

[0024] Figure 5 This is a schematic cross-sectional view of the mounting base of this utility model;

[0025] Figure 6 This is a schematic diagram showing the cross-section of the mounting base of this utility model.

[0026] Figure 7 This is a schematic diagram showing the position of the laser sensor of this utility model.

[0027] In the above attached figures: 1. Frame; 2. Crossbeam; 4. Slide rail; 5. Moving module; 6. Reflector; 7. Rotary seat; 8. Rotary table; 10. Electric telescopic rod; 11. Detection device; 12. Mounting seat; 13. Sliding side plate; 14. Sliding wheel; 15. Connecting seat; 16. Mounting plate; 18. Hollow observation port; 19. Magnifying lens; 20. Clamping plate; 21. Clamping bolt; 22. Rotating handle; 23. Mounting female seat; 24. Rotating block; 25. Mounting sleeve; 26. First blind hole; 27. Second blind hole; 28. Movable block; 29. ​​Tension spring; 31. Threaded blind hole; 32. Fastening bolt; 33. Straight groove; 34. Clamping block; 35. Laser rangefinder sensor. Detailed Implementation

[0028] The present invention will now be described with reference to the accompanying drawings:

[0029] like Figure 1 As shown, a device for measuring the accuracy of large-diameter reflective mirrors includes a horizontally arranged frame 1. A crossbeam 2 and a rotating platform are arranged sequentially from top to bottom on the frame 1. A horizontal slide 4 and a moving module 5 capable of translating along the slide 4 are arranged on the crossbeam 2. The rotating platform is capable of horizontally placing a reflective mirror 6.

[0030] like Figure 1 As shown, the rotating platform includes a rotating base 7 and a rotating platform 8. The rotating platform 8 is provided with several pairs of movable locking blocks 34. The several pairs of locking blocks 34 can move horizontally towards each other on the rotating platform 8 to clamp the reflector 6.

[0031] like Figure 1 , Figure 2 , Figure 3 As shown, the mobile module 5 is also provided with a telescopic rotation mechanism. The telescopic rotation mechanism includes an electric telescopic rod 10 vertically arranged at the bottom of the mobile module 5 and a mounting base 12 arranged at the end of the electric telescopic rod 10 and capable of rotation and locking. The mounting base 12 is provided with a detection device 11, which is raised, lowered and adjusted in angle by the telescopic rotation mechanism.

[0032] A clamping device is also provided on one side of the moving module 5, which can lock the moving module 5 at a specified position on the crossbeam 2.

[0033] like Figure 1 and 3 As shown, preferably, the crossbeam 2 is a rectangular column placed horizontally above the frame 1, and the slide 4 is a rectangular channel opened on both sides of the rectangular column.

[0034] like Figure 1 , Figure 3 As shown, preferably, the moving module 5 includes a pair of sliding side plates 13 slidably disposed in the sliding grooves 4 on both sides. Several sliding wheels 14 are movably embedded on the upper and lower sides of the sliding side plates 13. The sliding wheels 14 reduce the friction between the sliding side plates 13 and the sliding grooves 4. A connecting seat 15 is provided above the crossbeam 2. The two sides of the connecting seat 15 are fixedly connected to the sliding side plates 13 respectively.

[0035] like Figure 3 As shown, preferably, a mounting plate 16 is fixedly connected between the lower sides of the pair of sliding side plates 13. One end of the electric telescopic rod 10 is mounted on the mounting plate 16. When the electric telescopic rod 10 extends or retracts, it can drive the mounting base 12 to rise and fall in the vertical direction.

[0036] like Figure 1 , Figure 2 , Figure 3As shown, preferably, a scale line is provided below the slide groove 4, and a hollow observation port 18 is provided on the sliding side plate 13, through which the scale line can be observed, and a magnifying lens 19 is embedded in the hollow observation port 18.

[0037] like Figure 7 As shown, preferably, a laser rangefinder 35 is provided on the frame 1. The laser rangefinder 35 can measure the horizontal relative distance between the moving module 5 and one side of the frame 1, thereby achieving more precise distance adjustment. The laser rangefinder can be selected according to the on-site detection environment. In general, the Baumer brand O300 laser rangefinder can be used.

[0038] like Figure 2 , Figure 3 As shown, preferably, the clamping device includes a clamping plate 20 and a clamping bolt 21. The clamping plate 20 is disposed between the crossbeam 2 and the connecting seat 15, and the clamping plate 20 is parallel to the top surface of the crossbeam 2. The connecting seat 15 has a threaded hole perpendicular to the clamping plate 20. The clamping bolt 21 is screwed into the threaded hole, and one end of the clamping bolt 21 is movably connected to the clamping plate 20, and the other end is provided with a rotating handle 22 for easy operation.

[0039] like Figure 5 , Figure 6 As shown, preferably, the mounting base 12 consists of a mounting female base 23 and a rotating block 24. A mounting sleeve 25 is coaxially arranged on the rotating block 24. One end of the mounting sleeve 25 is fixedly connected to the rotating block 24. A first blind hole 26 is formed in the mounting sleeve 25. The mounting female base 23 has a second blind hole 27. A movable block 28 that can rotate about the axis of the second blind hole 27 is embedded at the end face of the second blind hole 27. The mounting sleeve 25 is coaxially inserted in the second blind hole 27. A tension spring 29 is coaxially arranged in the mounting sleeve 25. One end of the tension spring 29 is fixed to the end face of the first blind hole 26, and the other end is fixedly connected to the movable block 28 at the second blind hole 27. The tension spring 29 makes the rotating block 24 fit against the mounting female base 23. The detection device 11 is installed at the end of the rotating block 24 away from the mounting female base 23. Preferably, a high-viscosity grease is injected between the mounting sleeve 25 and the second blind hole 27. The viscosity of the high-viscosity grease generates resistance when the component moves, thereby achieving a damping sensation.

[0040] like Figure 2 As shown, preferably, angle scale lines are engraved on the outer wall of the mounting base 23 and the outer wall of the rotating block 24.

[0041] like Figure 5 , 6As shown, preferably, a fastening bolt 32 is coaxially and movably disposed on the movable block 28. The fastening bolt 32 can rotate relative to the movable block 28 on the axis of the movable block 28, but cannot move in the direction of the axis of the movable block 28. A threaded blind hole 31 is coaxially provided on the rotating block 24. The fastening bolt 32 is coaxially screwed into the threaded blind hole 31. When the fastening bolt 32 is tightened, the rotating block 24 can be tightly attached to the mounting female seat 23, so that the rotating block 24 cannot rotate on the mounting female seat 23. When the fastening bolt 32 is unscrewed from the threaded blind hole 31, the rotating block 24 can rotate freely on the mounting female seat 23. Under the action of the tension spring 29, there is no risk of the rotating block 24 falling off the mounting female seat 23.

[0042] like Figure 4 As shown, preferably, the rotary table 8 is disc-shaped, and a plurality of straight grooves 33 are formed along the diameter of the table surface. A plurality of locking blocks 34, which can move along the straight grooves 33 and be locked at designated positions in the straight grooves 33, are movably embedded in the straight grooves 33. The locking blocks 34 are cuboids with retractable elastic pawls on both sides. The straight grooves 33 are provided with ratchet teeth that cooperate with the elastic pawls. When the locking block 34 is in the straight groove 33, the elastic pawls and ratchet teeth engage, restricting the locking block 34 to move only unidirectionally in the straight groove 33. The locking block 34 can be pulled out from the vertical direction, and scale lines are formed on both sides of the straight groove to ensure that the elastic pawls are symmetrical with respect to the center point of the rotary table 8 after movement.

[0043] It should be noted that the electric telescopic pole, laser rangefinder, and detection device used in this utility model all require an unspecified power source to function, and an additional controller is required to receive and transmit signals. The detection device is existing technology and will not be described in detail here.

[0044] The method of using this utility model is as follows: Place the large-diameter reflector 6 in the center of the rotating table 8, and fix the reflector 6 by means of the movable locking block 34. After locking the locking block 34, the moving module 5 on the crossbeam 2 can be moved. After moving the moving module 5 to the required position by observing the scale line, if it is necessary to adjust the vertical distance of the detection mechanism relative to the reflector 6, the mounting base 12 can be raised and lowered by means of the electric telescopic rod 10. To adjust the angle of the detection mechanism, the rotating block 24 needs to be turned. The rotation angle can be known by means of the angle scale line. After adjusting to the appropriate angle, the angle can be fixed by means of the fastening bolt 32. After fixing, the detection can begin. Rotating the rotating table 8 can detect other points on the circumference of the reflector 6.

[0045] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A large aperture mirror surface accuracy testing apparatus, characterized in that: The utility model relates to a horizontal setting frame (1), the frame (1) is sequentially provided with crossbeam (2) and rotating platform (3) from top to bottom, the crossbeam (2) is provided with horizontal slide groove (4) and the mobile module (5) of being able to translate along slide groove (4), the rotating platform (3) can horizontally place mirror (6); The rotating platform (3) includes a rotating seat (7) and a rotating table (8) coaxially arranged horizontally on the rotating seat (7), the rotating table (8) can rotate about its own axis, and a plurality of pairs of movable clamping blocks (34) are arranged on the rotating table (8), the plurality of pairs of clamping blocks (34) can move horizontally towards each other on the rotating table (8) to clamp the mirror (6). The mobile module (5) is further provided with a telescopic rotating mechanism, the telescopic rotating mechanism includes an electric telescopic rod (10) vertically arranged at the bottom of the mobile module (5) and a mounting seat (12) arranged at the end of the electric telescopic rod (10) and capable of rotating and locking, and a detection device (11) is arranged on the mounting seat (12). The mobile module (5) is further provided with a clamping device on one side, and the clamping device can lock the mobile module (5) at a specified position on the crossbeam (2).

2. The apparatus for detecting the accuracy of a large-aperture mirror surface according to claim 1, wherein: The crossbeam (2) is a rectangular column horizontally arranged above the frame (1), and the slide groove (4) is a rectangular channel formed on both sides of the rectangular column.

3. The apparatus for detecting the accuracy of a large-aperture mirror surface according to claim 2, characterized in that: The mobile module (5) includes a pair of sliding side plates (13) slidingly arranged in the slide grooves (4) on both sides, sliding wheels (14) are movably embedded on the upper and lower sides of the sliding side plates (13), the sliding wheels (14) reduce the friction between the sliding side plates (13) and the slide grooves (4), and a connecting seat (15) is arranged above the crossbeam (2), and the connecting seat (15) is fixedly connected with the sliding side plates (13) on both sides.

4. The apparatus for precision detection of a large-aperture mirror surface according to claim 1, characterized in that: An installation plate (16) is fixedly connected between the lower sides of the pair of sliding side plates (13), and one end of the electric telescopic rod (10) is mounted on the installation plate (16), so that the mounting seat (12) can be lifted and lowered in the vertical direction when the electric telescopic rod (10) is telescoped.

5. The apparatus for precision detection of a large-aperture mirror surface according to claim 1, characterized in that: A scale line is arranged below the slide groove (4), the sliding side plate (13) is provided with a hollow observation port (18), the scale line can be observed from the hollow observation port (18), and a magnifying lens (19) is embedded in the hollow observation port (18).

6. The device for detecting the accuracy of a large-aperture mirror surface according to claim 1 or 4, characterized in that: The clamping device includes a clamping plate (20) and a clamping bolt (21), the clamping plate (20) is arranged between the crossbeam (2) and the connecting seat (15), and the clamping plate (20) is parallel to the top surface of the crossbeam (2), a threaded hole perpendicular to the clamping plate (20) is formed in the connecting seat (15), the clamping bolt (21) is screwed in the threaded hole, one end of the clamping bolt (21) is movably connected with the clamping plate (20), and the other end is provided with a rotating handle (22) for easy operation.

7. The apparatus for precision detection of a large-aperture mirror surface according to claim 1, characterized in that: The mounting seat (12) is composed of a mounting female seat (23) and a rotating block (24), a mounting sleeve (25) is coaxially arranged on the rotating block (24), one end of the mounting sleeve (25) is fixedly connected with the rotating block (24), a first blind hole (26) is formed in the mounting sleeve (25), the mounting female seat (23) is provided with a second blind hole (27), and a movable block (28) capable of rotating about the axis of the second blind hole (27) is embedded at the end face of the second blind hole (27), the mounting sleeve (25) is coaxially inserted into the second blind hole (27), a tension spring (29) is coaxially arranged in the mounting sleeve (25), one end of the tension spring (29) is fixed to the end face of the first blind hole (26), the other end is fixedly connected with the movable block (28) at the second blind hole (27), and the tension spring (29) makes the rotating block (24) adhere to the mounting female seat (23), and the detection device (11) is mounted at one end of the rotating block (24) away from the mounting female seat (23).

8. The apparatus for precision detection of a large-aperture mirror surface according to claim 7, characterized in that: Grease is injected between the mounting sleeve (25) and the second blind hole (27) to generate resistance between the knob and the shaft, thereby realizing damping feeling.

9. The apparatus for precision detection of a large-aperture mirror surface according to claim 7, characterized in that: A fastening bolt (32) is coaxially and movably arranged on the movable block (28), the fastening bolt (32) can rotate on the axis of the movable block (28) relative to the movable block (28) and cannot move in the direction of the axis of the movable block (28), a threaded blind hole (31) is formed in the rotating block (24) in a coaxial manner, the fastening bolt (32) is coaxially arranged in the threaded blind hole (31), when the fastening bolt (32) is screwed, the rotating block (24) can be tightly attached to the mounting female seat (23), so that the rotating block (24) cannot rotate on the mounting female seat (23), when the fastening bolt (32) is unscrewed from the threaded blind hole (31), the rotating block (24) can freely rotate on the mounting female seat (23), and under the action of the tension spring (29), the rotating block (24) and the mounting female seat (23) will not fall off.

10. The apparatus for precision detection of a large-aperture mirror surface according to claim 1, characterized in that: The rotating table (8) is disc-shaped, a plurality of straight grooves (33) are formed in the table surface of the rotating table (8) along the diameter of the table surface, and a plurality of clamping blocks (34) capable of moving along the straight grooves (33) and being locked at specified positions of the straight grooves (33) are movably embedded in the straight grooves (33).

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