Leakage detecting and baking integrated equipment for high-vacuum part
By designing an integrated leak detection and baking device that combines adjustment mechanism and filter screen, the problem of contaminants entering high vacuum components during operation is solved. It achieves buffering, deceleration, and filtration of high-purity nitrogen, ensuring the cleanliness of the equipment's interior.
Patent Information
- Application Number
- CN202520432820.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-13
- Publication Date
- 2026-01-06
- Estimated Expiration
- 2035-03-13
AI Technical Summary
Existing high-vacuum component leak detection and baking equipment cannot achieve integrated operation, and the pipeline is exposed to the atmosphere during operation, which causes contaminants to enter the internal cavity and affect the cleanliness of the equipment.
An integrated leak detection and baking device with an adjustment mechanism was designed. It uses components such as connecting shaft, sealing ball, gear and cylinder to achieve buffering, deceleration and filtration of high-purity nitrogen, and reduces dust entry through filter screen to achieve integrated operation of slow extraction, baking and gas filling.
This technology reduces the entry of contaminants during the slow pumping, baking, and gas filling processes of high-vacuum components, ensuring the cleanliness of the internal cavity and meeting high cleanliness requirements.
Smart Images
Figure CN223769694U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum component technology, specifically to an integrated device for leak detection and baking of high vacuum components. Background Technology
[0002] Currently, the internal cavities of high-vacuum components in large scientific facilities are all highly clean and dust-free cavities, and the steps of slow leak detection, baking and venting, and slow filling with high-purity nitrogen for high-vacuum components are all carried out separately.
[0003] However, existing integrated equipment for leak detection and baking of high vacuum components has the following problems during use: traditional processing methods cannot be integrated into the operation. In addition, during the operation, some pipelines are inevitably exposed to the atmosphere, causing pipeline contamination. As a result, when proceeding to the next step, due to the excessive pressure difference on both sides, the airflow flows disorderly inside the pipeline, causing contaminants to enter the interior of the high vacuum component, thus contaminating the internal cavity of the high vacuum component. Utility Model Content
[0004] The purpose of this invention is to provide an integrated equipment for leak detection and baking of high vacuum components, so as to solve the related problems mentioned in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution: an integrated device for leak detection and baking of high vacuum components, comprising a base plate, a slow-charging valve body, and a vacuum component to be evacuated. The vacuum component to be evacuated is disposed at the top of the base plate, and a heating belt is disposed inside the vacuum component. A main connecting pipe is installed at the output end of the vacuum component to be evacuated, and a vacuum component valve, a first angle valve, and an exhaust valve are disposed inside the main connecting pipe. An ion pump is disposed at the top of the base plate, and a first branch connecting pipe connected to the main connecting pipe is installed at the output end of the ion pump. A second angle valve is disposed inside the first branch connecting pipe. A second branch connecting pipe is installed on the side of the main connecting pipe away from the ion pump, and a pressure gauge is disposed inside the second branch connecting pipe. A filter is installed on one side of the branch connecting pipe, and a first flow meter is installed on one side of the filter. A slow-charge valve body is installed on one side of the first flow meter. A U-shaped connecting pipe is installed on the side of the main connecting pipe near the exhaust valve, and a second flow meter is installed inside the U-shaped connecting pipe. A slow-draw valve body is installed on one side of the second flow meter, and a connecting frame is installed on the outer wall of the slow-draw valve body. A molecular pump connected to a molecular pump is installed at the top of the base plate. A pre-pump connected to one end of the main connecting pipe is installed at the top of the base plate. A leak detector is installed at the top of the base plate, and a third branch connecting pipe connected to the main connecting pipe is installed at the output end of the leak detector. A third angle valve is installed inside the third branch connecting pipe. A deceleration and buffer adjustment mechanism is installed inside the slow-charge valve body and the slow-draw valve body.
[0006] This technical solution provides an integrated equipment for leak detection and baking of high vacuum components. The adjustment mechanism includes a connecting shaft and a sealing ball. The connecting shaft is installed inside the slow-draw valve body through a bearing, and a sealing ball adapted to the slow-draw valve body is provided at the bottom end of the connecting shaft. The slow-draw valve body has a horn-shaped buffer cavity inside.
[0007] This technical solution provides an integrated equipment for leak detection and baking of high vacuum components. The outer wall of the connecting shaft is equipped with a gear, a cylinder is provided on one side of the slow-draw valve body, and a rack adapted to the gear is installed at the output end of the cylinder.
[0008] This technical solution provides an integrated equipment for leak detection and baking of high vacuum components. The outer wall of the second flow meter is provided with a connecting cover for connecting to the external pipeline. The top and bottom ends of the connecting cover are provided with guide rods through grooves. The outer wall of the guide rod is fitted with a pressing frame.
[0009] This technical solution provides an integrated device for leak detection and baking of high vacuum components, wherein both the slow charging valve body and the slow drawing valve body are equipped with filters.
[0010] This technical solution provides an integrated equipment for leak detection and baking of high vacuum components, wherein the outer wall of the guide rod is fitted with a spring that fits against the pressing frame.
[0011] Compared with the prior art, this utility model provides an integrated equipment for leak detection and baking of high vacuum components, which has the following beneficial effects:
[0012] 1. This utility model uses a starting cylinder to drive the rack and gear to mesh, which in turn drives the connecting shaft to rotate. The connecting shaft then drives the sealing ball to rotate to the position of the small slot and the horn-shaped buffer cavity for convection. This disperses and counteracts the flow of high-purity nitrogen, thus buffering and decelerating the flow. The filter screen installed on the inner wall of the connecting frame solves the problem of contamination of the internal cavity of the vacuum component to be evacuated during the steps of leak detection, baking and exhaust, and filling with high-purity nitrogen, and reduces the entry of dust. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the front sectional view of the present invention;
[0014] Figure 2 This is a schematic diagram of the main structure of this utility model;
[0015] Figure 3 This is a top sectional view of the sleeve structure of this utility model;
[0016] Figure 4 For the present utility model Figure 2 A magnified structural diagram at point A.
[0017] In the diagram: 1. Base plate; 2. Slow-charge valve body; 3. Heating belt; 4. Vacuum component to be evacuated; 5. Main connecting pipe; 6. Vacuum component valve; 7. First angle valve; 8. Ion pump; 9. First branch connecting pipe; 10. Second angle valve; 11. Second branch connecting pipe; 12. Pressure gauge; 13. Filter; 14. First flow meter; 15. Molecular pump; 16. Third branch connecting pipe; 17. Leak detector; 18. Third angle valve; 19. Foreboard pump; 20. U-shaped connecting pipe; 21. Slow-pump valve body; 22. Exhaust valve; 23. Second flow meter; 24. Connecting shaft; 25. Gear; 26. Cylinder; 27. Rack; 28. Sealing ball; 29. Horn-shaped buffer cavity; 30. Connecting frame; 31. Guide rod; 32. Spring; 33. Pressing frame; 34. Connecting cover. Detailed Implementation
[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0019] Example 1, as Figure 1-2As shown, this utility model provides a technical solution: an integrated device for leak detection and baking of high vacuum components, including a base plate 1, a slow-charging valve body 2, and a vacuum component 4 to be evacuated. The vacuum component 4 to be evacuated is located at the top of the base plate 1, and a heating belt 3 is installed inside the vacuum component 4. A main connecting pipe 5 is installed at the output end of the vacuum component 4, and a vacuum component valve 6, a first angle valve 7, and an exhaust valve 22 are respectively installed inside the main connecting pipe 5. An ion pump 8 is located at the top of the base plate 1, and a first branch connecting pipe 9 connected to the main connecting pipe 5 is installed at the output end of the ion pump 8. A second angle valve 10 is installed inside the first branch connecting pipe 9. A second branch connecting pipe 11 is installed on the side of the main connecting pipe 5 away from the ion pump 8, and a pressure gauge 12 is installed inside the second branch connecting pipe 11. A filter 13 is installed on one side of the second branch connecting pipe 11, and a first flow meter 14 is installed on one side of the filter 13. A slow-charging valve 14 is installed on one side of the first flow meter 14. The charging valve body 2 and the main connecting pipe 5 are equipped with a U-shaped connecting pipe 20 on the side near the exhaust valve 22. A second flow meter 23 is installed inside the U-shaped connecting pipe 20. A slow-release valve body 21 is installed on one side of the second flow meter 23. A connecting bracket 30 is installed on the outer wall of the slow-release valve body 21. Both the slow charging valve body 2 and the slow-release valve body 21 are equipped with filter screens. A connecting cover 34 for connecting to the external pipeline is installed on the outer wall of the second flow meter 23. The top and bottom of the connecting cover 34 are provided with grooves. There is a guide rod 31, and a pressing frame 33 is sleeved on the outer wall of the guide rod 31. A spring 32 that fits against the pressing frame 33 is sleeved on the outer wall of the guide rod 31. When the operator presses the pressing frame 33, it moves on the outer wall of the guide rod 31 and squeezes the spring 32. After the pressing frame 33 passes through the outer wall of the slow-draw valve body 21, the pressing frame 33 retracts into the connecting cover 34 and does not contact the connecting frame 30. The slow-draw valve body 21 can then be removed from the U-shaped connecting pipe 20. This structure can meet the needs of quick disassembly and assembly, thus satisfying market demands.
[0020] Example 2, as Figure 1-4As shown, this utility model provides a technical solution: an integrated leak detection and baking device for high vacuum components, including a molecular pump 15 connected to a molecular pump 15 mounted on the top of a base plate 1, a pre-pump 19 connected to one end of a main connecting pipe 5 at the top of the base plate 1, a leak detector 17 at the top of the base plate 1, and a third branch connecting pipe 16 connected to the main connecting pipe 5 at the output end of the leak detector 17. A third angle valve 18 is installed inside the third branch connecting pipe 16. A deceleration and buffer adjustment mechanism is installed inside the slow charging valve body 2 and the slow withdrawing valve body 21. The adjustment mechanism includes a connecting shaft 24 and a sealing ball 28. The connecting shaft 24 is mounted inside the slow withdrawing valve body 21 via a bearing, and a sealing ball 28 adapted to the slow withdrawing valve body 21 is provided at the bottom end of the connecting shaft 24. A horn-shaped buffer is provided inside the slow withdrawing valve body 21. The outer wall of the connecting shaft 24 is equipped with a gear 25. A cylinder 26 is provided on one side of the slow-pump valve body 21, and a rack 27 adapted to the gear 25 is installed at the output end of the cylinder 26. When it is necessary to fill the vacuum component 4 with high-purity nitrogen, the slow-pump valve body 2 can be used to achieve slow-pump operation. Specifically, the starting cylinder 26 drives the rack 27 to mesh with the gear 25, and the gear 25 drives the connecting shaft 24 to rotate. In turn, the connecting shaft 24 drives the sealing ball 28 to rotate to the position of the small slot and the horn-shaped buffer cavity 29 for convection. This disperses and counteracts the flow of the high-purity nitrogen, thus buffering and decelerating it. The filter screen provided on the inner wall of the connecting frame 30 can solve the problem of contamination of the internal cavity of the vacuum component 4 during the steps of leak detection, baking and exhaust and filling with high-purity nitrogen, and reduce the entry of dust.
[0021] Working principle: First, connect the external power supply. During use, connect the vacuum component 4 to the interface of the main connecting pipe 5, connect the leak detector 17 to the third branch connecting pipe 16 of the leak detection interface, and connect the external high-purity nitrogen to the slow-charge valve body 2 of the slow-charge interface. Slow-charge operation is achieved through the slow-charge valve body 2. Specifically, the starting cylinder 26 drives the rack 27 to mesh with the gear 25, which in turn drives the connecting shaft 24 to rotate. The connecting shaft 24 then drives the sealing ball 28 to rotate to the position of the small slot and the horn-shaped buffer cavity 29 for convection. This disperses and counteracts the flow of the high-purity nitrogen, thus buffering and decelerating it. The inner wall of the connecting frame 30 is equipped with a filter screen, which solves the problem of internal cavity contamination during the leak detection, baking and degassing, and high-purity nitrogen filling of the vacuum component 4 to be evacuated, reducing dust entry. High-purity nitrogen is introduced into the vacuum component 4 to be evacuated. By closing the valve of the slow charging valve body 2, the cylinder 26 is activated to drive the rack 27 to mesh with the gear 25. The gear 25 then drives the connecting shaft 24 to rotate, which in turn drives the sealing ball 28 to rotate to the position of the closed surface and the horn-shaped buffer cavity 29. Then, the pre-pump 19 and the leak detector 17 are turned on, and the slow evacuation process of the vacuum component 4 is carried out through the slow evacuation valve body. Adjust the gas flow rate at 21 points and slowly pump the vacuum component 4. When the system vacuum reaches the working vacuum of the leak detector 17, open the third angle valve 18 to check for leaks in the vacuum component 4. After the leak check is completed, close the third angle valve 18 and the slow pump valve 21, open the exhaust valve 22 on the main connecting pipe 5, and turn on the molecular pump 15. When the vacuum reaches the vacuum required for the baking and exhaust process, turn on the heating belt 3 to bake and exhaust the vacuum component 4. After the baking and heating stops, open the second angle valve 10 to perform an ultimate vacuum test on the ion pump 8. After the baking and exhaust is completed, close the second angle valve 10. Valve 10, exhaust valve 22, and finally the vacuum component 4 to be evacuated are disconnected from the workpiece interface, thereby realizing the integrated operation of slow evacuation, slow charging, leak detection and baking of the vacuum component 4 to be evacuated. When it is necessary to clean the filter screen at the slow evacuation valve body 21 and the slow charging valve body 2, the operator presses the pressing frame 33 to move the compression spring 32 on the outer wall of the guide rod 31, so that after the pressing frame 33 passes through the outer wall of the slow evacuation valve body 21, the pressing frame 33 retracts into the connecting cover 34 and does not contact the connecting frame 30, so that the slow evacuation valve body 21 can be removed from the U-shaped connecting pipe 20. This structure can meet the requirements of quick disassembly and quick installation, and facilitates the cleaning of the filter screen.
[0022] Finally, it should be noted that the above content is only used to illustrate the technical solution of this utility model, and is not intended to limit the scope of protection of this utility model. Simple modifications or equivalent substitutions made by those skilled in the art to the technical solution of this utility model do not depart from the essence and scope of the technical solution of this utility model.
Claims
1. A high vacuum component leak detection baking integrated device, comprising a base plate (1), a slow charging valve body (2) and a vacuum component (4) to be pumped, characterized in that: The top end of the bottom plate (1) is provided with a vacuum component (4) to be pumped, and the inside of the vacuum component (4) is provided with a heating belt (3), the output end of the vacuum component (4) is provided with a main connecting pipe (5), and the inside of the main connecting pipe (5) is respectively provided with a vacuum component valve (6), a first angle valve (7) and an exhaust valve (22), the top end of the bottom plate (1) is provided with an ion pump (8), and the output end of the ion pump (8) is provided with a first branch connecting pipe (9) connected with the main connecting pipe (5), the inside of the first branch connecting pipe (9) is provided with a second angle valve (10), the side of the main connecting pipe (5) away from the ion pump (8) is provided with a second branch connecting pipe (11), and the inside of the second branch connecting pipe (11) is provided with a pressure gauge (12), one side of the second branch connecting pipe (11) is provided with a filter (13), and one side of the filter (13) is provided with a first flowmeter (14), one side of the first flowmeter (14) is provided with a slow charging valve body (2), one side of the main connecting pipe (5) close to the exhaust valve (22) is provided with a U-shaped connecting pipe (20), and the inside of the U-shaped connecting pipe (20) is provided with a second flowmeter (23), one side of the second flowmeter (23) is provided with a slow pumping valve body (21), and the outer wall of the slow pumping valve body (21) is provided with a connecting frame (30), the top end of the bottom plate (1) is provided with a molecular pump (15) connected with the molecular pump (15), the top end of the bottom plate (1) is provided with a front stage pump (19) connected with one end of the main connecting pipe (5), the top end of the bottom plate (1) is provided with a leak detector (17), and the output end of the leak detector (17) is provided with a third branch connecting pipe (16) connected with the main connecting pipe (5), the inside of the third branch connecting pipe (16) is provided with a third angle valve (18), and the inside of the slow charging valve body (2) and the slow pumping valve body (21) is provided with a speed reduction buffer adjusting mechanism.
2. The integrated leak detection and bake-out apparatus for high vacuum components of claim 1, wherein: The adjusting mechanism comprises a connecting shaft (24) and a sealing ball (28), the inside of the slow pumping valve body (21) is provided with the connecting shaft (24) through a bearing, and the bottom end of the connecting shaft (24) is provided with the sealing ball (28) matched with the slow pumping valve body (21), and the inside of the slow pumping valve body (21) is provided with a horn type buffer cavity (29).
3. The integrated leak detection and bake-out apparatus for high vacuum components of claim 2, wherein: The outer wall of the connecting shaft (24) is provided with a gear (25), one side of the slow pumping valve body (21) is provided with a cylinder (26), and the output end of the cylinder (26) is provided with a rack (27) matched with the gear (25).
4. The integrated leak detection and bake-out apparatus for high vacuum components of claim 1, wherein: The outer wall of the second flowmeter (23) is provided with a connecting cover (34) connected with an external pipeline, and the top end and the bottom end of the connecting cover (34) are both provided with a guide rod (31) through a groove, and the outer wall of the guide rod (31) is sleeved with a pressing frame (33).
5. The integrated leak detection and bake-out apparatus for high vacuum components of claim 4, wherein: The outer wall of the guide rod (31) is sleeved with a spring (32) matched with the pressing frame (33).
6. The integrated leak detection and bake-out apparatus for high vacuum components of claim 1, wherein: The inside of the slow charging valve body (2) and the slow pumping valve body (21) is provided with a filter screen.