Pressure sensor chip test tool
By designing a combined structure of test chamber, test cylinder, and cover plate, the problem of loose connection between chip and test port was solved, ensuring the stability and safety of testing, achieving reliable connection and insulation of pressure sensor chip, and simplifying the installation process.
Patent Information
- Application Number
- CN202423315241.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2026-01-06
- Estimated Expiration
- 2034-12-31
AI Technical Summary
In existing chip testing fixtures, the connection between the chip and the test port is not tight, which affects the stability and accuracy of the test. Furthermore, the chip is easily contaminated by dust or water droplets during the test, making the test unsafe and unreliable.
A pressure sensor chip testing fixture was designed, comprising a test chamber, a test cylinder, a cover plate, and a shock absorber. The fixture achieves reliable chip connection through the cooperation of a positioning head, positioning hole, side baffle, and insert. A constant temperature environment is maintained through a constant temperature medium input port, and safety insulation is achieved by using an extrusion block and an extrusion block made of silicone rubber.
It achieves a stable and reliable connection of the pressure sensor chip, avoids dust and water droplet contamination, ensures the accuracy and safety of the test, and simplifies the chip installation and removal process.
Smart Images

Figure CN223770335U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to chip testing frock technical field, concretely relates to a pressure sensor chip testing frock. BACKGROUND
[0002] The test standard specification of pressure sensor chip mainly includes a series of technical requirements, test methods and performance indexes. The following is the main content of the pressure sensor chip test standard specification according to the search result provided: the technical requirements of pressure sensor chip include measurement range, accuracy and other parameters, and performance requirements under different environmental conditions. These requirements ensure that the pressure sensor can work stably and reliably under various working conditions, meet the actual needs of users. The test method includes the test of static characteristics, dynamic characteristics, temperature characteristics and other aspects of the pressure sensor, and the verification of its durability, environmental adaptability and other aspects. The execution of these test methods can effectively evaluate whether the performance of the pressure sensor meets the standard requirements, and ensure its reliability and stability in practical application.
[0003] Chip testing frock is a tool specially designed for various types of testing of semiconductor chips. Its main function is to verify the performance and quality of the chip by simulating the conditions of the chip in the actual working environment. The design of this frock aims to simplify the testing process, improve the testing efficiency, and ensure the accuracy and reliability of the test results. Chip testing frock works cooperatively through its structural components to achieve comprehensive detection and evaluation of the chip. For example, the design of the open chip mounting seat makes the installation and removal of the chip simple, while the chip test circuit board ensures the accuracy and efficiency of the testing process. The detection adjustment mechanism can adjust the position of the tested piece as needed to adapt to different testing requirements. Chip testing frock is widely used in the production process of integrated circuit chips, especially in the quality inspection link after packaging. Through this frock, the quality of the packaging process can be effectively tested, the quality of the foundry can be tested, and the stability and reliability of the chip can be improved.
[0004] The output of the pressure sensor is greatly affected by the external environmental temperature and pressure, so during the batch calibration test of the silicon-based MEMS pressure sensor chip, a constant temperature and constant pressure environment needs to be provided for the sensor chip. Here, a constant temperature tank is used to provide a constant temperature environment. The constant temperature tank uses water, oil, alcohol and other liquids as medium, through the monitoring of temperature instrument and the action of stirring jet system, it can be stabilized at the set temperature, and the effective working area inside the tank body can be stabilized and uniform, which is the main supporting equipment for temperature instrument verification and calibration.
[0005] In the prior art (publication number CN208887840U) a kind of silicon-based MEMS pressure sensor chip test tool instruction book mentions "the test tool includes cover plate and cavity;The cover plate is placed in the upper of the cavity;Sealing ring groove is provided on the upper wall of the cavity, and a plurality of second screw holes are equidistantly arranged on the outer edge of sealing ring groove;First screw hole is provided at the position corresponding to second screw hole of the cover plate;Two aviation socket interfaces and two exhaust holes are symmetrically arranged in the inside of first screw hole of the cover plate", but the chip in the test process of chip test tool in prior art can not be closely connected between test port, affect the stability and accuracy of test, and dust or water droplet can fall into test port in the test process, and test is not safe and reliable. Utility model content
[0006] To overcome the defects existing in the prior art, a pressure sensor chip test tool is provided to solve the problems that the chip in the test process of chip test tool in prior art can not be closely connected between test port, affect the stability and accuracy of test, and dust or water droplet can fall into test port in the test process, and test is not safe and reliable.
[0007] To achieve the above-mentioned purpose, a pressure sensor chip test tool is provided, which comprises a test bin and a test cylinder, a plurality of test cylinders are arranged in the test bin, and a test port is arranged at the upper part of the test cylinder, a pressure sensor chip is inserted into the test port, and the pressure sensor chip is a detachable structure, a cover plate is arranged on the upper end of the test bin, and the cover plate is detachably connected with the test bin, a control panel is arranged at the lower part of the test bin, and a middle fixed plate is arranged on the left and right sides of the lower part of the test bin.
[0008] Further, the lower end surface of the middle fixed plate is fixed with a support leg, the lower end of the support leg is fixed on a base plate, and the upper end surface of the middle fixed plate is provided with a socket.
[0009] Further, the upper end of the test bin is provided with a top plate, the upper end surface of the top plate is provided with a positioning hole on the left and right sides, and the test port of the upper part of the test cylinder is sleeved in the top plate.
[0010] Further, the upper end surface of the cover plate is provided with a handle on the left and right sides, and the lower end surface of the cover plate is fixed with a side baffle on the left and right ends, and the lower part of the side baffle is embedded in the socket on the same side.
[0011] Further, the lower end surface of the cover plate is provided with a positioning head on the left and right sides, the lower part of the positioning head is embedded in the corresponding positioning hole on the same side, and the lower end surface of the cover plate is provided with a plurality of shock absorbers.
[0012] Further, the lower end of the shock damper is fixed with an upper fixed plate, and the lower end surface of the upper fixed plate is provided with a connecting block, and the lower end of the connecting block is fixed with an extrusion block, the extrusion block is made of silicone rubber material, and the extrusion block is pressed on the upper end surface of the pressure sensor chip.
[0013] The utility model discloses beneficial effect lies in:
[0014] 1. The utility model discloses test the left part of front side of bin is provided with constant temperature medium input pipe mouth and constant temperature medium output pipe mouth, convenient to the delivery constant temperature medium in test bin, make test cylinder, pressure sensor chip is in constant temperature welding internal test more stable reliable.
[0015] 2. The utility model discloses the setting positioning of positioning head and positioning hole, side baffle and spigot is accurate and reliable, makes the cover board more safe and reliable and is placed on the test bin, and through the setting of shock damper and extrusion block, not only can the effect of elastic extrusion required test chip be played, but also the effect of safe insulation is played, and the test is safer and more practical.
[0016] 2. The utility model discloses the cover board and test bin, pressure sensor chip and test mouth between convenient split connection make pressure sensor chip test installation easy, convenient, convenient, more flexible and practical. DRAWINGS
[0017] Figure 1 It is the front view schematic diagram of the utility model embodiment;
[0018] Figure 2 It is the section schematic diagram of the utility model embodiment;
[0019] Figure 3 It is the internal structure schematic diagram of test bin of the utility model embodiment;
[0020] Figure 4 It is the cover board schematic diagram of the utility model embodiment;
[0021] Figure 5 It is the pressure sensor chip into test cylinder insertion display effect schematic diagram of the utility model embodiment.
[0022] In the drawing: 1, test bin;10, middle fixed plate;11, support leg;12, pad;13, control panel;14, spigot;15, positioning hole;16, top plate;2, cover board;20, handle;21, positioning head;22, side baffle;23, shock damper;24, upper fixed plate;25, connecting block;26, extrusion block;3, test cylinder;30, test mouth;4, pressure sensor chip. SPECIFIC IMPLEMENTATION
[0023] In order to make the technical problems, technical solutions and beneficial effects of the utility model clearer, the utility model is further described in detail below in combination with the drawings and examples. The specific examples described herein are only used to explain the utility model and are not used to limit the utility model. Specific details such as specific system structures and technologies are proposed so as to more thoroughly understand the utility model examples. The described examples are part of the embodiments of the disclosure, not all the embodiments. However, those skilled in the art should clearly understand that the utility model can also be implemented in other embodiments without these specific details. Based on the examples in the disclosure, all other examples obtained by those skilled in the art without creative labor belong to the protection scope of the disclosure.
[0024] The specific embodiments of the utility model are described in detail below in combination with the drawings.
[0025] Figure 1 is a front view schematic diagram of the utility model embodiment, Figure 2 is a sectional view schematic diagram of the utility model embodiment, Figure 3 is a test bin internal structure schematic diagram of the utility model embodiment, Figure 4 is a cover plate schematic diagram of the utility model embodiment and Figure 5 is a pressure sensor chip insertion into the test cylinder display effect schematic diagram of the utility model embodiment.
[0026] Referring to Figures 1 to 5 , the utility model provides a kind of pressure sensor chip test tool, including test bin 1 and test cylinder 3, test bin 1 is provided with multiple groups of test cylinder 3, and the upper portion of test cylinder 3 is provided with test port 30, test port 30 is inserted with pressure sensor chip 4, and pressure sensor chip 4 is detachable structure, the upper end cover of test bin 1 is provided with cover plate 2, and cover plate 2 is split connection between test bin 1, the lower portion of test bin 1 is provided with control panel 13, and the lower portion of test bin 1 is provided with middle fixed plate 10 on left and right sides.
[0027] In the embodiment, the lower end surface of middle fixed plate 10 is fixed with support leg 11, and the lower end of support leg 11 is fixed on base plate 12, and the upper end surface of middle fixed plate 10 is provided with embedding port 14;The upper end of test bin 1 is provided with top plate 16, and the upper end surface of top plate 16 is provided with positioning hole 15 on left and right sides, and the test port 30 of test cylinder 3 upper portion is sleeved in top plate 16.
[0028] As a kind of preferable implementation, the left part of the front side of the utility model test bin 1 is provided with constant temperature medium input pipe and constant temperature medium output pipe, and it is convenient to transport constant temperature medium into test bin 1, so that test cylinder 3, pressure sensor chip 4 is in constant temperature welding internal test more stable and reliable.
[0029] In the embodiment, the upper end face of the cover plate 2 is provided with handles 20 on both sides, and the lower end face of the cover plate 2 is fixed with side baffles 22 on both ends, the lower part of the side baffles 22 is fitted into the same side of the embedding port 14; the lower end face of the cover plate 2 is provided with positioning heads 21 on both sides, and the lower part of the positioning head 21 is fitted into the corresponding positioning hole 15 on the same side, and the lower end face of the cover plate 2 is provided with a plurality of shock absorbers 23; the lower end of the shock absorber 23 is fixed with an upper fixed plate 24, the lower end face of the upper fixed plate 24 is provided with a connecting block 25, and the lower end of the connecting block 25 is fixed with an extrusion block 26, the extrusion block 26 is made of silicone rubber material, and the extrusion block 26 is pressed on the upper end face of the pressure sensor chip 4.
[0030] As a preferred embodiment, the positioning head 21 and the positioning hole 15, the side baffle 22 and the embedding port 14 are accurately and reliably positioned, so that the cover plate 2 is more safely and reliably placed on the test bin 1; and through the setting of the shock absorber 23 and the extrusion block 26, not only the effect of elastic extrusion of the tested chip can be achieved, but also the effect of safe insulation can be achieved, and the test is safer and more practical.
[0031] In the utility model, the cover plate 2 and the test bin 1, the pressure sensor chip 4 and the test port 30 are conveniently split and connected, so that the pressure sensor chip test installation is easy, convenient, convenient and practical, more flexible and practical.
[0032] The utility model can effectively solve the problem that the chip may not be connected closely between the test port in the chip test tool test process of prior art, which affects the stability and accuracy of the test, and dust or water droplets may fall into the test port during the test process, and the test is not safe and reliable, the utility model is convenient for accurately inserting the pressure sensor chip into the test port of the test cylinder, and the test is closely and reliably connected, safe and insulated, dust or water droplets are avoided, which helps to ensure the accuracy and reliability of the test.
[0033] The above embodiment is used to explain and illustrate the utility model, but not to limit the utility model, any modification and change made to the utility model within the spirit and application protection right claim range of the utility model should be included in the protection range of the utility model.
Claims
1. A pressure sensor chip test fixture, characterized by: Including test bin (1) and test cylinder (3), a plurality of test cylinders (3) are arranged in the test bin (1), and the upper part of the test cylinder (3) is provided with a test port (30), the pressure sensor chip (4) is inserted in the test port (30), and the pressure sensor chip (4) is detachable structure, the upper end cover of the test bin (1) is provided with a cover plate (2), and the cover plate (2) and the test bin (1) are connected, the lower part of the test bin (1) is provided with a control panel (13), and the lower part of the test bin (1) is provided with a middle fixed plate (10).
2. The pressure sensor chip test tool of claim 1, wherein, The lower end surface of the middle fixed plate (10) is fixed with a support leg (11), and the lower end of the support leg (11) is fixed on the backing plate (12), and the upper end surface of the middle fixed plate (10) is provided with an embedding port (14).
3. The pressure sensor chip test tool of claim 1, wherein, The upper end of the test bin (1) is provided with a top plate (16), and the upper end surface of the top plate (16) is provided with a positioning hole (15) on the left and right sides, and the test port (30) of the upper part of the test cylinder (3) is sleeved in the top plate (16).
4. The pressure sensor chip test tool of claim 1, wherein, The upper end surface of the cover plate (2) is provided with a handle (20) on the left and right sides, and the lower end surface of the cover plate (2) is fixed with a side baffle (22) on the left and right ends, and the lower part of the side baffle (22) is embedded in the embedding port (14) on the same side.
5. The pressure sensor chip test tool of claim 1, wherein, The lower end surface of the cover plate (2) is provided with a positioning head (21) on the left and right sides, and the lower part of the positioning head (21) is embedded in the corresponding positioning hole (15) on the same side, and the lower end surface of the cover plate (2) is provided with a plurality of shock absorbers (23).
6. The pressure sensor chip test tool of claim 5, wherein, The lower end of the shock absorber (23) is fixed with an upper fixed plate (24), and the lower end surface of the upper fixed plate (24) is provided with a connecting block (25), and the lower end of the connecting block (25) is fixed with an extrusion block (26), the extrusion block (26) is made of silicone rubber material, and the extrusion block (26) is pressed on the upper end surface of the pressure sensor chip (4).
Citation Information
Patent Citations
The utility model relates to a silicon-based MEMS pressure sensor chip test tool
CN208887840U