Coating and cleaning module for laser processing equipment

Abstract

The utility model relates to a coating and cleaning module of laser processing equipment, which sequentially comprises a bottom plate, a chassis and a stainless steel shell from bottom to top, the chassis is mounted on the bottom plate through a plurality of support columns, and an adsorption rotary carrying table is mounted in the middle of the stainless steel shell; a hollow motor is installed at the bottom of the base plate below the adsorption rotating platform deck, a high-speed sliding ring is installed on the inner side of the hollow motor, and the driving end of the top of the hollow motor is connected with the adsorption rotating platform deck above the hollow motor through the high-speed sliding ring. Through the structural arrangement of the hollow motor and the high-speed slip ring, the overall integration degree is better, the high-speed slip ring is smaller and lighter, the high-speed slip ring can be just hidden in the middle shaft when matched with the hollow motor, and compared with an original rotating part, the height of the rotating part in the existing scheme is remarkably reduced, and stability is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of chip processing technology, and in particular to a coating and cleaning module for laser processing equipment. Background Technology

[0002] With the development of the semiconductor industry, the integration of chips is constantly increasing, and the requirements for wafer manufacturing processes are becoming increasingly stringent. In the semiconductor dicing process, the coating and cleaning platform plays an increasingly important role in ensuring dicing quality and subsequent product performance. Typically, before dicing, the product is sprayed with deionized water or other solutions to clean the surface, removing dust particles, metal impurities, and other contaminants. Subsequently, a protective liquid is evenly coated onto the wafer surface to prevent scratches from debris generated during dicing, while also increasing wafer strength, reducing the risk of wafer cracking, and further improving chip quality and yield. A spin coating method is usually used, controlling the rotation speed and time to achieve the required coating thickness.

[0003] Extensive searching revealed a Chinese patent publication number, CN217432156U, which discloses an integrated coating and cleaning machine. From top to bottom, it comprises a stainless steel outer shell, a chassis, and a base plate. A main shaft rotation mechanism is positioned in the center of the chassis along the Z-axis. From bottom to top, the main shaft rotation mechanism includes a main shaft rotation motor, a platform transfer base plate, and a high-speed adsorption rotating platform. A first swing arm and a second swing arm are respectively installed inside the stainless steel outer shell on both sides of the main shaft rotation mechanism along the Y-axis. This design integrates coating and cleaning into a single device, reducing handling. The coating and cleaning speeds are adjustable to ensure uniformity. Furthermore, this invention utilizes a platform lifting cylinder to transport the processed products outside the equipment for further handling, allowing a single machine to handle different functions and products.

[0004] In summary, the problems with the existing technology are as follows:

[0005] 1. Because the entire rotating stage needs to adsorb products through vacuum, a self-made hollow rotating air shaft is used between the rotating stage and the motor. Although the hollow air shaft is sealed with an oil seal to prevent vacuum leakage, the oil seal's lifespan is not long enough during prolonged high-speed rotation, and its stability is average. Furthermore, as a consumable, the oil seal is cumbersome to replace, requiring the removal of many parts. Subsequently, a standard magnetic fluid was used to replace the central shaft, which improved stability. However, the magnetic fluid has requirements for the gas pressure passing through it, requiring the use of a pressure reducing valve, and its overall size and weight are also larger.

[0006] 2. In existing coating cleaning processes, two cylinders drive a spring-loaded roller shutter to seal the cavity. Due to the extremely high humidity inside the cavity, the cylinders have a short lifespan in humid environments.

[0007] In view of the above-mentioned shortcomings, the designer has actively researched and innovated in order to create a coating and cleaning module for laser processing equipment, making it more valuable for industrial applications. Utility Model Content

[0008] To solve any of the above-mentioned technical problems, the purpose of this utility model is to provide a coating and cleaning module for laser processing equipment.

[0009] To achieve the above objectives, the present invention adopts the following technical solution:

[0010] The laser processing equipment coating and cleaning module includes, from bottom to top, a base plate, a chassis, and a stainless steel shell. The chassis is mounted on the base plate by several support columns, and an adsorption rotating platform is installed in the middle of the stainless steel shell.

[0011] A hollow motor is installed at the bottom of the chassis below the adsorption rotary stage. A high-speed slip ring is installed inside the hollow motor. The drive end at the top of the hollow motor is connected to the adsorption rotary stage above through the high-speed slip ring.

[0012] A lifting cylinder is installed on one side of the bottom of the chassis. After passing through the chassis, the lifting cylinder drives the suction rotating platform above to move vertically.

[0013] Cleaning swing arms and adhesive application swing arms are respectively installed on the chassis on both sides of the adsorption rotating platform. Swing arm motor drive modules are installed on the chassis below the cleaning swing arms and adhesive application swing arms.

[0014] An acrylic telescopic gate is installed on the top outer side of the stainless steel shell. Telescopic cylinders are installed on the stainless steel shell on the front and back sides below the acrylic telescopic gate. The telescopic cylinders drive the acrylic telescopic gate above to move in the left and right directions.

[0015] As a further improvement of this utility model, a number of sliding guide rods distributed vertically are installed at the bottom of the chassis via sliding guide rod sleeves. The top of the sliding guide rods is installed at the bottom of the adsorption rotating platform, and a limit fixing ring is installed at the bottom of the sliding guide rods.

[0016] As a further improvement of this utility model, the swing arm motor drive module includes a swing arm motor and a swing arm coupling. The swing arm motor is mounted on the bottom of the chassis via a swing arm bracket, and the drive end at the top of the swing arm motor is connected to the cleaning swing arm or the gluing swing arm above it via the swing arm coupling.

[0017] As a further improvement of this utility model, a ventilation and drainage pipe is installed on one side of the stainless steel shell.

[0018] As a further improvement of this utility model, linear bearing guide rods distributed along the left and right directions are installed on the stainless steel shells on both the front and rear sides of the acrylic telescopic gate, and the acrylic telescopic gate moves in the left and right directions under the action of the linear bearing guide rods.

[0019] As a further improvement of this utility model, the bottom cover on one side of the hollow motor is connected to the chassis by a drag chain, and an origin sensor is installed on the bottom cover.

[0020] As a further improvement of this utility model, several claws are evenly distributed along the circumferential direction on the top of the adsorption rotating platform.

[0021] As a further improvement of this utility model, a waterproof cover is installed on the chassis outside the adsorption rotating platform.

[0022] As a further improvement of this utility model, a vent pipe is installed at the bottom of the high-speed slip ring.

[0023] By means of the above solution, this utility model has at least the following advantages:

[0024] This invention features a hollow motor and a high-speed slip ring, resulting in better overall integration, a more compact and lightweight design, and the hollow motor can be neatly concealed within the central shaft. Compared to the original rotating part, the height of the rotating part in the existing solution is significantly reduced, greatly improving stability.

[0025] This invention optimizes the coated acrylic telescopic door by placing the telescopic cylinder outside the outer cover, which greatly reduces the possibility of the cylinder getting damp and also reduces costs.

[0026] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a top view of the present invention;

[0029] Figure 2 This is a front view of the present invention;

[0030] Figure 3This is a partial schematic diagram of the hollow motor and the adsorption rotating platform of this utility model;

[0031] Figure 4 yes Figure 3 A schematic diagram after removing the hollow motor.

[0032] The meanings of the labels in the figures are as follows.

[0033] 1. Cleaning swing arm; 2. Adsorption rotating platform; 3. Glue-applying swing arm; 4. Acrylic telescopic gate; 5. Stainless steel shell; 6. Support column; 7. Sliding guide rod; 8. Limiting and fixing ring; 9. Swing arm motor; 10. Lifting cylinder; 11. Swing arm coupling; 12. Chassis; 13. Ventilation and drainage pipe; 14. Telescopic cylinder; 15. Cable chain; 16. Claw; 17. Waterproof cover; 18. Hollow motor; 19. Vent pipe; 20. High-speed slip ring; 21. Origin sensor; 22. Bottom cover. Detailed Implementation

[0034] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0035] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0036] like Figures 1-4As shown, a coating and cleaning module for laser processing equipment includes, from bottom to top, a base plate, a chassis 12, and a stainless steel outer shell 5. The chassis 12 is mounted on the base plate via several support columns 6. An adsorption rotating platform 2 is installed in the center of the stainless steel outer shell 5, and several claws 16 are evenly distributed along the circumference on the top of the adsorption rotating platform 2. A ventilation and drainage pipe 13 is installed on one side of the stainless steel outer shell 5. A waterproof cover 17 is installed on the chassis 12 outside the adsorption rotating platform 2. A hollow motor 18 is installed at the bottom of the chassis 12 below the adsorption rotating platform 2, and a high-speed slip ring 20 is installed inside the hollow motor 18. The drive end of the top of the hollow motor 18 is connected to the adsorption rotating platform 2 above through the high-speed slip ring 20. A vent pipe 19 is installed at the bottom of the high-speed slip ring 20. The high-speed slip ring 20 supports a maximum speed of 10,000 rpm and can achieve a stable high-speed rotation of 3,000 rpm, which greatly improves the coating effect and stability. In specific situations, it can meet the high-speed rotation of 5,000 rpm, which enhances the ability to develop new processes.

[0037] A lifting cylinder 10 is installed on one side of the bottom of the chassis 12. After passing through the chassis 12, the lifting cylinder 10 drives the suction rotating platform 2 above to move vertically. Several sliding guide rods 8 are installed at the bottom of the chassis 12 through sliding guide rod sleeves, which are distributed vertically. The top of the sliding guide rods 8 is installed at the bottom of the suction rotating platform 2, and a limit fixing ring 8 is installed at the bottom of the sliding guide rods 8.

[0038] The bottom cover 22 on one side of the hollow motor 18 is connected to the chassis 12 by a drag chain 15, and the origin sensor 21 is installed on the bottom cover 22.

[0039] A cleaning swing arm 1 and an adhesive application swing arm 3 are respectively installed on the chassis 12 on both sides of the adsorption rotary stage 2. A swing arm motor drive module is installed on the chassis 12 below the cleaning swing arm 1 and the adhesive application swing arm 3. The swing arm motor drive module includes a swing arm motor 9 and a swing arm coupling 11. The swing arm motor 9 is installed at the bottom of the chassis 12 through a swing arm bracket. The drive end at the top of the swing arm motor 9 is connected to the cleaning swing arm 1 or the adhesive application swing arm 3 above through the swing arm coupling 11.

[0040] An acrylic telescopic gate 4 is installed on the top outer side of the stainless steel shell 5. A telescopic cylinder 14 is installed on the stainless steel shell 5 on the front and rear sides below the acrylic telescopic gate 4. The telescopic cylinder 14 drives the acrylic telescopic gate 4 above to move in the left and right directions.

[0041] Linear bearing guide rods distributed along the left and right directions are installed on the stainless steel shells 5 on both the front and rear sides of the acrylic telescopic gate 4. The acrylic telescopic gate 4 moves in the left and right directions under the action of the linear bearing guide rods.

[0042] The positional and connection relationships between the components of this utility model are as follows:

[0043] The cleaning swing arm 1, the adhesive application swing arm 3, and the lifting cylinder 10 are mounted on the chassis 12, which is fixed to three support columns 6. The high-speed adsorption rotating platform 2, the lifting cylinder 10, and three sliding guide rods 7 are connected. Limiting rings 8 are installed on the sliding guide rods. The stainless steel shell 5 is then fixed to the chassis 13, and the acrylic telescopic door 4 and the ventilation and drainage pipe 13 are connected to the stainless steel shell 5. The top of the hollow motor 18 is connected to the adsorption rotating platform 2 and the rotating part of the high-speed slip ring 20 via a flange. The bottom of the high-speed slip ring 20 is connected to the ventilation pipe 19.

[0044] The working principle and process of this utility model:

[0045] First, under the action of the lifting cylinder 10 and the sliding guide rod 7, the adsorption rotating platform 2 is raised to receive the product. At this time, the vacuum negative pressure is transmitted through the vent pipe 19 to the high-speed slip ring 20 and finally to the adsorption rotating platform 2. When there is product, the adsorption rotating platform 2 forms a sealed cavity. After reaching the specified negative pressure value, the lifting cylinder 10 controls the entire adsorption rotating platform 2 to descend. After descending to the bottom, the acrylic telescopic door 4 is closed by the cylinder. During the coating process, the hollow motor 18 rotates at high speed, thereby driving the adsorption rotating platform 2 to rotate together. At the same time, the top of the high-speed slip ring 20 also rotates together. Then, the coating swing arm motor 9 rotates to drive the glue application swing arm 3 to complete the spraying of the protective liquid under the corresponding process parameters. After the coating is completed, the next processing step can be carried out. After the processing is completed, the equipment is cleaned under the corresponding parameters. During the cleaning process, the external exhaust air is discharged through the ventilation drain pipe 13 to remove the water mist and prevent water mist from splashing and causing damage to other equipment.

[0046] This invention, through the structural design of a hollow motor and a high-speed slip ring, achieves better overall integration, making it more compact and lightweight. The hollow motor can be perfectly concealed within the central shaft. Compared to the original rotating part, the height of the rotating part in existing solutions is significantly reduced, greatly improving stability. By optimizing the coated acrylic telescopic door and placing the telescopic cylinder outside the outer casing, the possibility of the cylinder getting damp is greatly reduced, while simultaneously lowering costs.

[0047] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0048] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0049] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A laser processing equipment coating and cleaning module, comprising, from bottom to top, a base plate, a chassis (12), and a stainless steel shell (5), wherein the chassis (12) is mounted on the base plate by a plurality of support columns (6), and an adsorption rotating platform (2) is installed in the middle of the stainless steel shell (5); characterized in that: A hollow motor (18) is installed at the bottom of the chassis (12) below the adsorption rotating stage (2). A high-speed slip ring (20) is installed inside the hollow motor (18). The drive end of the top of the hollow motor (18) is connected to the adsorption rotating stage (2) above through the high-speed slip ring (20). A lifting cylinder (10) is installed on one side of the bottom of the chassis (12). After passing through the chassis (12), the lifting cylinder (10) drives the suction rotating platform (2) above to move in the vertical direction. A cleaning swing arm (1) and an adhesive coating swing arm (3) are respectively provided on the chassis (12) on both sides of the adsorption rotating platform (2). A swing arm motor drive module is installed on the chassis (12) below the cleaning swing arm (1) and the adhesive coating swing arm (3). An acrylic telescopic door (4) is installed on the top outer side of the stainless steel shell (5). A telescopic cylinder (14) is installed on the stainless steel shell (5) on the front and rear sides below the acrylic telescopic door (4). The telescopic cylinder (14) drives the acrylic telescopic door (4) above to move in the left and right directions.

2. The laser processing equipment coating and cleaning module as described in claim 1, characterized in that, Several sliding guide rods (7) distributed vertically are installed at the bottom of the chassis (12) via sliding guide rod sleeves. The top of the sliding guide rods (7) is installed at the bottom of the adsorption rotating platform (2), and a limit fixing ring (8) is installed at the bottom of the sliding guide rods (7).

3. The laser processing equipment coating and cleaning module as described in claim 1, characterized in that, The swing arm motor drive module includes a swing arm motor (9) and a swing arm coupling (11). The swing arm motor (9) is mounted on the bottom of the chassis (12) via a swing arm bracket. The drive end of the top of the swing arm motor (9) is connected to the cleaning swing arm (1) or the glue-applying swing arm (3) above via the swing arm coupling (11).

4. The laser processing equipment coating and cleaning module as described in claim 1, characterized in that, A ventilation drain pipe (13) is installed on one side of the stainless steel casing (5).

5. The laser processing equipment coating and cleaning module as described in claim 1, characterized in that, Linear bearing guide rods distributed along the left and right directions are installed on the stainless steel shells (5) on both the front and rear sides of the acrylic telescopic gate (4). The acrylic telescopic gate (4) moves in the left and right directions under the action of the linear bearing guide rods.

6. The laser processing equipment coating and cleaning module as described in claim 1, characterized in that, The bottom cover (22) on one side of the bottom of the hollow motor (18) is connected to the chassis (12) by a drag chain (15), and an origin sensor (21) is installed on the bottom cover (22).

7. The laser processing equipment coating and cleaning module as described in claim 1, characterized in that, Several claws (16) are evenly distributed along the circumferential direction on the top of the adsorption rotating stage (2).

8. The laser processing equipment coating and cleaning module as described in claim 1, characterized in that, A waterproof cover (17) is installed on the chassis (12) outside the adsorption rotating platform (2).

9. The laser processing equipment coating and cleaning module as described in claim 1, characterized in that, A vent pipe (19) is installed at the bottom of the high-speed slip ring (20).

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