Focusing ring positioning device

Abstract

The embodiment of the utility model relates to a focusing ring positioning device, which comprises a rotating platform, a focusing ring positioning device and a focusing ring positioning device, the angle detection sensor is used for calibrating the angle of the rotating platform; the telescopic mechanism is connected to the rotating platform and extends in the radial direction of the circular rotating track of the rotating platform; the circle center positioning mechanism is connected to the telescopic mechanism; the correcting gripper is connected to the circle center positioning mechanism, and the circle positioning mechanism is used for moving the correcting gripper to the position over the circle center of the electrostatic chuck; and the rotating mechanism is in driving connection with the correcting gripper and used for driving the correcting gripper to rotate, and a rotating shaft of the correcting gripper is perpendicular to the electrostatic chuck and penetrates through the circle center of the electrostatic chuck. By adopting the technical scheme, the concentricity of the focusing ring and the electrostatic chuck can be improved.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor equipment, and more particularly to a focusing ring positioning device. Background Technology

[0002] In plasma etching processes, the focusing ring is a crucial component installed around the electrostatic chuck, and its installation accuracy has a critical impact on process results and product quality. Current technologies lack precise positioning methods for installing the focusing ring, relying primarily on manual visual inspection, which presents numerous problems.

[0003] The lack of precise positioning tools makes it easy for the focusing ring and the electrostatic chuck to become misaligned during installation, leading to a series of adverse consequences. For example, it can cause the wafer to fail to adhere to the electrostatic chuck, making it unstable during etching and affecting the uniformity and accuracy of the etching process. Furthermore, uneven etching along the inner edge of the focusing ring frequently occurs, which not only reduces product yield but also significantly increases the frequency of focusing ring replacements.

[0004] How to improve the concentricity of the focusing ring and the electrostatic chuck is a question worth discussing. Utility Model Content

[0005] In view of this, the present disclosure provides a focusing ring positioning device that can improve the concentricity of the focusing ring and the electrostatic chuck component.

[0006] To address the aforementioned technical problems, this disclosure provides a focusing ring positioning device. The focusing ring positioning device includes:

[0007] Rotating platform;

[0008] An angle detection sensor is used to calibrate the angle of the rotating platform;

[0009] A telescopic mechanism is connected to the rotating platform and extends radially along the circular rotation trajectory of the rotating platform;

[0010] A center positioning mechanism is connected to the telescopic mechanism;

[0011] A calibration gripper is connected to the circular positioning mechanism, which is used to move the calibration gripper directly above the center of the electrostatic chuck.

[0012] A rotating mechanism, connected to the calibration gripper drive, is used to drive the calibration gripper to rotate. The axis of rotation of the calibration gripper is perpendicular to the electrostatic chuck and passes through the center of the electrostatic chuck.

[0013] Optionally, the rotating platform includes:

[0014] Rotating base;

[0015] A rotary motor is connected to the rotating base;

[0016] A rotary table is connected to the rotating shaft of the rotary motor, which drives the rotary table to rotate. The telescopic mechanism is connected to the side wall of the rotary table.

[0017] Optionally, the telescopic mechanism includes:

[0018] A telescopic cylinder is connected to the rotating platform, and the angle detection sensor is connected to the telescopic cylinder;

[0019] The mounting base is connected to the drive end of the telescopic cylinder.

[0020] Optionally, the angle detection sensor includes a laser rangefinder sensor, used to detect the shortest distance from the laser rangefinder sensor to the electrostatic chuck, and determine that the telescopic mechanism is located in the radial direction of the electrostatic chuck.

[0021] Optionally, the correction gripper includes:

[0022] Correct the motor;

[0023] The calibration housing has two parallel through holes, and the calibration motor is disposed inside the calibration housing;

[0024] Bidirectional movable toothed plates are respectively inserted into the through holes and can slide in the through holes. The opposite sides of the bidirectional movable toothed plates are provided with teeth. The drive end of the correction motor is provided with a gear. The gear meshes with the bidirectional movable toothed plates so that when the two bidirectional movable toothed plates are driven, the two bidirectional movable toothed plates retract or extend.

[0025] The stop rod is rotatably connected to the end of the bidirectional moving toothed plate and is used to contact the inner wall surface of the focusing ring;

[0026] The center of the correction motor is aligned with the center of the electrostatic chuck.

[0027] Optionally, the stop bar is made of a material including rubber.

[0028] Optionally, the rotating mechanism includes:

[0029] A rotary connecting seat is connected to the central positioning mechanism, and the rotary connecting seat is hollow inside.

[0030] A rotating motor is disposed within the rotating connecting seat, and the drive end of the rotating motor is connected to the correction gripper;

[0031] The drive end of the rotating motor is collinear with the axis of the electrostatic chuck.

[0032] Optionally, the center positioning mechanism includes:

[0033] First direction track;

[0034] A first-direction moving device is connected to a first-direction track and is used to move on the first-direction track;

[0035] A first-direction ring edge detection sensor is connected to the first-direction moving device;

[0036] The second directional track is connected to another first directional moving device and is used to move the second directional track to face the center of the electrostatic chuck after the first directional ring edge detection sensor detects the edge of the electrostatic chuck.

[0037] A second directional moving device is connected to a second directional track and is used to move on the second directional track;

[0038] The second direction ring edge detection sensor is connected to the second direction moving device.

[0039] Optionally, the first direction ring edge detection sensor includes two sensors, which are respectively disposed at opposite ends of the first direction track, and the other first direction moving device is disposed between the two sensors.

[0040] Optionally, both the second direction ring edge detection sensor and the first direction ring edge detection sensor are laser rangefinders. The second direction ring edge detection sensor includes one sensor, which is used to cooperate with the two first direction ring edge detection sensors to form three detection points on the edge of the electrostatic chuck.

[0041] Compared with the prior art, the technical solution of the present disclosure has the following advantages:

[0042] In the technical solution provided in this disclosure, a center positioning mechanism of the equipment extends above the electrostatic chuck. An angle detection sensor monitors the angle of the equipment and controls the rotation of the rotating platform to drive the telescopic mechanism to rotate. After rotation, the telescopic mechanism aligns with the radial direction of the electrostatic chuck. The center positioning mechanism positions the center of the electrostatic chuck, and the telescopic mechanism further moves and positions the center positioning mechanism. After positioning, the focusing ring is placed on the mounting base, and the calibration gripper is moved to hold the inner ring of the focusing ring. The rotating mechanism rotates, causing the calibration gripper to rotate, thus accurately positioning the focusing ring and improving the concentricity between the focusing ring and the electrostatic chuck. Attached Figure Description

[0043] To more clearly illustrate the technical solutions of the embodiments of this disclosure, the drawings used in the description of the embodiments of this disclosure or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0044] Figure 1 A schematic diagram of the overall structure of the positioning device provided in the embodiments of this disclosure is shown. Figure 1 ;

[0045] Figure 2 A schematic diagram of the overall structure of the positioning device provided in the embodiments of this disclosure is shown. Figure 2 .

[0046] Figure label:

[0047] 10. Rotating platform; 101. Rotating base; 102. Rotating table;

[0048] 20. Angle detection sensor; 30. Telescopic mechanism; 301. Telescopic cylinder;

[0049] 40. Alignment gripper; 401. Alignment housing; 402. Bidirectional moving toothed plate;

[0050] 50. Center positioning mechanism; 501. First direction track; 502. First direction moving device;

[0051] 503. First direction ring edge detection sensor; 504. Second direction track;

[0052] 505. Second-direction moving device; 506. Second-direction ring edge detection sensor;

[0053] 60. Rotating mechanism; 601. Rotating connecting seat. Detailed Implementation

[0054] As is known from the background technology, if the focusing ring and the electrostatic chuck are not concentric during the installation process, it will reduce the product yield and significantly increase the frequency of focusing ring replacement.

[0055] How to improve the concentricity of the focusing ring and the electrostatic chuck is a question worth discussing.

[0056] To address the aforementioned technical problems, in this embodiment, the device's center positioning mechanism extends above the electrostatic chuck. An angle detection sensor monitors the device's angle, controlling the rotation of the rotating platform to drive the telescopic mechanism. After rotation, the telescopic mechanism aligns with the radial direction of the electrostatic chuck. The center positioning mechanism positions the center of the electrostatic chuck, and the telescopic mechanism further moves and positions the center positioning mechanism. After positioning, the focusing ring is placed on the mounting base. The calibration gripper moves and abuts against the inner ring of the focusing ring. The rotating mechanism rotates, causing the calibration gripper to rotate, thus precisely positioning the focusing ring and improving the concentricity between the focusing ring and the electrostatic chuck.

[0057] To make the above-mentioned objectives, features and beneficial effects of this disclosure more apparent and understandable, specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings.

[0058] refer to Figures 1 to 2 A positioning device, comprising:

[0059] Rotating platform 10;

[0060] An angle detection sensor 20 is used to calibrate the angle of the rotating platform 10;

[0061] The telescopic mechanism 30 is connected to the rotating platform 10 and extends radially along the circular rotation trajectory of the rotating platform 10;

[0062] The center positioning mechanism 50 is connected to the telescopic mechanism 30;

[0063] The calibration gripper 40 is connected to the circular positioning mechanism 50, which is used to move the calibration gripper 40 directly above the center of the electrostatic chuck.

[0064] The rotating mechanism 60 is driven and connected to the calibration gripper 40 to drive the calibration gripper 40 to rotate. The axis of rotation of the calibration gripper 40 is perpendicular to the electrostatic chuck and passes through the center of the electrostatic chuck.

[0065] The center positioning mechanism 50 of the equipment extends above the electrostatic chuck (as a non-limiting example, the center positioning mechanism 50 extends a few centimeters above the electrostatic chuck). The angle detection sensor 20 monitors the angle of the equipment and controls the rotating platform 10 to rotate, which in turn drives the telescopic mechanism 30 to rotate. After the telescopic mechanism 30 rotates, it coincides with the radial direction of the electrostatic chuck.

[0066] The electrostatic chuck is positioned by the center positioning mechanism 50. The center positioning mechanism 50 is further moved and positioned by the telescopic mechanism 30. After positioning, the focusing ring is placed on the placement seat. The correction gripper 40 is moved and held against the inner ring of the focusing ring. The rotating mechanism 60 rotates and drives the correction gripper 40 to rotate, so that the focusing ring is accurately positioned.

[0067] The rotating platform 10 is also equipped with a transverse drive mechanism, which is used to drive the telescopic mechanism 30 to move perpendicular to the telescopic direction of the telescopic mechanism 30 and to fine-tune the position of the telescopic mechanism 30.

[0068] Through the cooperation of the rotating platform 10, angle detection sensor 20, telescopic mechanism 30, center positioning mechanism 50, correction gripper 40 and rotating mechanism 60, the correction gripper 40 can be accurately moved to the center of the electrostatic chuck and driven to rotate around the axis passing through the center, thereby achieving precise positioning of the focusing ring, improving the concentricity between the focusing ring and the electrostatic chuck, effectively solving problems such as poor wafer adsorption and uneven etching caused by concentricity issues, and improving product yield.

[0069] The components work together to adapt to different sizes and installation conditions of the focusing ring and electrostatic chuck combination, and the positioning parameters can be flexibly adjusted within a certain range, which improves the versatility and practicality of the device.

[0070] The above scheme provides a precise positional reference for the subsequent installation and fixing of the focusing ring on the mounting base, which helps to improve the accuracy and stability of the installation and reduce installation errors caused by positioning deviations.

[0071] The rotating platform 10 provides basic rotational motion, and its angle is calibrated by the angle detection sensor 20 to ensure the accuracy of the angle reference of the entire device.

[0072] The telescopic mechanism 30 extends radially along the circular rotation trajectory of the rotating platform 10, and can adjust the position of the connecting parts radially to accommodate electrostatic chucks and focusing rings of different sizes. It can also adjust the detection and operation distance during the center positioning process. The telescopic mechanism 30 can drive the center positioning mechanism 50 to move to the center of the electrostatic chuck.

[0073] Driven by the telescopic mechanism 30, the center positioning mechanism 50 determines the center position of the electrostatic chuck by detection and calculation, and then moves the calibration gripper 40 directly above the center.

[0074] Driven by the rotating mechanism 60, the correction gripper 40 rotates around an axis perpendicular to the electrostatic chuck and passing through the center of the circle, interacting with the inner wall of the focusing ring to achieve correction and precise positioning of the focusing ring.

[0075] In some embodiments, the rotating platform 10 includes:

[0076] Rotating base 101;

[0077] A rotary motor is connected to the rotary base 101;

[0078] The rotary table 102 is connected to the rotating shaft of the rotary motor, which drives the rotary table 102 to rotate. The telescopic mechanism 30 is connected to the side wall of the rotary table 102.

[0079] The rotary motor is connected to the rotary base 101 and drives the rotary table 102 to rotate, providing stable and precise rotational power. This allows the telescopic mechanism 30 connected to the side wall of the rotary table 102 and its subsequent components to rotate at a predetermined angle and speed, ensuring the accuracy and controllability of the rotational action during the positioning process.

[0080] This structure facilitates integration with control systems, allowing operators to easily start, stop, and adjust the operation of the rotary motor through the control system. This enables automated operation of the entire positioning device, improving work efficiency and reducing the impact of human factors on positioning accuracy.

[0081] After receiving a command from the control system, the rotary motor's rotating shaft begins to rotate, driving the connected rotary table 102 to rotate. The rotation angle and speed of the rotary table 102 are determined by the rotary motor's speed, direction of rotation, and control signals from the control system.

[0082] The rotation of the rotary table 102 drives the telescopic mechanism 30 and its connected components such as the center positioning mechanism 50 and the correction gripper 40 to rotate together. With the cooperation of the angle detection sensor 20, the angle of the rotary platform 10 is calibrated and the rotation action is performed in subsequent positioning operations.

[0083] For example, during initial positioning, the rotary table 102 rotates slowly according to a preset program, enabling the angle detection sensor 20 to scan the edge of the electrostatic chuck and determine the radial direction, laying the foundation for subsequent precise operations.

[0084] In some embodiments, the telescopic mechanism 30 includes:

[0085] Telescopic cylinder 301 is connected to rotating platform 10, and angle detection sensor 20 is connected to telescopic cylinder 301;

[0086] The mounting base is connected to the drive end of the telescopic cylinder 301.

[0087] The telescopic cylinder 301, as the power source of the telescopic mechanism 30, can achieve precise telescopic movement in the radial direction according to the instructions of the control system. This allows components such as the mounting base connected to the drive end of the telescopic cylinder 301, the center positioning mechanism 50 set on the mounting base, and the correction gripper 40 to be accurately positioned in the radial direction of the electrostatic chuck, adapting to the installation requirements of electrostatic chucks and focusing rings of different sizes, and improving the versatility and adaptability of the positioning device.

[0088] During the positioning process, the telescopic cylinder 301's telescopic movement is closely coordinated with the rotation of the rotating platform 10 and the operation of the center positioning mechanism 50. For example, when determining the radial direction of the electrostatic chuck, the telescopic cylinder 301 needs to be adjusted to a suitable position based on the rotation angle of the rotating platform 10 and the feedback from the angle detection sensor 20, so as to accurately detect the edge of the electrostatic chuck. During the center positioning and focusing ring calibration stages, the telescopic cylinder 301 can also precisely adjust the relative positions of the components with the electrostatic chuck and focusing ring as needed, ensuring the accuracy and effectiveness of the positioning operation.

[0089] When the control system issues a telescopic command, the piston inside the telescopic cylinder 301 begins to move under the action of air pressure or hydraulic pressure (depending on the cylinder type). If the command requires the component to move closer to the center of the electrostatic chuck, the piston retracts, driving the mounting base and its connected components to move towards the center; conversely, if the command requires outward movement, the piston extends, pushing the component outward.

[0090] The extension and retraction of the telescopic cylinder 301 is precisely controlled by the control system, which controls parameters such as the flow rate and pressure of the gas or liquid entering the cylinder. For example, during the determination of the radial direction, the angle detection sensor 20 detects the change in distance from the edge of the electrostatic chuck and feeds the signal back to the control system. The control system calculates the required extension and retraction of the telescopic cylinder 301 according to a preset algorithm, and then adjusts the gas or liquid supply to move the telescopic cylinder 301 to the appropriate position, so that the telescopic mechanism 30 coincides with the radial direction of the electrostatic chuck. In subsequent operations, the telescopic cylinder 301 continuously adjusts its position according to positioning requirements, cooperating with other components to complete tasks such as center positioning and focusing ring correction.

[0091] The angle detection sensor 20 includes a laser rangefinder sensor for detecting the shortest distance from the laser rangefinder sensor to the electrostatic chuck, and determining that the telescopic mechanism 30 is located in the radial direction of the electrostatic chuck.

[0092] The radial direction of the telescopic mechanism 30 is determined by using a laser rangefinder to detect the shortest distance from the edge of the electrostatic chuck. This method offers high accuracy and reliability. Laser ranging technology can precisely measure distances and accurately find the shortest distance point by continuously monitoring distance changes, thus providing an accurate directional reference for subsequent positioning operations and ensuring the accuracy of the entire positioning process.

[0093] During operation, the laser rangefinder sensor feeds back the real-time distance data to the control system. Based on this data, the control system dynamically adjusts the rotation angle of the rotating platform 10 and the position of the telescopic mechanism 30, ensuring that the positioning operation is always performed in the accurate direction. Even if slight positional shifts or environmental disturbances occur during equipment operation, they can be corrected promptly through real-time sensor feedback, improving the stability and adaptability of the positioning device.

[0094] A laser rangefinder emits a laser beam, which strikes the edge of the electrostatic chuck and reflects back. The sensor calculates the distance to the edge based on the time difference between laser emission and reflection. As the rotating platform 10 drives the telescopic mechanism 30 to rotate, the laser rangefinder continuously measures its distance to different positions on the edge of the electrostatic chuck. Since the electrostatic chuck is circular, the distance from the center to the edge is shortest in the radial direction. Therefore, when the sensor detects the shortest distance, the direction in which the telescopic mechanism 30 is located is the radial direction of the electrostatic chuck.

[0095] The sensor transmits the measured distance data to the control system in real time, which then analyzes and processes this data. If the distance data does not meet expectations—for example, the distance does not gradually decrease to the shortest value or fluctuates significantly around the shortest value—the control system determines that there may be an angular deviation of the rotating platform 10 or other problems. Then, the control system adjusts the rotation angle of the rotating platform 10 according to a preset algorithm, allowing the telescopic mechanism 30 to continue rotating. Simultaneously, the laser rangefinder continues to monitor the distance until a stable shortest distance is found, thus determining the accurate radial direction. This real-time feedback and dynamic adjustment mechanism ensures the accuracy and reliability of the positioning operation.

[0096] The calibration gripper 40 includes:

[0097] Correct the motor;

[0098] The calibration housing 401 has two parallel through holes, and the calibration motor is installed inside the calibration housing 401.

[0099] The bidirectional moving toothed plates 402 are respectively installed in the through holes and can slide in the through holes. The opposite side of the bidirectional moving toothed plates 402 is provided with teeth. The drive end of the correction motor is provided with a gear. The gear meshes with the bidirectional moving toothed plates 402 at the same time so that when the two bidirectional moving toothed plates 402 are driven, the two bidirectional moving toothed plates 402 retract or extend.

[0100] The stop rod is rotatably connected to the end of the bidirectional moving toothed plate 402 and is used to contact the inner ring wall of the focusing ring;

[0101] The center of the calibrated motor is aligned with the center of the electrostatic chuck.

[0102] The correction motor, through the meshing of gears and the bidirectional moving gear plate 402, can convert the rotational motion of the motor into the precise linear motion of the bidirectional moving gear plate 402. The bidirectional moving gear plate 402 drives the end-connected stop rod to apply accurate force to the inner wall of the focusing ring in the circumferential direction, realizing fine position correction of the focusing ring in the circumferential direction, ensuring that the focusing ring is concentric with the electrostatic chuck, and effectively improving the positioning accuracy of the focusing ring.

[0103] The meshing structure between the gear and the bidirectional moving toothed plate 402 ensures uniform transmission and stable output of the correction force. Driven by the motor, the movement of the bidirectional moving toothed plate 402 is smooth and precisely controllable, allowing the magnitude and direction of the force applied by the stop rod to the focusing ring to be adjusted as needed. This avoids the focusing ring from shifting or being damaged due to unstable correction force, thus improving the reliability and stability of the correction process.

[0104] Compact and efficient structural design: The calibration housing 401 integrates components such as the calibration motor and the bidirectional moving toothed plate 402, forming a compact structural unit. This compact design reduces the overall space occupied by the device while improving the response speed and efficiency of the calibration action. When the calibration gripper 40 is working, the synergy between the components is faster and more effective, which is conducive to achieving precise focusing ring positioning operation in a limited space.

[0105] When the position of the focusing ring needs to be corrected, the control system sends a command to the correction motor, which then starts to rotate. The gear at the drive end of the correction motor rotates along with the motor. Since the gear meshes with the teeth on the bidirectional moving gear plate 402, the rotational motion of the gear is converted into the linear motion of the bidirectional moving gear plate 402.

[0106] When the calibration motor rotates, the bidirectional moving toothed plate 402 extends outward, and the stop rod moves outward to hold the focusing ring. During the calibration process, the bidirectional moving toothed plate 402 slides stably within the through hole, ensuring the smooth transmission of the calibration force. Furthermore, since the centers of the calibration motor and the electrostatic chuck are aligned, the calibration force can be applied evenly to the circumference of the focusing ring, achieving precise calibration.

[0107] The stop lever is made of rubber. The rubber material's flexibility and elasticity effectively prevent scratches, wear, or other mechanical damage when it comes into contact with the inner wall of the focusing ring. During the focusing ring alignment process, relative movement and forces occur between the stop lever and the focusing ring; the rubber material cushions these forces, protecting the surface quality of the focusing ring and extending its lifespan.

[0108] The rotating mechanism 60 includes:

[0109] The rotary connecting seat 601 is connected to the center positioning mechanism 50, and the rotary connecting seat 601 is hollow inside;

[0110] A rotating motor is installed inside the rotating connecting seat 601, and the drive end of the rotating motor is connected to the correction gripper 40.

[0111] The drive end of the rotating motor is collinear with the axis of the electrostatic chuck.

[0112] A rotary motor is housed within the rotary connecting seat 601, and its drive end is directly connected to the calibration gripper 40. This allows for precise control of the calibration gripper 40's rotation around an axis perpendicular to the electrostatic chuck and passing through its center. This precise rotational control is crucial for calibrating the position of the focusing ring in the circumferential direction. By precisely adjusting the rotation angle of the calibration gripper 40, fine-tuning of the focusing ring's position can be achieved, ensuring that the focusing ring is concentric with the electrostatic chuck and improving the positioning accuracy of the focusing ring.

[0113] The drive end of the rotating motor is collinear with the axis of the electrostatic chuck. This design ensures that the calibration gripper 40 will not experience any additional offset or tilting during rotation. The calibration gripper 40 always rotates stably around the center of the electrostatic chuck, ensuring that the force applied by the calibration gripper 40 to the focusing ring in the circumferential direction is uniform and accurate. This avoids the eccentric movement or wobbling of the calibration gripper 40 during rotation that might occur due to misalignment of the rotation axes, further improving the accuracy and stability of the focusing ring positioning.

[0114] Because the drive end of the rotary motor is collinear with the axis of the electrostatic chuck, the alignment gripper 40 maintains its rotation center around the center of the electrostatic chuck throughout the entire rotation process. This is because the drive shaft of the rotary motor and the axis of the electrostatic chuck are geometrically collinear. When the rotary motor rotates, the alignment gripper 40 rotates along this common axis, ensuring that the rotational motion of the alignment gripper 40 is consistent with the geometric center of the electrostatic chuck. During the positioning process, the control system continuously monitors and adjusts the operating parameters of the rotary motor, detects the actual rotational position of the alignment gripper 40 through sensors, compares it with the preset target position, and adjusts the rotation of the rotary motor in a timely manner according to the deviation, so that the alignment gripper 40 always stays on the correct rotational path, achieving precise positioning of the focusing ring.

[0115] The center positioning mechanism 50 includes:

[0116] First direction track 501;

[0117] The first direction moving device 502 is connected to the first direction track 501 and is used to move on the first direction track 501.

[0118] The first direction ring edge detection sensor 503 is connected to the first direction moving device 502;

[0119] The second direction track 504 is connected to another first direction moving device 502 and is used to move the second direction track 504 to face the center of the electrostatic chuck after the first direction ring edge detection sensor 503 detects the edge of the electrostatic chuck.

[0120] The second direction moving device 505 is connected to the second direction track 504 and is used to move on the second direction track 504.

[0121] The second direction ring edge detection sensor 506 is connected to the second direction moving device 505.

[0122] Through the coordinated operation of the first direction track 501, the first direction moving device 502, the first direction ring edge detection sensor 503, the second direction track 504, the second direction moving device 505, and the second direction ring edge detection sensor 506, the edge of the electrostatic chuck can be accurately detected from two mutually perpendicular directions. The center position of the electrostatic chuck is calculated using geometric principles, providing precise coordinates for the subsequent accurate movement of the calibration gripper 40 above the center, greatly improving the accuracy of the focusing ring positioning and ensuring that the focusing ring can be installed concentrically with the electrostatic chuck.

[0123] This multi-component collaborative centering method increases the reliability of positioning. Even under conditions of equipment vibration, environmental interference, or slight changes in the size of the electrostatic chuck, the center position can still be stably determined by integrating information from multiple detection points. Simultaneously, this structural design can adapt to electrostatic chucks of different sizes and shapes (within a certain range), improving the versatility and adaptability of the positioning device, making it suitable for various semiconductor manufacturing equipment.

[0124] Two first-direction ring edge detection sensors 503 on the first-direction track 501 are located at opposite ends. When the first-direction moving device 502 moves on the first-direction track 501, it drives the detection sensors to move synchronously. When one of the first-direction ring edge detection sensors 503 detects the edge of the electrostatic chuck, the sensor sends a signal to the control system, and the control system records the position information of the first-direction moving device 502 at this time. Then, the other first-direction ring edge detection sensor 503 continues to move until it also detects the edge of the electrostatic chuck, and the control system records the position information again. By comparing the moving distance or time of the first-direction moving device 502 when the two sensors detect the edge, the diameter position of the electrostatic chuck in the first direction can be determined (for example, if the time difference or moving distance difference between the two sensors detecting the edge conforms to a specific geometric relationship, such as being equal or proportional, then the line connecting the positions of the two sensors at this time can be determined as the diameter direction of the first direction).

[0125] After determining the diameter in the first direction, the first-direction moving device 502, connected to the second-direction track 504, moves the second-direction track 504 to a position directly opposite the center of the electrostatic chuck (precisely moved via motor drive or lead screw transmission, etc.). Next, the second-direction moving device 505 moves along the second-direction track 504, while the second-direction ring edge detection sensor 506 begins detecting the edge of the electrostatic chuck. When the second-direction ring edge detection sensor 506 detects the edge of the electrostatic chuck, the control system records this position information. At this point, using the position information of these three detection points (two first-direction detection points and one second-direction detection point), and applying geometric principles (such as the side length relationship of triangles or the principle of similar triangles), the control system can accurately calculate the center position of the electrostatic chuck. Throughout the process, the movement and detection actions of each component coordinate with each other, systematically completing the center positioning operation, laying the foundation for the accurate operation of the subsequent calibration gripper 40.

[0126] The first direction ring edge detection sensor 503 includes two sensors, which are respectively disposed at opposite ends of the first direction track 501, and the other first direction moving device 502 is disposed between the two first direction ring edge detection sensors 503.

[0127] By placing two first-direction ring edge detection sensors 503 at opposite ends of the first-direction track 501, the edges of the electrostatic chuck can be detected over a wider range, increasing the detection coverage area. This allows for the acquisition of more edge information when determining the diameter position of the electrostatic chuck in the first direction, reducing misjudgments caused by local edge irregularities or detection errors, thereby improving the accuracy of edge detection in the first direction and providing a more reliable data foundation for subsequent precise calculation of the center position.

[0128] Both the second direction ring edge detection sensor 506 and the first direction ring edge detection sensor 503 are laser rangefinders. The second direction ring edge detection sensor 506 is a single sensor used in conjunction with the two first direction ring edge detection sensors 503 to form three detection points on the edge of the electrostatic chuck. By employing laser rangefinders as the first and second direction ring edge detection sensors 503 and utilizing the layout of three detection points (two first direction detection points and one second direction detection point), the high precision of laser ranging is fully utilized. Laser ranging can accurately measure the distance from the sensor to the edge of the electrostatic chuck. Using the distance data from the three detection points, a more accurate geometric model can be constructed to calculate the center position. Compared to other detection methods, this significantly reduces the center positioning deviation caused by measurement errors, further improving the positioning accuracy of the entire positioning device and ensuring that the focusing ring is precisely concentric with the electrostatic chuck.

[0129] It is understood that in the description of this application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0130] It is understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0131] It is understood that, in this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0132] It is understood that, in this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0133] Understandably, when a component is described as "fixed to" or "set on" another component, it can be directly on the other component or there may be an intervening component. When a component is described as "connected to" another component, it can be directly connected to the other component or there may be an intervening component.

[0134] It is understandable that the term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this article indicates that the preceding and following related objects have an "or" relationship.

[0135] It is understood that the above description provides multiple embodiment solutions, and the optional methods described in each embodiment solution can be combined and cross-referenced with each other without conflict, thereby extending to a variety of possible embodiment solutions, all of which can be considered as the embodiment solutions disclosed in this disclosure.

[0136] While the embodiments disclosed herein are as described above, this disclosure is not limited thereto. Any person skilled in the art can make various alterations and modifications without departing from the spirit and scope of this disclosure; therefore, the scope of protection of this disclosure should be determined by the scope defined in the claims.

Claims

1. A focusing ring positioning device, characterized in that, include: Rotating platform; An angle detection sensor is used to calibrate the angle of the rotating platform; A telescopic mechanism is connected to the rotating platform and extends radially along the circular rotation trajectory of the rotating platform; A center positioning mechanism is connected to the telescopic mechanism; A calibration gripper is connected to the circular positioning mechanism, which is used to move the calibration gripper directly above the center of the electrostatic chuck. A rotating mechanism, connected to the calibration gripper drive, is used to drive the calibration gripper to rotate. The axis of rotation of the calibration gripper is perpendicular to the electrostatic chuck and passes through the center of the electrostatic chuck.

2. The positioning device according to claim 1, characterized in that, The rotating platform includes: Rotating base; A rotary motor is connected to the rotating base; A rotary table is connected to the rotating shaft of the rotary motor, which drives the rotary table to rotate. The telescopic mechanism is connected to the side wall of the rotary table.

3. The positioning device according to claim 1, characterized in that, The telescopic mechanism includes: A telescopic cylinder is connected to the rotating platform, and the angle detection sensor is connected to the telescopic cylinder; The mounting base is connected to the drive end of the telescopic cylinder.

4. The positioning device according to claim 1, characterized in that, The angle detection sensor includes a laser rangefinder sensor, used to detect the shortest distance from the laser rangefinder sensor to the electrostatic chuck, and determine that the telescopic mechanism is located in the radial direction of the electrostatic chuck.

5. The positioning device according to claim 1, characterized in that, The calibration gripper includes: Correct the motor; The calibration housing has two parallel through holes, and the calibration motor is disposed inside the calibration housing; Bidirectional movable toothed plates are respectively inserted into the through holes and can slide in the through holes. The opposite sides of the bidirectional movable toothed plates are provided with teeth. The drive end of the correction motor is provided with a gear. The gear meshes with the bidirectional movable toothed plates so that when the two bidirectional movable toothed plates are driven, the two bidirectional movable toothed plates retract or extend. The stop rod is rotatably connected to the end of the bidirectional moving toothed plate and is used to contact the inner wall surface of the focusing ring; The center of the correction motor is aligned with the center of the electrostatic chuck.

6. The positioning device according to claim 5, characterized in that, The stop bar is made of a material including rubber.

7. The positioning device according to claim 1, characterized in that, The rotating mechanism includes: A rotary connecting seat is connected to the central positioning mechanism, and the rotary connecting seat is hollow inside. A rotating motor is disposed within the rotating connecting seat, and the drive end of the rotating motor is connected to the correction gripper; The drive end of the rotating motor is collinear with the axis of the electrostatic chuck.

8. The positioning device according to claim 1, characterized in that, The center positioning mechanism includes: First direction track; A first-direction moving device is connected to a first-direction track and is used to move on the first-direction track; A first-direction ring edge detection sensor is connected to the first-direction moving device; The second directional track is connected to another first directional moving device and is used to move the second directional track to face the center of the electrostatic chuck after the first directional ring edge detection sensor detects the edge of the electrostatic chuck. A second directional moving device is connected to a second directional track and is used to move on the second directional track; The second direction ring edge detection sensor is connected to the second direction moving device.

9. The positioning device according to claim 8, characterized in that, The first direction ring edge detection sensor includes two sensors, which are respectively disposed at opposite ends of the first direction track, and the other first direction moving device is disposed between the two first direction ring edge detection sensors.

10. The positioning device according to claim 9, characterized in that, Both the second direction ring edge detection sensor and the first direction ring edge detection sensor are laser rangefinders. The second direction ring edge detection sensor includes one sensor, which is used to cooperate with the two first direction ring edge detection sensors to form three detection points on the edge of the electrostatic chuck.

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