Monocrystalline silicon wafer graphite boat transfer device
By setting up a detection unit and a connecting part in the single-crystal silicon wafer graphite boat transfer device, the problem of inaccurate graphite boat positioning in the prior art is solved, and the precise positioning and acquisition of the graphite boat is achieved, avoiding falling and improving the safety and efficiency of the transfer process.
Patent Information
- Application Number
- CN202422480309.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-14
- Publication Date
- 2026-01-09
- Estimated Expiration
- 2034-10-14
AI Technical Summary
Existing transfer devices often fail to accurately position the coated silicon wafers when transferring them from the graphite boat to the wafer transport line, causing the graphite boat to easily fall off during the transfer process.
A single-crystal silicon wafer graphite boat transfer device is designed. By setting a detection unit on the limiting part of the mounting base and combining it with the connecting part on the graphite boat, precise positioning and acquisition can be achieved. The position can be adjusted by translation, rotation and lifting mechanisms to ensure the accuracy of acquisition.
It achieves precise positioning and capture of the graphite boat, preventing it from falling during the transfer process, and is convenient and quick to use.
Smart Images
Figure CN223786459U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of transfer equipment technology, and in particular to a single-crystal silicon wafer graphite boat transfer device. Background Technology
[0002] A graphite boat is a support tool used in a plasma-enhanced chemical vapor deposition (PECVD) tube furnace to deposit thin films on the surface of polycrystalline or monocrystalline silicon wafers after texturing and diffusion processes. In the solar photovoltaic field, graphite boats are used in the production process of solar cells. Existing transfer devices transfer the coated silicon wafers from the graphite boat to the graphite boat on the wafer transport line. However, the transfer device's positioning and pickup of the graphite boat are inaccurate, easily leading to mispositioning and causing the graphite boat to fall during the transfer process. Utility Model Content
[0003] The technical problem to be solved by this utility model is: in order to overcome the problem that in the prior art, the transfer device in the transfer device is not accurate in positioning and picking up the graphite boat, which easily leads to inaccurate picking up position and causes the graphite boat to fall off during the transfer process, so as to provide a new technology.
[0004] The technical solution adopted by this utility model to solve its technical problem is: a single-crystal silicon wafer graphite boat transfer device. The graphite boat has a connecting part protruding on its side, including a translation mechanism, a rotation mechanism, a connecting seat, a lifting mechanism, and a mounting seat. The translation mechanism provides power for the translation of the graphite boat. The translation end of the translation mechanism is connected to the rotation mechanism. The rotation end of the rotation mechanism is fixedly connected to the connecting seat. The connecting seat is fixedly connected to the lifting mechanism. The lifting end of the lifting mechanism is connected to the mounting seat. The lifting mechanism provides power for the lifting movement of the graphite boat. A capture mechanism is arranged on the mounting seat. The capture mechanism is used to capture the graphite boat. The bottom surface of the mounting seat has two downward protrusions forming limit parts. A detection unit is arranged on the inner side of the limit part. The detection unit is used to detect whether the capture mechanism is in position. By setting the detection unit on the limit part of the mounting seat, the capture position of the graphite boat can be accurately positioned. The connection part on the graphite boat is used to complete the positioning and capture. It is quick and convenient to use.
[0005] The further includes an intake mechanism comprising a rotating shaft, a transmission rod, a drive component, and a support rod. The drive component is fixedly connected to the mounting base, the drive component is located above the mounting base, the rotating shaft passes through the mounting base, the support rod is fixedly connected to the rotating shaft, the support rod is located below the mounting base, the output end of the drive component is connected to the beginning of the transmission rod, the end of the transmission rod is fixedly connected to the rotating shaft, and the support rod is used to support the bottom surface of the graphite boat connection.
[0006] The detection unit further includes a receiving groove, a fixed contact, a moving contact, a contact block, and a reset element. The receiving groove is opened on the limiting part, the fixed contact is fixedly connected to the side wall of the limiting part, the contact block is slidably connected to the receiving groove, the moving contact is arranged on the side of the contact block near the fixed contact, and one end of the reset element abuts against the receiving groove and the other end abuts against the contact block.
[0007] It further includes a spring as the reset element.
[0008] It further includes an arc-shaped guide surface on the side of the contact block near the center of the mounting base.
[0009] Further, it includes a guide post arranged on the mounting base, the guide post passing through the connecting base, and the guide post and the connecting base being slidably connected.
[0010] The beneficial effects of this utility model are: the single crystal silicon wafer graphite boat transfer device provided by this utility model can achieve precise positioning of the graphite boat by setting a detection unit on the limiting part of the mounting base, and complete the positioning and acquisition by utilizing the connecting part on the graphite boat, which is quick and convenient to use. Attached Figure Description
[0011] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0012] Figure 1 This is a front view structural diagram of the present invention;
[0013] Figure 2 This is a utility model Figure 1 Enlarged structural diagram at point A;
[0014] Figure 3 This is a side view of the structure of this utility model;
[0015] Figure 4 This is a top view of the structure of this utility model;
[0016] Figure 5 This is a schematic diagram of the structure of the graphite boat of this utility model.
[0017] In the diagram: 1. Translation mechanism, 2. Rotation mechanism, 3. Connecting seat, 4. Lifting mechanism, 5. Mounting seat, 51. Limiting part, 52. Guide column, 6. Picking mechanism, 61. Rotating shaft, 62. Transmission rod, 63. Driving component, 64. Support rod, 7. Detection unit, 71. Receiving groove, 72. Fixed contact, 73. Moving contact, 74. Contact block, 741. Guide surface, 75. Reset element. Detailed Implementation
[0018] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.
[0019] like Figure 1 This is a schematic diagram of the structure of this utility model, a graphite boat transfer device for single-crystal silicon wafers. The graphite boat has a protruding connecting part on its side. It includes a translation mechanism 1, a rotation mechanism 2, a connecting seat 3, a lifting mechanism 4, and a mounting seat 5. The translation mechanism 1 provides power for the translation of the graphite boat. The translation end of the translation mechanism 1 is connected to the rotation mechanism 2 via a transmission connection. The translation mechanism 1 is a slide rail slider mechanism, which is a linear transmission device mainly composed of a guide rail, a slider, and a retainer. The guide rail is a linear component used to guide and support the movement of the slider; the slider is a component that slides freely and moves smoothly; and the retainer serves as a fixing device, fixing the guide rail to the machine or equipment.
[0020] The rotating end of the rotating mechanism 2 is fixedly connected to the connecting seat 3, and the connecting seat 3 is fixedly connected to the lifting mechanism 4. The rotating mechanism 2 is a rotating table. A rotating table is an auxiliary instrument installed on a specific device. It usually consists of three, four or five rotating axes. By rotating each rotating axis, the tilting and rotation of an object or sample in space can be achieved to meet the needs of different fields.
[0021] The lifting end of the lifting mechanism 4 is connected to the mounting base 5 via a transmission. The lifting mechanism 4 is used to provide power for the lifting and lowering movement of the graphite boat. The lifting mechanism 4 is a power element such as a cylinder or hydraulic cylinder. The mounting base 5 is equipped with a capture mechanism 6, which is used to capture the graphite boat. The bottom surface of the mounting base 5 has two downward protrusions at both ends to form a limiting part 51. A detection unit 7 is arranged on the inner side of the limiting part 51, which is used to detect whether the capture mechanism 6 is in position.
[0022] like Figure 2 , Figure 3 , Figure 4 As shown, the intake mechanism 6 includes a rotating shaft 61, a transmission rod 62, a driving component 63, and a support rod 64. The driving component 63 is fixedly connected to the mounting base 5. The driving component 63 is a power element such as a cylinder or hydraulic cylinder. The driving component 63 is located above the mounting base 5. The rotating shaft 61 passes through the mounting base 5. The support rod 64 is fixedly connected to the rotating shaft 61 and is located below the mounting base 5. The output end of the driving component 63 is connected to the first end of the transmission rod 62. The tail end of the transmission rod 62 is fixedly connected to the rotating shaft. The support rod 64 is used to support the bottom surface of the graphite boat connection part.
[0023] like Figure 2 , Figure 3 , Figure 4As shown, the detection unit 7 includes a receiving groove 71, a fixed contact 72, a moving contact 73, a contact block 74, and a reset element 75. The receiving groove 71 is formed on the limiting part 51. The fixed contact 72 is fixedly connected to the side wall of the limiting part 51. The moving contact 73 and the fixed contact 72 are two common contact types in the fields of electrical engineering and automation control. They play an important role in circuit control and equipment operation. The contact block 74 is slidably connected to the receiving groove 71. The moving contact 73 is arranged on the side of the contact block 74 near the fixed contact 72. One end of the reset element 75 abuts against the receiving groove 71, and the other end abuts against the contact block 74. By setting the detection unit 7 on the limiting part 51 of the mounting base 5, the precise positioning of the graphite boat can be achieved. The positioning and acquisition are completed by using the connecting part on the graphite boat. It is quick and convenient to use. The reset element 75 is a spring.
[0024] The contact block 74 has an arc-shaped guide surface 741 on the side near the center of the mounting base 5, which facilitates the retraction of the contact block 74 into the receiving groove 71, so that the moving contact 73 and the fixed contact 72 make contact to transmit signals, thereby activating the acquisition unit 6.
[0025] The mounting base 5 is provided with a guide post 52, which passes through the connecting base 3. The guide post 52 and the connecting base 3 are slidably connected to each other, which increases the stability of the mounting base 5.
[0026] When in use, the mounting base 5 moves above the graphite boat, the lifting mechanism 4 is activated, causing the mounting base 5 to descend. When the contact block 74 contacts the connecting part of the graphite boat, the contact block retracts into the receiving groove 71, causing the moving contact 73 and the fixed contact 72 to contact and transmit a signal, causing the acquisition unit 6 to start. The driving member 63 causes the support rod 64 to rotate below the connecting part, the lifting mechanism 4 is activated again, causing the mounting base 5 to rise, and the support rod 64 supports the connecting part and drives the graphite boat to move as a whole.
[0027] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A graphite boat transfer device for single-crystal silicon wafers, wherein a connecting portion protrudes from the side of the graphite boat, characterized in that, The system includes a translation mechanism (1), a rotation mechanism (2), a connecting seat (3), a lifting mechanism (4), and a mounting seat (5). The translation mechanism (1) provides power for the translation of the graphite boat. The translation end of the translation mechanism (1) is connected to the rotation mechanism (2) via transmission. The rotation end of the rotation mechanism (2) is fixedly connected to the connecting seat (3). The connecting seat (3) is fixedly connected to the lifting mechanism (4). The lifting end of the lifting mechanism (4) is connected to the mounting seat (5) via transmission. The lifting mechanism (4) provides power for the lifting and lowering movement of the graphite boat. The mounting seat (5) is equipped with a capture mechanism (6) for capturing the graphite boat. The bottom surface of the mounting seat (5) has two downward protrusions forming a limiting part (51). A detection unit (7) is arranged on the inner side of the limiting part (51) for detecting whether the capture mechanism (6) is in place.
2. The graphite boat transfer device for single-crystal silicon wafers as described in claim 1, characterized in that: The intake mechanism (6) includes a rotating shaft (61), a transmission rod (62), a driving component (63), and a support rod (64). The driving component (63) is fixedly connected to the mounting base (5). The driving component (63) is located above the mounting base (5). The rotating shaft (61) passes through the mounting base (5). The support rod (64) is fixedly connected to the rotating shaft (61). The support rod (64) is located below the mounting base (5). The output end of the driving component (63) is connected to the head end of the transmission rod (62). The tail end of the transmission rod (62) is fixedly connected to the rotating shaft. The support rod (64) is used to support the bottom surface of the graphite boat connection part.
3. The graphite boat transfer device for single-crystal silicon wafers as described in claim 1, characterized in that: The detection unit (7) includes a receiving groove (71), a fixed contact (72), a moving contact (73), a contact block (74), and a reset element (75). The receiving groove (71) is opened on the limiting part (51). The fixed contact (72) is fixedly connected to the side wall of the limiting part (51). The contact block (74) is slidably connected to the receiving groove (71). The moving contact (73) is arranged on the side of the contact block (74) near the fixed contact (72). One end of the reset element (75) abuts against the receiving groove (71), and the other end abuts against the contact block (74).
4. The graphite boat transfer device for single-crystal silicon wafers as described in claim 3, characterized in that: The reset element (75) is a spring.
5. The graphite boat transfer device for single-crystal silicon wafers as described in claim 3, characterized in that: The contact block (74) has an arc-shaped guide surface (741) on the side near the center of the mounting base (5).
6. The graphite boat transfer device for single-crystal silicon wafers as described in claim 1, characterized in that: A guide post (52) is arranged on the mounting base (5), the guide post (52) passes through the connecting base (3), and the guide post (52) and the connecting base (3) are slidably connected.