Linear grabbing and transplanting mechanism for graphite boat

Abstract

The linear grabbing and transplanting mechanism comprises a sealing plate and a profile frame which are fixedly connected, the outer surface wall of the profile frame is connected with a housing in a sliding mode, and the outer surface wall of the housing is fixedly connected with a lower plate through a connecting frame. A longitudinal moving assembly used for grabbing the transplanting mechanism to move longitudinally and a lifting assembly used for vertically moving the housing are integrated on the top of the sealing plate. According to the graphite boat cover plate, the two sets of side edge cylinder bodies are in linkage with the corresponding grippers, the two sets of side edge cylinder bodies are combined to the two opposite sides of the two sets of connecting parts at the top of the graphite boat cover plate correspondingly, then the two sets of middle cylinder bodies drive the corresponding grippers, and the two sets of grippers are combined to the two adjacent sides of the two sets of connecting parts; and the guide wheels, the guide blocks, the centering limiting plates and the boat cushion blocks on the multiple sets of grippers are all arranged in a manner of being attached to the outer contour of the connecting part, so that stable grabbing and transplanting of the graphite boat are realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to graphite boat processing technical field especially relates to a graphite boat's one word type snatchs and transplants mechanism. BACKGROUND

[0002] Graphite boat usually refers to in the field such as semiconductor manufacturing, photovoltaic industry is used to load silicon wafer or other material and carries out heat treatment one kind of container. This container is made of high purity graphite, has good high temperature resistance and chemical stability.

[0003] Since graphite boat has greater volume, so the snatch and transplant mechanism is used in the transfer between each step, and the existing snatch and transplant mechanism includes X axis translation assembly, Y axis movement component, Z axis movement component and clamping snatch component.

[0004] The clamping snatch component in the above existing snatch and transplant mechanism is mostly the conventional jaw, and the connecting part structure of graphite boat cover plate is relatively irregular, so that the stability of graphite boat clamping snatch can be further optimized, and therefore the corresponding graphite boat's one word type snatch and transplant mechanism is urgently needed to solve the above problems. UTILITY MODEL CONTENT

[0005] The utility model relates to graphite boat's one word type snatch and transplant mechanism.

[0006] In order to achieve the above object, the utility model adopts the following technical scheme:

[0007] A graphite boat's one word type snatch and transplant mechanism, including fixedly connected sealing plate and section frame, the section frame outer wall is connected with the shell of sliding, the shell outer wall is fixedly connected with the lower plate through the connecting frame, the sealing plate top is integrated with the longitudinal movement of snatch and transplant mechanism for longitudinal movement component and shell vertical movement's lifting assembly, the lower plate top is fixedly connected with two groups of side edge cylinder and middle part cylinder, two groups of side edge cylinder and middle part cylinder output end are all fixedly connected with the grab hand.

[0008] Preferably, the side edge cylinder output end is fixedly connected with the grab hand through mounting plate one, and the middle part cylinder output end is fixedly connected with the grab hand through mounting plate two, and the mounting plate one and mounting plate two are slidably connected with the lower plate top.

[0009] Preferably, the mounting plate one and mounting plate two bottom are all fixedly connected with the slide sleeve, and two groups of slide sleeves are slidably connected with the lower plate top through two groups of tracks.

[0010] Preferably, the inner and outer walls of the grab hand are fixedly connected with the guide block, the centering limit plate and the boat pad respectively, and the inner wall of the grab hand is hinged with the guide wheel.

[0011] Preferably, the longitudinal movement assembly comprises a longitudinal movement motor fixedly connected to the top of the sealing plate, a driving gear fixedly connected to the output end of the longitudinal movement motor, and a separate sliding block fixedly connected to the bottom of the sealing plate.

[0012] Preferably, the lifting assembly comprises a lifting motor fixedly connected to the top of the sealing plate, a lifting wheel fixedly connected to the output end of the lifting motor, and a chain integrated between the lifting wheel and the cover shell.

[0013] In summary, due to the adoption of the above technical solutions, the present application has the following beneficial effects:

[0014] 1. In the present application, the longitudinal movement motor drives the driving gear to rotate, the driving gear is engaged with the external rack, the separate sliding block is engaged with the external sliding rail, the z-axis movement of the whole grabbing transplanting mechanism is realized, the lifting motor vertically pulls the cover shell through the lifting wheel and the chain, the cover shell is connected to the lower plate through the connecting frame, the y-axis movement of the lower plate is realized, the two groups of side cylinder bodies drive the corresponding grippers, the two groups of middle cylinder bodies also drive the corresponding grippers, the two groups of grippers are combined on the adjacent sides of the two groups of connecting parts, the guide wheels, guide blocks and centering limit plates on the multiple grippers are attached to the external contours of the connecting parts, and the stable grabbing and transplanting of the graphite boat is realized.

[0015] 2. In the present application, the side cylinder bodies are fixed to the corresponding grippers through the mounting plate one, the middle cylinder bodies are fixed to the corresponding grippers through the mounting plate two, the bottom of the mounting plate one and the bottom of the mounting plate two are respectively engaged with the top of the lower plate through the two groups of rails, the stability of the movement of the multiple grippers is ensured, and the stability of the use of the graphite boat is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 An overall structure schematic diagram is shown according to the embodiment of the present application;

[0017] Figure 2 A limit plate structure schematic diagram is shown according to the embodiment of the present application;

[0018] Figure 3 A combination block structure schematic diagram is shown according to the embodiment of the present application;

[0019] Figure 4 A spring structure schematic diagram is shown according to the embodiment of the present application;

[0020] Figure 5 A centering limit block structure schematic diagram is shown according to the embodiment of the present application.

[0021] LEGEND:

[0022] 1, sealing plate; 2, lifting motor; 3, lifting wheel; 4, longitudinal moving motor; 5, driving gear; 6, single slider; 7, profile frame; 8, cover; 9, connecting frame; 10, lower plate; 11, side cylinder; 12, gripper; 13, mounting plate one; 14, middle cylinder; 15, mounting plate two; 16, guide block; 17, guide wheel; 18, centering limiting plate; 19, boat pad. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0024] Please refer to Figures 1-5 The utility model provides a technical scheme:

[0025] The graphite boat one-word type grabbing and transplanting mechanism, including fixed connection's sealing plate 1 and profile frame 7, the outer wall of profile frame 7 is slidably connected with cover 8, the outer wall of cover 8 is fixedly connected with lower plate 10 through connecting frame 9, the top of sealing plate 1 is integrated with longitudinal moving assembly for grabbing and transplanting mechanism longitudinal movement and lifting assembly for cover 8 vertical movement, the top of lower plate 10 is fixedly connected with two groups of side cylinder 11 and middle cylinder 14, and the output end of two groups of side cylinder 11 and middle cylinder 14 is fixedly connected with gripper 12;

[0026] Longitudinal moving motor 4 drives driving gear 5 to rotate, driving gear 5 is engaged with external rack, and single slider 6 is slidably connected with external slide rail, so as to realize the z-axis movement of grabbing and transplanting mechanism as a whole, lifting motor 2 vertically pulls cover 8 through lifting wheel 3 and chain, cover 8 links lower plate 10 through connecting frame 9, so as to realize the y-axis movement of lower plate 10, two groups of side cylinder 11 link corresponding gripper 12, the two groups of gripper 12 are combined on the opposite sides of the two groups of connecting parts on the top of graphite boat cover plate, then two groups of middle cylinder 14 also drive corresponding gripper 12, and the two groups of gripper 12 are combined on the adjacent sides of the two groups of connecting parts, and the guide wheel 17, guide block 16, centering limiting plate 18 and boat pad 19 on multiple grippers 12 are all attached to the external contour of connecting part, so as to realize the stable grabbing and transplanting of graphite boat.

[0027] Specifically, as Figure 2 and Figure 4As shown, the side cylinder 11 output end is fixedly connected with the gripper 12 through the mounting plate one 13, the middle cylinder 14 output end is fixedly connected with the gripper 12 through the mounting plate two 15, the mounting plate one 13 and the mounting plate two 15 are slidably connected with the top of the lower plate 10, the bottom of the mounting plate one 13 and the mounting plate two 15 are fixedly connected with the sliding sleeve, the two groups of sliding sleeves are slidably connected with the top of the lower plate 10 through the two groups of tracks, the side cylinder 11 is fixed with the corresponding gripper 12 through the mounting plate one 13, and the middle cylinder 14 is fixed with the corresponding gripper 12 through the mounting plate two 15, the bottom of the mounting plate one 13 and the mounting plate two 15 are slidably connected with the top of the lower plate 10 through the two groups of tracks, so as to ensure the stability of the movement of the plurality of grippers 12, thereby ensuring the stability of the use of the graphite boat one-dimensional grabbing transplanting mechanism.

[0028] Specifically, as Figure 2 With Figure 3 As shown, the inner and outer walls of the gripper 12 are fixedly connected with the guide block 16, the centering limiting plate 18 and the boat pad 19, the inner wall of the gripper 12 is hingedly connected with the guide wheel 17, the guide wheels 17, the guide blocks 16, the centering limiting plates 18 and the boat pads 19 on the plurality of grippers 12 are arranged in the outer contour of the connection part, so as to ensure the stability of the gripper 12 combined with the outer wall of the graphite boat, the longitudinal moving assembly includes the longitudinal moving motor 4 fixedly connected with the top of the sealing plate 1, the output end of the longitudinal moving motor 4 is fixedly connected with the drive gear 5, the bottom of the sealing plate 1 is fixedly connected with the single sliding block 6, the longitudinal moving motor 4 drives the drive gear 5 to rotate, the drive gear 5 is meshingly connected with the external rack, the single sliding block 6 is slidably connected with the external slide rail, so as to realize the z-axis movement of the whole grabbing transplanting mechanism, the lifting assembly includes the lifting motor 2 fixedly connected with the top of the sealing plate 1, the output end of the lifting motor 2 is fixedly connected with the lifting wheel 3, the chain is integrated between the lifting wheel 3 and the cover shell 8, the lifting motor 2 vertically pulls the cover shell 8 through the lifting wheel 3 and the chain, and the cover shell 8 links the lower plate 10 through the connecting frame 9, so as to realize the y-axis movement of the lower plate 10.

[0029] Working principle: the longitudinal moving motor 4 drives the driving gear 5 to rotate, the driving gear 5 is engaged with the external rack, the upper single slider 6 is engaged with the external slide rail, so that the z-axis movement of the whole grabbing transplanting mechanism is realized, the lifting motor 2 lifts the cover shell 8 through the lifting wheel 3 and the chain, the cover shell 8 is linked with the lower plate 10 through the connecting frame 9, so that the y-axis movement of the lower plate 10 is realized, the two groups of side cylinder bodies 11 link the corresponding grippers 12, the two groups of grippers 12 are combined on the opposite sides of the two groups of connecting parts on the top of the graphite boat cover plate, then the two groups of middle cylinder bodies 14 drive the corresponding grippers 12, and the two groups of grippers 12 are combined on the adjacent sides of the two groups of connecting parts, and the guide wheels 17, the guide blocks 16, the centering limit plates 18 and the boat pad blocks 19 on the multiple groups of grippers 12 are all attached to the external contour of the connecting part, so that the stable grabbing and transplanting of the graphite boat are realized, the side cylinder body 11 is fixed with the corresponding gripper 12 through the mounting plate one 13, and the middle cylinder body 14 is fixed with the corresponding gripper 12 through the mounting plate two 15, the bottom of the mounting plate one 13 and the mounting plate two 15 are respectively engaged with the top of the lower plate 10 through two groups of rails, so that the stability of the movement of the multiple groups of grippers 12 is ensured, and the stability of the use of the graphite boat one-dimensional grabbing and transplanting mechanism is ensured.

[0030] The above description of the embodiments enables those skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Accordingly, the present application is not to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A linear grasping and transplanting mechanism for a graphite boat, comprising a fixedly connected sealing plate (1) and a profile frame (7), characterized in that, The outer wall of the profile frame (7) is slidably connected to a cover (8). The outer wall of the cover (8) is fixedly connected to a lower plate (10) via a connecting frame (9). The top of the sealing plate (1) is integrated with a longitudinal moving component for gripping the transplanting mechanism and a lifting component for vertical movement of the cover (8). The top of the lower plate (10) is fixedly connected to two sets of side cylinders (11) and a middle cylinder (14). The output ends of the two sets of side cylinders (11) and the middle cylinder (14) are all fixedly connected to grippers (12).

2. The graphite boat-shaped grasping and transplanting mechanism according to claim 1, characterized in that, The output end of the side cylinder (11) is fixedly connected to the gripper (12) via mounting plate one (13), and the output end of the middle cylinder (14) is fixedly connected to the gripper (12) via mounting plate two (15). Both mounting plate one (13) and mounting plate two (15) are slidably connected to the top of the lower plate (10).

3. The graphite boat-shaped grasping and transplanting mechanism according to claim 2, characterized in that, The bottom of both mounting plate one (13) and mounting plate two (15) are fixedly connected with sliding sleeves, and the two sets of sliding sleeves are slidably connected to the top of the lower plate (10) through two sets of tracks.

4. The graphite boat-shaped grasping and transplanting mechanism according to claim 3, characterized in that, The inner and outer walls of the gripper (12) are respectively fixedly connected to a guide block (16), a centering limit plate (18) and a boat pad block (19), and a guide wheel (17) is hinged to the inner wall of the gripper (12).

5. The graphite boat-shaped grasping and transplanting mechanism according to claim 4, characterized in that, The longitudinal movement assembly includes a longitudinal movement motor (4) fixedly connected to the top of the sealing plate (1), a drive gear (5) fixedly connected to the output end of the longitudinal movement motor (4), and a separate slider (6) fixedly connected to the bottom of the sealing plate (1).

6. The graphite boat linear grasping and transplanting mechanism according to claim 5, characterized in that, The lifting assembly includes a lifting motor (2) fixedly connected to the top of the sealing plate (1), a lifting wheel (3) fixedly connected to the output end of the lifting motor (2), and a chain integrated between the lifting wheel (3) and the cover (8).

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