Quartz boat transfer device and quartz boat transfer system

Abstract

According to the quartz boat transfer device and the quartz boat transfer system, two clamping assemblies are arranged on a base arranged on a conveying mechanism, the two clamping assemblies are arranged at the two ends, in the extending direction of the base, of the base correspondingly, and the ends, away from the base, of the two clamping assemblies are each provided with a bearing structure used for bearing a quartz boat; the quartz boat can be clamped through the clamping assembly. Therefore, the silicon wafer turnover efficiency can be improved, and the damage probability of the quartz boat and the silicon wafer can be reduced. Moreover, at least one of the two clamping assemblies can move relative to the base, the distance between the two clamping assemblies in the extending direction of the base can be adjusted, and therefore the adaptability of the quartz boat transfer device to quartz boats of different sizes can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of solar cell production equipment, and in particular to a quartz boat transfer device and a quartz boat transfer system. BACKGROUND

[0002] A solar cell is a product obtained after a plurality of processing procedures on a silicon wafer. In the processing and production of the solar cell, the silicon wafer is usually loaded into a quartz boat by an automatic loading and unloading machine, and then the quartz boat loaded with the silicon wafer is manually transported to a processing device for processing.

[0003] However, this manual transfer mode not only has low transfer efficiency, but also is prone to damage to the quartz boat and the silicon wafer during the transfer process. CONTENT OF THE UTILITY MODEL

[0004] Embodiments of the present application disclose a quartz boat transfer device and a quartz boat transfer system, which are helpful to realize the automation of transporting the silicon wafer by the quartz boat, thereby being beneficial to improve the transfer efficiency of the silicon wafer and reduce the damage probability of the quartz boat and the silicon wafer.

[0005] To achieve the above-mentioned purpose, a first aspect of embodiments of the present application discloses a quartz boat transfer device, comprising:

[0006] a base configured to be arranged on the transmission mechanism; and

[0007] two clamping assemblies, the two clamping assemblies are respectively arranged at two ends of the base along a first direction, the two clamping assemblies are configured to clamp a quartz boat, at least one of the two clamping assemblies is movable relative to the base to adjust the distance between the clamping assembly and another clamping assembly along the first direction, and an end of the two clamping assemblies away from the base is provided with a supporting structure configured to support the quartz boat.

[0008] The first direction is the extension direction of the base.

[0009] As an optional implementation, the clamping assembly comprises a side plate arranged to extend upward from the base.

[0010] The base is provided with a first sliding part, the side plate is provided with a second sliding part corresponding to the first sliding part, and the second sliding part is slidably connected to the first sliding part to enable the side plate to be movable along the first direction.

[0011] One of the first sliding part and the second sliding part is a protruding part, and the other is a sliding groove part.

[0012] As an optional implementation, the two side plates are arranged opposite to each other on the base and form a clamping space between the two side plates and the base for clamping the quartz boat, the first sliding part is located outside the clamping space, and the second sliding part is arranged on a side of the side plate away from the clamping space.

[0013] The clamping assembly further comprises a connecting piece, one end of the connecting piece is connected to a side of the side plate located in the clamping space, and the other end of the connecting piece is connected to the base, the base is provided with a first adjusting hole extending along the first direction, and the connecting piece is provided with a second adjusting hole extending along the first direction corresponding to the first adjusting hole, the second adjusting hole is in communication with the first adjusting hole, and the second adjusting hole and the first adjusting hole are configured to pass through a fastener to maintain the current position of the side plate relative to the base.

[0014] As an optional implementation, the clamping assembly further comprises a deviation correcting component, the deviation correcting component is arranged on the top of the side plate along the first direction, the deviation correcting component and the supporting structure are arranged in sequence, and the deviation correcting component is located on a side of the supporting structure away from the clamping space, and the deviation correcting component is configured to correct the position of the quartz boat on the supporting structure.

[0015] As an optional implementation, the supporting structure comprises two first supporting pieces and a second supporting piece, the two first supporting pieces and the second supporting piece are arranged on the side plate, the two first supporting pieces are arranged in the second direction, the second supporting piece is located between the two first supporting pieces, and the two first supporting pieces and the second supporting piece are configured to jointly support the quartz boat, and the deviation correcting component is arranged corresponding to the second supporting piece along the first direction.

[0016] The second direction intersects the first direction.

[0017] As an optional implementation, the deviation correcting component comprises a base and two deviation correcting wheels, the base is arranged on the top of the side plate along the first direction, and the base is arranged corresponding to the second supporting piece along the first direction, the base is provided with two spaced mounting grooves, and each deviation correcting wheel is rotatably arranged in the corresponding mounting groove, and the deviation correcting wheel is rotatable relative to the base to correct the position of the quartz boat on the supporting structure.

[0018] As an optional implementation, the clamping assembly is arranged close to an end of the base along the first direction, the two ends of the base along the first direction are provided with anti-collision pieces extending along the first direction; and / or,

[0019] The base is provided with an induction component on one end of the end, and the induction component is configured to be inductively connected with the sensor on the loading and unloading station and the processing station; and / or,

[0020] The two clamping assemblies form a group, and the base is provided with multiple groups of clamping assemblies along the first direction;

[0021] The base is provided with multiple hollow parts along the first direction.

[0022] The second aspect of the application further discloses a quartz boat transfer system, comprising a transmission mechanism and a quartz boat transfer device as described in the first aspect above, the quartz boat transfer device is arranged on the transmission mechanism, and the transmission mechanism is configured to transmit between the loading and unloading station and the processing station, so that the quartz boat transfer device transfers the quartz boat between the loading and unloading station and the processing station.

[0023] As an optional implementation, the quartz boat transfer system further comprises a quartz boat holder configured to hold the quartz boat, the quartz boat holder has a to-be-held part, and the holding structure holds the to-be-held part, so that the quartz boat holder is clamped between the two clamping assemblies.

[0024] As an optional implementation, the quartz boat holder is provided with a clamping groove on the two side walls along the length direction of the quartz boat holder, the clamping groove is arranged adjacent to the bottom of the quartz boat holder, and the clamping groove forms the to-be-held part; and / or,

[0025] The quartz boat holder is provided with multiple clamping parts on the two side walls along the width direction of the quartz boat holder, the multiple clamping parts are arranged along the length direction of the quartz boat holder, and the clamping parts are located at the top end of the quartz boat holder, and the clamping parts are configured to clamp the boat ears of the quartz boat.

[0026] Compared with the prior art, the application has the following advantages:

[0027] The quartz boat transfer device and the quartz boat transfer system provided by the application can realize clamping of the quartz boat through the clamping assembly by arranging two clamping assemblies on the base arranged on the transmission mechanism, arranging the two clamping assemblies at the two ends of the base along the extension direction of the base, and arranging the holding structure on one end of the two clamping assemblies away from the base for holding the quartz boat. It is helpful to realize the automation of the quartz boat transporting silicon wafers, thereby facilitating the improvement of the turnover efficiency of the silicon wafers and the reduction of the damage probability of the quartz boat and the silicon wafers. In addition, at least one of the two clamping assemblies is movable relative to the base, which is helpful to adjust the distance between the two clamping assemblies along the extension direction of the base, thereby facilitating the adaptability of the quartz boat transfer device to quartz boats of different sizes. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments, the following will briefly introduce the drawings needed to be used in the embodiments. Obviously, the drawings described below only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0029] Figure 1 is a structural schematic view of a quartz boat transfer device disclosed by the embodiments of the present application;

[0030] Figure 2 is a top view of the quartz boat transfer device in Figure 1

[0031] Figure 3 is a partial enlarged view of A in Figure 1

[0032] Figure 4 is a side view of the quartz boat transfer device in Figure 1

[0033] Figure 5 is another structural schematic view of a quartz boat transfer system disclosed by the embodiments of the present application;

[0034] Figure 6 is a structural schematic view of a quartz boat transfer system disclosed by the embodiments of the present application;

[0035] Figure 7 is a structural schematic view of a quartz boat supporting a quartz boat disclosed by the embodiments of the present application.

[0036] Explanation of reference signs:

[0037] 100-quartz boat transfer device; 1-base; 11-first sliding part; 111-first adjusting hole; 12-anti-collision part; 13-sensing part; 14-hollow part; 2-clamping assembly; 21-supporting structure; 211-first supporting part; 212-second supporting part; 213-reinforcing part; 22-side plate; 221-second sliding part; 23-connection part; 231-second adjusting hole; 24-fastening part; 25-correcting part; 251-base; 252-mounting groove; 253-correcting wheel; 3-clamping space; 200-quartz boat transfer system; 201-transporting mechanism; 202-loading and unloading station; 203-processing station; 204-quartz boat support; 2041-clamping groove; 2042-clamping part; 2043-supporting rod; 205-quartz boat; 2051-boat ear; X-first direction; Y-second direction. DETAILED DESCRIPTION

[0038] ​​​The technical solutions in the embodiments will be described clearly and completely below with reference to the drawings in the embodiments. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0039] In the present application, the terms "upper", "lower", "left", "right", "front", "back" and the like indicate the orientation or positional relationship shown in the drawings. These terms are mainly used for better description of the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0040] In addition, in addition to indicating the orientation or positional relationship, the above-mentioned terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific situation.

[0041] In addition, the terms "mounting", "setting", "connection" should be understood broadly. For example, it can be fixed connection, detachable connection, or integral structure; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above-mentioned terms in the present application can be understood according to the specific situation.

[0042] In addition, the terms "first", "second" and the like are mainly used to distinguish different devices, elements or components (the specific types and structures can be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of "multiple" is two or more.

[0043] The solar cell is a product obtained after a plurality of processing procedures using a silicon wafer as a raw material. Each processing procedure requires the use of different processing equipment, and the transportation of the silicon wafer between different procedures requires the use of a quartz boat to load, so that a plurality of silicon wafers can be transported to the processing station of the corresponding processing equipment at one time, thereby improving the transportation efficiency of the silicon wafer.

[0044] The loading and unloading process of the silicon wafer in the quartz boat is completed by using an automatic wafer loading and unloading machine at the loading and unloading station, and the process processing of the silicon wafer after entering the different processing equipment is also completed by the corresponding automatic processing equipment.

[0045] But in the related art, after the quartz boat completes the automatic loading and unloading process of the silicon wafer, the quartz boat is manually transported to the battery piece processing station for subsequent process processing of the silicon wafer. This manual transportation method is cumbersome and low in efficiency, and at the same time, the manual transportation method also increases the probability of damage to the quartz boat and the silicon wafer, greatly affecting the production efficiency of the solar cell.

[0046] In view of this point, the quartz boat transfer device and the quartz boat transfer system provided by the embodiments of the present application are provided. The base is arranged on the transmission mechanism, two clamping assemblies are arranged at the two ends of the first direction of the base, and a supporting structure is arranged on the end of each clamping assembly away from the base to support the quartz boat. This helps to clamp the quartz boat through the two clamping assemblies, and further helps to realize the automatic transmission of the quartz boat between the loading and unloading stations and the processing stations through the transmission mechanism, thereby facilitating the improvement of the turnover efficiency of the silicon wafer and the reduction of the damage probability of the quartz boat and the silicon wafer. In addition, at least one of the two clamping assemblies is movable relative to the base, which helps to flexibly adjust the distance between the two clamping assemblies in the first direction, thereby facilitating the adaptability of the quartz boat transfer device to quartz boats of different sizes. In addition, the quartz boat transfer system also includes a quartz boat holder that can support the quartz boat. The quartz boat holder can be clamped between the two clamping assemblies, and the quartz boat holder is provided with a plurality of clamping parts for clamping the boat ears of the quartz boat. This helps to transport multiple quartz boats at a time through the quartz boat holder, thereby facilitating the improvement of the turnover efficiency of the silicon wafer and the reduction of the damage probability of the quartz boat and the silicon wafer.

[0047] The technical solutions of the present application will be further described below in conjunction with the embodiments and the accompanying drawings.

[0048] Please refer to Figure 1 and Figure 2 , Figure 1 is a structural schematic view of the quartz boat transfer device disclosed by the embodiments of the present application, Figure 2 is Figure 1 the top view of the quartz boat transfer device in Figure 6 . The quartz boat transfer device 100 of the present application can be applied to the quartz boat transfer system 200 (see Figure 6 ), that is, the quartz boat transfer device 100 can be matched with the transmission mechanism 201 (see ) of the quartz boat transfer system 200 to realize transmission between the loading and unloading stations 202 and the processing stations 203.

[0049] Figure 6 Specifically, the quartz boat transfer device 100 of the present application includes a base 1 and two clamping assemblies 2. The base 1 is configured to be arranged on the transmission mechanism 201 (see Figure 6) under the transmission of the transmission mechanism 201 (see FIG. 1), so as to realize the automatic transmission of the quartz boat 205 between the loading and unloading station 202 and the processing station 203. The two clamping assemblies 2 are respectively arranged at two ends of the base 1 along the first direction X, and the end of each clamping assembly 2 away from the base 1 is provided with a supporting structure 21 configured to support the quartz boat 205, so that the two clamping assemblies 2 can clamp the quartz boat 205.

[0050] The first direction X is the extension direction of the base 1 (the length direction of the base 1). That is, the first direction X is the transmission direction of the transmission mechanism 201 (see FIG. 1). Figure 6

[0051] The quartz boat transfer device 100 disclosed in the present application is helpful to clamp the quartz boat 205 by the two clamping assemblies 2, and then is helpful to realize the automatic transmission of the quartz boat 205 between the loading and unloading station 202 and the processing station 203 by the transmission mechanism 201 (see FIG. 1), so as to improve the turnover efficiency of the silicon wafer and reduce the damage probability of the quartz boat 205 and the silicon wafer. Figure 6

[0052] Meanwhile, by arranging the supporting structure 21 on the clamping assembly 2, the supporting structure 21 supports the to-be-supported part of the quartz boat 205, so that the quartz boat 205 can be firmly supported between the two clamping assemblies 2 during the transmission process, avoiding the situation that the quartz boat 205 falls during the turnover process, and effectively improving the transfer reliability of the quartz boat transfer device 100.

[0053] It can be understood that the above-mentioned two clamping assemblies 2 relative to the base 1 can have various embodiments. In one example, one of the two clamping assemblies 2 is movable relative to the base 1 along the first direction X to adjust the distance between the two clamping assemblies 2 along the first direction X. In this way, it is helpful to adjust the distance between the two clamping assemblies 2 so that the two clamping assemblies 2 can clamp quartz boats 205 of different sizes, thereby improving the adaptability of the two clamping assemblies 2 to quartz boats 205 of different sizes.

[0054] In another example, the two clamping assemblies 2 are movable relative to the base 1 along the first direction X to adjust the distance between the two clamping assemblies 2 along the first direction X. Compared with the clamping assembly 2 on one side being movable relative to the base 1, it is helpful to improve the flexibility of distance adjustment between the two clamping assemblies 2, and also helpful to expand the range of distance adjustment between the two clamping assemblies 2, thereby further improving the adaptability of the two clamping assemblies 2 to quartz boats 205 of different sizes.

[0055] Optionally, the base 1 can be a long strip plate body, and the material of the base 1 can be aluminum alloy or stainless steel, etc., which is not limited in the present embodiment.​​

[0056] Optionally, the base 1 can be fixed on the conveying mechanism 201 by means of, for example, screws or rivets. Alternatively, the base 1 can be connected to the conveying mechanism 201 by means of, for example, buckles or magnets, so as to avoid the base 1 from being separated from the conveying mechanism 201 during the conveying process.

[0057] In some embodiments, referring to Figure 1 and Figure 2 , the base 1 can be provided with a plurality of hollow parts 14 at intervals along the first direction X, so as to reduce the material required by the base 1 without affecting the strength of the base 1, thereby facilitating the reduction of the cost of the base 1.

[0058] Optionally, along the first direction X, two adjacent hollow parts 14 can be provided at intervals, for example, by means of partitions, so as to avoid the insufficient structural strength of the base 1 due to the direct communication of the hollow parts 14.

[0059] In some embodiments, referring to Figure 1 and Figure 2 , the clamping assembly 2 comprises a side plate 22 extending upward from the base 1 and slidably connected to the base 1. By slidably connecting the side plate 22 to the base 1, the position of the side plate 22 on the base 1 can be adjusted, thereby achieving the clamping of quartz boats of different specifications.

[0060] Optionally, in order to provide guidance for the sliding of the side plate 22 on the base 1 and avoid the deviation of the sliding of the side plate 22 on the base 1, a first sliding part 11 is provided on the base 1, and a second sliding part 221 corresponding to the first sliding part 11 is provided on the side plate 22, the second sliding part 221 being slidably connected to the first sliding part 11 so as to enable the side plate 22 to move along the first direction X. One of the first sliding part 11 and the second sliding part 221 is a protruding part, and the other is a sliding groove part which can extend along the first direction X.

[0061] By providing the first sliding part 11 and the second sliding part 221 which are slidably connected, and by locating the first sliding part 11 on the base 1 and the second sliding part 221 on the side plate 22, it is helpful to enable the side plate 22 to move relative to the base 1 along the first direction X, thereby facilitating the adjustment of the distance between the two side plates 22 so that the two clamping assemblies 2 can clamp quartz boats 205 of different sizes, and thereby facilitating the adaptability of the two clamping assemblies 2 to quartz boats 205 of different sizes.

[0062] For example, the first sliding part 11 can be a sliding groove part, and the second sliding part 221 can be a protruding part. The protruding part and the sliding groove part can have various embodiments.

[0063] In an example, the protruding part is a sliding block, and the sliding groove part is a sliding rail, and the sliding block is in sliding connection with the sliding rail. This arrangement helps to make the structure of the protruding part and the sliding groove part simpler, and helps to improve the smoothness of the movement of the side plate 22 relative to the base 1 along the first direction X.

[0064] In another example, the protruding part is a pulley, and the sliding groove part is a sliding groove, and the pulley is embedded in the sliding groove for sliding. This arrangement helps to ensure that the side plate 22 can slide along the extension direction of the sliding groove, thereby helping to improve the stability and precision of the movement of the side plate 22 relative to the base 1 along the first direction X.

[0065] It can be understood that the material of the protruding part can be stainless steel, aluminum alloy, steel, plastic, cast iron, etc., and if the sliding groove part is a sliding rail, the material of the sliding rail can also be stainless steel, aluminum alloy, steel, plastic, cast iron, etc., which is not limited in the present embodiment.

[0066] In some embodiments, referring to Figure 1 and Figure 2 , the two side plates 22 are arranged opposite to each other on the base 1 and form a clamping space 3 between the base 1 and the side plates 22 for clamping the quartz boat 205, the first sliding part 11 is located outside the clamping space 3, and the second sliding part 221 is arranged on the side of the side plate 22 away from the clamping space 3. By arranging the first sliding part 11 and the second sliding part 221 outside the clamping space 3, it helps to avoid the collision between the first sliding part 11 and the second sliding part 221 and the quartz boat 205 located in the clamping space 3, which can cause damage to the quartz boat 205.

[0067] Optionally, referring to Figure 3 , Figure 3 is Figure 1 a partial enlarged view of A in FIG. 4. The clamping assembly 2 further comprises a connecting piece 23, which is L-shaped, one end of the connecting piece 23 is connected to the side of the side plate 22 located in the clamping space 3, and the other end of the connecting piece 23 is connected to the base 1. By increasing the arrangement of the connecting piece 23, the connection stability between the side plate 22 and the base 1 can be improved, thereby helping to improve the stability of the quartz boat transfer device 100 as a whole.

[0068] Optionally, the connecting piece 23 can be an angle steel or an angle iron, the vertical part of the connecting piece 23 can be connected to the side of the side plate 22 located in the clamping space 3, and the horizontal part of the connecting piece 23 can be connected to the base 1.

[0069] Optionally, in order to realize the adjustment of the clamping assembly 2 relative to the base 1, a plurality of first adjustment holes 111 are arranged on the base 1, and the plurality of first adjustment holes 111 are arranged at intervals along the first direction X. A second adjustment hole 231 extending along the first direction X is arranged on the connecting piece 23 corresponding to the first adjustment hole 111. The second adjustment hole 231 is in communication with the first adjustment hole 111. The second adjustment hole 231 and the first adjustment hole 111 are configured to pass through the fastener 24 to maintain the current position of the side plate 22 relative to the base 1. By the form that the fastener 24 passes through the first adjustment hole 111 and the second adjustment hole 231, the first adjustment hole 111 is located on the base 1, the second adjustment hole 231 is located on the connecting piece 23, and the other end of the connecting piece 23 is connected with the side plate 22. It is helpful to fix the base 1 and the side plate 22 by the fastener 24, so that the side plate 22 can be kept in the current position after adjusting the position relative to the base 1.

[0070] It can be understood that the second adjustment hole 231 extends along the first direction X, that is, the second adjustment hole 231 is a long strip-shaped adjustment hole. Compared with a circular adjustment hole, the long strip-shaped adjustment hole can pass through two or more fasteners 24 at a time to connect with a plurality of first adjustment holes 111. Compared with the mode that only one fastener 24 can pass through at a time, it is helpful to improve the connection stability between the side plate 22 and the base 1.

[0071] It can be understood that the fastener 24 can be a threaded fastener such as a bolt or a screw. The first adjustment hole 111 is a threaded hole. The fastener 24 and the first adjustment hole 111 are fixedly connected by threaded connection. This threaded connection mode is helpful to improve the connection stability between the fastener 24 and the first adjustment hole 111, and further improve the connection stability between the side plate 22 and the base 1.

[0072] It can be understood that in addition to the threaded connection mode described above, the connection mode between the connecting piece 23 and the base 1 can also be that a plurality of elastic protruding portions are arranged on the base 1 along the first direction X, and a positioning hole is arranged on the corresponding connecting piece 23. The positioning hole can realize clamping of the elastic protruding portion to maintain the current position of the side plate 22 relative to the base 1. Of course, as other examples, the connecting piece 23 can also be arranged with a plurality of elastic protruding portions along the first direction X, and the base 1 can be arranged with a positioning hole.

[0073] Considering that the quartz boat 205 is automatically loaded and unloaded by the automatic wafer loading and unloading machine, and then the quartz boat 205 is transported to the upper side of the clamping assembly 2 on the transmission mechanism 201 by the mechanical hand clamping the quartz boat 205, and then the quartz boat 205 is lowered to place the to-be-supported part of the quartz boat 205 on the supporting structure 21 to realize the clamping of the quartz boat 205 by the clamping assembly 2. Based on this, please refer to Figures 1 to 3In some embodiments, the clamping assembly 2 further comprises a deviation rectifying component 25 arranged on the top of the side plate 22 along the first direction X, and the deviation rectifying component 25 and the supporting structure 21 are arranged in sequence, and the deviation rectifying component 25 is configured to rectify the position of the quartz boat 205 on the supporting structure 21.

[0074] By arranging the deviation rectifying component 25 on the top of the side plate 22, when the clamping assembly 2 clamps the quartz boat 205, the quartz boat 205 can be accurately or more accurately dropped onto the supporting structure 21 through the deviation rectifying component 25, so as to avoid the situation that the position of the quartz boat 205 relative to the supporting structure 21 deviates, and the quartz boat 205 is damaged due to collision during transmission.

[0075] Optionally, the deviation rectifying component 25 is located on the side of the supporting structure 21 away from the clamping space 3. That is, along the first direction X, the deviation rectifying component 25 is located outside the clamping space 3 relative to the supporting structure 21. Thus, when the quartz boat 205 falls onto the supporting structure 21, if the position of the quartz boat 205 along the first direction X deviates relative to the supporting structure 21, the deviation rectifying components 25 on both sides can rectify the position of the quartz boat 205, no matter which side of the quartz boat 205 relative to the supporting structure 21 along the first direction X deviates, the deviation rectifying component 25 can rectify it, which helps to make the deviation rectifying component 25 rectify the position of the quartz boat 205 on the supporting structure 21 more comprehensively.

[0076] In some embodiments, the supporting structure 21 comprises two first supporting members 211 and a second supporting member 212, both of which are arranged on the side plate 22 and located in the clamping space 3. The first supporting members 211 are arranged in the second direction Y, and the second supporting member 212 is located between the two first supporting members 211. The two first supporting members 211 and the second supporting member 212 are configured to jointly support the quartz boat. The deviation correcting member 25 is arranged corresponding to the second supporting member 212 in the first direction X. A reinforcing member 213 is arranged below the second supporting member 212 to support the second supporting member 212. One end of the reinforcing member 213 is connected to the side plate 22, and the other end extends from the side plate 22 into the clamping space 3 in the first direction X. The second direction Y intersects the first direction X. Since the width of the deviation correcting member 25 in the first direction X is greater than the width of the side plate 22, that is, part of the deviation correcting member 25 is located in the clamping space 3, and the deviation correcting member 25 is arranged corresponding to the second supporting member 212 in the first direction X, the second supporting member 212 cannot be directly connected to the side plate 22 in the first direction X to avoid the deviation correcting member 25, but is connected to the side plate 22 through the reinforcing member 213 below. The two first supporting members 211 can support the to-be-supported part of the quartz boat 205, and the second supporting member 212 arranged between the two first supporting members 211 can jointly support the quartz boat 205, which helps to improve the supporting force of the supporting structure 21 on the quartz boat 205, and further helps to make the quartz boat 205 more stable on the supporting structure 21. Of course, as another example, the supporting structure 21 can also be integrated, but the reinforcing member 213 and the avoiding slot for avoiding the deviation correcting member 25 also need to be arranged.

[0077] It can be understood that the two first supporting members 211 and the second supporting member 212 can be supporting blocks, supporting columns, etc., which are not limited in the embodiment.

[0078] It can be understood that the two first supporting members 211 and the second supporting member 212 are used to support the quartz boat 205, so their material needs to have good impact resistance, which can be polypropylene, polyvinyl chloride, etc., which are not limited in the embodiment.

[0079] Optionally, referring to Figures 1 to 3 , the deviation correcting member 25 comprises a base 251 and two deviation correcting wheels 253. The base 251 is arranged on the top of the side plate 22 and arranged corresponding to the second supporting member 212 in the first direction X. Two installation grooves 252 are arranged on the base 251 in the second direction Y. Each deviation correcting wheel 253 is rotatably arranged in the corresponding installation groove 252. The deviation correcting wheel 253 can rotate relative to the base 251 to correct the position of the quartz boat 205 on the supporting structure 21.

[0080] Since the quartz boat 205 has a certain width along the second direction Y, two correction wheels 253 are arranged on the base 251 along the second direction Y, which helps to improve the accuracy of the correction wheel 253 along the first direction X compared to the way of arranging only one correction wheel 253. Of course, as other examples, the correction member 25 can also include the base 251 and one correction wheel 253 having a certain length along the second direction Y.

[0081] It can be understood that the base 251 can be provided with a rotating shaft extending along the second direction Y, and the two correction wheels 253 are sleeved on the rotating shaft to realize rotation relative to the base 251.

[0082] It can be understood that the material of the above-mentioned base 251 can be stainless steel, aluminum alloy or cast iron, etc., which is not limited in the embodiment.

[0083] It can be understood that the material of the above-mentioned correction wheel 253 can be ceramic, tungsten carbide, etc., which is not limited in the embodiment.

[0084] In some embodiments, referring to Figure 1 , in combination with Figure 4 , Figure 4 is Figure 1 the side view of the quartz boat transfer device in . The clamping assembly 2 is arranged close to the end of the base 1 along the first direction X, that is, the clamping assembly 2 has a distance or a slight distance from the end of the base 1 along the first direction X, which can avoid the situation that the clamping assembly 2 collides with other devices or components due to being too close to the edge of the base 1 when the clamping assembly 2 is transported on the transmission mechanism 201, resulting in damage to the quartz boat 205 or the silicon wafer.

[0085] Optionally, referring to Figure 1 , in combination with Figure 4 , the base 1 is provided with a bumper 12 extending along the first direction X at both ends along the first direction X. By arranging the bumper 12 at both ends of the base 1 along the length direction of the base 1, if the base 1 collides with other components during the transportation of the base 1 on the transmission mechanism 201, the bumper 12 helps to provide a buffer area to absorb part of the impact energy, thereby reducing the impact force on the quartz boat 205 clamped on the clamping assembly, and further helping to reduce the probability of damage to the quartz boat 205 and the silicon wafer during the transportation of the quartz boat.

[0086] Optionally, the bumper 12 can be arranged on the side surface of both ends of the base 1, and the bumper 12 can include but is not limited to a bumper strip, a bumper block, a bumper plate, etc.

[0087] Optionally, the material of the anti-collision member 12 can be polyvinylidene fluoride or acrylonitrile-styrene-diene copolymer, etc. with certain elasticity, which is not limited in the embodiment.

[0088] In some embodiments, referring to Figure 4 , the base 1 is provided with a sensing component 13 at the end of one end of the base 1 along the first direction X, which is configured to be inductively connected with a sensor (not shown in the figure) on the loading and unloading station 202 and the processing station 203. When the base 1 is transported on the transmission mechanism 201 to the loading and unloading station 202 and the processing station 203, the sensor can inductively sense the sensing component 13, so that the transmission mechanism 201 stops transmission, thereby helping to improve the automation degree of the quartz boat 205 transmission.

[0089] It can be understood that the sensing component 13 can be a baffle or a block, and the sensor can be a photoelectric sensor or an ultrasonic sensor, etc. which is not limited in the embodiment.

[0090] In order to improve the turnover efficiency of the silicon wafer, a plurality of clamping assemblies 2 can be provided on the base 1. For details, please refer to Figure 5 , Figure 5 is another structural schematic view of the quartz boat transfer system disclosed in the embodiment of the application. As shown in Figure 5 It can be seen that in the present application, two clamping assemblies 2 can form a group, and a plurality of clamping assemblies 2 are arranged on the base 1 along the first direction X with intervals, thereby helping to improve the number of silicon wafers transported at a time, and further helping to improve the turnover efficiency of the silicon wafer.

[0091] For example, as shown in Figure 5 , two groups of clamping assemblies 2 can be provided on the base 1, and the two groups of clamping assemblies 2 can have a spacing therebetween, so as to reserve an adjustment gap, to ensure that the clamping assembly 2 has sufficient adjustment distance, and further to be adapted to quartz boats 205 of different specifications.

[0092] Please refer to Figure 6 , Figure 6 is a structural schematic view of the quartz boat transfer system disclosed in the embodiment of the application. In the second aspect, the application discloses a quartz boat transfer system 200, which comprises a transmission mechanism 201 and the quartz boat transfer device 100 of the first aspect as described above. The quartz boat transfer device 100 is arranged on the transmission mechanism 201, and the transmission mechanism 201 is configured to transmit between the loading and unloading station 202 and the processing station 203, so as to transfer the quartz boat 205 between the loading and unloading station 202 and the processing station 203 by the quartz boat transfer device 100. By providing the transmission mechanism 201, it is helpful to realize the automatic transmission of the quartz boat 205 between the loading and unloading station 202 and the processing station 203, and further to improve the turnover efficiency of the silicon wafer.

[0093] It can be understood that the transmission mechanism 201 can include a belt and a driving device, such as a motor, a motor, etc., so as to drive the belt to rotate by the driving device to realize the transmission of the quartz boat.

[0094] In some embodiments, referring to Figure 7 , Figure 7 is a structural schematic view of the quartz boat holder supporting the quartz boat. The quartz boat transfer system 200 further includes a quartz boat holder 204 configured to support the quartz boat. By setting the quartz boat holder 204 to support the quartz boat 205, and then clamping between the two clamping assemblies 2 for transmission, it helps to reduce the case that the quartz boat 205 is easily damaged due to direct contact with the clamping assembly 2.

[0095] Optionally, the quartz boat holder 204 can be, for example, similar to the boat body structure, having a supporting space inside, which can be used to support the quartz boat.

[0096] It can be understood that the material of the quartz boat holder 204 can be quartz or plastic, etc., which is not specifically limited in the embodiment.

[0097] Optionally, the quartz boat holder 204 has a to-be-supported part, and the supporting structure 21 can support the to-be-supported part, so that the quartz boat holder 204 is clamped between the two clamping assemblies 2. That is, through the cooperation between the quartz boat holder 204 and the supporting structure 21 of the two clamping assemblies 2, the quartz boat holder 204 can be clamped between the two clamping assemblies 2.

[0098] Optionally, referring to Figure 7 , the quartz boat holder 204 is provided with a clamping groove 2041 on the side wall in the length direction thereof, which is arranged adjacent to the bottom of the quartz boat holder 204, and the clamping groove 2041 is formed as the to-be-supported part of the quartz boat holder 204. By opening the clamping groove 2041 on the side wall in the length direction of the quartz boat holder 204, it helps to make the quartz boat holder 204 be supported by the supporting structure 21 on the clamping assembly 2, so that it can be transmitted between the loading and unloading station 202 and the processing station 203.

[0099] In some embodiments, the quartz boat holder 204 is provided with a plurality of clamping portions 2042 on the two side walls in the width direction of the quartz boat holder 204, the plurality of clamping portions 2042 are arranged at intervals in the length direction of the quartz boat holder 204, and the clamping portion 2042 is located at the top end of the quartz boat holder 204. The clamping portion 2042 is configured to clamp the boat ear 2051 of the quartz boat 205. This arrangement helps to carry multiple quartz boats 205 at a time through the quartz boat holder 204, thereby helping to improve the turnover efficiency of the silicon wafer. In addition, the boat ear 2051 of the quartz boat 205 is clamped in the clamping portion 2042 of the quartz boat holder 204, which helps to improve the stability of the quartz boat 205 placed in the quartz boat holder 204. At the same time, the clamping portion 2042 can also play a guiding role, which helps to prompt the placement position of the boat ear 2051 of the quartz boat 205.

[0100] It can be understood that the above-mentioned clamping portion 2042 can be a single circular groove portion or a long strip-shaped groove portion, and the side wall of the quartz boat 205 is provided with two boat ears 2051. If the clamping portion 2042 is a single groove portion, it can clamp each boat ear 2051. If the clamping portion 2042 is a long strip-shaped groove portion, it can clamp two boat ears 2051 of a quartz boat 205 at a time. The present embodiment does not make specific limitations in this regard.

[0101] Optionally, referring to Figure 7 , the bottom of the quartz boat holder 204 is hollow, and a plurality of bearing rods 2043 are arranged at intervals in the length direction of the bottom of the quartz boat holder 204. The two ends of the bearing rod 2043 are respectively connected to the two side walls of the quartz boat holder 204 in the width direction, and each bearing rod 2043 is used to bear one quartz boat 205. On the one hand, it helps to improve the bearing strength of the quartz boat holder 204 to the quartz boat 205, thereby helping to improve the turnover stability of the quartz boat 205 in the quartz boat holder 204. On the other hand, it helps to reduce the required material of the quartz boat holder 204 without affecting the strength of the quartz boat holder 204, thereby helping to reduce the cost of the quartz boat holder 204.

[0102] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or make equivalent substitutions for part or all of the technical features; and these modifications or substitutions do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A quartz boat transfer device, characterized by, The quartz boat transfer device is applied to a quartz boat transfer system, the quartz boat transfer system comprising a transmission mechanism configured to transmit between a loading and unloading station and a processing station, the quartz boat transfer device comprising: a base configured to be arranged on the transmission mechanism; and two clamping assemblies, the two clamping assemblies being respectively arranged at two ends of the base along a first direction, the two clamping assemblies being configured to clamp a quartz boat, at least one of the two clamping assemblies being movable relative to the base to adjust a distance between the clamping assemblies along the first direction, each end of the two clamping assemblies away from the base being provided with a supporting structure configured to support the quartz boat; wherein the first direction is an extension direction of the base.

2. The quartz boat transfer device according to claim 1, wherein The clamping assembly comprises a side plate arranged upwardly from the base; a first sliding part is arranged on the base, a second sliding part corresponding to the first sliding part is arranged on the side plate, and the second sliding part is slidably connected to the first sliding part to enable the side plate to be movable along the first direction; wherein one of the first sliding part and the second sliding part is a protruding part, and the other is a sliding groove part.

3. The quartz boat transfer device of claim 2, wherein, The two side plates are oppositely arranged on the base and form a clamping space between the two side plates and the base for clamping the quartz boat, the first sliding part is located outside the clamping space, and the second sliding part is arranged on a side of the side plate away from the clamping space; The clamping assembly further comprises a connecting piece, one end of the connecting piece is connected to a side of the side plate inside the clamping space, and the other end of the connecting piece is connected to the base, a plurality of first adjusting holes are arranged on the base, the plurality of first adjusting holes are arranged at intervals along the first direction, a second adjusting hole extending along the first direction is arranged on the connecting piece corresponding to the first adjusting hole, the second adjusting hole is in communication with the first adjusting hole, and the second adjusting hole and the first adjusting hole are configured to be penetrated by a fastener to maintain a current position of the side plate relative to the base.

4. The quartz boat transfer device of claim 3, wherein, The clamping assembly further comprises a deviation correcting component arranged on a top of the side plate along the first direction, the deviation correcting component and the supporting structure are arranged in sequence along the first direction, and the deviation correcting component is located on a side of the supporting structure away from the clamping space, the deviation correcting component being configured to correct a position of the quartz boat on the supporting structure.

5. The quartz boat transfer device of claim 4, wherein, The supporting structure comprises two first supporting pieces and a second supporting piece, the two first supporting pieces and the second supporting piece are arranged on the side plate, the two first supporting pieces are arranged at intervals along a second direction, the second supporting piece is located between the two first supporting pieces, the two first supporting pieces and the second supporting piece are configured to jointly support the quartz boat, and the deviation correcting component and the second supporting piece are arranged corresponding to each other along the first direction. wherein the second direction intersects the first direction.

6. The quartz boat transfer device of claim 5, wherein, The deviation correcting component includes a base and two deviation correcting wheels, the base is arranged on the top of the side plate and corresponds to the second supporting part along the first direction, the base is provided with two spaced installation grooves, each deviation correcting wheel is rotatably arranged in the corresponding installation groove, and the deviation correcting wheels are rotatable relative to the base to correct the position of the quartz boat on the supporting structure.

7. The quartz boat transfer device according to any one of claims 1 to 6, wherein The clamping assembly is arranged near the end of the base along the first direction, and the two ends of the base along the first direction are provided with anti-collision parts extending along the first direction. And / or, An induction component is arranged on one end of the base, and the induction component is configured to be inductively connected with sensors on the loading and unloading station and the processing station. The two clamping assemblies form a group, and the base is provided with multiple groups of clamping assemblies spaced along the first direction. The base is provided with multiple hollow parts spaced along the first direction.

8. A quartz boat transfer system characterized by, The quartz boat transfer system includes a transmission mechanism and the quartz boat transfer device according to any one of claims 1-7, the quartz boat transfer device is arranged on the transmission mechanism, and the transmission mechanism is configured to transmit between the loading and unloading station and the processing station to transfer the quartz boat between the loading and unloading station and the processing station.

9. The quartz boat transfer system of claim 8, wherein, The quartz boat transfer system further includes a quartz boat holder configured to hold the quartz boat, the quartz boat holder has a to-be-held part, and the supporting structure holds the to-be-held part so that the quartz boat holder is clamped between the two clamping assemblies.

10. The quartz boat transfer system according to claim 9, wherein The quartz boat holder is provided with a clamping groove on the two side walls along the length direction, the clamping groove is arranged near the bottom of the quartz boat holder, and the clamping groove forms the to-be-held part; and / or The quartz boat holder is provided with multiple clamping parts on the two side walls along the width direction, the multiple clamping parts are spaced along the length direction of the quartz boat holder, and the clamping parts are located at the top end of the quartz boat holder, and the clamping parts are configured to clamp the boat ears of the quartz boat.

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