Wafer turntable rotation adjusting device and equipment

Abstract

The utility model discloses a wafer rotating disc rotation adjusting device and equipment. The wafer rotating disc rotation adjusting device comprises a mounting substrate, a driving mechanism, an X-axis sliding assembly, a Y-axis sliding assembly, a rotating assembly and a bearing rotating disc with a fixed rotating center. The driving mechanism is installed on the installation substrate, and the output end of the driving mechanism is connected with the X-axis sliding assembly. The X-axis sliding assembly is limited to be slidably mounted on the mounting substrate in the X-axis direction; the Y-axis sliding assembly is limited to be slidably installed on the X-axis sliding assembly in the Y-axis direction. The outer rotating part of the rotating assembly coaxially sleeves the inner rotating part, the outer rotating part and the inner rotating part can relatively and freely rotate, the outer rotating part is fixedly connected with the bearing turntable, and the inner rotating part is fixedly connected to the Y-axis sliding assembly; when the driving mechanism drives the X-axis sliding assembly to do linear motion in the X-axis direction, the bearing rotary disc is driven to rotate. According to the utility model, the process of rotation control is simplified, the assembly and maintenance are facilitated, the adjustment precision is improved, and the rotation process is smoother.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and in particular to a wafer turntable rotation adjustment device and equipment. Background Technology

[0002] In the wafer performance testing process, it is necessary to precisely control the position and angle of the wafer in order to insert the testing instrument into the testing point of each tiny chip inside the wafer for testing.

[0003] Traditional methods for controlling the position and angle of a wafer include controlling the rotation angle via a cam connected to a carrier turntable, and controlling the rotation angle via gear meshing between the carrier turntable and gears. However, both methods have drawbacks:

[0004] 1. Controlling the rotation angle by connecting the cam to the load-bearing turntable is costly, requires high processing standards, has a complex assembly process, and long-term operation will cause wear on the contact parts, which will greatly affect the rotation accuracy. In addition, the equipment is difficult to maintain in the later stage.

[0005] 2. The method of controlling the rotation angle by meshing the bearing turntable with gears is noisy. Due to the unstable gear structure, there is obvious backlash and jump in the gear rotation, which causes jamming and uneven rotation, and also affects the accuracy of rotation. In addition, the meshing of the bearing turntable with gears has high assembly requirements, complex structure, large size, and high maintenance cost. Utility Model Content

[0006] The purpose of this invention is to provide a wafer turntable rotation adjustment device and equipment, which simplifies the rotation control process, facilitates assembly and maintenance, and improves adjustment accuracy. Furthermore, it enhances the structural stability of the device, making the rotation process smoother.

[0007] To achieve the above objectives, this utility model provides a wafer turntable rotation adjustment device, including a mounting substrate, a drive mechanism, an X-axis sliding assembly, a Y-axis sliding assembly, a rotation assembly, and a carrier turntable, wherein the carrier turntable has a fixed rotation center;

[0008] The drive mechanism is mounted on the mounting base plate, and the output end of the drive mechanism is connected to the X-axis sliding assembly;

[0009] The X-axis sliding assembly is restricted to be slidably mounted on the mounting base plate along the X-axis direction;

[0010] The Y-axis sliding assembly is restricted to be slidably mounted on the X-axis sliding assembly along the Y-axis direction;

[0011] The rotating assembly includes an inner rotating part and an outer rotating part. The outer rotating part is coaxially sleeved on the outside of the inner rotating part. The outer rotating part and the inner rotating part can rotate freely relative to each other. The outer rotating part is fixedly connected to the bearing turntable, and the inner rotating part is fixedly connected to the Y-axis sliding assembly.

[0012] When the drive mechanism drives the X-axis sliding assembly to move linearly along the X-axis, it causes the bearing turntable to rotate.

[0013] Optionally, the rotating component includes:

[0014] A ball bearing, wherein the outer ring of the ball bearing is fixedly connected to the bearing turntable;

[0015] A guide shaft, the upper end of which is fixedly mounted on the inner ring of the ball bearing, and the lower end of which is fixedly mounted on the Y-axis sliding assembly;

[0016] The outer ring of the ball bearing is defined as the outer rotating part, and the guide shaft and the inner ring of the ball bearing are defined as the inner rotating part.

[0017] Optionally, a connecting block is fixedly connected to a position on the side wall of the bearing turntable, and a first through hole is opened on the connecting block, through which the upper and lower parts are connected, and the outer ring of the ball bearing is fixedly installed at the first through hole.

[0018] Optionally, an X-axis linear slide rail is fixedly mounted on the mounting base plate; the X-axis sliding assembly includes an X-axis mounting plate and a first mounting block, an X-axis slider is fixedly mounted on the X-axis mounting plate, the X-axis slider is slidably mounted on the X-axis linear slide rail, and the first mounting block is fixedly mounted on the X-axis mounting plate.

[0019] Optionally, the drive mechanism includes a ball screw, and the first mounting block and the ball screw are helically engaged. When the ball screw rotates, it drives the first mounting block to slide in the X-axis direction.

[0020] Optionally, the drive mechanism further includes a drive motor, and the ball screw is fixedly connected to the output end of the drive motor.

[0021] Optionally, the drive motor is fixedly mounted on the motor mounting base, and the motor mounting base is fixedly mounted on the mounting base plate.

[0022] Optionally, the Y-axis sliding assembly includes a second mounting block, the inner rotating part is fixedly connected to the second mounting block, and a Y-axis slider is fixedly mounted on the second mounting block; a Y-axis linear slide rail is fixedly mounted on the first mounting block, and the Y-axis slider is slidably mounted on the Y-axis linear slide rail.

[0023] Optionally, the Y-axis sliding assembly further includes a Y-axis mounting plate, which is fixedly mounted on the first mounting block, and the Y-axis linear slide rail is fixedly mounted on the Y-axis mounting plate.

[0024] To achieve the above objectives, this utility model also provides a device for wafer inspection, including the wafer turntable rotation adjustment device as described above.

[0025] In this embodiment of the invention, the wafer turntable rotation adjustment device includes a mounting substrate, a drive mechanism, an X-axis sliding assembly, a Y-axis sliding assembly, a rotation assembly, and a carrier turntable with a fixed rotation center. The drive mechanism is mounted on the mounting substrate. The X-axis sliding assembly is slidably mounted on the mounting substrate, and the output end of the drive mechanism is connected to the X-axis sliding assembly. The Y-axis sliding assembly is slidably mounted on the X-axis sliding assembly. The rotation assembly includes an inner rotating part and an outer rotating part coaxially sleeved outside the inner rotating part. The outer and inner rotating parts can rotate freely relative to each other. The outer rotating part is fixedly connected to the carrier turntable, and the inner rotating part is fixedly connected to the Y-axis sliding assembly. The drive mechanism, along the X-axis, drives the X-axis sliding assembly to move linearly, thereby providing a rotational driving force for the carrier turntable. Simultaneously, the Y-axis sliding assembly provides a degree of freedom in the Y-axis direction, and the rotation assembly provides a degree of freedom in the rotation angle, thus driving the carrier turntable to rotate. The coordinated arrangement of the rotation assembly, drive mechanism, X-axis sliding assembly, and Y-axis sliding assembly simplifies the rotation control process, facilitates assembly and maintenance, and improves adjustment accuracy. Furthermore, the nested rotation design of the outer and inner rotating parts enhances the structural stability of the device and makes the rotation process smoother. Attached Figure Description

[0026] Figure 1 This is a three-dimensional structural diagram of the wafer turntable rotation adjustment device in an embodiment of this utility model.

[0027] Figure 2 This is a three-dimensional structural diagram of the wafer turntable rotation adjustment device hidden behind the bearing turntable in an embodiment of this utility model. Detailed Implementation

[0028] To explain in detail the technical content, structural features, and effects of this utility model, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0029] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0030] It should be noted that when an element is said to be "fixed" to another element, it can be directly on the other element or there may be an intervening element. When an element is said to be "connected" to another element, it can be directly connected to the other element or there may be an intervening element. Conversely, when an element is said to be "directly" on another element, there is no intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0031] Please see Figure 1 and Figure 2 This utility model discloses a wafer turntable rotation adjustment device 1, including a mounting substrate 10, a drive mechanism 20, an X-axis sliding assembly 30, a Y-axis sliding assembly 40, a rotation assembly 50, and a carrier turntable 60, the carrier turntable 60 having a fixed rotation center. The drive mechanism 20 is mounted on the mounting substrate 10, and the output end of the drive mechanism 20 is connected to the X-axis sliding assembly 30. The X-axis sliding assembly 30 is restricted to be slidably mounted on the mounting substrate 10 along the X-axis direction. The Y-axis sliding assembly 40 is restricted to be slidably mounted on the X-axis sliding assembly 30 along the Y-axis direction. The rotation assembly 50 includes an inner rotating part 51 and an outer rotating part 52, the outer rotating part 52 being coaxially sleeved outside the inner rotating part 51, the outer rotating part 52 and the inner rotating part 51 being able to rotate freely relative to each other, the outer rotating part 52 being fixedly connected to the carrier turntable 60, and the inner rotating part 51 being fixedly connected to the Y-axis sliding assembly 40. When the drive mechanism 20 drives the X-axis sliding assembly 30 to move linearly along the X-axis, it drives the bearing turntable 60 to rotate.

[0032] In this embodiment of the invention, the wafer turntable rotation adjustment device 1 includes a mounting substrate 10, a drive mechanism 20, an X-axis sliding assembly 30, a Y-axis sliding assembly 40, a rotation assembly 50, and a carrier turntable 60 with a fixed rotation center. The drive mechanism 20 is mounted on the mounting substrate 10. The X-axis sliding assembly 30 is slidably mounted on the mounting substrate 10, and the output end of the drive mechanism 20 is connected to the X-axis sliding assembly 30. The Y-axis sliding assembly 40 is slidably mounted on the X-axis sliding assembly 30. The rotation assembly 50 includes an inner rotating part 51 and an outer rotating part 52 coaxially sleeved outside the inner rotating part 51. The outer rotating part 52 and the inner rotating part 51 can rotate freely relative to each other. The outer rotating part 52 is fixedly connected to the carrier turntable 60, and the inner rotating part 51 is fixedly connected to the Y-axis sliding assembly 40. The drive mechanism 20, with its driving force along the X-axis, drives the X-axis sliding assembly 30 to move linearly, thus providing a rotational driving force for the carrier turntable 60. Simultaneously, the Y-axis sliding assembly 40 provides freedom in the Y-axis direction, and the rotation assembly 50 provides freedom in the rotation angle, thereby driving the carrier turntable 60 to rotate. The coordinated arrangement of the rotation assembly 50, drive mechanism 20, X-axis sliding assembly 30, and Y-axis sliding assembly 40 simplifies the rotation control process, facilitates assembly and maintenance, and improves adjustment accuracy. Furthermore, the nested rotation design of the outer rotating part 52 and the inner rotating part 51 enhances the structural stability of the device, making the rotation process smoother.

[0033] In some embodiments, the rotating assembly 50 includes a ball bearing 53 and a guide shaft 54. The outer ring of the ball bearing 53 is fixedly connected to the carrier turntable 60. The upper end of the guide shaft 54 ​​is fixedly mounted to the inner ring of the ball bearing 53, and the lower end of the guide shaft 54 ​​is fixedly mounted to the Y-axis sliding assembly 40. The outer ring of the ball bearing 53 is defined as the outer rotating portion 52, and the guide shaft 54 ​​and the inner ring of the ball bearing 53 are defined as the inner rotating portion 51.

[0034] Since the inner ring of the ball bearing 53 is fixedly connected to the guide shaft 54, the outer ring of the ball bearing 53 and the bearing turntable 60 fixed on the outer ring of the ball bearing 53 can rotate relative to the inner ring of the ball bearing 53. Furthermore, the rotating assembly 50 formed by the combination of the ball bearing 53 and the guide shaft 54 ​​has the advantages of small size and high structural stability.

[0035] It is understood that the outer rotating part 52 and the inner rotating part 51 are defined only for ease of understanding and distinction, and are not considered as limitations on this utility model.

[0036] Specifically, a connecting block 70 is fixedly connected to a position on the side wall of the bearing turntable 60. The connecting block 70 has a first through hole 71 extending vertically, and the outer ring of the ball bearing 53 is fixedly installed in the first through hole 71. The connecting block 70 facilitates the connection between the bearing turntable 60 and the outer ring of the ball bearing 53.

[0037] In some embodiments, an X-axis linear slide rail 11 is fixedly mounted on the mounting base plate 10, and the X-axis sliding assembly 30 includes an X-axis mounting plate 31 and a first mounting block 32. An X-axis slider 33 is fixedly mounted on the X-axis mounting plate 31, and the X-axis slider 33 is slidably mounted on the X-axis linear slide rail 11. The first mounting block 32 is fixedly mounted on the X-axis mounting plate 31.

[0038] In some embodiments, the drive mechanism 20 includes a ball screw 21, a first mounting block 32, and a ball screw 21 in a helical engagement. When the ball screw 21 rotates, it drives the first mounting block 32 to slide in the X-axis direction. A screw nut 23 is installed in conjunction with the ball screw 21 and is fixedly mounted on the first mounting block 32. The drive motor 22 drives the ball screw 21 to rotate, and the ball screw 21 and screw nut 23 work together to convert the rotational motion into linear motion, driving the first mounting block 32 to move linearly along the X-axis, providing rotational driving force for the turntable 60.

[0039] Specifically, the drive mechanism 20 also includes a drive motor 22, and a ball screw 21 is fixedly connected to the output end of the drive motor 22.

[0040] In a specific example, the ball screw 21 is fixedly connected to the shaft of the drive motor 22 via fasteners (not shown). When the drive motor 22 starts, the ball screw 21 rotates together with the shaft of the drive motor 22. The ball screw 21 is a preloaded ball screw. Using a preloaded ball screw eliminates axial backlash, improves the accuracy and rigidity of the ball screw 21, and is beneficial to the rotation accuracy and durability of the wafer turntable rotation adjustment device 1.

[0041] Specifically, the drive motor 22 is fixedly mounted on the motor mounting base 24, which in turn is fixedly mounted on the mounting base 10. The motor mounting base 24 facilitates the fixed mounting of the drive motor 22.

[0042] In some embodiments, the Y-axis sliding assembly 40 includes a second mounting block 41, an inner rotating part 51 is fixedly connected to the second mounting block 41, a Y-axis slider 42 is fixedly mounted on the second mounting block 41, a Y-axis linear slide rail 12 is fixedly mounted on the first mounting block 32, and the Y-axis slider 42 is slidably mounted on the Y-axis linear slide rail 12.

[0043] Specifically, the Y-axis sliding assembly 40 also includes a Y-axis mounting plate 43, which is fixedly mounted on the first mounting block 32, and the Y-axis linear slide rail 12 is fixedly mounted on the Y-axis mounting plate 43. By setting the Y-axis mounting plate 43, it is convenient to install the Y-axis linear slide rail 12.

[0044] Specifically, the lower flange of the guide shaft 54 ​​is connected to the Y-axis slider 42. Of course, this utility model does not limit this.

[0045] In summary, the load-bearing turntable 60 of this utility model is driven by the drive motor 22 and the ball screw 21 to move along the X-axis direction connected to the first mounting block 32, thereby providing the driving force for rotation. The X-axis sliding assembly 30, the Y-axis sliding assembly 40 and the rotating assembly 50 provide the degrees of freedom for the direction and angle of rotation. The X-axis and Y-axis directions are both limited by the combination of linear slide rails and sliders. The rotating assembly 50 uses ball bearings 53 and guide shafts 54. The parts structure is relatively simple and easy to install and maintain, which helps to reduce costs.

[0046] This utility model embodiment also discloses a device for wafer inspection, including the wafer turntable rotation adjustment device 1 as described above.

[0047] The above-disclosed examples are merely preferred embodiments of the present utility model, intended to facilitate understanding and implementation by those skilled in the art. They should not be construed as limiting the scope of the present utility model. Therefore, any equivalent variations made in accordance with the scope of the present utility model patent shall still fall within the scope of the present utility model.

Claims

1. A wafer turntable rotation adjustment device, characterized in that, It includes a mounting base plate, a drive mechanism, an X-axis sliding assembly, a Y-axis sliding assembly, a rotating assembly, and a carrier turntable, wherein the carrier turntable has a fixed rotation center; The drive mechanism is mounted on the mounting base plate, and the output end of the drive mechanism is connected to the X-axis sliding assembly; The X-axis sliding assembly is restricted to be slidably mounted on the mounting base plate along the X-axis direction; The Y-axis sliding assembly is restricted to be slidably mounted on the X-axis sliding assembly along the Y-axis direction; The rotating assembly includes an inner rotating part and an outer rotating part. The outer rotating part is coaxially sleeved on the outside of the inner rotating part. The outer rotating part and the inner rotating part can rotate freely relative to each other. The outer rotating part is fixedly connected to the bearing turntable, and the inner rotating part is fixedly connected to the Y-axis sliding assembly. When the drive mechanism drives the X-axis sliding assembly to move linearly along the X-axis, it causes the bearing turntable to rotate.

2. The wafer turntable rotation adjustment device as described in claim 1, characterized in that, The rotating component includes: A ball bearing, wherein the outer ring of the ball bearing is fixedly connected to the bearing turntable; A guide shaft, the upper end of which is fixedly installed on the inner ring of the ball bearing, and the lower end of which is fixedly installed on the Y-axis sliding assembly; The outer ring of the ball bearing is defined as the outer rotating part, and the guide shaft and the inner ring of the ball bearing are defined as the inner rotating part.

3. The wafer turntable rotation adjustment device as described in claim 2, characterized in that, A connecting block is fixedly connected to a position on the side wall of the bearing turntable. The connecting block has a first through hole that runs vertically through it. The outer ring of the ball bearing is fixedly installed in the first through hole.

4. The wafer turntable rotation adjustment device as described in claim 1, characterized in that, An X-axis linear slide rail is fixedly mounted on the mounting base plate; the X-axis sliding assembly includes an X-axis mounting plate and a first mounting block, an X-axis slider is fixedly mounted on the X-axis mounting plate, the X-axis slider is slidably mounted on the X-axis linear slide rail, and the first mounting block is fixedly mounted on the X-axis mounting plate.

5. The wafer turntable rotation adjustment device as described in claim 4, characterized in that, The drive mechanism includes a ball screw, and the first mounting block and the ball screw are helically engaged. When the ball screw rotates, it drives the first mounting block to slide in the X-axis direction.

6. The wafer turntable rotation adjustment device as described in claim 5, characterized in that, The drive mechanism also includes a drive motor, and the ball screw is fixedly connected to the output end of the drive motor.

7. The wafer turntable rotation adjustment device as described in claim 6, characterized in that, The drive motor is fixedly mounted on the motor mounting base, and the motor mounting base is fixedly mounted on the mounting base plate.

8. The wafer turntable rotation adjustment device as described in claim 4, characterized in that, The Y-axis sliding assembly includes a second mounting block, the inner rotating part is fixedly connected to the second mounting block, and a Y-axis slider is fixedly mounted on the second mounting block; a Y-axis linear slide rail is fixedly mounted on the first mounting block, and the Y-axis slider is slidably mounted on the Y-axis linear slide rail.

9. The wafer turntable rotation adjustment device as described in claim 8, characterized in that, The Y-axis sliding assembly further includes a Y-axis mounting plate, which is fixedly mounted on the first mounting block, and the Y-axis linear slide rail is fixedly mounted on the Y-axis mounting plate.

10. An apparatus for wafer inspection, characterized in that, Includes the wafer turntable rotation adjustment device as described in any one of claims 1 to 9.

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