Glue scraping tool for silicon carbide seed crystal graphite cover

Abstract

The utility model relates to a glue scraping tool for a silicon carbide seed crystal graphite cover, which comprises a tool rack, a mounting rack, a rotary driving assembly, a lifting assembly, a base assembly, a universal spherical support column, a graphite cover positioning disc, a seed crystal graphite cover, a fixed bracket, a linear guide rail, a sliding block, a knife rest assembly and a correction assembly, the rotary driving assembly and the lifting assembly are both arranged on the mounting frame, the lower end of the lifting assembly is connected with the rotary driving assembly, the upper end of the lifting assembly is connected with the mounting frame, the base assembly is arranged on the mounting frame, and the lower end of the universal spherical supporting column is rotationally connected with the base assembly. The seed crystal graphite cover is arranged on the graphite cover positioning disc; the fixing support is connected to the mounting frame, the linear guide rail is connected to the fixing support, and the tool rest assembly and the correction assembly are arranged at intervals and connected to the linear guide rail through sliding blocks. According to the utility model, the film thickness consistency and uniformity of glue can be ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to a glue scraping frock technical field, concretely relates to a glue scraping frock for silicon carbide seed crystal graphite cover. BACKGROUND

[0002] As the third generation semiconductor material, silicon carbide has the characteristics of wide band gap, high breakdown field strength, high thermal conductivity, high electron saturation rate and strong anti-radiation ability, and is more suitable for manufacturing high-temperature, high-frequency, large-frequency and anti-radiation devices, and can be widely applied in high-voltage, high-frequency, high-temperature, high-reliability and other fields, including radio frequency communication, radar, satellite, power management, automobile electronics, industrial power electronics, etc.

[0003] At present, the most commonly used method for preparing silicon carbide is physical vapor transport (PVT). This process requires crystalline growth on a piece of silicon carbide seed crystal. The seed crystal needs to be bonded to the graphite cover by glue. When bonding, glue needs to be applied on the graphite cover. A thin piece of silicon carbide seed crystal is attached to the graphite cover. During the preparation process, the firm combination between the seed crystal and the graphite cover needs to be ensured. The uniformity and thickness of the glue layer have high requirements. If the glue is not uniform in thickness, the seed crystal will be broken down, and the back of the seed crystal will sublimate, inducing the formation of microtubules, dislocations and other defects, thereby causing the silicon carbide to be scrapped or reducing the growth quality of the silicon carbide.

[0004] In the prior art, manual glue scraping is mostly used. The thickness and uniformity of the glue are difficult to guarantee. In order to guarantee the uniformity of the glue layer, a glue scraping frock for silicon carbide seed crystal graphite cover is designed to solve the problem of poor film thickness consistency and uniformity of the glue layer in the prior art. SUMMARY

[0005] To solve the problems in the background art, the utility model provides a glue scraping frock for silicon carbide seed crystal graphite cover. The utility model can guarantee the film thickness consistency and uniformity of the glue.

[0006] In order to solve the above problems, the utility model discloses the following technical scheme: a kind of silicon carbide seed crystal graphite cover is scraped with glue tooling, including tooling rack, multiple foma casters are installed in the bottom array of tooling rack;Workbench lifting mechanism, including mounting bracket, rotary drive component and lifting assembly, the mounting bracket is arranged on the tooling rack, the rotary drive component is arranged below the mounting bracket, the lifting assembly is arranged on the mounting bracket, the lower end of the lifting assembly is connected with the rotary drive component drive, and the upper end is connected with the movable part lifting drive of the mounting bracket;Universal adjusting mechanism, including base assembly, universal spherical column, graphite cover positioning disc and seed crystal graphite cover, the base assembly is arranged on the movable part of the mounting bracket, the lower spherical head end of the universal spherical column is rotatably connected with the base assembly, the graphite cover positioning disc is connected on the upper rod end of the universal spherical column, and the seed crystal graphite cover is detachably arranged on the graphite cover positioning disc;And tool rest moving correction mechanism, including fixed support, linear guide rail, sliding block, tool rest assembly and correction component, the fixed support is connected and arranged on the mounting bracket, the end of the linear guide rail is connected on the fixed support, the sliding block is slidably installed on the linear guide rail, the tool rest assembly and the correction component are oppositely spaced and are slidably connected on the linear guide rail by the sliding block.

[0007] Further, the mounting bracket includes a plurality of linear bearings and a plurality of guide columns, and a bottom plate, a lifting plate and a top plate are sequentially and spacedly arranged from bottom to top, the bottom plate is connected to the tooling rack, lower ends of the plurality of guide columns are connected to the bottom plate, upper ends of the plurality of guide columns penetrate the lifting plate and are connected to the top plate, the plurality of linear bearings are movably sleeved on the plurality of guide columns one by one and are fixedly connected to the lifting plate, and the upper end of the lifting assembly is connected to the lifting plate.

[0008] Further, the rotary drive component includes a wave wheel hand wheel, a flat key, a connecting shaft, a shaft sleeve and a shaft seat, the shaft seat is connected to the tooling rack, the connecting shaft is transversely arranged in the shaft seat and is connected to the shaft seat through the sleeved shaft sleeve, the outer end of the connecting shaft is provided with an external thread and is engaged with the rod portion of the lifting assembly, and the wave wheel hand wheel is mounted on the connecting shaft through the flat key.

[0009] Still further, the lifting assembly includes a floating joint, a connecting top rod and a lead screw, which are sequentially arranged from top to bottom, the upper end of the floating joint is connected to the movable part of the mounting bracket, the connecting top rod is inserted into the lower end of the floating joint, the upper end of the lead screw is inserted into the lower end of the connecting top rod, the lower end of the lead screw penetrates the shaft seat and is connected to the connecting shaft.

[0010] Further, the base assembly comprises a support base, a support pressing plate, an adjustable handle and a locking adjusting structure, the support base is arranged on the movable part of the mounting frame at the upper end of the lifting assembly, the support pressing plate is arranged above the support base in a clearance fit, a mounting hole is formed in the center of the support base and the support pressing plate, the lower ball head end of the universal spherical column is arranged in the mounting hole of the support base and the support pressing plate, and the adjustable handle and the locking adjusting structure are arranged between the support base and the support pressing plate on the two sides of the universal spherical column.

[0011] Further, the universal adjusting mechanism further comprises a fastening structure arranged on the graphite cover positioning disc and the seed crystal graphite cover, the fastening structure comprises a graphite pressing plate, a spring pull rod, a spring sleeve and a compression spring, the lower end of the spring sleeve is inserted into the top surface of the graphite cover positioning disc, the lower end of the spring pull rod is arranged in the spring sleeve, the upper end of the spring pull rod passes out of the spring sleeve, the compression spring is elastically sleeved on the spring pull rod in the spring sleeve, and the graphite pressing plate is arranged on the upper end of the spring pull rod and is pressed on the bottom surface of the seed crystal graphite cover.

[0012] Further, the knife holder assembly comprises a knife holder fixed plate, a knife edge ruler support and a knife edge ruler body, the end of the knife holder fixed plate is connected to the sliding block, the knife edge ruler support is connected to the knife holder fixed plate through screws, and the knife edge ruler body is detachably arranged on the knife edge ruler support, and the direction of the cutting edge of the knife edge ruler body is perpendicular to the direction of the linear guide rail.

[0013] Further, the correction assembly comprises a correction disc fixed plate, a correction disc body and a correction disc adjusting structure, the end of the correction disc fixed plate is connected to the sliding block, the correction disc adjusting structure is arranged on the correction disc fixed plate, and the correction disc body is connected to the lower end of the correction disc adjusting structure, and the bottom surface of the correction disc body is used for abutting correction with the seed crystal graphite cover.

[0014] Still further, the correction disc adjusting structure comprises a support plate, an adjusting screw, a short shaft and a copper sleeve, the support plate is installed on the correction disc fixed plate through screws, the adjusting screw is arranged on the support plate in a penetrating manner, the copper sleeve is fixed on the correction disc fixed plate below the support plate through screws, the short shaft is arranged in the copper sleeve, the lower end of the short shaft is installed on the correction disc body through screws, the upper end of the short shaft is threadedly connected with a nut, and the lower end of the adjusting screw abuts against the upper end surface of the short shaft.

[0015] Further, the correction disc adjusting structure further comprises a limiting screw penetrating the side surface of the copper sleeve, the limiting screw is fixed on the copper sleeve through a nut, the side surface of the short shaft is provided with a vertical limiting slot, and the inner end of the limiting screw is matched with the vertical limiting slot.

[0016] The graphite cover positioning device has the advantages that the seed crystal graphite cover is positioned on the graphite cover positioning disc, the correction assembly is moved to the upper side of the seed crystal graphite cover through the sliding block along the linear guide rail, the movable part of the mounting frame is driven to move upward by the lifting assembly, the seed crystal graphite cover and the correction assembly can be attached, the universal adjusting mechanism is used for ensuring the attachment of the correction assembly and the seed crystal graphite cover, the cutter holder assembly is moved to the correction assembly to realize tool setting, the glue placed on the seed crystal graphite cover is evenly coated by the cutter holder assembly through the sliding block along the linear guide rail, and the film thickness consistency and uniformity of the glue are ensured. BRIEF DESCRIPTION OF DRAWINGS

[0017] The utility model is further explained in connection with the drawings and examples.

[0018] Figure 1 It is the three-dimensional structure schematic diagram of the utility model;

[0019] Figure 2 It is the structure schematic diagram of the workbench lifting mechanism;

[0020] Figure 3 It is the structure schematic diagram of the rotary drive assembly;

[0021] Figure 4 It is the structure schematic diagram of the universal adjusting mechanism;

[0022] Figure 5 It is the structure schematic diagram of the cutter holder moving correction mechanism;

[0023] Figure 6 It is the top view of the cutter holder moving correction mechanism;

[0024] Figure 7 It is the structure schematic diagram of the correction assembly.

[0025] 1, tooling bench; 2, form wheels; 3, workbench lifting mechanism; 4, mounting frame; 5, rotary drive assembly; 6, lifting assembly; 7, universal adjusting mechanism; 8, base assembly; 9, universal spherical column; 10, graphite cover positioning disc; 11, seed crystal graphite cover; 12, tool holder moving correction mechanism; 13, fixed support; 14, linear guide rail; 15, sliding block; 16, tool holder assembly; 17, correction assembly; 18, linear bearing; 19, guide column; 20, bottom plate; 21, lifting plate; 22, top plate; 23, impeller hand wheel; 24, flat key; 25, connecting shaft; 26, shaft sleeve; 27, shaft seat; 28, floating joint; 29, connecting top rod; 30, lead screw; 31, support base; 32, support pressing plate; 33, adjustable handle; 34, locking adjusting structure; 35, fastening structure; 36, graphite pressing plate; 37, spring pull rod; 38, spring sleeve; 39, compression spring; 40, tool holder fixing plate; 41, tool edge ruler support; 42, tool edge ruler body; 43, correction disc fixing plate; 44, correction disc body; 45, correction disc adjusting structure; 46, support plate; 47, adjusting screw; 48, short shaft; 49, copper sleeve; 50, limit screw. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0027] The seed crystal graphite cover 11 is positioned on the graphite cover positioning disc 10, the correction assembly 17 is moved to above the seed crystal graphite cover 11 along the linear guide rail 14 through the sliding block 15, the movable part of the mounting frame 4 is driven to make ascending movement by the lifting assembly 6, the seed crystal graphite cover 11 can be combined with the correction assembly 17, the universal adjusting mechanism 7 is used to ensure the combination degree of the correction assembly 17 and the seed crystal graphite cover 11, the tool holder assembly 16 is moved to the correction assembly 17 to realize tool setting, the glue placed on the seed crystal graphite cover 11 is evenly coated by the parallel movement of the tool holder assembly 16 along the linear guide rail 14 through the sliding block 15, and the film thickness consistency and uniformity of the glue are ensured.

[0028] Specifically, as Figures 1 to 7As shown, a kind of carbonized silicon seed crystal graphite cover 11 is scraped with glue tooling, including tooling rack 1, the bottom of the tooling rack 1 is installed multiple form wheels 2;Workbench lifting mechanism 3, including mounting bracket 4, rotary drive component 5 and lifting component 6, the mounting bracket 4 is arranged on the tooling rack 1, the rotary drive component 5 is arranged below the mounting bracket 4, the lifting component 6 is arranged on the mounting bracket 4, the lower end of the lifting component 6 is connected with the rotary drive component 5 drive, and the upper end is connected with the movable part lifting drive of the mounting bracket 4;Universal adjusting mechanism 7, including base component 8, universal spherical column 9, graphite cover positioning disc 10 and seed crystal graphite cover 11, the base component 8 is arranged on the movable part of the mounting bracket 4, the lower spherical head end of the universal spherical column 9 is rotatably connected with the base component 8, the graphite cover positioning disc 10 is connected to the upper rod end of the universal spherical column 9, and the seed crystal graphite cover 11 is detachably arranged on the graphite cover positioning disc 10;And tool rest moving correction mechanism 12, including fixed support 13, linear guide rail 14, sliding block 15, tool rest component 16 and correction component 17, the fixed support 13 is connected and arranged on the mounting bracket 4, the end of the linear guide rail 14 is connected on the fixed support 13, the sliding block 15 is slidably installed on the linear guide rail 14, and the tool rest component 16 and the correction component 17 are relatively spaced apart and are slidably connected on the linear guide rail 14 by the sliding block 15.

[0029] Further, the mounting bracket 4 includes multiple linear bearings 18 and multiple guide columns 19, and bottom plate 20, lifting plate 21 and top plate 22 are sequentially and spaced apart from bottom to top, the bottom plate 20 is connected on the tooling rack 1, the lower end of multiple guide columns 19 is connected with the bottom plate 20, the upper end of multiple guide columns 19 penetrates the lifting plate 21 and is connected with the top plate 22, multiple linear bearings 18 are movably sleeved on multiple guide columns 19 one by one and are fixedly connected with the lifting plate 21, and the upper end of the lifting component 6 is connected with the lifting plate 21.

[0030] Further, the rotary drive component 5 includes impeller hand wheel 23, flat key 24, connecting shaft 25, shaft sleeve 26 and shaft seat 27, the shaft seat 27 is connected on the tooling rack 1, the connecting shaft 25 is transversely arranged in the shaft seat 27 and is connected with the shaft seat 27 by sleeving the shaft sleeve 26, the outer end of the connecting shaft 25 is installed the impeller hand wheel 23 by the flat key 24, and external threads are formed in the connecting shaft 25 and are engaged with the rod part of the lifting component 6.

[0031] Further, the lifting assembly 6 comprises a floating joint 28, a connecting top rod 29 and a screw rod 30 arranged in sequence from top to bottom, the upper end of the floating joint 28 is connected with the movable part of the mounting frame 4, the connecting top rod 29 is inserted into the lower end of the floating joint 28, the upper end of the screw rod 30 is inserted into the lower end of the connecting top rod 29, and the lower end of the screw rod 30 is arranged in the shaft seat 27 and connected with the driving of the connecting shaft 25.

[0032] Further, the base assembly 8 comprises a bracket base 31, a bracket pressing plate 32, an adjustable handle 33 and a locking adjusting structure 34, the bracket base 31 is arranged on the movable part of the mounting frame 4 at the upper end of the lifting assembly 6, the bracket pressing plate 32 is arranged in clearance fit above the bracket base 31, the bracket base 31 and the bracket pressing plate 32 are provided with mounting holes at the centers, the lower ball head end of the universal spherical column 9 is arranged in the mounting holes of the bracket base 31 and the bracket pressing plate 32, the adjustable handle 33 and the locking adjusting structure 34 are arranged between the bracket base 31 and the bracket pressing plate 32 on both sides of the universal spherical column 9.

[0033] Further, the universal adjusting mechanism 7 further comprises a fastening structure 35 arranged on the graphite cover positioning disc 10 and the seed crystal graphite cover 11, the fastening structure 35 comprises a graphite pressing plate 36, a spring pull rod 37, a spring sleeve 38 and a compression spring 39, the lower end of the spring sleeve 38 is inserted into the top surface of the graphite cover positioning disc 10, the lower end of the spring pull rod 37 is arranged in the spring sleeve 38, the upper end of the spring pull rod 37 is arranged out of the spring sleeve 38, the compression spring 39 is elastically sleeved on the spring pull rod 37 in the spring sleeve 38, and the graphite pressing plate 36 is arranged on the upper end of the spring pull rod 37 and is pressed on the bottom surface of the seed crystal graphite cover 11.

[0034] Further, the knife holder assembly 16 comprises a knife holder fixed plate 40, a knife edge ruler support 41 and a knife edge ruler body 42, the end of the knife holder fixed plate 40 is connected with the sliding block 15, the knife edge ruler support 41 is connected with the knife holder fixed plate 40 through screws, the knife edge ruler body 42 is detachably arranged on the knife edge ruler support 41, and the direction of the blade of the knife edge ruler body 42 is perpendicular to the direction of the linear guide rail 14.

[0035] Further, the correction assembly 17 comprises a correction disc fixing plate 43, a correction disc body 44 and a correction disc adjusting structure 45, the end of the correction disc fixing plate 43 is connected with the sliding block 15, the correction disc adjusting structure 45 is arranged on the correction disc fixing plate 43, the correction disc body 44 is connected at the lower end of the correction disc adjusting structure 45, and the bottom surface of the correction disc body 44 is used for abutting against the seed crystal graphite cover 11 for correction.

[0036] Still further, the correction disc adjusting structure 45 comprises a support plate 46, an adjusting screw 47, a short shaft 48 and a copper sleeve 49, the support plate 46 is installed on the correction disc fixing plate 43 through a screw, the adjusting screw 47 is arranged through the support plate 46, the copper sleeve 49 is fixed on the correction disc fixing plate 43 below the support plate 46 through a screw, the short shaft 48 is arranged in the copper sleeve 49, the lower end of the short shaft 48 is installed on the correction disc body 44 through a screw, the upper end of the short shaft 48 is threadedly connected with a nut, and the lower end of the adjusting screw 47 abuts against the upper end surface of the short shaft 48.

[0037] Further, the correction disc adjusting structure 45 further comprises a limiting screw 50 arranged through the side surface of the copper sleeve 49, the limiting screw 50 is fixed on the copper sleeve 49 through a nut, the side surface of the short shaft 48 is provided with a vertical limiting groove, and the inner end of the limiting screw 50 is matched with the vertical limiting groove.

[0038] In use, the seed crystal graphite cover 11 is positioned on the graphite cover positioning disc 10 and fixed through the fastening structure 35, the correction assembly 17 is moved to above the seed crystal graphite cover 11 along the linear guide rail 14, the floating joint 28 is controlled to perform the jacking movement by rotating the wave wheel handle 23, so that the lifting plate 21 is moved upwards along the guide column 19, the universal adjusting mechanism 7 arranged on the lifting plate 21 is synchronously moved upwards, the abutting of the seed crystal graphite cover 11 and the correction disc body 44 can be realized, after abutting, the universal spherical column 9 is fixed by rotating the adjustable handle 33 to control the locking adjusting structure 34, so that the position of the seed crystal graphite cover 11 is prevented from being deviated, the universal adjusting mechanism 7 is used for ensuring the abutting degree of the correction assembly 17 and the seed crystal graphite cover 11, the tool rest assembly 16 is moved to the correction assembly 17, so that the tool setting of the tool edge body 42 is realized, the glue placed on the seed crystal graphite cover 11 can be uniformly coated by moving the tool edge body 42 along the linear guide rail 14 in parallel, and the film thickness consistency and uniformity of the glue are ensured.

[0039] The above merely describes the preferred embodiment of the utility model, and is not used to limit the utility model, and any modification, equivalent replacement, improvement and the like within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A kind of carbonized silicon seed crystal graphite cover with glue scraping tooling, it is characterized by, The utility model relates to a kind of tooling rack, which comprises: Tooling rack (1), the bottom array of the tooling rack (1) is installed multiple Foma casters (2); Workbench lifting mechanism (3), including mounting frame (4), rotary drive assembly (5) and lifting assembly (6), the mounting frame (4) is set on the tooling rack (1), the rotary drive assembly (5) is set below the mounting frame (4), the lifting assembly (6) is set on the mounting frame (4), the lower end of the lifting assembly (6) is driven to be connected with the rotary drive assembly (5), and the upper end is connected with the movable part lifting drive of the mounting frame (4); Universal adjusting mechanism (7), including base assembly (8), universal spherical column (9), graphite cover positioning disc (10) and seed crystal graphite cover (11), the base assembly (8) is set on the movable part of the mounting frame (4), the lower ball head end of the universal spherical column (9) is rotatably connected with the base assembly (8), the graphite cover positioning disc (10) is connected on the upper rod end of the universal spherical column (9), and the seed crystal graphite cover (11) is detachably set on the graphite cover positioning disc (10);And Tool holder moving correction mechanism (12), including fixed support (13), linear guide (14), sliding block (15), tool holder assembly (16) and correction assembly (17), the fixed support (13) is connected and set on the mounting frame (4), the end of the linear guide (14) is connected on the fixed support (13), the sliding block (15) is slidably installed on the linear guide (14), the tool holder assembly (16) and the correction assembly (17) are oppositely spaced and are slidably connected on the linear guide (14) by the sliding block (15).

2. The seed crystal graphite cover scraping tooling of claim 1, wherein: The mounting frame (4) includes multiple linear bearings (18) and multiple guide columns (19), and bottom plate (20), lifting plate (21) and top plate (22) are sequentially and spacedly arranged from bottom to top, the bottom plate (20) is connected on the tooling rack (1), the lower end of multiple guide columns (19) is connected with the bottom plate (20), the upper end of multiple guide columns (19) penetrates the lifting plate (21) and is connected with the top plate (22), multiple linear bearings (18) are movably sleeved on multiple guide columns (19) one by one and fixedly connected with the lifting plate (21), and the upper end of the lifting assembly (6) is connected with the lifting plate (21).

3. The seed graphite cover scraping tooling of claim 1, wherein: The rotary drive assembly (5) includes impeller hand wheel (23), flat key (24), connecting shaft (25), shaft sleeve (26) and shaft seat (27), the shaft seat (27) is connected on the tooling rack (1), the connecting shaft (25) is transversely arranged in the shaft seat (27) and is connected with the shaft seat (27) by sleeving the shaft sleeve (26), the outer end of the connecting shaft (25) is installed the impeller hand wheel (23) by the flat key (24), and external thread is formed on the connecting shaft (25) and engaged with the rod part of the lifting assembly (6).

4. The seed crystal graphite cover scraping tooling of claim 3, wherein: The lifting assembly (6) comprises a floating joint (28), a connecting top rod (29) and a screw rod (30) arranged in sequence from top to bottom, the upper end of the floating joint (28) is connected with the movable part of the mounting frame (4), the connecting top rod (29) is inserted into the lower end of the floating joint (28), the upper end of the screw rod (30) is inserted into the lower end of the connecting top rod (29), and the lower end of the screw rod (30) is arranged in the shaft seat (27) and connected with the connecting shaft (25).

5. The apparatus for coating a silicon carbide seed crystal with graphite according to claim 1, wherein: The base assembly (8) comprises a bracket base (31), a bracket pressing plate (32), an adjustable handle (33) and a locking adjusting structure (34), the bracket base (31) is arranged on the movable part of the mounting frame (4) at the upper end of the lifting assembly (6), the bracket pressing plate (32) is arranged in clearance fit above the bracket base (31), the bracket base (31) and the bracket pressing plate (32) are provided with mounting holes at the centers, the lower ball head end of the universal spherical column (9) is arranged in the mounting holes of the bracket base (31) and the bracket pressing plate (32), and the adjustable handle (33) and the locking adjusting structure (34) are arranged between the bracket base (31) and the bracket pressing plate (32) on the two sides of the universal spherical column (9).

6. The seed graphite cover scraping tooling of claim 1, wherein: The universal adjusting mechanism (7) further comprises a fastening structure (35) arranged on the graphite cover positioning disc (10) and the seed crystal graphite cover (11), the fastening structure (35) comprises a graphite pressing plate (36), a spring pull rod (37), a spring sleeve (38) and a compression spring (39), the lower end of the spring sleeve (38) is inserted into the top surface of the graphite cover positioning disc (10), the lower end of the spring pull rod (37) is arranged in the spring sleeve (38), the upper end of the spring pull rod (37) is arranged out of the spring sleeve (38), the compression spring (39) is elastically sleeved on the spring pull rod (37) in the spring sleeve (38), and the graphite pressing plate (36) is arranged on the upper end of the spring pull rod (37) and is pressed on the seed crystal graphite cover (11).

7. The apparatus according to claim 1, characterized in that: The tool holder assembly (16) comprises a tool holder fixing plate (40), a tool edge ruler support (41) and a tool edge ruler body (42), the end of the tool holder fixing plate (40) is connected to the sliding block (15), the tool edge ruler support (41) is connected to the tool holder fixing plate (40) by screws, the tool edge ruler body (42) is detachably arranged on the tool edge ruler support (41), and the direction of the cutting edge of the tool edge ruler body (42) is perpendicular to the direction of the linear guide rail (14).

8. The apparatus for coating a silicon carbide seed crystal with graphite according to claim 1, wherein: The correction assembly (17) comprises a correction disc fixing plate (43), a correction disc body (44) and a correction disc adjusting structure (45), the end of the correction disc fixing plate (43) is connected with the slider (15), the correction disc adjusting structure (45) is arranged on the correction disc fixing plate (43), the correction disc body (44) is connected at the lower end of the correction disc adjusting structure (45), and the bottom surface of the correction disc body (44) is used for abutting correction with the seed crystal graphite cover (11).

9. The apparatus according to claim 8, characterized in that: The correction disc adjusting structure (45) comprises a support plate (46), an adjusting screw (47), a short shaft (48) and a copper sleeve (49), the support plate (46) is installed on the correction disc fixing plate (43) through a screw, the adjusting screw (47) is arranged on the support plate (46) in a penetrating mode, the copper sleeve (49) is fixed on the correction disc fixing plate (43) below the support plate (46) through a screw, the short shaft (48) is arranged in the copper sleeve (49), the lower end of the short shaft (48) is installed with the correction disc body (44) through a screw, the upper end of the short shaft (48) is threadedly connected with a nut, and the lower end of the adjusting screw (47) is abutted against the upper end surface of the short shaft (48).

10. The apparatus according to claim 9, wherein the apparatus further comprises a scraper. The correction disc adjusting structure (45) further comprises a limiting screw (50) arranged in the side surface of the copper sleeve (49), the limiting screw (50) is fixed on the copper sleeve (49) through a nut, the side surface of the short shaft (48) is provided with a vertical limiting groove, and the inner end of the limiting screw (50) is matched with the vertical limiting groove.

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