Pin hole expansion device of mask cleaning machine

Abstract

The utility model relates to the technical field of mask cleaning, and discloses a Pin hole expansion device of a mask cleaning machine, which comprises an expansion board and an expansion hole arranged on the expansion board, the expansion hole can be detachably fixed together with a support PIN column, at least two fixing holes are arranged on the expansion board, and the expansion hole and the support PIN column are detachably fixed together. And the fixing holes are fixedly connected with the PIN column mounting holes in the turntable in a threaded manner through fixing screws. According to the utility model, the Pin column mounting hole site on the existing turntable is used for expansion, the original device of the cleaning machine is not changed, the expansion device is simple to use and low in cost, and the cleaning of mask plates with more sizes can be realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to mask cleaning technical field, concretely is a kind of Pin hole extension device of mask cleaning machine. BACKGROUND

[0002] The main production process of mask is chrome plating, glue coating, photoetching, developing, etching and stripping, and it needs to be cleaned multiple times in the whole production process, and the cleaning before glue coating is particularly important, because the effect of cleaning directly determines the quality of photoresist film formation.The mask cleaning machine adopts rotating cleaning mode, and the mask is placed in the cleaning machine and rotates with the turntable, and the mask is cleaned by spraying liquid or pure water on the film surface, and the mask that can be cleaned by the cleaning machine has certain size requirements, and some special size or new size masks that exceed the installation hole position of Pin column of the cleaning machine cannot be cleaned. SUMMARY

[0003] (I) technical problem solved

[0004] In view of the deficiencies of the prior art, the utility model provides a Pin hole extension device of mask cleaning machine, which solves the problem that the existing mask cleaning machine cannot cope with some special size masks that exceed the installation hole position of Pin column when supporting and cleaning the masks.

[0005] (II) technical scheme

[0006] To achieve the above purpose, the utility model realizes the following technical scheme:

[0007] A Pin hole extension device of mask cleaning machine, comprising an extension plate and an extension hole provided on the extension plate, the extension hole can be detachably fixed with the supporting Pin column, the extension plate is provided with at least two fixing holes, and the fixing holes are screw thread fixedly connected with the Pin column mounting hole on the turntable through fixing screws.

[0008] Preferably, the extension hole inner cavity is provided with internal threads and can be screw connected with the lower part of the supporting Pin column.

[0009] Preferably, the plane shape of the extension plate is triangular, circular, square or rhombic.

[0010] Preferably, the spacing between the fixing holes is provided with multiple specifications, and the fixing holes with multiple specifications can be installed in a group of Pin column mounting holes on the turntable.

[0011] (III) beneficial effects

[0012] The utility model has the following beneficial effects:

[0013] The Pin hole expansion device of the mask cleaning machine can quickly install and arrange the whole expansion plate in the PIN column mounting hole of the turntable through the fixing hole and the fixing screw, and can be quickly and fixedly arranged with the supporting PIN column through the expansion hole, so that personnel can adjust the installation position of the expansion plate on the turntable according to the actual cleaning mask size, and then cooperate with the PIN column mounting hole of the original turntable and the supporting PIN column to support and limit the mask of a special size. The device can expand the existing PIN column mounting hole, without changing the original device of the cleaning machine, and is simple to use and low in cost. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a layout structure diagram of the existing turntable and supporting PIN column;

[0015] Figure 2 It is a schematic diagram of the overall structure of the expansion plate of the utility model;

[0016] Figure 3 It is a layout structure diagram of the expansion plate and the turntable of the utility model under a certain size;

[0017] Figure 4 It is a layout structure diagram of the expansion plate and the supporting PIN column mounting of the utility model.

[0018] In the figure: 1, expansion plate; 2, fixed hole; 3, fixed screw; 4, expansion hole; 5, turntable; 6, PIN column mounting hole; 7, supporting PIN column. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0020] Please refer to Figure 1 The utility model provides a technical scheme: a Pin hole expansion device of a mask cleaning machine, which comprises an expansion plate 1 and an expansion hole 4 arranged on the expansion plate 1, the expansion hole 4 can be detachably fixed with a supporting PIN column 7, the expansion plate 1 is arranged with at least two fixed holes 2, and the fixed hole 2 is screw-fixedly connected with the PIN column mounting hole 6 on the turntable 5 through a fixed screw 3.

[0021] The utility model discloses, through the fixed hole 2 of setting, can cooperate with fixed screw 3 fast whole extension board 1 install arrangement in the PIN post installation hole 6 that the rotating disc 5 opened, through the extension hole 4 of setting, can be convenient for fast and support PIN post 7 installation fixed, and then personnel can according to the need of actual cleaning mask plate size, adjust the installation position of extension board 1 on the rotating disc 5, and then cooperate the PIN post installation hole 6 of rotating disc 5 originally and support PIN post 7 for special size mask plate support limit.

[0022] Referring to Figure 2 With 3 As shown in the drawings, in the embodiment, the inner cavity of the extension hole 4 is provided with internal threads and can be threadedly connected with the lower part of the support PIN post 7. By providing a threaded hole in the inner cavity of the extension hole 4 that cooperates with the support PIN post 7, the installation of the support PIN post 7 can be conveniently and quickly completed,

[0023] In the embodiment, the planar shape of the extension board 1 is triangular, circular, square or rhombic. In actual application, the extension board 1 can be processed into various shapes and sizes as needed, as long as it can meet the demand of extending the support PIN post 7, and the size and shape are not specifically limited.

[0024] Referring to Figure 4 As shown in the drawings, in the embodiment, the spacing between the fixed holes 2 is provided with multiple specifications, and the fixed holes 2 with multiple spacing specifications can be installed in at least one group of PIN post installation holes 6 on the rotating disc 5. Only one specific form of extension is shown in the application, and multiple sizes and positions can be extended using this principle, which are all within the protection scope of the patent.

[0025] It should be noted that, in this document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, inclusion of an element in a list of elements does not exclude other identical elements not expressly listed or inherent to the process, method, article, or apparatus.

[0026] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A pin hole expansion device for a mask cleaning machine, characterized in that: The extension plate and the extension hole arranged on the extension plate can be detachably fixed with the supporting PIN column, and at least two fixing holes are arranged on the extension plate and are threadedly connected with the PIN column mounting hole on the rotating disc through a fixing screw.

2. The pin hole expanding device of a mask cleaning machine according to claim 1, wherein: The inner cavity of the extension hole is provided with an internal thread and can be threadedly connected with the lower part of the supporting PIN column.

3. The pin hole expanding device of a mask cleaning machine according to claim 2, wherein: The planar shape of the extension plate is triangular, circular, square or rhombic.

4. The pin hole expanding device of a mask cleaning machine according to claim 3, wherein: The spacing between the fixing holes is provided with multiple specifications, and the fixing holes with multiple specifications can be installed in at least one group of PIN column mounting holes on the rotating disc.

Images