Copper wire ultralow-temperature wire drawing device for semiconductor

Abstract

The utility model relates to the technical field of wire drawing equipment, in particular to a copper wire ultralow-temperature wire drawing device for semiconductors, which comprises a support frame, a nitrogen storage mechanism and a wire winding mechanism, and a round hole is arranged at one end of the top of the support frame. According to the device, the nitrogen storage mechanism is arranged at one end of the top of the supporting frame, a copper wire penetrates through a plugging assembly and the interior of a wire hole mold, one end of the copper wire is conveniently fixed through a second fixing bolt and a third threaded hole, and liquid nitrogen is conveyed into a second liquid storage shell and a first liquid storage shell by opening a second ultralow-temperature ball valve; according to the copper wire winding device, the first liquid storage shell is arranged in the first liquid storage shell, then the copper wire in the first liquid storage shell is in an ultralow-temperature environment, then a third motor is started, the rotating winding rod is used for winding the copper wire, the second motor is started, the copper wire wound by the winding rod is more orderly, and the collected copper wire is prevented from being scattered and entangled; and therefore, the copper wire is drawn in an ultralow-temperature environment, and the use is more convenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to a copper wire ultra -low temperature wire drawing device for semiconductor belongs to wire drawing equipment technical field. BACKGROUND

[0002] The electrical conductivity of copper is superior to most metals, which makes it an ideal interconnection material in semiconductors. Compared with traditional aluminum interconnection, copper interconnection has lower resistance, which can effectively reduce the signal transmission delay on the chip. Therefore, copper wire is a key material in semiconductor manufacturing, mainly used for interconnection lines of chips. The application of copper wire in the semiconductor field is multifaceted. It not only improves the performance of the chip, but also helps to reduce costs and improve production efficiency. With the continuous progress of technology, the application of copper wire in semiconductor manufacturing will be more extensive. Liquid nitrogen environment has a positive effect on wire drawing performance, mainly in the improvement of strength and ductility, the change of deformation mechanism, the optimization of microstructure, the change of fracture characteristics and the improvement of plastic deformation ability. These changes help to improve the application performance of materials in extreme low temperature environment. Ultra -low temperature wire drawing device needs to be used under ultra -low temperature environment, but the existing ultra -low temperature wire drawing device has complex structure, inconvenient operation, and the copper wire collected after wire drawing is easy to scatter, and the practicality is poor. SUMMARY

[0003] The utility model aims at providing a copper wire ultra -low temperature wire drawing device for semiconductor to solve the problems in the above background.

[0004] To achieve the above purpose, the utility model provides the following technical scheme:

[0005] A copper wire ultra -low temperature wire drawing device for semiconductor, comprising:

[0006] The support frame is provided with a circular hole at one end of the top;

[0007] The nitrogen storage mechanism is fixed to one end of the top of the support frame;

[0008] The winding mechanism is fixed to the other end of the top of the support frame.

[0009] Further, the nitrogen storage mechanism comprises:

[0010] The fixed frame is fixedly connected with the top of the support frame, and the inner wall of the fixed frame is provided with a height adjusting assembly;

[0011] The connecting frame is fixedly connected with the inner bottom surface of the fixed frame;

[0012] The bottom of the liquid storage shell one is fixedly connected with the top of the connecting frame, the top of the liquid storage shell one is provided with a limiting slot, limiting notches one are formed at both ends of the limiting slot, threaded holes one are formed at both ends of the inner side wall of the limiting notches one, an ultralow-temperature ball valve one is fixedly connected with one end of the bottom, a wire drawing assembly is arranged on the inner wall of the liquid storage shell one, and sealing assemblies are arranged at both ends of the liquid storage shell one.

[0013] The liquid storage shell two is arranged at the top of the liquid storage shell one, limiting notches two are formed at both ends of the bottom of the liquid storage shell two, a limiting plate is fixedly connected with the bottom of the liquid storage shell two, and the limiting plate is slidably inserted into the inner wall of the limiting slot, an ultralow-temperature ball valve two is fixedly connected with the top of one end of the liquid storage shell two, a conveying pipe is fixedly connected with the top of the ultralow-temperature ball valve two, and the top of the conveying pipe is fixed with the top of the fixing frame.

[0014] Preferably, the height adjusting assembly comprises an L-shaped plate, one side of the L-shaped plate is fixedly connected with an inner side wall of the fixing frame, an oil cylinder is fixedly connected with the inner bottom surface of the L-shaped plate, a fixed plate is fixedly connected with the output end of the oil cylinder, one side of the fixed plate is fixedly connected with the outer side wall of the liquid storage shell two, telescopic plates are fixedly connected with both ends of the inner bottom surface of the L-shaped plate, and the top of the telescopic plate is fixedly connected with the bottom of the fixed plate.

[0015] Preferably, the sealing assembly comprises a limiting block, a limiting hole is formed at the middle position of the limiting block, the bottom of the limiting block is in contact with the inner side wall of the limiting notches one, two limiting holes are formed at the bottom of the limiting block, a fixed bolt one is arranged on the limiting block in a matched mode, and one end of the fixed bolt one is in threaded connection with the threaded hole two and the threaded hole one.

[0016] Preferably, the wire drawing assembly comprises:

[0017] A rectangular shell one, rectangular holes one are formed at both ends of the rectangular shell one, a bearing frame one is fixedly connected with the bottom of the rectangular shell one, and the bottom of the bearing frame one is fixedly connected with the inner bottom surface of the liquid storage shell one.

[0018] A bearing frame two is arranged at the top of the rectangular shell one, the bottom of the bearing frame two is fixedly connected with a rectangular shell two, rectangular holes two are formed at both ends of the bottom of the rectangular shell two, a connecting block is fixedly connected with the inner bottom surface of the rectangular shell two, an eyelet mold is fixedly connected with the top of the connecting block, and guide rollers are rotatably connected with the top of both ends of the bearing frame two.

[0019] Two positioning blocks are slidably inserted into the rectangular holes one and the rectangular holes two at corresponding positions.

[0020] Further, the wire winding mechanism comprises:

[0021] A rectangular plate, the bottom of the rectangular plate is fixedly connected with the top of the support frame.

[0022] The moving plate is arranged on one side of the rectangular plate;

[0023] The round shell is rotatably connected with one end of the moving plate, and the bottom of the round shell is slidably inserted into the inside of the round hole;

[0024] The winding rod is rotatably connected with the top of the round shell;

[0025] The third motor is fixedly connected with the inner bottom surface of the round shell, and the output end of the third motor is fixedly connected with the bottom of the winding rod.

[0026] Preferably, the top of one side of the rectangular plate is fixedly connected with a connecting plate, the bottom of the other end of the moving plate is provided with a second motor, the output end of the second motor is fixedly connected with a reciprocating lead screw through the side wall of the supporting frame, the reciprocating lead screw is screw-connected with the moving plate, the top of the inner side wall of the winding rod is provided with a connecting groove, the inner top surface of the connecting groove is provided with a threaded hole three, and the bottom of a second fixing bolt is screw-connected with the inside of the threaded hole three.

[0027] Compared with the prior art, the semiconductor copper wire ultra-low temperature drawing device has the advantages that:

[0028] 1. The nitrogen storage mechanism is arranged on one end of the top of the supporting frame, the copper wire is inserted into the inside of the plugging assembly and the wire eye mold, the one end of the copper wire is fixed by the second fixing bolt and the threaded hole three, the liquid nitrogen is transported into the inside of the second liquid storage shell and the first liquid storage shell by opening the ultra-low temperature ball valve two, the copper wire in the first liquid storage shell is in the ultra-low temperature environment, the copper wire is wound by the rotating winding rod by starting the third motor, the copper wire wound by the winding rod is more neat by starting the second motor, the collected copper wire is prevented from being scattered and entangled, the copper wire in the ultra-low temperature environment is drawn when the copper wire passes through the wire eye mold, the use is more convenient, the plugging assembly and the wire eye mold can be quickly replaced according to the need, and the practicability of the semiconductor copper wire ultra-low temperature drawing device is improved. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 It is the overall structure schematic view of the utility model;

[0030] Figure 2 It is the supporting frame structure schematic view in the utility model;

[0031] Figure 3 It is the nitrogen storage mechanism structure schematic view in the utility model;

[0032] Figure 4 It is Figure 3 The local enlarged view in A of the utility model;

[0033] Figure 5Is the position relation schematic view of the fixed frame and the L-shaped plate in the utility model;

[0034] Figure 6 Is the position relation schematic view of the rectangular shell one and the bearing frame two in the utility model;

[0035] Figure 7 Is the structure schematic view of the winding mechanism in the utility model;

[0036] Figure 8 Is the structure schematic view of the winding rod in the utility model.

[0037] In the drawing: 100, support frame;101, round hole;200, nitrogen storage mechanism;210, fixed frame;220, connecting frame;230, liquid storage shell one;231, limiting groove;232, ultra-low temperature ball valve one;233, limiting gap one;234, threaded hole one;240, liquid storage shell two;241, limiting gap two;242, limiting plate;243, ultra-low temperature ball valve two;244, conveying pipe;250, L-shaped plate;251, oil cylinder;252, fixed plate;253, telescopic plate;260, rectangular shell one;261, rectangular hole one;262, bearing frame one;270, limiting block;271, limiting hole;272, screw hole two;273, fixed bolt one;280, bearing frame two;281, rectangular shell two;282, rectangular hole two;283, connecting block;284, eyelet mold;285, guide roller;290, positioning block;300, winding mechanism;310, rectangular plate;320, connecting plate;330, motor two;331, reciprocating screw;332, moving plate;340, round shell;350, winding rod;351, connecting groove;352, threaded hole three;360, motor three;370, fixed bolt two. DETAILED DESCRIPTION

[0038] The technical solutions in the embodiments of the utility model will be apparently and completely described in connection with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by the ordinary skilled in the art without creative labor fall within the protection scope of the utility model.

[0039] Please refer to Figures 1-8 In the embodiments of the utility model, a copper wire ultra-low temperature wire drawing device for semiconductor comprises a support frame 100, a nitrogen storage mechanism 200 and a winding mechanism 300. A round hole 101 is formed in one end of the top of the support frame 100. The nitrogen storage mechanism 200 is fixed to one end of the top of the support frame 100. The winding mechanism 300 is fixed to the other end of the top of the support frame 100.

[0040] Specifically, the nitrogen storage mechanism 200 is used to store liquid nitrogen, and the nitrogen storage mechanism 200 and the winding mechanism 300 are used in cooperation to facilitate low-temperature wire drawing of the copper wire, and the use is more convenient.

[0041] Example One

[0042] As Figures 3-8As shown, in the embodiment, the nitrogen storage mechanism 200 comprises: a fixed frame 210, a connecting frame 220, a liquid storage shell one 230 and a liquid storage shell two 240, the bottom of the fixed frame 210 is fixedly connected with the top of the support frame 100, the inner wall of the fixed frame 210 is provided with an height adjusting assembly, the bottom of the connecting frame 220 is fixedly connected with the inner bottom surface of the fixed frame 210, the bottom of the liquid storage shell one 230 is fixedly connected with the top of the connecting frame 220, the top of the liquid storage shell one 230 is provided with a limiting groove 231, limiting notches one 233 are formed at both ends of the limiting groove 231, threaded holes one 234 are formed at both ends of the inner side wall of the limiting notches one 233, an ultra-low temperature ball valve one 232 is fixedly connected in communication with one end of the bottom of the liquid storage shell one 230, the inner wall of the liquid storage shell one 230 is provided with a wire drawing assembly, the both ends of the liquid storage shell one 230 are provided with a plugging assembly, the liquid storage shell two 240 is arranged on the top of the liquid storage shell one 230, limiting notches two 241 are formed at both ends of the bottom of the liquid storage shell two 240, a limiting plate 242 is fixedly connected with the bottom of the liquid storage shell two 240, and the limiting plate 242 is slidably inserted with the inner wall of the limiting groove 231, an ultra-low temperature ball valve two 243 is fixedly connected in communication with one end of the top of the liquid storage shell two 240, a conveying pipe 244 is fixedly connected in communication with the top of the ultra-low temperature ball valve two 243, and the top of the conveying pipe 244 is fixed with the top of the fixed frame 210, the wire drawing assembly comprises: a rectangular shell one 260, a bearing frame two 280 and two positioning blocks 290, rectangular holes one 261 are formed at both ends of the rectangular shell one 260, a bearing frame one 262 is fixedly connected with the bottom of the rectangular shell one 260, and the bottom of the bearing frame one 262 is fixedly connected with the inner bottom surface of the liquid storage shell one 230, the bearing frame two 280 is arranged on the top of the rectangular shell one 260, a rectangular shell two 281 is fixedly connected with the bottom of the bearing frame two 280, rectangular holes two 282 are formed at both ends of the bottom of the rectangular shell two 281, a connecting block 283 is fixedly connected with the inner bottom surface of the rectangular shell two 281, and an eyelet mold 284 is fixedly connected with the top of the connecting block 283, guide rollers 285 are rotatably connected with the top of both ends of the bearing frame two 280, one end of each of the two positioning blocks 290 is slidably inserted with the corresponding rectangular hole one 261 and rectangular hole two 282, the winding mechanism 300 comprises: a rectangular plate 310, a moving plate 332, a circular shell 340, a winding rod 350 and a motor three 360, the bottom of the rectangular plate 310 is fixedly connected with the top of the support frame 100, the moving plate 332 is arranged on one side of the rectangular plate 310, the circular shell 340 is rotatably connected with one end of the moving plate 332, the bottom of the circular shell 340 is slidably inserted with the inside of the circular hole 101, the bottom of the winding rod 350 is rotatably connected with the top of the circular shell 340, the bottom of the motor three 360 is fixedly connected with the inner bottom surface of the circular shell 340, and the output end of the motor three 360 is fixedly connected with the bottom of the winding rod 350.

[0043] In the embodiment, the carrier frame two 280, the eyelet mold 284 and the guide roller 285 are fixed by inserting the rectangular shell two 281 into the interior of the rectangular shell one 260 and inserting the two positioning blocks 290 into the rectangular hole one 261 and the rectangular hole two 282. One end of the copper wire is fixed by inserting the copper wire through the plugging assembly and the interior of the eyelet mold 284, inserting one end of the copper wire into the connecting groove 351, and screwing the fixing bolt two 370 to make the fixing bolt two 370 in contact with one end of the copper wire. Liquid nitrogen is transported into the interior of the liquid storage shell two 240 and the liquid storage shell one 230 by opening the ultra-low temperature ball valve two 243. The liquid nitrogen is stored in the liquid storage shell one 230, so that part of the copper wire is below the liquid level of the liquid nitrogen. The copper wire in the liquid storage shell one 230 is in an ultra-low temperature environment. The copper wire is wound by rotating the winding rod 350 driven by the motor three 360. When the copper wire passes through the eyelet mold 284, the copper wire in the ultra-low temperature environment is drawn. After the drawing is completed, the liquid nitrogen is recovered by starting the ultra-low temperature ball valve one 232.

[0044] As shown in Figures 3-5 In the embodiment, the height adjusting assembly includes an L-shaped plate 250. One side of the L-shaped plate 250 is fixedly connected to an inner side wall of the fixed frame 210. An oil cylinder 251 is fixedly connected to the inner bottom surface of the L-shaped plate 250. A fixed plate 252 is fixedly connected to the output end of the oil cylinder 251. One side of the fixed plate 252 is fixedly connected to the outer side wall of the liquid storage shell two 240. Two telescopic plates 253 are fixedly connected to the both ends of the inner bottom surface of the L-shaped plate 250. The top of the telescopic plate 253 is fixedly connected to the bottom of the fixed plate 252. The plugging assembly includes a limiting block 270. A limiting hole 271 is formed in the middle position of the limiting block 270. The bottom of the limiting block 270 is in contact with the inner side wall of the limiting notch one 233. Two limiting holes 271 are formed in the bottom of the limiting block 270. A fixing bolt one 273 is arranged on the limiting block 270 in a matched mode. One end of the fixing bolt one 273 is in threaded connection with the threaded hole two 272 and the threaded hole one 234.

[0045] In specific implementation, the limiting block 270 is inserted into the corresponding limiting notch 233, and the fixing bolt 273, screw hole 272 and threaded hole 234 are used to fix the position of the limiting block 270. The limiting hole 271 allows the copper wire to pass through. When the top of the liquid storage shell 240 and the liquid storage shell 230 are closed, the size of the limiting hole 271 matches the size of the copper wire, thereby reducing the evaporation efficiency of liquid nitrogen. Appropriate sealing components can be selected according to the needs of use. After use, the hydraulic cylinder 251 is activated to move the fixing plate 252 and the liquid storage shell 240, thereby facilitating the opening of the liquid storage shell 240 and the disassembly and replacement of the sealing components and the wire eye mold 284.

[0046] Example 2

[0047] Based on Example 1, in order to make the wound copper wire more neat and avoid the collected copper wire from being scattered and tangled.

[0048] like Figures 7-8 As shown, in this embodiment, a connecting plate 320 is fixedly connected to the top of one side of the rectangular plate 310, and a motor 330 is provided at the bottom of the other end of the movable plate 332. The motor 330 is fixedly connected to the bottom of the support frame 100. The output end of the motor 330 passes through the side wall of the support frame 100 and is fixedly connected to a reciprocating screw 331. The reciprocating screw 331 is screwed into the movable plate 332. A connecting groove 351 is provided at the top of the inner side wall of the winding rod 350, and a threaded hole 352 is provided on the inner top surface of the connecting groove 351. A fixing bolt 370 is provided at the top of the winding rod 350, and the bottom of the fixing bolt 370 is screwed into the inside of the threaded hole 352.

[0049] In practice, by starting motor 330, the reciprocating screw 331 is rotated, and the rectangular plate 310 limits the moving plate 332, thereby adjusting the height of the moving plate 332, the round shell 340 and the winding rod 350. The winding rod 350 rotates, making the copper wire wound by the winding rod 350 more neat and avoiding the collected copper wire from being scattered and tangled.

[0050] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0051] Furthermore, it should be understood that although the specification is described in terms of embodiments, not every embodiment includes only one independent technical solution, and the specification is described in this way only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A copper wire ultra-low temperature drawing device for semiconductor, characterized by, The utility model relates to a nitrogen storage device, including: Support frame (100), one end of the top of support frame (100) is equipped with round hole (101); Nitrogen storage mechanism (200), one end of the top of support frame (100) is fixed with nitrogen storage mechanism (200); Wire winding mechanism (300), the other end of the top of support frame (100) is fixed with wire winding mechanism (300); Nitrogen storage mechanism (200) includes: Fixed frame (210), the bottom of fixed frame (210) is fixedly connected with the top of support frame (100), and the inner wall of fixed frame (210) is provided with height adjusting assembly; Connecting frame (220), the bottom of connecting frame (220) is fixedly connected with the inner bottom surface of fixed frame (210); Liquid storage shell no. (230), the bottom of liquid storage shell no. (230) is fixedly connected with the top of connecting frame (220), and the top of liquid storage shell no. (230) is equipped with limiting slot (231), and the both ends of limiting slot (231) are equipped with limiting notches no. (233), the both ends of the inner side wall of limiting notches no. (233) are equipped with threaded holes no. (234), one end of the bottom is communicated and is fixed with ultra-low temperature ball valve no. (232), the inner wall of liquid storage shell no. (230) is provided with wire drawing assembly, and the both ends of liquid storage shell no. (230) are provided with plugging assembly; Liquid storage shell no. (240) is arranged on the top of liquid storage shell no. (230), and the both ends of the bottom of liquid storage shell no. (240) are equipped with limiting notches no. (241), the bottom of liquid storage shell no. (240) is fixedly connected with limiting plate (242), and the inner wall of limiting plate (242) and limiting slot (231) is slidably inserted, one end of the top of liquid storage shell no. (240) is communicated and is fixed with ultra-low temperature ball valve no. (243), and the top of ultra-low temperature ball valve no. (243) is communicated and is fixed with delivery pipe (244), and the top of delivery pipe (244) is fixed with fixed frame (210); Wire drawing assembly includes: Rectangular shell no. (260), the both ends of rectangular shell no. (260) are equipped with rectangular holes no. (261), and the bottom of rectangular shell no. (260) is fixedly connected with bearing frame no. (262), and the bottom of bearing frame no. (262) is fixedly connected with the inner bottom surface of liquid storage shell no. (230); Bearing frame no. (280) is arranged on the top of rectangular shell no. (260), and the bottom of bearing frame no. (280) is fixedly connected with rectangular shell no. (281), and the both ends of the bottom of rectangular shell no. (281) are equipped with rectangular holes no. (282), and the inner bottom surface of rectangular shell no. (281) is fixedly connected with connecting block (283), and the top of connecting block (283) is fixedly connected with wire eye die (284), and the both ends of the top of bearing frame no. (280) are rotatably connected with guide roller (285); Two positioning blocks (290) are slidably inserted with rectangular holes no. (261) and rectangular holes no. (282) at corresponding positions; Wire winding mechanism (300) includes: Rectangular plate (310), the bottom of rectangular plate (310) is fixedly connected with the top of support frame (100); Moving plate (332) is arranged on one side of rectangular plate (310); A round shell (340) is rotatably connected to one end of the moving plate (332), and the bottom of the round shell (340) is slidably inserted into the inner part of the round hole (101); A winding rod (350) is rotatably connected to the top of the round shell (340); A third motor (360) is fixedly connected to the inner bottom of the round shell (340), and the output end of the third motor (360) is fixedly connected to the bottom of the winding rod (350).

2. The ultra-low temperature wire drawing apparatus for copper wire for semiconductor according to claim 1, wherein The height adjusting assembly comprises an L-shaped plate (250), one side of which is fixedly connected to an inner side wall of the fixed frame (210), the inner bottom of the L-shaped plate (250) is fixedly connected with an oil cylinder (251), the output end of the oil cylinder (251) is fixedly connected with a fixed plate (252), one side of the fixed plate (252) is fixedly connected to an outer side wall of the second liquid storage shell (240), and both ends of the inner bottom of the L-shaped plate (250) are fixedly connected with telescopic plates (253), and the top of the telescopic plate (253) is fixedly connected to the bottom of the fixed plate (252).

3. The ultra-low temperature wire drawing apparatus for copper wire for semiconductor according to claim 1, wherein The plugging assembly comprises a limiting block (270), a limiting hole (271) is formed in the middle position of the limiting block (270), the bottom of the limiting block (270) is in contact with the inner side wall of the limiting notch (233), two limiting holes (271) are formed in the bottom of the limiting block (270), a fixed bolt (273) is arranged on the limiting block (270), and one end of the fixed bolt (273) is in threaded connection with the screw hole (272) and the threaded hole (234).

4. The ultra-low temperature wire drawing apparatus for copper wire for semiconductor according to claim 1, wherein One side of the top of the rectangular plate (310) is fixedly connected with a connecting plate (320), the bottom of the other end of the moving plate (332) is provided with a second motor (330), the second motor (330) is fixedly connected to the bottom of the support frame (100), the output end of the second motor (330) penetrates through the side wall of the support frame (100) and is fixedly connected with a reciprocating lead screw (331), the reciprocating lead screw (331) is in threaded connection with the moving plate (332), the top of the inner side wall of the winding rod (350) is provided with a connecting groove (351), the inner top of the connecting groove (351) is provided with a threaded hole (352), the top of the winding rod (350) is provided with a second fixed bolt (370), and the bottom of the second fixed bolt (370) is in threaded connection with the inner part of the threaded hole (352).

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