Wafer basket

Abstract

The utility model discloses a wafer lifting basket, which comprises two side plate parts which are symmetrically arranged left and right, a rear baffle part which is arranged at the rear ends of the opposite surfaces of the two side plate parts and has the left end and the right end fixed on the two side plate parts, and a bottom plate part which is arranged at the lower ends of the opposite surfaces of the two side plate parts and has the left side and the right side fixed on the two side plate parts, the top plate part is arranged at the upper ends of the opposite faces of the two side plate parts, the handle part is arranged above the top plate part, the two ends of the handle part are fixed to the two side plate parts respectively, the two limiting blocks are arranged on the opposite faces of the two side plate parts respectively, one ends of the two pull ropes are connected to the handle part at the same time, and the other ends of the two pull ropes are connected to the two side plate parts respectively. According to the wafer lifting basket, on the premise that it is guaranteed that the product is simple in structure and economical in production and use, automatic limiting of a wafer frame can be effectively completed through the product, the wafer frame is well prevented from sliding out of the product in the transportation process, the transportation efficiency is guaranteed, and the transportation safety is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of wafer processing accessories, in particular to a wafer basket. BACKGROUND

[0002] Wafer refers to the silicon wafer used for making silicon semiconductor circuit, and its raw material is silicon. High-purity polysilicon is dissolved and added into silicon crystal seed, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer.

[0003] When processing the wafer, the wafer is generally fixed in the wafer frame first, and is transferred several times at a short distance according to the needs. In the process of transfer, in order to improve the transfer efficiency and better protect the wafer, a basket is needed. The existing basket needs to be manually limited after loading the wafer frame, otherwise the wafer frame is easy to slide out and fall off during transportation. CONTENT OF THE INVENTION

[0004] In view of the deficiencies of the prior art, the present application provides a wafer basket which can effectively complete the automatic limiting of the wafer frame under the premise of ensuring simple product structure, economical production and use, and can well avoid the wafer frame from sliding out of the product during transportation, that is, ensure the transportation efficiency and improve the safety of transportation.

[0005] A wafer basket comprises two side plate parts arranged symmetrically left and right, a backstop part arranged at the rear end of the opposite faces of the two side plate parts and fixed on the two side plate parts at the left and right ends respectively, a bottom plate part arranged at the lower end of the opposite faces of the two side plate parts and fixed on the two side plate parts at the left and right sides respectively, a top plate part arranged at the upper end of the opposite faces of the two side plate parts, a handle part arranged above the top plate part and fixed on the two side plate parts at the two ends respectively, two limiting blocks arranged on the opposite faces of the two side plate parts respectively, and two pull ropes connected at one end on the handle part and at the other end on the two side plate parts.

[0006] Further, the side plate part is composed of a plate-shaped side plate, a back vertical groove vertically arranged at the rear end of the inner side face of the side plate, a limiting block insertion groove vertically arranged at the rear section of the inner side face of the side plate, a handle limiting groove arranged at the middle section of the upper side face of the side plate, a top plate groove, a plurality of wafer frame insertion grooves and a bottom plate groove horizontally arranged at the inner side face of the side plate, two arc grooves arranged at the two corners of the front end of the outer side face of the side plate respectively, and a rotating fence arranged on the two arc grooves simultaneously.

[0007] As preferred, the top plate slot and the bottom plate slot respectively horizontally pass through the inner side of the whole side plate, the upper end of the rear vertical slot upwardly passes through the side plate, the rear end rearwardly passes through the side plate, and the bottom end communicates with the bottom plate slot; the upper end of the handle limiting slot upwardly passes through the side plate, and the bottom end communicates with the bottom plate slot; the bottom end of the handle limiting slot communicates with the top plate slot.

[0008] As preferred, the rear end of the rotating column is provided with two opposite rotating shaft feet upwardly and downwardly, and the two rotating shaft feet are respectively rotatably arranged in the two opposite arc-shaped slots; the front end of the rotating column is further provided with a first rope slot for fixing the pull rope.

[0009] Further, the rear stop portion is composed of a rear stop plate and rear stop fixing strips vertically arranged on the left and right sides of the rear stop plate; the rear stop fixing strips are integrated with the rear stop plate, and the width of the rear stop fixing strips is greater than the thickness of the rear stop plate; the two rear stop fixing strips are respectively fixed in the two rear vertical slots by screws.

[0010] Further, the bottom plate portion is composed of a bottom plate body, two fixing strips horizontally arranged on the left and right sides of the lower side of the bottom plate body, and a plurality of support feet arranged on the lower side of the bottom plate body and having a height greater than the thickness of the fixing strips; the left and right sides of the bottom plate body are respectively inserted into the two bottom plate slots, and the rear end of the bottom plate body abuts against the rear stop plate; the distance between the adjacent horizontal sides of the bottom plate body and the fixing strips is the same as the depth of the bottom plate slot, and the two fixing strips are respectively fixed on the two side plates by screws.

[0011] Further, the top plate portion is composed of a top plate body and two ring buckles vertically arranged on the upper side of the front end of the top plate body; the inner diameter of the ring buckles matches the pull rope, and the two ring buckles are respectively penetrated by the two pull ropes.

[0012] Further, the handle portion is composed of a handle plate, a handle slot opened on the upper side of the handle plate, two shaft sleeve pipes symmetrically arranged in the handle slot, and two C-shaped handles respectively arranged in the two shaft sleeve pipes and rotatable about the two shaft sleeve pipes as the axis; the left and right ends of the handle plate are respectively fixed in the two handle limiting slots by the screws vertically penetrating the handle plate, the lower side of the handle plate abuts against the upper side of the top plate body, and the handle plate presses the top plate body against the lower side wall of the top plate slot.

[0013] As preferred, the lower side of the handle plate is further provided with two handle plate bottom slots symmetrically arranged in the handle plate and penetrating the handle plate from front to back, and the groove width of the handle plate bottom slots is greater than the pull rope; the position of the C-shaped handle away from the rotating axis is provided with a second rope slot; one end of the pull rope is fixed on the second rope slot after penetrating the handle plate bottom slot.

[0014] In addition, the limiting block is arranged in the limiting block slot, the lower end of the limiting block abuts against the bottom plate body, the upper end abuts against the top plate body, and the limiting block is fixed in the limiting block slot by the screw penetrating through the side plate.

[0015] Compared with the prior art, the embodiment of the application has the following beneficial effects:

[0016] The utility model discloses under the premise of guaranteeing product simple structure, production and use economy, make product can effectively complete to wafer frame automatic limiting, good avoided wafer frame in the process of transportation from product sliding, that is to ensure the transportation efficiency, improve the security of transportation.

[0017] Some of the additional features of the application can be explained in the following description. Some of the additional features of the application will be apparent to one of ordinary skill in the art by examination of the following description or by practice or use of the following examples. The features disclosed by the application can be realized and attained by the practice of various aspects of the application described below. BRIEF DESCRIPTION OF DRAWINGS

[0018] The drawings described herein are intended to provide further understanding of the application, and form a part of the application. The schematic embodiments of the application and the description thereof are used to explain the application, and do not constitute a limitation of the application. In the drawings, the same reference numerals represent the same components. Among them,

[0019] Figure 1 It is a structural schematic diagram of the utility model.

[0020] Figure 2 It is an explosion diagram of the utility model.

[0021] Explanation of reference numerals:

[0022] 100, side plate part; 101, side plate; 102, rear vertical groove; 103, limiting block slot; 104, handle limiting groove; 105, top plate groove; 106, wafer frame slot; 107, bottom plate groove; 108, arc-shaped groove; 109, rotating column; 110, first rope groove;

[0023] 200, rear stop part; 201, rear stop plate; 202, rear stop fixed strip;

[0024] 300, bottom plate part; 301, bottom plate body; 302, fixed strip;

[0025] 400, top plate part; 401, top plate body; 402, ring buckle;

[0026] 500, handle part; 501, handle plate; 502, handle slot; 503, shaft sleeve; 504, C-shaped handle; 505, handle plate bottom slot; 506, second rope slot;

[0027] 600, pull rope;

[0028] 700, limiting block. DETAILED DESCRIPTION

[0029] In order to make the personnel in the technical field better understand the scheme of the present application, the technical scheme in the embodiments of the present application will be clearly and completely described below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by the person skilled in the art without making creative efforts should belong to the protection scope of the present application.

[0030] It should be noted that if the terms "first", "second", and the like are involved in the specification and claims of the present application and the above-mentioned drawings, they are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein. In addition, if the terms "include" and "have" and any variations thereof are involved, it is intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not have to be limited to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0031] In the present application, if the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like are involved, the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0032] Also, in addition to being used to indicate the orientation or positional relationship, the above-mentioned part of the terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For the person skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.

[0033] Furthermore, in the present application, if the terms "mount", "set", "provided with", "connect", "connected", "socketed" and the like are involved, they should be interpreted in a broad sense. For example, it can be fixed connection, detachable connection, or integral structure; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0034] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0035] Embodiment 1

[0036] As shown in Figure 1 , 2 A wafer basket includes two side plate parts 100 arranged symmetrically left and right, a backstop part 200 arranged at the back end of the opposite faces of the two side plate parts 100 and fixed on the two side plate parts 100 at the left and right ends respectively, a bottom plate part 300 arranged at the lower end of the opposite faces of the two side plate parts 100 and fixed on the two side plate parts 100 at the left and right sides respectively, a top plate part 400 arranged at the upper end of the opposite faces of the two side plate parts 100, a handle part 500 arranged above the top plate part 400 and fixed on the two side plate parts 100 at the two ends respectively, two limit blocks 700 arranged on the opposite faces of the two side plate parts 100 respectively, and two pull ropes 600 connected on the handle part 500 at one end and connected on the two side plate parts 100 at the other end respectively.

[0037] The side plate part 100 is composed of a plate-shaped side plate 101, a back vertical groove 102 vertically arranged at the back end of the inner side face of the side plate 101, a limit block insertion groove 103 vertically arranged at the back section of the inner side face of the side plate 101, a handle limit groove 104 arranged at the middle section of the upper side face of the side plate 101, a top plate groove 105, a plurality of wafer frame insertion grooves 106 and a bottom plate groove 107 horizontally arranged at the inner side face of the side plate 101, two arc-shaped grooves 108 arranged at the two corners of the outer side face of the front end of the side plate 101 respectively, and a rotating bar 109 arranged on the two arc-shaped grooves 108 simultaneously.

[0038] The top plate groove 105 and the bottom plate groove 107 horizontally pass through the inner side face of the entire side plate 101 respectively, the upper end of the back vertical groove 102 passes through the side plate 101 upward, the back end passes through the side plate 101 backward, and the bottom end communicates with the bottom plate groove 107, the upper end of the limit block insertion groove 103 passes through the side plate 101 upward, and the bottom end communicates with the bottom plate groove 107, and the bottom end of the handle limit groove 104 communicates with the top plate groove 105.

[0039] The rear end of the rotating column 109 is provided with two opposite rotating shafts, which are rotatably arranged in two opposite arc-shaped grooves 108, and the front end of the rotating column 109 is also provided with a first rope groove 110 for fixing the pull rope 600.

[0040] The rear stop portion 200 is composed of a rear stop plate 201 and rear stop fixing strips 202 vertically arranged on the left and right sides of the rear stop plate 201; the rear stop fixing strips 202 are integrated with the rear stop plate 201, and the width of the rear stop fixing strips 202 is greater than the thickness of the rear stop plate 201; the two rear stop fixing strips 202 are fixed in the two rear vertical grooves 102 by screws.

[0041] The bottom plate portion 300 is composed of a bottom plate body 301, two fixing strips 302 parallelly arranged on the left and right sides of the lower side of the bottom plate body 301, and a plurality of support feet arranged on the lower side of the bottom plate body 301 and having a height greater than the thickness of the fixing strips 302; the left and right sides of the bottom plate body 301 are respectively inserted into the two bottom plate grooves 107, and the rear end of the bottom plate body 301 abuts against the rear stop plate 201; the distance between the adjacent parallel sides of the bottom plate body 301 and the fixing strips 302 is the same as the depth of the bottom plate groove 107, and the two fixing strips 302 are fixed on the two side plates 101 by screws.

[0042] The top plate portion 400 is composed of a top plate body 401 and two ring buckles 402 vertically arranged on the front end of the upper side of the top plate body 401; the inner diameter of the ring buckle 402 matches the pull rope 600, and the two ring buckles 402 are respectively penetrated by the two pull ropes 600.

[0043] The handle portion 500 is composed of a handle plate 501, a handle groove 502 opened on the upper side of the handle plate 501, two shaft sleeve pipes 503 symmetrically arranged in the handle groove 502, and two C-shaped handles 505 respectively arranged in the two shaft sleeve pipes 503 and rotatable about the two shaft sleeve pipes 503 as the axes; the left and right ends of the handle plate 501 are respectively fixed in the two handle limiting grooves 104 by vertically penetrating the handle plate 501 with screws, the lower side of the handle plate 501 abuts against the upper side of the top plate body 401, and the handle plate 501 presses the top plate body 401 against the lower side wall of the top plate groove 105.

[0044] The lower side of the handle plate 501 is also symmetrically provided with two handle plate bottom grooves 505 penetrating the handle plate 501 from front to back, and the groove width of the handle plate bottom grooves 505 is greater than the pull rope 600; the second rope groove 506 is arranged at the position of the C-shaped handle 504 away from the rotating axis; one end of the pull rope 600 is fixed on the second rope groove 506 after penetrating the handle plate bottom groove 505.

[0045] The limiting block 700 is arranged in the limiting block slot 103, the lower end of the limiting block 700 abuts against the bottom plate body 301, the upper end abuts against the top plate body 401, and the limiting block 700 is fixed in the limiting block slot 103 by the screw penetrating the side plate 101.

[0046] The side plate part, the bottom plate part, the backstop part and the handle part fixed by the screw can make the product obtain sufficient supporting force, and avoid deformation of the product during use.

[0047] In use, when the C-shaped handle is turned over and lifted, the C-shaped handle will pull the rear end of the pull rope, and the rotating column at the front end of the pull rope will rotate to close the opening of the product under the pulling of the pull rope, so as to limit the wafer frame. After lifting the product, the rear end of the pull rope will remain in the pulled-out state, so that the rotating column always remains closed to the opening of the product, and therefore the wafer frame inserted into the wafer frame slot in the product cannot slide out from the opening. Only when the product is put down and the C-shaped handle is released to reset, the rotating column can be opened to take out the wafer frame in the product.

[0048] In addition, in order to further improve the use effect of the product, a rotary spring structure can also be arranged on the rotating column, so that the rotating column can be automatically opened after the handle is put down. The rotary spring is a prior art, and those skilled in the art can complete its arrangement and use without creative labor according to the above description, and therefore will not be described here.

[0049] It should be noted that all the features disclosed in the specification, or the steps in all the disclosed methods or processes, can be combined in any manner, except for mutually exclusive features and / or steps.

[0050] In addition, the above specific embodiments are exemplary, and those skilled in the art can think of various solutions under the inspiration of the disclosure of the present application, and these solutions also belong to the disclosed range of the present application and fall within the protection scope of the present application. Those skilled in the art should understand that the specification and drawings of the present application are illustrative and do not constitute a limitation on the claims. The protection scope of the present application is defined by the claims and their equivalents.

Claims

1. A wafer basket, characterized in that, Two side plate parts (100) are symmetrically arranged, a backstop part (200) is arranged at the opposite rear ends of the two side plate parts (100) and is fixed on the two side plate parts (100) at the left and right ends respectively, a bottom plate part (300) is arranged at the opposite lower ends of the two side plate parts (100) and is fixed on the two side plate parts (100) at the left and right sides respectively, a top plate part (400) is arranged at the opposite upper ends of the two side plate parts (100), a handle part (500) is arranged above the top plate part (400) and is fixed on the two side plate parts (100) at the two ends respectively, two limiting blocks (700) are arranged on the opposite sides of the two side plate parts (100) respectively, and two pull ropes (600) are connected at one end on the handle part (500) and at the other end on the two side plate parts (100) respectively.

2. The wafer boat of claim 1, wherein The side plate part (100) is composed of a plate-shaped side plate (101), a rear vertical groove (102) vertically arranged at the rear end of the inner side of the side plate (101), a limiting block insertion groove (103) vertically arranged at the rear section of the inner side of the side plate (101), a handle limiting groove (104) arranged at the middle section of the upper side of the side plate (101), a top plate groove (105), a plurality of wafer frame insertion grooves (106) and a bottom plate groove (107) horizontally arranged at the inner side of the side plate (101), two arc-shaped grooves (108) arranged at the two corners of the outer side of the front end of the side plate (101) respectively, and a rotating fence (109) arranged on the two arc-shaped grooves (108) simultaneously.

3. The wafer boat of claim 2, wherein, The top plate groove (105) and the bottom plate groove (107) horizontally pass through the inner side of the entire side plate (101) respectively, the upper end of the rear vertical groove (102) passes through the side plate (101) upward, the rear end passes through the side plate (101) rearward, and the bottom end is communicated with the bottom plate groove (107), the upper end of the limiting block insertion groove (103) passes through the side plate (101) upward, and the bottom end is communicated with the bottom plate groove (107), and the bottom end of the handle limiting groove (104) is communicated with the top plate groove (105).

4. The wafer boat of claim 3, wherein, The rear end of the rotating fence (109) is provided with two opposite rotating shaft feet upward and downward, and the two rotating shaft feet are rotatably arranged in the two opposite arc-shaped grooves (108) respectively, and the front end of the rotating fence (109) is further provided with a first rope groove (110) for fixing the pull rope (600).

5. The wafer boat of claim 4, wherein, The backstop part (200) is composed of a backstop plate (201) and backstop fixing strips (202) vertically arranged at the left and right sides of the backstop plate (201); the backstop fixing strips (202) are integrated with the backstop plate (201), and the width of the backstop fixing strips (202) is greater than the thickness of the backstop plate (201); the two backstop fixing strips (202) are fixed in the two rear vertical grooves (102) by screws respectively.

6. The wafer boat of claim 5, wherein, The bottom plate part (300) is composed of a bottom plate body (301), two fixed strips (302) arranged in parallel on the left and right sides of the lower side of the bottom plate body (301), and a plurality of support feet arranged on the lower side of the bottom plate body (301) and having a height greater than the thickness of the fixed strips (302); the left and right sides of the bottom plate body (301) are respectively inserted into two bottom plate grooves (107), and the rear end of the bottom plate body (301) abuts against the rear baffle (201); the distance between the fixed strips (302) and the adjacent parallel side of the bottom plate body (301) is the same as the depth of the bottom plate groove (107), and the two fixed strips (302) are respectively fixed on the two side plates (101) by screws.

7. The wafer boat of claim 6, wherein, The top plate part (400) is composed of a top plate body (401) and two ring buckles (402) vertically arranged on the upper side of the front end of the top plate body (401); the inner diameter of the ring buckle (402) matches the pull rope (600), and the two ring buckles (402) are respectively penetrated by two pull ropes (600).

8. The wafer boat of claim 7, wherein, The handle part (500) is composed of a handle plate (501), a handle groove (502) opened on the upper side of the handle plate (501), two shaft sleeve pipes (503) symmetrically arranged in the handle groove (502), and two C-shaped handles (505) respectively arranged in the two shaft sleeve pipes (503) and rotatable about the two shaft sleeve pipes (503) as the axis; the left and right ends of the handle plate (501) are respectively fixed in two handle limiting grooves (104) by screws vertically penetrating the handle plate (501) itself, the lower side of the handle plate (501) abuts against the upper side of the top plate body (401), and the handle plate (501) presses the top plate body (401) tightly against the lower side wall of the top plate groove (105).

9. The wafer boat of claim 8, wherein, The lower side of the handle plate (501) is also symmetrically provided with two handle plate bottom grooves (505) penetrating the handle plate (501) from front to back, and the groove width of the handle plate bottom groove (505) is greater than that of the pull rope (600); the position of the C-shaped handle (504) away from the rotation axis is provided with a second rope groove (506); one end of the pull rope (600) is fixed on the second rope groove (506) after penetrating the handle plate bottom groove (505).

10. The wafer boat of claim 9, wherein, The limiting block (700) is arranged in the limiting block insertion groove (103), the lower end of the limiting block (700) abuts against the bottom plate body (301), the upper end abuts against the top plate body (401), and the limiting block (700) is fixed in the limiting block insertion groove (103) by the screw penetrating the side plate (101).

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