Material taking device

Abstract

The utility model belongs to the technical field of semiconductor chip production, and discloses a material taking device. During material taking, the X-axis moving module drives the electromagnet module to attract the first side of the material disc, the material disc is pulled out of the material frame, then through combination of the X-axis moving module and the lifting driving part, the electromagnet module is moved to the second side of the material disc, and the electromagnet module is attracted to the second side of the material disc; the X-axis moving module is used for pushing the material trays to the picking device, after picking is completed, the X-axis moving module, the lifting driving part and the electromagnet module are matched to pull the material trays out of the picking device and push the material trays into the material frame, accurate taking and placing of the material trays are achieved, and the material taking efficiency and stability are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor chip manufacturing, especially relates to a material taking device. BACKGROUND

[0002] In the production and detection process of semiconductor chips, efficient and accurate handling of chips is the key link to ensure stable operation of the production line and improve the yield. Currently, chip picking and placing mainly relies on mechanical hands, vacuum suction cups or manual operation. However, these traditional methods have certain limitations, for example, manual operation depends on the proficiency of workers, which is not only low in efficiency, but also easy to cause chip damage or pollution due to human factors; vacuum suction cups are limited by the surface structure and material of the chip, and may cause the chip to fall off due to unstable adsorption or insufficient adsorption force, affecting the reliability of picking and placing; although mechanical hands can realize automatic handling, mechanical clamping may cause mechanical stress on the edge of the chip, affecting the quality of the chip, especially when handling ultra-thin chips or micro-chips, which is more likely to cause damage.

[0003] Therefore, there is an urgent need for a material taking device to solve the above technical problems. INVENTION CONTENTS

[0004] The utility model aims at providing a material taking device, which realizes accurate picking and placing of the tray, improves the material taking efficiency, and improves the stability and reliability of the material taking process.

[0005] To achieve this purpose, the utility model adopts the following technical scheme:

[0006] The material taking device is arranged between the tray frame and the picking device, and comprises:

[0007] The moving module comprises an X-axis moving module, a first support and a lifting driving part, the X-axis moving module is arranged on the first support, and the lifting driving part is arranged on the moving end of the X-axis moving module;

[0008] The electromagnet module is arranged on the lifting end of the lifting driving part, the electromagnet module can be adsorbed on the side wall of the tray, the X-axis moving module can drive the electromagnet module to move along the X-axis direction, the lifting driving part can drive the electromagnet module to move along the Z-axis direction, so as to pull the tray out of the tray frame and push it into the picking device, or pull the tray out of the picking device and push it into the tray frame, and the X-axis direction is perpendicular to the Z-axis direction.

[0009] Optionally, the first support is provided with first and second tracks parallel to each other, and the electromagnet module comprises:

[0010] The mounting seat is connected with the lifting end of the lifting driving part, and the mounting seat is provided with first and second mounting plates arranged in an up-down manner.

[0011] A first magnet assembly is arranged on an upper end surface of the first mounting plate, and is configured to drive the tray to move along the first track.

[0012] A second magnet assembly is arranged on a lower end surface of the second mounting plate, and is configured to drive the tray to move along the second track.

[0013] Optionally, the electromagnet module further comprises:

[0014] A first driving member is arranged on the first mounting plate, and the first magnet assembly is arranged on the first driving member, and the first driving member is configured to drive the first magnet assembly to move along the X-axis direction.

[0015] A second driving member is arranged on the second mounting plate, and the second magnet assembly is arranged on the second driving member, and the second driving member is configured to drive the second magnet assembly to move along the X-axis direction.

[0016] Optionally, the first magnet assembly comprises a magnet fixing seat and at least two electromagnets, and the at least two electromagnets are arranged on the magnet fixing seat and are spaced apart along the X-axis direction.

[0017] Optionally, the X-axis moving module comprises:

[0018] An X-axis driving motor is arranged on the first support.

[0019] A transmission assembly comprises a driving wheel, a driven wheel and a transmission belt, the driving wheel is in transmission connection with the output end of the X-axis driving motor, the driven wheel is rotatably arranged on the first support, the transmission belt is arranged around the driving wheel and the driven wheel and is tensioned by the driving wheel and the driven wheel, and the lifting driving member is arranged on the transmission belt.

[0020] Optionally, the X-axis moving module further comprises a tensioning support, the tensioning support is movably arranged on the first support, the driven wheel is rotatably arranged on the tensioning support, and the tensioning support is configured to adjust the mounting position of the driven wheel.

[0021] Optionally, the material taking device further comprises a code scanning member, the code scanning member is arranged on the first support, and the code scanning member is configured to scan the identification code on the tray.

[0022] Optionally, the material taking device further comprises a sensor assembly, the sensor assembly comprises a first sensor, the first sensor is arranged on the first support, and the first sensor is configured to detect whether the tray is transported to a preset position.

[0023] Optionally, the material taking device further comprises a Y-axis moving module and a Z-axis moving module, the Z-axis moving module is arranged on the moving end of the Y-axis moving module, the first support is arranged on the moving end of the Z-axis moving module, the Y-axis moving module is used for driving the electromagnet module to move along the Y-axis direction, and the Z-axis moving module is used for driving the electromagnet module to move along the Z-axis direction, and the X-axis direction, the Y-axis direction and the Z-axis direction are perpendicular to each other.

[0024] Optionally, the Y-axis moving module comprises a Y-axis driving motor, a Y-axis screw nut assembly and a first bearing seat.

[0025] The Z-axis moving module comprises a Z-axis driving motor and a Z-axis screw nut assembly, the output shaft of the Y-axis driving motor is connected with the input end of the Y-axis screw nut assembly, the first bearing seat is arranged on the moving end of the Y-axis screw nut assembly, the Z-axis screw nut assembly is arranged on the first bearing seat along the Z-axis direction, the output shaft of the Z-axis driving motor is connected with the input end of the Z-axis screw nut assembly, and the first support is arranged on the moving end of the Z-axis screw nut assembly.

[0026] Beneficial effects:

[0027] The material taking device provided by the utility model, when taking materials, the electromagnet module is driven by the X-axis moving module to adsorb the first side of the material tray, the material tray is pulled out of the material frame, then the electromagnet module is moved to the second side of the material tray through the combination of the X-axis moving module and the lifting driving piece, the electromagnet module is adsorbed on the second side of the material tray, the material tray is pushed to the picking device through the X-axis moving module, and after picking is completed, the material tray is pulled out of the picking device and pushed into the material frame through the cooperation of the X-axis moving module, the lifting driving piece and the electromagnet module, so that the product is not damaged in the material taking process, the material tray is accurately taken and placed, and the material taking efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 is the structure schematic view of the X-axis moving module and the electromagnet module under one visual angle provided by the utility model;

[0029] Figure 2 is the structure schematic view of the X-axis moving module and the electromagnet module under another visual angle provided by the utility model;

[0030] Figure 3 is the partial structure schematic view of the electromagnet module provided by the utility model;

[0031] Figure 4 is the structure schematic view of the moving module and the electromagnet module provided by the utility model.

[0032] In the drawings:

[0033] 100, a moving module; 110, an X-axis moving module; 111, an X-axis drive motor; 112, a transmission assembly; 1121, a driving wheel; 1122, a driven wheel; 1123, a transmission belt; 1124, a tensioning support; 120, a first support; 121, a first track; 122, a second track; 130, a lifting drive; 140, a Y-axis moving module; 141, a Y-axis drive motor; 142, a Y-axis screw nut assembly; 143, a first bearing seat; 150, a Z-axis moving module; 151, a Z-axis drive motor; 152, a Z-axis screw nut assembly;

[0034] 200, an electromagnet module; 210, a mounting seat; 211, a first mounting plate; 212, a second mounting plate; 213, a first magnet assembly; 214, a second magnet assembly; 215, a first drive; 216, a second drive; 217, a magnet fixing seat; 218, an electromagnet; 2181, a first electromagnet; 2182, a second electromagnet;

[0035] 300, a code scanning element;

[0036] 400, a first sensor. DETAILED DESCRIPTION

[0037] The utility model will be described in further detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model, and not to limit the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.

[0038] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0039] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0040] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0041] This embodiment provides a material handling device, disposed between a material frame and a sorting device, such as... Figures 1-4 As shown, the material handling device includes a moving module 100 and an electromagnet module 200. The moving module 100 includes an X-axis moving module 110, a first support 120, and a lifting drive 130. The X-axis moving module 110 is mounted on the first support 120, the lifting drive 130 is mounted on the moving end of the X-axis moving module 110, and the electromagnet module 200 is mounted on the lifting end of the lifting drive 130. The electromagnet module 200 can be attracted to the side wall of the material tray. The X-axis moving module 110 can drive the electromagnet module 200 to move along the X-axis direction, and the lifting drive 130 can drive the electromagnet module 200 to move along the Z-axis direction. The X-axis direction is perpendicular to the Z-axis direction. Through the cooperation of the X-axis moving module 110, the lifting drive 130, and the electromagnet module 200, the material tray can be transported between the material frame and the picking device.

[0042] During material handling, the X-axis moving module 110 drives the electromagnet module 200 to attract the first side of the material tray, pulling the tray out of the material frame. Then, through the combination of the X-axis moving module 110 and the lifting drive 130, the electromagnet module 200 is moved to the second side of the material tray and attracted there. The X-axis moving module 110 pushes the tray into the sorting device. After sorting, the X-axis moving module 110, the lifting drive 130, and the electromagnet module 200 work together to pull the tray out of the sorting device and push it into the material frame. This avoids product damage during material handling, achieves precise tray handling, and improves material handling efficiency.

[0043] Optionally, the lifting drive 130 is a lifting cylinder, which enables the electromagnet module 200 to be smoothly lifted and lowered along the Z-axis direction, and can improve the movement efficiency of the electromagnet module 200 in the Z-axis direction, ensuring that the lifting cylinder, in conjunction with the X-axis moving module 110, can quickly move the electromagnet module 200 from one side of the product carrier to the other side of the product carrier.

[0044] Optionally, such as Figure 1 and Figure 2 As shown, the first bracket 120 is provided with a first track 121 and a second track 122 that are parallel to each other. The electromagnet module 200 includes a mounting base 210, a first magnet assembly 213 and a second magnet assembly 214. The mounting base 210 is connected to the lifting end of the lifting drive component 130. The mounting base 210 is provided with a first mounting plate 211 and a second mounting plate 212 arranged vertically. The first magnet assembly 213 is disposed on the upper end surface of the first mounting plate 211. The first magnet assembly 213 is used to drive the tray to move along the first track 121, thereby moving the tray from the material frame to the selection device. The second magnet assembly 214 is disposed on the lower end surface of the second mounting plate 212. The second magnet assembly 214 is used to drive the tray to move along the second track 122, thereby moving the tray from the selection device to the material frame. The first magnet assembly 213 drives the tray to move along the first track 121 (that is, the tray is fed to the sorting device through the first track), while the second magnet assembly 214 drives the tray to move along the second track 122 (returning the tray). This effectively reduces the reciprocating motion path of the electromagnet module 200, optimizes the overall handling process, reduces motion loss, and improves the service life of the equipment.

[0045] Understandably, the first magnet assembly 213 is only responsible for pulling the tray through the first track 121 and pushing it into the sorting device. After sorting, the second magnet assembly 214 is only responsible for pulling the tray from the sorting device and pushing it into the material frame. This can reduce the movement path of the electromagnet module 200 and improve handling efficiency.

[0046] Optionally, the electromagnet module 200 further includes a first driving member 215 and a second driving member 216. The first driving member 215 is disposed on the first mounting plate 211, and the first magnet assembly 213 is disposed on the first driving member 215. The first driving member 215 is used to drive the first magnet assembly 213 to move along the X-axis direction, adjusting the specific position of the first magnet assembly 213 when adsorbing the material tray from the material frame to ensure precise docking and avoid adsorption failure due to slight deviations in the placement position of the material tray, thereby improving the pick-and-place accuracy. In this embodiment, both the first driving member 215 and the second driving member 216 are driving cylinders.

[0047] Optionally, the second driving component 216 is disposed on the second mounting plate 212, and the second magnet assembly 214 is disposed on the second driving component 216. The second driving component 216 is used to drive the second magnet assembly 214 to move along the X-axis direction, adjusting the specific position of the second magnet assembly 214 when adsorbing the material tray from the picking device to ensure precise alignment and avoid adsorption failure due to slight deviations in the position of the material tray, thereby improving the pick-and-place accuracy. The structure of the second magnet assembly 214 is the same as that of the first magnet assembly 213, and will not be described again.

[0048] Optionally, the first magnet assembly 213 includes a magnet holder 217 and at least two electromagnets 218, which are spaced apart on the magnet holder 217 along the X-axis. The two electromagnets 218 are defined as a first electromagnet 2181 and a second electromagnet 2182. The first electromagnet 2181 is used to pull the product out of the material frame. Then, the X-axis moving module 110 and the lifting drive 130 drive the first electromagnet 2181 and the second electromagnet 2182 to move synchronously to the other side of the tray. The second electromagnet 2182 pushes the product into the picking device. After picking, the second electromagnet 2182 pulls the tray out of the picking device. Then, the X-axis moving module 110 and the lifting drive 130 drive the first electromagnet 2181 and the second electromagnet 2182 to move synchronously to the other side of the tray. The first electromagnet 2181 pushes the tray back into the material frame, achieving an efficient handling process.

[0049] In this embodiment, as Figure 3 As shown, two first electromagnets 2181 and two second electromagnets 2182 are provided, which can ensure that the material tray is subjected to stable force during the suction process and improve the stability of the handling.

[0050] Optionally, the X-axis moving module 110 includes an X-axis drive motor 111 and a transmission assembly 112. The X-axis drive motor 111 is mounted on the first bracket 120. The transmission assembly 112 includes a drive wheel 1121, a driven wheel 1122, and a transmission belt 1123. The drive wheel 1121 is connected to the output end of the X-axis drive motor 111. The driven wheel 1122 is rotatably mounted on the first bracket 120. The transmission belt 1123 is wound around the drive wheel 1121 and the driven wheel 1122 and is tensioned by them. A lifting drive component 130 is mounted on the transmission belt 1123. When the X-axis drive motor 111 drives the transmission belt 1123 to rotate, the electromagnet module 200 on the lifting end of the lifting drive component 130 can move along the X-axis. In this embodiment, the X-axis moving module 110 has a simple structure, high motion efficiency, and improves the handling speed.

[0051] Optionally, the X-axis moving module 110 further includes a tensioning support 1124, which is movably mounted on the first bracket 120. The driven wheel 1122 is rotatably mounted on the tensioning support 1124, and the tensioning support 1124 is used to adjust the installation position of the driven wheel 1122. This effectively adjusts the tension of the transmission belt 1123, keeping it always taut, ensuring precise and stable X-axis movement of the electromagnet module 200, and avoiding positioning deviations caused by slackness or slippage. Optionally, the X-axis moving module 110 may also include a tensioning wheel that abuts against the transmission belt 1123, thereby further adjusting the tension of the transmission belt 1123.

[0052] Optionally, the first bracket 120 is also provided with a slide rail along the X-axis, and the lifting drive 130 is provided with a slider, which is slidably connected to the slide rail, thereby ensuring the stability and accuracy of the movement of the electromagnet module 200 in the X-axis direction.

[0053] Optionally, the material handling device also includes a barcode scanner 300, which is mounted on the first support 120 and is used to scan the identification code on the material tray. By automatically recognizing the identification code on the material tray through the barcode scanner 300, product information can be quickly obtained, enabling automatic product tracking and management.

[0054] For example, information on qualified and unqualified products can be pre-stored in an identification code. By scanning the identification code, it is possible to quickly identify which products on the tray are qualified and which are unqualified. When the tray is pushed to the sorting device, the unqualified products can be quickly picked out.

[0055] Optionally, the material handling device further includes a sensor assembly, which includes a first sensor 400. The first sensor 400 is disposed on the first support 120. The first sensor 400 is used to detect whether the material tray has been transported to a preset position. In this embodiment, the preset position is the middle position of the first support 120, so that the two ends of the material tray have sufficient distance to allow the power magnet 218 assembly to enter.

[0056] Optionally, if the material tray does not reach the preset position correctly, the first sensor 400 can immediately send a signal to the controller. The controller will then trigger an alarm or pause the operation of the material handling device to prevent equipment or product damage due to misalignment, thereby improving the safety of system operation. It should be noted that the specific connection circuit between the first sensor 400 and the controller is existing technology and will not be described in detail here.

[0057] Optionally, the material handling device further includes a Y-axis moving module 140 and a Z-axis moving module 150. The Z-axis moving module 150 is disposed on the moving end of the Y-axis moving module 140, and the first support 120 is disposed on the moving end of the Z-axis moving module 150. The Y-axis moving module 140 is used to drive the electromagnet module 200 to move along the Y-axis direction, and the Z-axis moving module 150 is used to drive the electromagnet module 200 to move along the Z-axis direction. The X-axis direction, Y-axis direction, and Z-axis direction are perpendicular to each other. Through the cooperation of the Y-axis moving module 140, the Z-axis moving module 150, and the X-axis moving module 110, the material tray at any position in the material frame can be taken out or sent back, improving the flexibility of material handling.

[0058] Optionally, the Y-axis moving module 140 includes a Y-axis drive motor 141, a Y-axis lead screw and nut assembly 142, and a first support 143. The Z-axis moving module 150 includes a Z-axis drive motor 151 and a Z-axis lead screw and nut assembly 152. The output shaft of the Y-axis drive motor 141 is connected to the input end of the Y-axis lead screw and nut assembly 142. The first support 143 is disposed on the moving end of the Y-axis lead screw and nut assembly 142. The Z-axis lead screw and nut assembly 152 is disposed on the first support 143 along the Z-axis direction. The output shaft of the Z-axis drive motor 151 is connected to the input end of the Z-axis lead screw and nut assembly 152. A first bracket 120 is disposed on the moving end of the Z-axis lead screw and nut assembly 152. In this embodiment, the Y-axis lead screw and nut assembly 142 and the Z-axis lead screw and nut assembly 152 are prior art in the art and will not be described in detail.

[0059] The general process of material handling by the material handling device provided in this embodiment is as follows:

[0060] First, the electromagnet module 200 is attracted to the first side of the material tray, and the moving module 100 drives the electromagnet module 200 to pull the material tray from the material frame to the preset position.

[0061] Next, the control module 100 drives the electromagnet module 200 to move to the second side of the tray and attaches to the second side of the tray. The moving module 100 pushes the tray from the preset position to the selection device.

[0062] After selection, the electromagnet module 200 is attached to the second side of the tray, and the moving module 100 drives the electromagnet module 200 to pull the tray from the selection device to the preset position.

[0063] Finally, the control module 100 drives the electromagnet module 200 to move to the first side of the tray and attaches to the first side of the tray. The control module 100 then pushes the tray from the preset position into the tray frame.

[0064] The material handling device provided in this embodiment makes the material tray smoother in the process of moving between the material frame and the sorting device, improves the material handling efficiency, and thus improves the production efficiency.

[0065] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A material handling device, disposed between a material frame and a sorting device, characterized in that, include: The mobile module (100) includes an X-axis mobile module (110), a first support (120), and a lifting drive (130). The X-axis mobile module (110) is disposed on the first support (120), and the lifting drive (130) is disposed on the mobile end of the X-axis mobile module (110). An electromagnet module (200) is disposed on the lifting end of the lifting drive (130). The electromagnet module (200) can be attracted to the side wall of the tray. The X-axis moving module (110) can drive the electromagnet module (200) to move along the X-axis direction. The lifting drive (130) can drive the electromagnet module (200) to move along the Z-axis direction, so as to pull the tray from the tray frame and push it into the selection device, or pull the tray from the selection device and push it into the tray frame. The X-axis direction is perpendicular to the Z-axis direction.

2. The material handling device according to claim 1, characterized in that, The first support (120) is provided with a first track (121) and a second track (122) that are parallel to each other, and the electromagnet module (200) includes: The mounting base (210) is connected to the lifting end of the lifting drive (130), and the mounting base (210) is provided with a first mounting plate (211) and a second mounting plate (212) arranged vertically. The first magnet assembly (213) is disposed on the upper end face of the first mounting plate (211), and the first magnet assembly (213) is used to drive the tray to move along the first track (121); The second magnet assembly (214) is disposed on the lower end face of the second mounting plate (212), and the second magnet assembly (214) is used to drive the tray to move along the second track (122).

3. The material handling device according to claim 2, characterized in that, The electromagnet module (200) also includes: A first driving member (215) is disposed on the first mounting plate (211), and a first magnet assembly (213) is disposed on the first driving member (215). The first driving member (215) is used to drive the first magnet assembly (213) to move along the X-axis direction. The second driving member (216) is disposed on the second mounting plate (212), and the second magnet assembly (214) is disposed on the second driving member (216). The second driving member (216) is used to drive the second magnet assembly (214) to move along the X-axis direction.

4. The material handling device according to claim 2, characterized in that, The first magnet assembly (213) includes a magnet holder (217) and at least two electromagnets (218), with the at least two electromagnets (218) spaced apart on the magnet holder (217) along the X-axis direction.

5. The material handling device according to claim 1, characterized in that, The X-axis movement module (110) includes: The X-axis drive motor (111) is mounted on the first bracket (120); The transmission assembly (112) includes a drive wheel (1121), a driven wheel (1122), and a transmission belt (1123). The drive wheel (1121) is connected to the output end of the X-axis drive motor (111). The driven wheel (1122) is rotatably mounted on the first bracket (120). The transmission belt (1123) is wound around the drive wheel (1121) and the driven wheel (1122) and is tensioned by the drive wheel (1121) and the driven wheel (1122). The lifting drive component (130) is mounted on the transmission belt (1123).

6. The material handling device according to claim 5, characterized in that, The X-axis moving module (110) further includes a tensioning support (1124), which is movably mounted on the first bracket (120). The driven wheel (1122) is rotatably mounted on the tensioning support (1124), and the tensioning support (1124) is used to adjust the installation position of the driven wheel (1122).

7. The material handling device according to claim 1, characterized in that, The material handling device further includes a barcode scanner (300), which is disposed on the first support (120) and is used to scan the identification code on the material tray.

8. The material handling device according to claim 1, characterized in that, The material handling device further includes a sensor assembly, which includes a first sensor (400) disposed on the first bracket (120). The first sensor (400) is used to detect whether the material tray has been moved to a preset position.

9. The material handling device according to any one of claims 1-8, characterized in that, The material handling device further includes a Y-axis moving module (140) and a Z-axis moving module (150). The Z-axis moving module (150) is disposed on the moving end of the Y-axis moving module (140). The first bracket (120) is disposed on the moving end of the Z-axis moving module (150). The Y-axis moving module (140) is used to drive the electromagnet module (200) to move along the Y-axis direction. The Z-axis moving module (150) is used to drive the electromagnet module (200) to move along the Z-axis direction. The X-axis direction, the Y-axis direction, and the Z-axis direction are perpendicular to each other.

10. The material handling device according to claim 9, characterized in that, The Y-axis moving module (140) includes a Y-axis drive motor (141), a Y-axis lead screw and nut assembly (142), and a first bearing seat (143). The Z-axis moving module (150) includes a Z-axis drive motor (151) and a Z-axis lead screw and nut assembly (152). The output shaft of the Y-axis drive motor (141) is connected to the input end of the Y-axis lead screw nut assembly (142). The first support (143) is disposed on the moving end of the Y-axis lead screw nut assembly (142). The Z-axis lead screw nut assembly (152) is disposed on the first support (143) along the Z-axis direction. The output shaft of the Z-axis drive motor (151) is connected to the input end of the Z-axis lead screw nut assembly (152). The first bracket (120) is disposed on the moving end of the Z-axis lead screw nut assembly (152).

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