Drying tank of chain type polishing machine
By adding a protective cover to the drying tank of the chain polishing machine and using nitrogen to purge impurities, the problem of EL roller marks caused by impurity adsorption after the chain acid polishing machine stops was solved, achieving efficient and clean production and production process optimization.
Patent Information
- Application Number
- CN202423008799.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-03
- Publication Date
- 2026-01-23
- Estimated Expiration
- 2034-12-03
AI Technical Summary
After the chain acid polishing machine's drying tank is shut down, impurities will be adsorbed onto the rollers, causing EL roller marks on the silicon wafers to become dirty, affecting the cleanliness of the silicon wafers and production efficiency.
A protective cover is installed on the drying tank, and a nitrogen source is connected through the vents on both sides of the protective cover to blow nitrogen into the tank to remove impurities, avoiding direct contact cleaning. The residual heat of the protective cover is used to dry the workpieces, reducing heat loss and cleaning time.
It effectively prevents impurities from adsorbing onto the transmission rod and protrusions, avoids EL contamination, shortens recovery time, improves production efficiency and silicon wafer cleanliness, reduces rework processes, and enhances overall production efficiency.
Smart Images

Figure CN223826742U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to photovoltaic cell field especially chain type polishing machine drying groove. BACKGROUND
[0002] The drying groove in the chain type acid polishing machine is a key component, which is mainly used for drying treatment of the silicon wafer after acid polishing treatment. The main function of the drying groove is to remove the moisture or other liquid on the silicon wafer through a certain way (such as hot air, vacuum, etc.), so that the silicon wafer reaches a certain dryness to meet the requirements of the subsequent process. In the chain type acid polishing machine, the drying groove is usually located after the acid polishing groove, and is used for drying treatment of the silicon wafer after acid polishing.
[0003] When the chain type acid polishing machine is stopped, the impurities contained in the drying groove will cause poor cleanliness in the machine and air impurities adsorbed on the rollers of the drying groove. When the machine is restarted, the impurities on the rollers will be brought to the surface of the silicon wafer, causing EL roller printing stains and other problems on the silicon wafer. INVENTION CONTENTS
[0004] The utility model discloses a chain type polishing machine drying groove.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:
[0006] The utility model discloses a chain type polishing machine drying groove, including the groove body, the air pipe is set up on the groove body, the protection cover is covered and is established to the groove body, the both sides of protection cover are seted up and pass the air hole of protection gas, the air pipe's air inlet end is set up and is passed through the top of protection cover.
[0007] Further scheme: the protection cover includes upper layer cover body and lower layer cover body, and the upper layer cover body is connected with the lower layer cover body through a partition plate.
[0008] Further scheme: the groove body includes a groove body, a transmission rod rotatably connected in the groove body, and a convex portion spacedly sleeved on the outer periphery of the transmission rod.
[0009] Further scheme: the convex portion is made of high-temperature-resistant plastic.
[0010] Further scheme: the air pipe includes a CDA air pipe and an exhaust hood connected to the air outlet end of the CDA air pipe.
[0011] Further scheme: the air hole is a horizontally arranged waist-shaped hole.
[0012] Further scheme: the cover plate is made of transparent material.
[0013] Compared with the prior art, the utility model has the advantages that:
[0014] The utility model discloses a protection cover is additionally established on the drying groove, can reduce drying heat loss on one hand, improve drying efficiency, when stopping, nitrogen source is connected through the air hole of protection cover two sides to the horizontal purging nitrogen in the groove, and the impurity adsorbed on the transmission rod and convex part is blown away, and this kind of impurity removal mode is not direct contact, thus avoids the transmission rod, convex part and produces EL dirty roller mark etc., need not secondary cleaning, greatly shorten the time of recovery operation.
[0015] In addition, the upper cover body of the protection cover can prevent liquid from returning to the workpiece, and the workpiece is dried by using the residual heat of the protection cover, thereby reducing the rework process and improving the production efficiency as a whole. BRIEF DESCRIPTION OF DRAWINGS
[0016] Fig. 1 It is a three-dimensional structure schematic diagram of the utility model;
[0017] Fig. 2 It is a side sectional view of the utility model;
[0018] In the drawing: 1-tank body, 11-tank body, 12-transmission rod, 13-convex part, 2-air pipe, 21-CDA air pipe, 22-exhaust hood, 3-protection cover, 31-upper cover body, 311-cover plate, 32-lower cover body, 4-air hole. DETAILED DESCRIPTION
[0019] The technical solutions in the embodiments of the utility model will be described clearly and completely below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.
[0020] In the description of the utility model, it should be explained that the terms "upper", "lower", "left", "right", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, or the orientation or positional relationship usually placed when the utility model product is used, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.
[0021] Please refer to Figs. 1-2In this embodiment, a drying tank for a chain polishing machine includes a tank body 1, with an air pipe 2 mounted on the tank body 1. A protective cover 3 covers the tank body 1, and ventilation holes 4 on both sides of the protective cover 3 allow protective gas to pass through. The air inlet end of the air pipe 2 extends through the top of the protective cover 3. During normal production of the chain acid polishing machine, the air pipe 2 continuously blows dry, clean compressed air into the tank body 2, drying the material placed on the tank body 1. The protective cover 3 reduces heat loss and improves drying efficiency. When the chain acid polishing machine stops, protective gas such as nitrogen is introduced through the ventilation holes 3 to purge the inside of the tank, preventing impurities in the air from adsorbing onto the tank body 1. The impurities fall to the bottom of the tank body 1 and can be cleaned periodically.
[0022] Furthermore, the protective cover 3 includes an upper cover 31 and a lower cover 32, which are connected by a partition, meaning they are not interconnected. The upper cover 31 has an opening covered by a cover plate 311. Rework sheets containing liquid can be placed in the upper cover 31 and dried using the residual heat of the lower cover 32.
[0023] Furthermore, the tank 1 includes a tank body 11, a transmission rod 12 rotatably connected in the tank body 11, and protrusions 13 spaced apart and sleeved on the outer periphery of the transmission rod 12. The transmission rod 12 drives the protrusions 13 to rotate, providing support and guidance for the material to be dried, making it heat more evenly.
[0024] Furthermore, the protrusion 13 is made of high-temperature resistant plastic.
[0025] Furthermore, the air pipe 2 includes a CDA air pipe 21 and an exhaust hood 22 connected to the air outlet of the CDA air pipe 21. The exhaust hood 22 increases the air blowing area, making the entire tank 1 heat up more evenly.
[0026] Furthermore, the vent 4 is a horizontally positioned, waist-shaped hole. During shutdown, a nitrogen source is connected via a hose to continuously supply nitrogen into the tank 1, purging the surfaces of the drive rod 12 and the protrusion 13, causing adsorbed impurities to fall to the bottom of the tank body 11. This waist-shaped design of the vent 4 helps to distribute the gas more evenly within the tank 1. During horizontal purging, this ensures that the gas is evenly purged to every corner of the tank, avoiding over-purging or under-purging in localized areas. This uniform gas distribution helps improve the thoroughness and uniformity of the purging. Since the drive rod 12 and the protrusion 13 are essentially uncontaminated, production can begin directly after the chain acid polishing machine is restarted, without significant EL contamination or roller marks, greatly reducing the number of rework runs and restart time, saving manpower and rework costs, increasing machine output, and reducing production costs.
[0027] Furthermore, the cover plate 311 is made of transparent material, which makes it easy to inspect the drying status of the returned workpieces.
[0028] When the chain acid polishing machine is in normal production, compressed air is continuously supplied through the CDA air pipe to dry the material placed on the drive rod 12, and the lower cover 32 can reduce heat loss. At the same time, the reworkpiece with liquid is placed in the upper cover 31 and dried using the residual heat of the cover, saving rework time. When the chain acid polishing machine is stopped, the CDA air pipe stops supplying air, and the hose connected to the vent 4 blows nitrogen into the tank to prevent impurities from adhering to the protrusion 13 in the tank. This is closed before restarting the machine. After the chain acid polishing machine is restarted, since there is no direct contact during the purging process, there are no EL dirt roller marks on the drive rod 12 and the protrusion 13, and production can proceed directly.
[0029] Although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
[0030] Therefore, the above description is only a preferred embodiment of this application and is not intended to limit the scope of this application; that is, all equivalent modifications made in accordance with the scope of the claims of this application shall be within the protection scope of the claims of this application.
Claims
1. A drying tank for a chain polishing machine, comprising a tank body (1), wherein an air pipe (2) is mounted on the tank body (1), characterized in that, The tank (1) is covered with a protective cover (3), and the protective cover (3) has ventilation holes (4) on both sides for the protective gas to pass through. The air inlet end of the air pipe (2) is set through the top of the protective cover (3). The protective cover (3) includes an upper cover (31) and a lower cover (32), the upper cover (31) and the lower cover (32) are connected by a partition; the upper cover (31) has an opening, and a cover plate (311) is provided on the opening. The trough (1) includes a trough body (11), a transmission rod (12) rotatably connected in the trough body (11), and protrusions (13) spaced out on the outer periphery of the transmission rod (12).
2. The drying tank of the chain polishing machine according to claim 1, characterized in that, The protrusion (13) is made of high-temperature resistant plastic.
3. The drying tank of the chain polishing machine according to claim 1, characterized in that, The trachea (2) includes a CDA trachea (21) and an exhaust hood (22) connected to the outlet end of the CDA trachea (21).
4. The drying tank of the chain polishing machine according to claim 1, characterized in that, The ventilation hole (4) is a horizontally arranged waist-shaped hole.
5. The drying tank of the chain polishing machine according to claim 1, characterized in that, The cover plate (311) is made of transparent material.