Glass defect detection device and glass processing system

Abstract

The utility model discloses a glass defect detection device which comprises a positioning mechanism and a detection mechanism, and the positioning mechanism can position glass at a detection position; the detection mechanism is arranged corresponding to the detection position and comprises a plurality of groups of edge detection assemblies and a plurality of groups of chamfer detection assemblies; the multiple sets of edge detection assemblies are arranged in one-to-one correspondence with multiple edges of the glass, each edge detection assembly comprises an upper detection module and a lower detection module, the upper detection modules are used for detecting the upper sides of the edges of the glass, and the lower detection modules are used for detecting the lower sides of the edges of the glass; the plurality of groups of chamfer detection assemblies are arranged in one-to-one correspondence with a plurality of chamfers of the glass so as to detect the chamfers of the glass. By adopting the glass defect detection device, defect detection can be carried out on the edge of the glass after edge processing of the glass is completed, and the glass with defects is prevented from being applied to a semiconductor preparation process. The utility model further relates to a glass processing system.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of glass processing, and particularly relates to a glass defect detection device and a glass processing system. BACKGROUND

[0002] In a semiconductor preparation process, a glass substrate carrying a film needs to undergo a high-temperature process. If the glass has defects, it will have a great impact on production efficiency. In order to avoid damage to the glass during transportation and affect the semiconductor production efficiency, the edge of the glass substrate needs to be ground and processed, and small defects may be generated on the edge of the glass substrate during the processing. Therefore, the edge of the glass substrate needs to be detected for defects. CONTENT OF THE UTILITY MODEL

[0003] The technical problem to be solved by the application is to realize defect detection on the edge of a glass substrate, and provide a glass defect detection device and a glass processing system.

[0004] The technical scheme provided by the application is as follows:

[0005] A glass defect detection device comprises:

[0006] A positioning mechanism is arranged on a conveying path of the glass, and the positioning mechanism can position the glass at a detection position;

[0007] A detection mechanism is arranged corresponding to the detection position to detect the glass at the detection position, and the detection mechanism comprises a plurality of edge detection assemblies and a plurality of chamfer detection assemblies;

[0008] The plurality of edge detection assemblies are arranged one-to-one corresponding to a plurality of edges of the glass, and each edge detection assembly comprises an upper detection module and a lower detection module, the upper detection module is used for detecting the upper side of the edge of the glass, and the lower detection module is used for detecting the lower side of the edge of the glass;

[0009] The plurality of chamfer detection assemblies are arranged one-to-one corresponding to a plurality of chamfers of the glass to detect the chamfers of the glass.

[0010] The glass defect detection device is used to position the glass conveyed by the positioning mechanism at the detection position, and then detect the upper and lower sides of the edge of the glass through the upper and lower detection modules, and detect the chamfers of the glass through the chamfer detection assemblies. In this way, the edge of the glass can be detected for defects after the edge of the glass is processed, and the glass with defects can be avoided from being applied to the semiconductor preparation process.

[0011] Furthermore, the detection mechanism also includes multiple upper driving components, each of which is connected to a corresponding upper detection module, and the upper driving component is used to drive the upper detection module to reciprocate so that the upper detection module can detect multiple positions on the upper side of the glass edge.

[0012] Furthermore, the detection mechanism also includes multiple lower driving components, each of which is connected to a corresponding lower detection module, and the lower driving component is used to drive the lower detection module to reciprocate so that the lower detection module can detect multiple positions on the lower side of the glass edge.

[0013] Furthermore, both the upper detection module and the lower detection module include an edge detection camera and an edge detection light source.

[0014] Furthermore, the chamfer detection component includes a chamfer detection camera and a chamfer detection light source.

[0015] Furthermore, the positioning mechanism includes a baffle assembly and a positioning assembly. The baffle assembly is used to block the glass at the detection position, and the positioning assembly is used to position the glass at the detection position.

[0016] Furthermore, the material blocking assembly includes a material blocking drive and a block, the material blocking drive is connected to the block to drive the block to move, and the block can pass through an avoidance position and an obstruction position during its movement;

[0017] When the block moves to the avoidance position, the glass can be output from the detection position; when the block moves to the blocking position, the block can abut against the glass delivered to the detection position.

[0018] Furthermore, the positioning component includes a first positioning block and a second positioning block, which are respectively disposed on both sides of the glass conveying path, and the first positioning block and the second positioning block can move closer to each other and further away from each other, so as to clamp and position the glass at the detection position during the process of moving closer to each other.

[0019] A glass processing system includes a glass defect detection device as described above.

[0020] Furthermore, it also includes a conveying mechanism for conveying the glass. Attached Figure Description

[0021] The accompanying drawings are provided to further understand this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof.

[0022] Figure 1 A schematic diagram of the glass defect detection device and conveying mechanism provided in an embodiment of this application;

[0023] Figure 2 for Figure 1 The diagram shows the detection of the upper and lower detection modules in the glass defect detection device.

[0024] Figure 3 for Figure 1 The diagram shows a chamfering detection component in a glass defect detection device.

[0025] Label Explanation:

[0026] 100. Glass defect detection device; 200. Glass; 110. Positioning mechanism; 111. Material blocking assembly; 112. Positioning component; 120. Edge detection assembly; 121. Upper detection module; 122. Lower detection module; 123. Upper drive component; 130. Chamfer detection assembly; 300. Conveying mechanism. Detailed Implementation

[0027] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0028] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the equipment or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0029] On the one hand, this application provides a glass defect detection device that can detect defects at the edges of glass, thereby preventing glass with edge defects from being used in semiconductor manufacturing processes.

[0030] like Figures 1 to 3As shown, the glass defect detection device 100 includes a positioning mechanism 110 and a detection mechanism. The positioning mechanism 110 is disposed on the conveying path of the glass 200 and is capable of positioning the glass 200 at the detection position. The detection mechanism is disposed corresponding to the detection position and is used to detect the edge of the glass 200 located at the detection position.

[0031] Furthermore, the inspection mechanism includes multiple sets of edge inspection components 120 and multiple sets of chamfer inspection components 130. The multiple sets of edge inspection components 120 are arranged corresponding to each of the multiple edges of the glass 200, and each edge inspection component 120 includes an upper inspection module 121 and a lower inspection module 122. The upper inspection module 121 is used to inspect the upper side of the edge of the glass 200, and the lower inspection module 122 is used to inspect the lower side of the edge of the glass 200. The multiple sets of chamfer inspection components 130 are arranged corresponding to each of the multiple chamfers of the glass 200 to inspect the chamfers of the glass 200.

[0032] Using the aforementioned glass defect detection device, the positioning mechanism 110 positions the conveyed glass 200 at the detection position. Then, the upper and lower detection modules 121 and 122 detect the upper and lower edges of the glass 200, while the chamfer detection component 130 detects the chamfers of the glass 200. In this way, defect detection can be performed on the edges of the glass 200 after edge processing, preventing the use of defective glass 200 in semiconductor manufacturing processes.

[0033] In one embodiment, the positioning mechanism 110 includes a stop assembly 111 and a positioning assembly 112. The stop assembly 111 is used to block the glass 200 at the detection position, and the positioning assembly 112 is used to position the glass 200 at the detection position.

[0034] The material blocking assembly 111 includes a material blocking drive and a block. The material blocking drive is connected to the block to drive the block to move. During the movement of the block, it can pass through an avoidance position and an obstruction position.

[0035] When the stop block moves to the avoidance position, the glass 200 can be output from the detection position, that is, continue to be transported downstream; when the stop block moves to the blocking position, the stop block can abut against the glass 200 transported to the detection position, thereby blocking the glass 200 at the detection position.

[0036] It is understandable that when the stop block moves to the blocking position, the stop block is located on the conveying path of the glass 200, and when the stop block blocks the glass 200 at the detection position, the stop block abuts against the downstream side of the glass 200, thereby preventing the glass 200 from continuing to be conveyed downstream.

[0037] Optionally, the blocking drive is a pneumatic or electric cylinder, and is located below the glass 200 conveying path. The blocking drive drives the stop block to reciprocate vertically. Thus, when it is necessary to block the glass 200, the blocking drive drives the stop block to rise to the blocking position; when it is necessary to release the glass 200 downstream, the blocking drive drives the stop block to descend to the avoidance position. Of course, in other embodiments, the blocking drive can also be located above the glass 200 conveying path, with the stop block descending to the blocking position and rising to the avoidance position; or the blocking drive can also drive the stop block to move horizontally, as long as it can pass through the aforementioned blocking and avoidance positions and does not interfere with the glass 200 conveying mechanism.

[0038] In one embodiment, the positioning component 112 includes a first positioning block and a second positioning block, which are respectively disposed on both sides of the conveying path of the glass 200. The first positioning block and the second positioning block can move closer to each other and further away from each other, so as to clamp the glass 200 at the positioning detection position when they move closer to each other. It can be understood that the stop component 111 blocks the glass 200 from continuing to be conveyed in the conveying direction of the glass 200, and also realizes the positioning of the glass 200 in the conveying direction of the glass 200. The positioning component 112 is used to position the glass 200 in a horizontal direction that is at an angle to the conveying direction, such as positioning the glass 200 in a horizontal direction perpendicular to the conveying direction, while clamping and fixing the glass 200.

[0039] Furthermore, the positioning component 112 also includes a first positioning drive and a second positioning drive, which are respectively connected to the first positioning block and the second positioning block to drive the first positioning block and the second positioning block to move closer and further apart. Optionally, both the first positioning drive and the second positioning drive are cylinders or electric cylinders.

[0040] It should be noted that in this embodiment, both the first positioning block and the second positioning block can reciprocate, and reciprocate in a horizontal direction perpendicular to the glass 200 conveying direction, so that after the glass 200 completes the inspection, both the first positioning block and the second positioning block are separated from the glass 200, which facilitates the conveying of the glass 200.

[0041] In a preferred embodiment, there are two of each of the first positioning block, the second positioning block, the first positioning drive, and the second positioning drive. The two first positioning blocks and the two second positioning blocks are spaced apart along the conveying direction of the glass 200, and each first positioning block and each second positioning block can move independently. Thus, when detecting the edge, one of the first positioning blocks (or second positioning blocks) can be separated from the glass 200 firstly. After detecting the area covered by that first positioning block (or second positioning block), it is pressed against the glass 200. Then, the other first positioning block (or second positioning block) is removed, and its covered area is detected, achieving comprehensive detection of the edge of the glass 200.

[0042] Understandably, to improve the stability of the glass 200 clamping, more first positioning blocks and second positioning blocks can be set, and each first positioning block and each second positioning block is preferably able to move independently to separate from the glass 200 in sequence. Of course, two or more of the multiple first positioning blocks (second positioning blocks) can also be grouped into multiple groups, and each group of first positioning blocks (second positioning blocks) can move independently.

[0043] In one embodiment, the positioning component 112 further includes a lifting drive and a mounting plate. The lifting drive is connected to the mounting plate to drive the mounting plate to rise and fall. The first positioning drive and the second positioning drive are both disposed on the mounting plate to rise and fall with the mounting plate. Thus, when positioning is required, the mounting plate can be driven to rise, so that the first positioning block and the second positioning block correspond to the glass 200 in the horizontal direction. After detection is completed, the first positioning block and the second positioning block separate from the glass 200 and then fall to avoid being positioned.

[0044] It is understandable that the lifting drive and the stop drive have the same function and can be set as a single drive. Furthermore, if the first and second positioning blocks do not affect the conveying of the glass 200, the first and second positioning blocks do not need to be lifted or lowered.

[0045] In one embodiment, the detection mechanism further includes an upper drive member 123, each upper drive member 123 being connected to a corresponding upper detection module 121, and the upper drive member 123 being used to drive the upper detection module 121 to reciprocate so that the upper detection module 121 can detect multiple positions on the upper side of the edge of the glass 200, thereby performing more comprehensive detection.

[0046] It is understandable that when the glass 200 has a rectangular structure, the upper driving component 123 is used to drive the upper detection module 121 to move along the length direction of the corresponding edge. Specifically... Figure 1There are four upper detection modules 121, two of which move back and forth along the conveying direction, and the other two move back and forth along the direction perpendicular to the conveying direction. Of course, when the glass 200 is of other shapes, the movement path of the upper detection modules 121 can be set specifically, as long as it can achieve comprehensive detection of the upper edge of the glass 200, and there are no restrictions here.

[0047] In one embodiment, the detection mechanism further includes multiple lower driving members, each connected to a corresponding lower detection module 122. The lower driving members drive the lower detection module 122 to reciprocate, enabling the lower detection module 122 to detect multiple locations on the lower side of the glass 200 edge, thus providing a more comprehensive detection. It is understood that the cooperation between the lower detection module 122 and the lower driving member is the same as the cooperation between the upper detection module 121 and the upper driving member 123, and will not be elaborated further here.

[0048] Optionally, both the upper drive unit 123 and the lower drive unit are linear modules.

[0049] In one embodiment, both the upper detection module 121 and the lower detection module 122 include an edge detection camera and an edge detection light source. The edge detection camera is used to take pictures of the edges, and the edge detection light source is used to provide illumination, thereby ensuring the clarity of the pictures. Similarly, the chamfer detection module includes a chamfer detection camera and a chamfer detection light source, the difference being that the chamfer detection camera is used to take pictures of the chamfers.

[0050] It should be noted that after the inspection camera takes a picture, the photo will be transmitted to the image processing system. The image processing system will process and compare the photo to determine whether there are defects on the edges and chamfers of the glass 200.

[0051] On the other hand, this application also provides a glass processing system, which includes the glass defect detection device in the above embodiments.

[0052] Furthermore, the glass processing system also includes a conveying mechanism 300 for conveying the glass 200 along the aforementioned conveying path. Preferably, the conveying mechanism 300 includes multiple conveying rollers arranged at intervals along the aforementioned conveying path.

[0053] It is understood that the aforementioned glass defect detection device is preferably installed in the downstream or end process of the glass processing system, that is, the qualified glass 200 can be packaged.

[0054] Although embodiments of this application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A glass defect detection device, characterized in that, include: A positioning mechanism is disposed on the glass conveying path, and the positioning mechanism is capable of positioning the glass at the detection position; An inspection mechanism is provided corresponding to the inspection position to inspect the glass located at the inspection position. The inspection mechanism includes multiple sets of edge inspection components and multiple sets of chamfer inspection components. Multiple sets of edge detection components are arranged one-to-one with multiple edges of the glass, and each edge detection component includes an upper detection module and a lower detection module. The upper detection module is used to detect the upper side of the glass edge, and the lower detection module is used to detect the lower side of the glass edge. Multiple sets of chamfer detection components are arranged one-to-one with multiple chamfers of the glass to detect the chamfers of the glass.

2. The glass defect detection device according to claim 1, characterized in that, The detection mechanism further includes multiple upper driving components, each of which is connected to a corresponding upper detection module. The upper driving component is used to drive the upper detection module to reciprocate, so that the upper detection module can detect multiple positions on the upper side of the glass edge.

3. The glass defect detection device according to claim 1, characterized in that, The detection mechanism further includes multiple lower driving components, each of which is connected to a corresponding lower detection module. The lower driving component is used to drive the lower detection module to reciprocate, so that the lower detection module can detect multiple positions on the lower side of the glass edge.

4. The glass defect detection device according to claim 1, characterized in that, Both the upper detection module and the lower detection module include an edge detection camera and an edge detection light source.

5. The glass defect detection device according to claim 1, characterized in that, The chamfering detection component includes a chamfering detection camera and a chamfering detection light source.

6. The glass defect detection device according to claim 1, characterized in that, The positioning mechanism includes a baffle assembly and a positioning assembly. The baffle assembly is used to block the glass at the detection position, and the positioning assembly is used to position the glass at the detection position.

7. The glass defect detection device according to claim 6, characterized in that, The material blocking assembly includes a material blocking drive and a blocking block. The material blocking drive is connected to the blocking block to drive the blocking block to move. During the movement of the blocking block, it can pass through an avoidance position and an obstruction position. When the stop block moves to the avoidance position, the glass can be output from the detection position; When the block moves to the blocking position, the block can come into contact with the glass being transported to the detection position.

8. The glass defect detection device according to claim 6, characterized in that, The positioning component includes a first positioning block and a second positioning block, which are respectively disposed on both sides of the glass conveying path. The first positioning block and the second positioning block can move closer to each other and further away from each other, so as to clamp and position the glass at the detection position when they move closer to each other.

9. A glass processing system, characterized in that, Includes the glass defect detection device according to any one of claims 1-8.

10. The glass processing system according to claim 9, characterized in that, It also includes a conveying mechanism for conveying the glass.

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