Protective sheet box for wafer inspection

Abstract

The utility model relates to the technical field of wafer protection, in particular to a protective wafer box for wafer inspection, which comprises a wafer box bottom cover, the whole wafer box bottom cover is of a cylindrical structure, and a support frame is arranged on the surface of the inner wall of the wafer box bottom cover; the two ends of the wafer box upper cover are provided with fastening buttons, and the bottom surface of the wafer box upper cover is provided with a plurality of positioning rods; the wafer box has the beneficial effects that a wafer can be placed on the support frame in the wafer box bottom cover, and then inward pressure is applied to the fastening buttons at the two ends of the wafer box upper cover, so that the wafer box upper cover is fixedly clamped on the surface of the wafer box bottom cover, and meanwhile, the wafer in the wafer box upper cover can be fixed by the positioning rod at the bottom of the wafer box upper cover; therefore, wafer damage caused by collision between the wafer and the inner wall of the wafer box bottom cover due to waggling of the wafer during wafer surface inspection is avoided, and the problem of wafer collision damage caused by no special protection device in the wafer inspection process is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer protection field, concretely is a kind of protective sheet box for wafer inspection. BACKGROUND

[0002] Wafer inspection is the vital link in semiconductor manufacturing process, directly influence product quality and production efficiency, check whether wafer surface has tiny defect, such as surface scratch, particle contamination, crystal defect etc., ensure the smooth progress of subsequent process, and early detection and elimination of defective wafer, can avoid resource waste and cost increase, reduce the risk brought by defect product flowing into market, in short, wafer inspection plays an irreplaceable role in guaranteeing product quality and reducing production cost.

[0003] In prior art, when inspecting wafer surface, it is directly contacted with wafer surface by mechanical arm and artificial, and its surface has no special protection measure.

[0004] However, wafer surface has no any special protection measure when being inspected, which can cause wafer surface to be physically damaged, such as scratch and knock, affect final product quality, therefore, the utility model provides a kind of protective sheet box for wafer inspection to solve the technical problems proposed above. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a kind of protective sheet box for wafer inspection to solve the problems proposed in the above background.

[0006] To achieve the above object, the utility model provides the following technical scheme: a kind of protective sheet box for wafer inspection, the protective sheet box for wafer inspection includes: sheet box bottom cover, sheet box bottom cover overall is cylindrical structure, and the inner wall surface of sheet box bottom cover is provided with support frame;

[0007] Sheet box upper cover, and the two ends of sheet box upper cover are equipped with tight button, and the bottom surface of sheet box upper cover is equipped with a plurality of positioning rods.

[0008] Preferably, the inner wall surface of the sheet box bottom cover is fixedly installed with a support frame, the sheet box upper cover is clamped into the upper part of the sheet box bottom cover, and the two ends of the sheet box bottom cover are fixedly installed with fixed blocks, and the upper end surface of the fixed block is provided with a clamping groove.

[0009] Preferably, the support frame includes a plurality of support rods and a fixing member, and the support rods are distributed in a circumferential array on the outer wall surface of the fixing member.

[0010] Preferably, the sheet box upper cover is a cylindrical structure, a central visible hole is formed at the center of the surface of the sheet box upper cover, a plurality of edge visible grooves are formed at the edge of the surface of the sheet box upper cover, and the two ends of the sheet box upper cover are fixedly installed with clamping members.

[0011] Preferably, the clamping pieces are provided with two groups, both of which are located above the fixing blocks, the surface of the clamping piece is provided with a button slot, two groups of springs are arranged in the button slot, a sliding slot is arranged at both ends of the button slot, a fastening button is clamped in the button slot, sliding blocks are fixedly connected to both ends of the fastening button, the sliding blocks are clamped in the sliding slot and can be displaced up and down in the sliding slot, and a clamping plate is fixedly connected to the bottom surface of the fastening button and clamped in the clamping slot through the clamping piece.

[0012] Preferably, the positioning rods are arranged in a circumferential array below the upper cover of the wafer box, an installation plate is fixedly installed at the upper end of the positioning rod, the installation plate is fixedly installed on the lower surface of the upper cover of the wafer box, and an anti-skid block is fixedly installed at the lower end of the positioning rod.

[0013] Compared with the prior art, the wafer box has the advantages that:

[0014] The wafer box for wafer inspection can place the wafer on the support frame in the bottom cover of the wafer box, then inward pressure is applied to the fastening buttons at both ends of the upper cover of the wafer box, so that the upper cover of the wafer box is fixedly clamped on the surface of the bottom cover of the wafer box, meanwhile, the positioning rods at the bottom of the upper cover of the wafer box can fix the wafer in the upper cover of the wafer box, so that wafer shaking and collision with the inner wall of the bottom cover of the wafer box during wafer surface inspection are avoided, and wafer breakage is avoided, and the problem that wafer is damaged due to the absence of a special protection device during wafer inspection is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a structural schematic view of the wafer box;

[0016] Figure 2 It is a schematic view of the wafer box during installation and use;

[0017] Figure 3 It is a sectional view of the wafer box;

[0018] Figure 4 It is an exploded view of the wafer box;

[0019] Figure 5 It is a bottom view of the upper cover of the wafer box.

[0020] In the drawing: 1, bottom cover of wafer box; 2, support frame; 3, upper cover of wafer box; 4, fastening button; 5, positioning rod;

[0021] 6, fixing block; 7, support rod; 8, fixing piece; 9, central visual hole; 10, edge visual slot; 11, clamping piece; 12, button slot; 13, sliding slot; 14, sliding block; 15, clamping plate; 16, clamping slot; 17, installation plate; 18, anti-skid block; 19, spring. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical scheme of the utility model carry on clear, complete description, and the advantage is more clear and distinct, the following combining with the drawing carries out further detailed explanation to the utility model embodiment. It should be understood that the specific embodiments described herein are part of the embodiments of the utility model, rather than all embodiments, only to explain the embodiments of the utility model, and not for limiting the embodiments of the utility model, all other embodiments obtained by the ordinary skill in the art without making creative labor belong to the scope of the utility model protection.

[0023] Embodiment one: please refer to Figures 1-5 The utility model provides a kind of technical scheme: a protective sheet box for wafer inspection, the protective sheet box for wafer inspection includes: sheet box bottom cover 1, sheet box bottom cover 1 overall is cylindrical structure, support frame 2 is arranged on the inner wall surface of sheet box bottom cover 1;

[0024] Sheet box upper cover 3, sheet box upper cover 3 both ends are equipped with tight button 4, and sheet box upper cover 3 bottom is equipped with several positioning rods 5;

[0025] When using, wafer can be placed on the support frame 2 in sheet box bottom cover 1, then the tight button 4 of sheet box upper cover 3 both ends is applied to the pressure inwards, so that sheet box upper cover 3 is fixed and clamped on the surface of sheet box bottom cover 1, while the positioning rod 5 of sheet box upper cover 3 bottom can fix the wafer in sheet box upper cover 3, avoid wafer from shaking and colliding with the inner wall of sheet box bottom cover 1 when verifying wafer surface, and cause wafer to be damaged, so as to avoid the problem that wafer is damaged by knocking during verifying wafer without special protection device.

[0026] Embodiment two: on the basis of embodiment one, in order to facilitate verification wafer and be provided with clamping piece 11, clamping piece 11 is provided with two groups, and two groups of clamping piece 11 are located just above fixed block 6, button slot 12 is formed on the surface of clamping piece 11, two groups of spring 19 are arranged in button slot 12, sliding slot 13 is formed at the both ends of button slot 12, tight button 4 is clamped in button slot 12, and the both ends of tight button 4 are fixedly connected with sliding block 14, and sliding block 14 is clamped in sliding slot 13, and sliding block 14 can be displaced up and down in sliding slot 13, and the bottom of tight button 4 is fixedly connected with clamping plate 15, and clamping plate 15 passes through clamping piece 11 and is clamped in clamping groove 16;Operator can press tight button 4 of sheet box upper cover 3 both ends simultaneously, and simultaneously applies the force of sheet box upper cover 3 upwards, so that the clamping plate 15 of tight button 4 bottom is separated from clamping groove 16, so as to open sheet box upper cover 3, place wafer in sheet box bottom cover 1 and tighten sheet box upper cover 3 on the upper end of sheet box bottom cover 1, so as to facilitate verification wafer.

[0027] The upper cover 3 of the wafer box is in a cylindrical structure as a whole, a central visible hole 9 is formed at the center of the surface of the upper cover 3 of the wafer box, a plurality of edge visible grooves 10 are formed at the edge of the surface of the upper cover 3 of the wafer box, and the upper cover 3 of the wafer box is fixedly installed at both ends of the wafer box; the central visible hole 9 and the edge visible groove 10 are formed on the surface of the upper cover 3 of the wafer box, so that the wafer in the wafer box can be viewed, thereby facilitating the inspection of whether the wafer surface has defects.

[0028] In the embodiment two, in order to facilitate the taking and fixing of the wafer in the wafer box, a support frame 2 is arranged, the support frame 2 comprises a plurality of support rods 7 and a fixing piece 8, the support rods 7 are arranged in a circumferential array on the outer wall surface of the fixing piece 8 as a whole, the support frame 2 is fixedly installed on the inner wall surface of the wafer box bottom cover 1, the wafer box upper cover 3 is clamped on the wafer box bottom cover 1, the fixing block 6 is fixedly installed at both ends of the wafer box bottom cover 1, and the clamping groove 16 is formed on the upper end surface of the fixing block 6; the support frame 2 for bearing the wafer is composed of a plurality of circumferentially arranged support rods 7 and fixing pieces 8, and gaps exist between the support rods 7, thereby facilitating the taking of the wafer and avoiding the difficulty in taking out the wafer due to the complete adhesion of the wafer surface to one surface.

[0029] The positioning rods 5 are arranged in a circumferential array below the wafer box upper cover 3 as a whole, the mounting plate 17 is fixedly installed at the upper end of the positioning rod 5, the mounting plate 17 is fixedly installed on the lower surface of the wafer box upper cover 3, and the anti-skid block 18 is fixedly installed at the lower end of the positioning rod 5; when the wafer is placed in the wafer box, the positioning rod 5 on the lower surface of the wafer box upper cover 3 is located above the wafer, and the anti-skid block 18 at one end of the positioning rod 5 abuts against the wafer surface, thereby fixing the wafer in the wafer box.

[0030] In actual use, the wafer can be placed on the support frame 2 in the wafer box bottom cover 1, then the inward pressure is applied to the fastening buttons 4 at both ends of the wafer box upper cover 3, thereby fixing the wafer box upper cover 3 on the surface of the wafer box bottom cover 1, and the positioning rods 5 at the bottom of the wafer box upper cover 3 can fix the wafer in the wafer box upper cover 3, thereby avoiding the wafer from shaking and colliding with the inner wall of the wafer box bottom cover 1 when the wafer surface is inspected, and avoiding the wafer from being damaged due to the collision, thereby avoiding the problem that the wafer is damaged due to the lack of special protection device during the inspection of the wafer.

[0031] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A protective wafer cassette for wafer inspection, characterized in that: The protective wafer cassette for wafer inspection includes: a wafer cassette bottom cover (1), the wafer cassette bottom cover (1) is cylindrical in shape, and a support frame (2) is provided on the inner wall surface of the wafer cassette bottom cover (1); The tablet box cover (3) has fastening buttons (4) installed at both ends, and several positioning rods (5) are installed on the bottom surface of the tablet box cover (3).

2. The protective wafer cassette for wafer inspection according to claim 1, characterized in that: A support frame (2) is fixedly installed on the inner wall surface of the tablet box bottom cover (1), a tablet box top cover (3) is inserted above the tablet box bottom cover (1), and fixing blocks (6) are fixedly installed at both ends of the tablet box bottom cover (1). A slot (16) is opened on the upper surface of the fixing block (6).

3. A protective wafer cassette for wafer inspection according to claim 1, characterized in that: The support frame (2) includes several support rods (7) and fasteners (8). The support rods (7) are arranged in a circular array on the outer wall surface of the fasteners (8).

4. A protective wafer cassette for wafer inspection according to claim 1, characterized in that: The film box cover (3) is cylindrical in shape. A central viewing hole (9) is provided at the center of the surface of the film box cover (3). Several edge viewing grooves (10) are provided at the edge of the surface of the film box cover (3). Clips (11) are fixedly installed at both ends of the film box cover (3).

5. A protective wafer cassette for wafer inspection according to claim 4, characterized in that: The card (11) is provided in two sets, both sets of card (11) are located directly above the fixed block (6). The surface of the card (11) is provided with a button groove (12). Two sets of springs (19) are provided in the button groove (12). The two ends of the button groove (12) are provided with sliding grooves (13). A fastening button (4) is inserted into the button groove (12). The two ends of the fastening button (4) are fixedly connected with sliders (14). The sliders (14) are locked in the sliding grooves (13). The sliders (14) can move up and down in the sliding grooves (13). The bottom surface of the fastening button (4) is fixedly connected with a card plate (15). The card plate (15) passes through the card (11) and is locked in the card slot (16).

6. A protective wafer cassette for wafer inspection according to claim 1, characterized in that: The positioning rods (5) are arranged in a circular array below the film box cover (3). The upper end of the positioning rods (5) is fixedly installed with an mounting plate (17), which is fixedly installed on the lower surface of the film box cover (3). The lower end of the positioning rods (5) is fixedly installed with an anti-slip block (18).

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