Wafer box hanger and wafer box cleaning system

Abstract

The utility model provides a wafer box hanger and a wafer box cleaning system. According to the wafer box hanger and the wafer box cleaning system, the first containing groove in a cuboid shape is designed, so that the wafer box hanger can contain a cascade type wafer box; by additionally arranging the second accommodating groove, the wafer box hanging rack can accommodate a foup type wafer box; by designing the first accommodating groove in the shape of the trapezoid body, the wafer box hanging rack can accommodate octagonal wafer boxes. Therefore, the wafer box containing device can meet the containing requirement of the wafer box through different designs, and has the advantages of being simple in structure and convenient and fast to operate.

Description

Technical Field

[0001] This utility model relates to the field of wafer box storage, and in particular to a wafer box hanger and a wafer box cleaning system. Background Technology

[0002] Wafer cassette cleaning equipment is a crucial part of the semiconductor manufacturing process, primarily used to remove contaminants from the wafer surface to ensure the performance and reliability of semiconductor devices. Wafer cassettes typically come in two types: foup and cassette. However, current wafer cassette cleaning equipment's cassette racks are only compatible with 12-inch foup wafer cassettes. This prevents other sizes and models of wafer cassettes from being installed or secured in the racks, thus hindering their feeding into the wafer cassette cleaning equipment.

[0003] Therefore, designing a wafer cassette rack that can accommodate wafer cassettes of various sizes and models has become one of the problems that urgently needs to be solved by those skilled in the art.

[0004] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this utility model and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this utility model. Utility Model Content

[0005] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a wafer cassette rack and a wafer cassette cleaning system to solve the problem that the existing wafer cassette rack can only accommodate 12-inch FOUP type wafer cassettes.

[0006] To achieve the above and other related objectives, this utility model provides a wafer cassette holder, which includes at least: an outer frame, a storage module, and a retaining strip module; the outer frame is a cuboid frame composed of metal profiles; the storage module is disposed within the outer frame; the storage module includes n first storage slots, and when n is greater than or equal to 2, the n first storage slots are arranged in a stacked manner along the height direction of the outer frame; the first storage slots store wafer cassettes, and the first storage slots are cubic metal frames with openings, the openings of the first storage slots being located on the side of the outer frame; wherein, n is a natural number greater than or equal to 1; the retaining strip module includes n retaining strip groups; the retaining strip groups are correspondingly disposed at the openings of the first storage slots, including m parallel metal retaining strips, and the m metal retaining strips are slidably disposed on the outer frame; wherein, m is a natural number greater than or equal to 2.

[0007] Optionally, the first storage slot is a cuboid metal frame with an opening.

[0008] Alternatively, the first storage slot can accommodate a 12-inch wafer cassette.

[0009] Alternatively, the storage module further includes n second storage slots, which are arranged in a stacked manner along the height direction of the outer frame; the second storage slots store wafer cover, and the second storage slots are cubic metal frames with openings; the n second storage slots are uniformly arranged above or below the n first storage slots.

[0010] Optionally, the first storage slot is a trapezoidal metal frame with an opening, and the bottom surface of the trapezoid is the opening of the first storage slot; the top and bottom surfaces of the trapezoid are both rectangular.

[0011] Alternatively, the first storage slot can accommodate an 8-inch wafer cassette.

[0012] Alternatively, the wafer cassette holder further includes a slot module, the slot module including n slot groups, the slot groups being correspondingly arranged with the first storage slot; when the first storage slot is pulled out along a direction parallel to the bottom surface of the outer frame, the movement trajectory of each vertex of the first storage slot in the opening plane is the first storage slot guide rail, and the slot groups are arranged at the first storage slot guide rail.

[0013] To achieve the above and other related objectives, this utility model also provides a wafer cassette cleaning system, which includes at least: a cleaning machine, a slot module, and a wafer cassette hanger; the slot module includes a first slot and a second slot, the first slot being disposed on the top surface of the outer frame, and the second slot being disposed on the bottom surface of the outer frame; the wafer cassette hanger is fixed to the cleaning machine through the slot module.

[0014] Optionally, the wafer cassette cleaning system has k wafer cassette holders, and the k wafer cassette holders are placed symmetrically around the central axis of symmetry of the cleaning machine; where k is a natural number greater than or equal to 2.

[0015] As described above, the wafer cassette holder and wafer cassette cleaning system of this utility model have the following beneficial effects:

[0016] 1. This utility model designs a first storage slot with a cuboid shape, and makes the first storage slots have different volumes of holding capacity. This utility model can store cassette-type wafer boxes of different sizes.

[0017] 2. This utility model incorporates a second storage slot, allowing the wafer box holder to separately store the wafer box body and the wafer box cover. This utility model can store foup-type wafer boxes.

[0018] 3. By designing the first storage slot into a trapezoidal shape, this utility model can store an octagonal wafer box.

[0019] 4. The wafer box rack of this utility model can meet the storage needs of wafer boxes of different sizes and models, and has the advantages of simple structure and easy use.

[0020] 5. The wafer cassette cleaning system of this utility model can ensure the stability of the wafer cassette racks during the cleaning process by symmetrically placing the wafer cassette racks in the cleaning machine. Attached Figure Description

[0021] Figure 1 The diagram shows a structural schematic of a foup-type wafer cassette.

[0022] Figure 2 The diagram shows a cassette-type wafer cassette.

[0023] Figure 3 The diagram shows a structural schematic of an octagonal wafer box.

[0024] Figure 4 The diagram shown is a schematic diagram of the first structure of the wafer box holder of this utility model.

[0025] Figure 5 The diagram shown is a schematic diagram of the first structure of the first storage slot of this utility model.

[0026] Figure 6 The diagram shown is a second structural schematic of the wafer box holder of this utility model.

[0027] Figure 7 The diagram shown is a third structural schematic of the wafer box holder of this utility model.

[0028] Figure 8 The diagram shown is a schematic diagram of the fourth structure of the wafer box holder of this utility model.

[0029] Figure 9 The diagram shown is a second structural schematic of the first storage slot of this utility model.

[0030] Figure 10 The diagram shown is a structural schematic of the wafer cassette cleaning system of this utility model.

[0031] Component designation explanation

[0032] 1. Wafer box mounting bracket

[0033] 1a Outer frame

[0034] 1b First storage compartment

[0035] 1b1 Side of the first storage compartment

[0036] 1b2 Bottom surface of the first storage compartment

[0037] 1b3 Opening of the first storage compartment

[0038] 1c gear group

[0039] 1d slot set

[0040] 1e Second storage compartment

[0041] 2 Cleaning machine

[0042] 3 Card Slot Module Detailed Implementation

[0043] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0044] Please see Figures 1-10 It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the illustrations only show the components related to this utility model and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0045] Wafer boxes are classified into foup wafer boxes, cassette wafer boxes, and octagonal wafer boxes, such as... Figure 1 , Figure 2 and Figure 3As shown, the main differences between foup-type wafer cassettes, cassette-type wafer cassettes, and octagonal wafer cassettes are as follows: Foup-type wafer cassettes are specifically designed for handling and storing 12-inch wafers and are equipped with a sealed cover to ensure cleanliness inside the cassette; cassette-type wafer cassettes can be used for handling and storing both 12-inch and 8-inch wafers, and are typically open-structured without a sealed cover; octagonal wafer cassettes are typically used for handling and storing 8-inch wafers, and their body and cover are formed by dividing the octagonal wafer cassette into two parts. Therefore, to match the dimensions and models of the aforementioned wafer cassettes, the specific implementation scheme of this utility model is as follows:

[0046] Example 1

[0047] like Figure 4 As shown, this embodiment provides a wafer box hanger 1, which includes an outer frame 1a, a storage module, and a baffle module.

[0048] like Figure 4 As shown, the outer frame 1a is a cuboid frame composed of metal profiles.

[0049] Specifically, in this embodiment, the outer frame 1a accommodates the storage module and the baffle module, and provides support for them. The outer frame 1a is a cuboid frame, both to accommodate the commonly used cleaning machine 2 and because cuboids are generally stable three-dimensional structures. In practical applications, the shape of the outer frame 1a can be set according to actual needs and is not limited to this embodiment.

[0050] like Figure 4 As shown, the storage module is set inside the outer frame 1a; the storage module includes n first storage slots 1b, which are stacked in layers along the height direction of the outer frame 1a; the first storage slots 1b store the wafer box, and the first storage slot 1b is a cubic metal frame with an opening, the opening of the first storage slot 1b being located on the side of the outer frame 1a; where n is a natural number greater than or equal to 1.

[0051] Specifically, in this embodiment, the first storage slot 1b is designed according to the size and model of the wafer cassette. When the wafer cassette is placed into the first storage slot 1b, the wafer cassette fits snugly into the first storage slot 1b. Further, the first storage slot 1b includes four sides 1b1, with two sides 1b1 arranged opposite each other. The bottom surface 1b2 of the first storage slot is arranged opposite to the opening 1b3. Further, as... Figure 5 As shown, the first storage slot 1b is a rectangular metal frame with an opening. As an example, such as... Figure 5As shown, the first storage slot 1b can accommodate either a 12-inch cassette-type wafer cassette or an 8-inch cassette-type wafer cassette. The size of the first storage slot 1b can be designed according to needs in practical applications and is not limited to this embodiment.

[0052] Specifically, in this embodiment, the bottom and top surfaces of each first storage slot 1b of the storage module are parallel to each other and parallel to the bottom and top surfaces of the outer frame 1a. When n is greater than or equal to 2, each first storage slot 1b is stacked layer by layer, and the size and shape of each first storage slot 1b are completely consistent. The purpose is to make one wafer box rack 1 dedicated to storing one type and size of wafer box, so that the wafer box rack 1 can be placed completely symmetrically in the cleaning machine in the later stage.

[0053] like Figure 4 As shown, the baffle module includes n baffle groups 1c; the baffle groups 1c are correspondingly set at the opening of the first storage slot 1b, including m parallel metal baffles, and the m metal baffles are slidably set on the outer frame 1a; where m is a natural number greater than or equal to 2.

[0054] Specifically, in this embodiment, each first storage slot 1b is provided with a corresponding baffle group 1c. The metal baffle in each baffle group 1c slides and translates on the opening plane of the corresponding first storage slot 1b. The purpose of providing the baffle group 1c is to fix the position of the wafer cassette after it is placed into the first storage slot 1b. As an example, such as Figure 4 As shown, each baffle group 1c includes two metal baffles, which are arranged parallel to the side of the outer frame 1a; as shown Figure 6 As shown, each baffle group 1c includes two metal baffles, which are arranged parallel to the side of the outer frame 1a. In practical applications, the specific number and position of the metal baffles in the baffle group 1c can be set as needed, and are not limited to this embodiment.

[0055] Specifically, in this embodiment, the wafer cassette holder further includes a slot module, which includes n slot groups 1d. Each first storage slot 1b is provided with a corresponding slot group 1d. When the first storage slot 1b is pulled out along a direction parallel to the bottom surface of the outer frame 1a, the movement trajectory of each vertex of the first storage slot 1b in the opening plane is the first storage slot guide rail, and the slot group 1d is located at the first storage slot guide rail. As an example, such as Figure 6As shown, the first storage slot 1b is a cuboid metal frame, fixed to the outer frame 1a. The wafer cassette can be fixed inside the first storage slot 1b. A slot group 1d includes four slide rails, which are arranged on the four sides of the side 1b1 of the first storage slot, allowing the first storage slot 1b to be pulled out along a direction parallel to the bottom surface of the outer frame 1a. In practical applications, the positions of the slide rails in the slot group 1d are set according to the movement trajectory of the first storage slot 1b at each vertex in the opening plane, and are not limited to this embodiment.

[0056] Example 2

[0057] like Figure 7 As shown, this embodiment provides a wafer cassette holder 1. The difference between this embodiment and Embodiment 1 is that the storage module further includes n second storage slots 1e, which are arranged in a stacked manner along the height direction of the outer frame 1a; the second storage slots 1e store the wafer cassette cover, and the second storage slots 1e are cubic metal frames with openings; the n second storage slots 1e are uniformly arranged above or below the n first storage slots 1b.

[0058] Specifically, in this embodiment, when the wafer cassette has a sealed cover, the wafer cassette holder 1 needs to be equipped with a storage area for the wafer cassette cover. Therefore, this embodiment provides n second storage slots 1e, so that the wafer cassette cover, which is matched one-to-one with the wafer cassette body, can be stored. The structure of the second storage slot 1e is similar to that of the first storage slot 1b, and will not be described again here. As an example, such as Figure 7 As shown, both the second storage slot 1e and the first storage slot 1b are rectangular metal frames. The first storage slot 1b houses a 12-inch wafer cassette, and the second storage slot 1e houses the wafer cassette cover. n first storage slots 1b are stacked together, and n second storage slots 1e are stacked together. The second storage slots 1e are positioned above the first storage slots 1b. Therefore, this example allows for the unified cleaning of 12-inch foup-type wafer cassettes. In practical applications, the second storage slots 1e can also be positioned below the first storage slots 1b, and are not limited to this embodiment.

[0059] Example 3

[0060] like Figure 8 As shown, this embodiment provides a wafer box holder 1. The difference between this embodiment and embodiments one and two is that: the first storage groove 1b is a trapezoidal metal frame with an opening, and the bottom surface of the trapezoid is the opening of the first storage groove 1b; the top and bottom surfaces of the trapezoid are both rectangular.

[0061] Specifically, in this embodiment, such as Figure 3 As shown, since the octagonal wafer box's body and lid are composed of a hexagon divided in two, both the body and lid are trapezoidal. Figure 9 The first storage slot 1b shown can also be assembled into a hexagon through its bottom surface, therefore the wafer cassette holder 1 in this embodiment can store an octagonal wafer cassette. As an example, such as Figure 8 As shown, the first storage slot 1b accommodates an 8-inch octagonal wafer cassette. In practical applications, the first storage slot 1b can also accommodate a 12-inch octagonal wafer cassette, and is not limited to this embodiment. Furthermore, the positions of each slot group 1d on the corresponding first storage slot 1b in this embodiment are slightly different from those in Embodiment 1. For example, as shown... Figure 9 As shown, a slot group 1d includes four slide rails, which are respectively located at the vertices of the opening of the first storage slot 1b. All four slide rails are parallel to the bottom surface of the outer frame 1a, allowing the first storage slot 1b to be pulled out along a direction parallel to the bottom surface of the outer frame. In practical applications, the specific number and position of the slide rails in the slot group 1d are determined based on the movement trajectory of each vertex within the opening plane of the first storage slot 1b, and are not limited to this embodiment.

[0062] Example 4

[0063] like Figure 10 As shown, this embodiment provides a wafer cassette cleaning system, which includes: a cleaning machine 2, a slot module 3, and wafer cassette hangers 1 as described in Embodiments 1 to 3; the slot module 3 includes a first slot and a second slot, each first slot being disposed on the top surface of the outer frame 1a of each wafer cassette hanger 1, and each second slot being disposed on the top surface of the outer frame 1a of each wafer cassette hanger 1; the wafer cassette hanger 1 is fixed to the cleaning machine 2 by the slot module 3.

[0064] Specifically, in this embodiment, the cleaning machine 2 can typically hold multiple wafer cassette holders 1 and has a central axis of symmetry. Each wafer cassette holder 1 is fixed to the cleaning machine 2 by a slot assembly 3, and each wafer cassette holder 1 is symmetrically placed based on the central axis of symmetry of the cleaning machine 2 to ensure the stability of the cleaning machine 2 during operation.

[0065] In summary, this utility model designs various wafer cassette holders: By designing a first storage slot with a cuboid shape, it allows the holder to store cassette-type wafer cassettes; by adding a second storage slot, it allows the holder to store foup-type wafer cassettes; and by designing a first storage slot with a trapezoidal shape, it allows the holder to store octagonal wafer cassettes. Therefore, this utility model, through different designs, can meet the storage needs of wafer cassettes and has the advantages of simple structure and convenient operation. Thus, this utility model effectively overcomes the various shortcomings of existing technologies and has high industrial application value.

[0066] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A wafer cassette holder, characterized in that, The wafer box rack includes at least: an outer frame, a storage module, and a baffle module; The outer frame is a cuboid frame made of metal profiles; The storage module is disposed within the outer frame; the storage module includes n first storage slots, and when n is greater than or equal to 2, the n first storage slots are arranged in a stacked manner along the height direction of the outer frame; the first storage slots store wafer boxes, and the first storage slots are cubic metal frames with openings, the openings of the first storage slots being located on the side of the outer frame; where n is a natural number greater than or equal to 1. The baffle module includes n baffle groups; the baffle groups are correspondingly set at the opening of the first storage slot, including m parallel metal baffles, and the m metal baffles are slidably set on the outer frame; where m is a natural number greater than or equal to 2.

2. The wafer cassette holder according to claim 1, characterized in that: The first storage slot is a rectangular metal frame with an opening.

3. The wafer cassette holder according to claim 2, characterized in that: The first storage slot accommodates a 12-inch wafer cassette.

4. The wafer cassette holder according to claim 2, characterized in that: The storage module also includes n second storage slots, which are arranged in a stacked manner along the height direction of the outer frame; the second storage slots store wafer cover, and the second storage slots are cubic metal frames with openings; the n second storage slots are uniformly arranged above or below the n first storage slots.

5. The wafer cassette holder according to claim 1, characterized in that: The first storage slot is a trapezoidal metal frame with an opening, and the bottom surface of the trapezoid is the opening of the first storage slot; the top and bottom surfaces of the trapezoid are both rectangular.

6. The wafer cassette holder according to claim 2 or 5, characterized in that: The first storage slot accommodates an 8-inch wafer cassette.

7. The wafer cassette holder according to claim 2 or 5, characterized in that: The wafer box holder also includes a slot module, which includes n slot groups, and the slot groups are correspondingly arranged with the first storage slot; when the first storage slot is pulled out along a direction parallel to the bottom surface of the outer frame, the movement trajectory of each vertex of the first storage slot in the opening plane is the first storage slot guide rail, and the slot groups are arranged at the first storage slot guide rail.

8. A wafer cell cleaning system, characterized in that, The wafer cassette cleaning system includes at least: a cleaning machine, a card slot module, and a wafer cassette rack as described in any one of claims 1-7; The card slot module includes a first card slot and a second card slot. The first card slot is disposed on the top surface of the outer frame, and the second card slot is disposed on the bottom surface of the outer frame. The wafer cassette holder is fixed to the cleaning machine platform through the card slot module.

9. The wafer cassette cleaning system according to claim 8, characterized in that: The wafer cassette cleaning system has k wafer cassette racks, which are placed symmetrically around the central axis of symmetry of the cleaning machine; where k is a natural number greater than or equal to 2.

Images