OHT exception handling tool

Abstract

The utility model provides an OHT abnormity processing tool. A clamping groove is located in the upper edge of a supporting plate, a lifting hole vertically penetrates through the supporting plate in the supporting plate in the first direction, a transmission hole is perpendicular to a first plane where the supporting plate is located, and the first direction is parallel to the first plane. The lead screw can be in threaded connection with the lifting hole, the supporting wheel shaft part is located on a center shaft of the wheel part, and the shaft part is rotationally connected with the transmission hole. Through the clamping groove, the lifting hole and the transmission hole of the supporting plate, the wheels of the movable crown block are lifted and moved when being clamped on the track, and the processing efficiency of OHT abnormal downtime is improved; meanwhile, the clamping grooves of the supporting plates are C-shaped clamping grooves, so that the clamping effect on the connecting shafts is improved, and the risk that the connecting shafts slide out of the clamping grooves when the wheels are lifted up is avoided; in addition, a protection pad is arranged below the lead screw, so that the lead screw is prevented from damaging the surface of the track abutting against the lower end of the lead screw in the process of rotating to lift the wheel; and finally, by arranging a plurality of lead screws and supporting wheels, the stability of lifting and moving the wheels can be improved.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor equipment, and in particular relates to an OHT (Output Change Detection) error handling tool. Background Technology

[0002] The manufacturing process of semiconductor products involves hundreds of processes from start to finish, resulting in the movement of hundreds of thousands of components. To prevent contamination, damage, and delivery accidents of semiconductor materials during this process, Overhead Hoist Transfer (OHT) systems are used as automated material handling systems in semiconductor production lines. OHT systems, which automate material handling between various semiconductor processes, are responsible for transporting wafers loaded in FOUPs (Front Opening Unified Pods) along overhead tracks to the manufacturing equipment according to the production process.

[0003] During operation, the Overhead Hoist Transfer (OHT) system brakes via a rear wheel motor equipped with a brake. When the OHT malfunctions or loses power, the rear wheels will be braked. In case of an OHT malfunction, the crane can usually be moved manually via command or by manually pushing the anti-collision structure. Conversely, when the OHT loses power, the brakes can usually be released by applying a 24V power supply, allowing the crane to move.

[0004] However, in some cases, when the brake is damaged and stuck, the above methods cannot move the OHT. The OHT needs to be completely disassembled to move the crane. This results in low efficiency in handling abnormal OHT downtime, which seriously affects overall production efficiency.

[0005] Therefore, there is an urgent need for a structure that can improve the movement of the overhead crane when the OHT (Overhead Crane) malfunctions and jams on the track.

[0006] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating the understanding of those skilled in the art. It should not be assumed that the above technical solutions are known to those skilled in the art simply because these solutions have been described in the background section of this application. Utility Model Content

[0007] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide an OHT anomaly handling tool to solve the problems of difficulty in moving the overhead crane and low processing efficiency when the OHT malfunctions and gets stuck on the track.

[0008] To achieve the above and other related objectives, this utility model provides the following technical solution:

[0009] This utility model provides an OHT (Out of Threat) anomaly handling tool, which includes: a support plate, a lead screw, and a support wheel;

[0010] The support plate includes a slot, a lifting hole, and a transmission hole; the slot is located at the upper edge of the support plate and is used to place the connecting shaft of the drive structure when the wheel of the OHT mobile crane is abnormally jammed; the lifting hole penetrates the support plate vertically along a first direction, the transmission hole is perpendicular to the first plane on which the support plate is located, the first direction is parallel to the first plane, and the projections of the slot, the transmission hole, and the lifting hole on the support plate do not coincide with each other;

[0011] The lifting hole is a threaded hole, and the lifting thread on the side of the lead screw can be threadedly connected to the lifting hole. The lead screw is used to drive the support plate threadedly to lift the wheel connected to the connecting shaft that is engaged in the slot.

[0012] The support wheel includes a wheel portion and an axle portion. The axle portion is fixed on the central shaft of the wheel portion, and the plane where the wheel portion is located is parallel to the first plane. The axle portion can pass through the transmission hole and be rotatably connected to the transmission hole. The support wheel is used to keep the wheel that has been lifted by the support plate suspended in the air and to move its position.

[0013] Optionally, the slot is a U-shaped slot, which penetrates the support plate along a direction perpendicular to the first plane, and the projection of the slot on the support plate is U-shaped.

[0014] Optionally, the slot is a C-shaped slot, which penetrates the support plate in a direction perpendicular to the first plane, and the projection of the slot on the support plate is an upward-facing C-shape.

[0015] Optionally, the OHT anomaly handling tool further includes a protective pad located below the lead screw to protect the surface abutted by the lower end of the lead screw from damage.

[0016] Optionally, the protective pad is provided with a receiving groove extending along the first direction, the receiving groove matching the lower end of the lead screw.

[0017] Optionally, a rotating nut is fixed to the top of the lead screw, which is used to rotate the lead screw to drive the support plate to rise and fall in a threaded manner.

[0018] Optionally, the end of the shaft of the support wheel is provided with a limiting thread, which is used to limit the shaft within the transmission hole.

[0019] Optionally, the support plate includes two or more transmission holes, and each transmission hole is provided with a corresponding support wheel.

[0020] Optionally, the support plate includes two transmission holes, and the plane parallel to the first direction and perpendicular to the first plane is the second plane. The two transmission holes are located at opposite ends of the second plane passing through the slot as a plane of symmetry.

[0021] Optionally, the support plate includes two or more lifting holes, and each lifting hole is provided with a lead screw.

[0022] As described above, the OHT anomaly handling tool of this utility model has the following beneficial effects:

[0023] This utility model, by setting the slot, lifting hole and transmission hole of the support plate, realizes the function of lifting and moving the wheels of the mobile crane that are abnormally jammed. When the wheels of the mobile crane are jammed on the track and cannot be moved, they can be moved to handle the situation, avoiding the need for complete disassembly of the OHT and improving the handling efficiency when the OHT is abnormally down.

[0024] This utility model improves the locking effect of the slot on the connecting shaft by setting the slot of the support plate to a C-shaped slot, thus avoiding the risk of the connecting shaft slipping out of the slot and causing an accident when the wheel is lifted.

[0025] This utility model prevents damage to the track surface that the lower end of the lead screw abuts by setting a protective pad under the lead screw during the process of rotating to lift the wheel;

[0026] This invention improves the stability of lifting and moving the wheel by setting multiple lead screws and support wheels. Attached Figure Description

[0027] Figure 1 The image shown is a three-dimensional schematic diagram of the OHT anomaly handling tool in this utility model.

[0028] Figure 2 The image shown is a three-dimensional schematic diagram of the OHT anomaly handling tool in this utility model.

[0029] Figure 3 The image shown is a three-dimensional schematic diagram of the OHT anomaly handling tool in this utility model.

[0030] Figure 4 The image shown is a three-dimensional schematic diagram of the OHT anomaly handling tool in this utility model.

[0031] Figure 5The image shown is a three-dimensional schematic diagram of the OHT anomaly handling tool in this utility model.

[0032] Figure 6 The image shown is a perspective view of the support plate of the OHT anomaly handling tool in this utility model.

[0033] Figure 7 The diagram shown is a perspective view of the lead screw of the OHT anomaly handling tool in this utility model.

[0034] Figure 8 The image shown is a perspective view of the support wheel of the OHT anomaly handling tool in this utility model.

[0035] Figure 9 The image shown is a three-dimensional schematic diagram of the protective pad in an example of the OHT anomaly handling tool of this utility model.

[0036] Figure 10 The image shown is a side view of the support wheel in an example of the OHT anomaly handling tool of this utility model.

[0037] Component designation explanation

[0038] 1. Support plate; 11. Slot; 12. Lifting hole; 13. Transmission hole; 2. Lead screw; 21. Lifting thread; 22. Rotating nut; 3. Support wheel; 31. Wheel part; 32. Shaft part; 33. Limiting thread; 34. Limiting nut; 35. Bearing; 36. Bearing ball; 41. Wheel; 42. Drive structure; 43. Connecting shaft; 44. Track; 5. Protective pad; 51. Receiving groove. Detailed Implementation

[0039] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0040] In the detailed description of the embodiments of this utility model, for ease of explanation, the schematic diagrams illustrating the device structure may be partially enlarged without adhering to the general scale, and the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. Furthermore, in actual manufacturing, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0041] For ease of description, spatial relation terms such as “below,” “under,” “lower than,” “below,” “above,” and “upper” may be used herein to describe the relationship between one element or feature shown in the accompanying drawings and other elements or features. It will be understood that these spatial relation terms are intended to include directions other than those depicted in the accompanying drawings for devices in use or operation.

[0042] In the context of this application, the structure described above the first feature may include embodiments in which the first and second features are formed in direct contact, or embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0043] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0044] Existing technology for Overhead Hoist Transfer (OHT) systems used in semiconductor processes involves braking via a rear wheel motor equipped with a brake. When the OHT malfunctions or loses power, the rear wheels are braked. In case of an OHT malfunction, movement can typically be achieved manually via command or by manually pushing the anti-collision structure. Conversely, in case of a power failure, the brakes can usually be released by applying a 24V power supply. However, in some situations, when the brakes are damaged and jammed, neither of these methods can move the OHT. The entire OHT must be disassembled to move the crane, resulting in low efficiency in handling OHT malfunctions and significantly impacting overall production efficiency.

[0045] This utility model provides an OHT (Outcome Tolerance) exception handling tool, such as... Figures 1-5 The image shown is a three-dimensional view of the OHT anomaly handling tool from various angles. The OHT anomaly handling tool includes: Figure 6 Support plate 1 as shown Figure 7 The lead screw 2 shown and as Figure 8 Support wheel 3 shown;

[0046] like Figure 6As shown, the support plate 1 includes a slot 11, a lifting hole 12, and a transmission hole 13; the slot 11 is located at the upper edge of the support plate 1, and the slot 11 is used to place the wheel 41 of the OHT mobile crane that is abnormally jammed and the connecting shaft 43 of the drive structure 42; the lifting hole 12 penetrates the support plate 1 vertically along a first direction in the support plate 1, and the transmission hole 13 is perpendicular to the first plane where the support plate 1 is located, and the first direction is parallel to the first plane; the projections of the slot 11, the transmission hole 13, and the lifting hole 12 on the support plate 1 do not coincide with each other;

[0047] The lifting hole 12 is a threaded hole, and the lifting thread 21 on the side of the lead screw 2 can be threadedly connected to the lifting hole 12. The lead screw 2 is used to thread drive with the support plate 1 to lift the wheel 41 connected to the connecting shaft 43 that is engaged in the slot 11.

[0048] like Figure 8 As shown, the support wheel 3 includes a wheel portion 31 and a shaft portion 32. The shaft portion 32 is fixed on the central shaft of the wheel portion 31, and the plane where the wheel portion 31 is located is parallel to the first plane. The shaft portion 32 can pass through the transmission hole 13 and is rotatably connected to the transmission hole 13. The support wheel 3 is used to keep the wheel 41 raised by the support plate 1 suspended in the air and to transfer its position.

[0049] This utility model, by setting the slot 11, lifting hole 12 and transmission hole 13 of the support plate 1, realizes the function of lifting and moving the wheel 41 of the mobile crane that is abnormally stuck. When the wheel 41 of the mobile crane is stuck on the track 44 and cannot move, it can be moved to handle the situation, avoiding the need for the entire OHT to be disassembled, and improving the handling efficiency when the OHT is abnormally down.

[0050] Specifically, the accompanying drawings in this article are only used to illustrate the basic structure of the OHT exception handling tool, and the specific sizes and proportions in the drawings do not represent the actual sizes and proportions of each component.

[0051] In one embodiment, such as Figure 6 As shown, the slot 11 is a U-shaped slot 11, which penetrates the support plate 1 along a direction perpendicular to the first plane, and the projection of the slot 11 on the support plate 1 is U-shaped.

[0052] In one embodiment, the depth of the U-shaped slot 11 is greater than the diameter of the connecting shaft 43.

[0053] This invention sets the slot 11 to be a U-shaped slot with a depth greater than the diameter of the connecting shaft 43, so that the connecting shaft 43 can fall completely into the slot 11 and be lower than the opening height of the slot 11, thereby avoiding the danger of the connecting shaft 43 slipping out of the slot 11 and causing an accident when the wheel 41 is lifted.

[0054] In one embodiment, the slot 11 is a C-shaped slot 11, which penetrates the support plate 1 in a direction perpendicular to the first plane, and the projection of the slot 11 on the support plate 1 is an upward-facing C-shape.

[0055] This utility model sets the slot 11 of the support plate 1 to a C-shaped slot 11. By utilizing the feature that the opening diameter of the C-shaped slot 11 is slightly smaller than the maximum diameter, the locking effect of the slot 11 on the connecting shaft 43 can be improved, avoiding the risk of the connecting shaft 43 slipping out of the slot 11 and causing an accident when the wheel 41 is lifted.

[0056] In one embodiment, such as Figure 9 As shown, the OHT anomaly handling tool also includes a protective pad 5, which is located below the lead screw 2 to protect the surface abutted by the lower end of the lead screw 2 from damage.

[0057] This invention provides a protective pad 5 under the lead screw 2 to prevent damage to the surface of the track 44 or other structures that the lead screw 2 contacts during rotation to lift the wheel 41.

[0058] Specifically, the material hardness of the protective pad 5 should be greater than that of the lead screw to prevent the lead screw from puncturing the protective pad downwards.

[0059] In one embodiment, such as Figure 9 As shown, the protective pad 5 is provided with a receiving groove 51 extending along the first direction, and the receiving groove 51 matches the lower end of the lead screw 2.

[0060] This invention provides a receiving groove 51 on the protective pad 5 that matches the lower end of the lead screw 2. This allows the protective pad 5 to buffer and protect the surface of the track 44 that the lead screw 2 abuts against, while the receiving groove 51 also limits the position of the lead screw 2. This further improves the positional stability of the lead screw 2 during rotation, thereby increasing the driving efficiency of lifting the wheel 41, reducing deformation damage to the lead screw 2 during driving, and extending the service life of the lead screw 2.

[0061] In one embodiment, such as Figure 7 As shown, a rotating nut 22 is fixed to the top of the lead screw 2. The rotating nut 22 is used to rotate the lead screw 2 to drive the support plate 1 to rise and fall by thread.

[0062] This invention improves the efficiency of the lead screw 2 in driving the support plate 1 to lift the wheel 41 by fixing a rotating nut 22 at the top of the lead screw 2, so that the lead screw 2 can be rotated by rotating the rotating nut 22 with a screwdriver. If an electric screwdriver is used, the lifting efficiency can be further improved, thereby saving manpower and time.

[0063] Specifically, other suitable structures can also be used to drive the lead screw 2 to rotate, all of which are within the protection scope of this utility model.

[0064] In one embodiment, such as Figure 8 As shown, the end of the shaft portion 32 of the support wheel 3 is provided with a limiting thread 33, which is used to limit the shaft portion 32 within the transmission hole 13.

[0065] This invention provides a limiting thread 33 at the end of the shaft portion 32 of the support wheel 3, allowing the end of the support wheel 3 passing through the support plate 1 to pass through as follows: Figure 8 The limiting nut 34 shown is threaded onto the limiting thread 33 so that the shaft 32 of the support wheel 3 is confined within the transmission hole 13 and will not fall out, thereby improving the reliability of the support wheel 3 when it performs its supporting function.

[0066] In one embodiment, such as Figure 10 The image shows a side view of the support wheel 3. The center of the wheel portion 31 of the support wheel 3 is provided with a bearing 35 and bearing balls 36. The bearing 35 and bearing balls 36 are used to improve the rolling efficiency of the support wheel 3.

[0067] In one embodiment, the support plate 1 includes two or more transmission holes 13, and each transmission hole 13 is provided with a corresponding support wheel 3.

[0068] This utility model, by setting two or more transmission holes 13, allows multiple support wheels 3 to support and drive the wheel 41, thereby improving the driving efficiency of the wheel 41; however, more support wheels 3 will also require a longer installation time. Technicians can reasonably set the number of support wheels 3 according to their needs.

[0069] In one embodiment, such as Figure 6 As shown, the support plate 1 includes two transmission holes 13. The plane parallel to the first direction and perpendicular to the first plane is the second plane. The two transmission holes 13 are located at both ends with the second plane passing through the slot 11 as the plane of symmetry.

[0070] This invention improves the support stability of the support wheel 3 on the wheel 41 by setting two transmission holes 13 located at both ends of the second plane passing through the slot 11 as a symmetrical plane.

[0071] In one embodiment, the support plate 1 includes two or more lifting holes 12, and each lifting hole 12 is provided with a lead screw 2.

[0072] This utility model, by setting two or more lifting holes 12, can simultaneously lift the wheel 41 using multiple lead screws 2, thereby improving the stability of lifting the wheel 41 and avoiding damage to the track 44 of the moving crane or affecting the cleanliness of the overall process environment caused by instability during the lifting process. At the same time, it can also increase the driving force for heavier wheels 41, thereby improving the efficiency of lifting the wheel 41 and saving manpower and time.

[0073] Specifically, the vertical distance from the center of the transmission hole 13 to the surface of the track 44 when the lead screw 2 lifts the support plate 1 is greater than or equal to the radius of the support wheel 3.

[0074] This invention sets the vertical distance from the center of the transmission hole 13 to the surface of the track 44 to be greater than or equal to the radius of the support wheel 3 when the lead screw 2 lifts the support plate 1. This ensures that when the support wheel 3 is transmitted into the transmission hole 13 after the lead screw 2 lifts the support plate 1, there is enough space below the transmission hole 13 for the support wheel 3 to be placed perpendicular to the surface of the track 44, thus ensuring that the support wheel 3 can provide stable support.

[0075] Preferably, such as Figure 2 As shown, the vertical distance from the center of the transmission hole 13 to the surface of the track 44 when the lead screw 2 lifts the support plate 1 is greater than the radius of the support wheel 3.

[0076] This invention sets the vertical distance from the center of the transmission hole 13 to the surface of the track 44 to be greater than the radius of the support wheel 3 when the lead screw 2 lifts the support plate 1 and sets the support wheel 3, thereby facilitating the subsequent removal of the lead screw 2 and the protective pad 5.

[0077] In one embodiment, the method of using the OHT exception handling tool is as follows:

[0078] The slot 11 of the support plate 1 is locked under the connecting shaft 43 between the jammed wheel 41 and the drive structure 42;

[0079] The rotating nut 22 of the rotating screw 2 is screwed into the screw 2 through the lifting hole 12, and the end of the screw 2 is placed in the receiving groove 51 of the protective pad 5 until the screw 2 can no longer move downwards;

[0080] Maintain the height of the lead screw 2 within the receiving groove 51, rotate the lead screw 2 to raise the support plate 1 threadedly connected to the lead screw 2, thereby raising the connecting shaft 43 within the slot 11 of the support plate 1, and thus raising the wheel 41 connected to the connecting shaft 43 to a preset height.

[0081] The shaft portion 32 of the support wheel 3 passes through the transmission hole 13 of the support plate 1, and a limiting nut 34 is provided on the limiting thread 33 at the other end of the shaft portion 32 passing through the transmission hole 13 to limit the shaft portion 32 of the support wheel 3 within the transmission hole 13.

[0082] By rotating the screw nut 22, the screw 2 is unscrewed from the lifting rod, the protective pad 5 is removed, and the rotation of the support wheel 3 drives the support plate 1, thereby driving the wheel 41 to move away from the surface of the track 44.

[0083] In summary, the OHT (Overhead Crane) malfunction handling tool of this invention, through the setting of a slot, lifting hole, and transmission hole in the support plate, enables the lifting and movement of wheels that are abnormally jammed on the mobile crane. This allows the wheels of the mobile crane to be moved when they are stuck on the track, avoiding the need for complete disassembly of the OHT and improving the handling efficiency when the OHT malfunctions. Furthermore, by setting the slot of the support plate to a C-shaped slot, the locking effect of the slot on the connecting shaft is improved, preventing the connecting shaft from slipping out of the slot during the lifting process and causing an accident. Additionally, by placing a protective pad under the lead screw, damage to the track surface that the lead screw abuts against at its lower end is prevented during the rotation to lift the wheel. Finally, by setting multiple lead screws and support wheels, the stability of lifting and moving the wheel is improved.

[0084] Therefore, this utility model effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0085] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. An OHT (Outcome Tolerance) exception handling tool, characterized in that, The OHT anomaly handling tool includes: a support plate, a lead screw, and a support wheel; The support plate includes a slot, a lifting hole, and a transmission hole; the slot is located at the upper edge of the support plate and is used to place the connecting shaft of the drive structure when the wheel of the OHT mobile crane is abnormally jammed; the lifting hole penetrates the support plate vertically along a first direction, the transmission hole is perpendicular to the first plane on which the support plate is located, the first direction is parallel to the first plane, and the projections of the slot, the transmission hole, and the lifting hole on the support plate do not coincide with each other; The lifting hole is a threaded hole, and the lifting thread on the side of the lead screw can be threadedly connected to the lifting hole. The lead screw is used to drive the support plate threadedly to lift the wheel connected to the connecting shaft that is engaged in the slot. The support wheel includes a wheel portion and an axle portion. The axle portion is fixed on the central shaft of the wheel portion, and the plane where the wheel portion is located is parallel to the first plane. The axle portion can pass through the transmission hole and be rotatably connected to the transmission hole. The support wheel is used to keep the wheel that has been lifted by the support plate suspended in the air and to move its position.

2. The OHT anomaly handling tool according to claim 1, characterized in that: The slot is a U-shaped slot, which penetrates the support plate along a direction perpendicular to the first plane, and the projection of the slot on the support plate is U-shaped.

3. The OHT anomaly handling tool according to claim 1, characterized in that: The slot is a C-shaped slot, which penetrates the support plate in a direction perpendicular to the first plane. The projection of the slot on the support plate is an upward-facing C-shape.

4. The OHT anomaly handling tool according to claim 1, characterized in that: The OHT anomaly handling tool also includes a protective pad located below the lead screw to protect the surface abutted by the lower end of the lead screw from damage.

5. The OHT anomaly handling tool according to claim 4, characterized in that: The protective pad is provided with a receiving groove extending along the first direction, and the receiving groove matches the lower end of the lead screw.

6. The OHT anomaly handling tool according to claim 1, characterized in that: A rotating nut is fixed to the top of the lead screw, and the rotating nut is used to rotate the lead screw to drive the support plate to rise and fall by thread.

7. The OHT anomaly handling tool according to claim 1, characterized in that: The end of the shaft of the support wheel is provided with a limiting thread, which is used to limit the shaft within the transmission hole.

8. The OHT anomaly handling tool according to claim 1, characterized in that: The support plate includes two or more transmission holes, and each transmission hole is provided with a corresponding support wheel.

9. The OHT anomaly handling tool according to claim 8, characterized in that: The support plate includes two transmission holes. The plane parallel to the first direction and perpendicular to the first plane is the second plane. The two transmission holes are located at opposite ends of the second plane passing through the slot as a plane of symmetry.

10. The OHT anomaly handling tool according to claim 1, characterized in that: The support plate includes two or more lifting holes, and each lifting hole is provided with a lead screw.

Images