Grinding fluid spraying device and grinding equipment

Abstract

The utility model discloses a grinding fluid spraying device and grinding equipment. The grinding fluid spraying device comprises a grinding fluid conveying module, a gas conveying module and an atomizing nozzle, the grinding liquid conveying module comprises a nozzle, and the spray pipe is provided with a liquid outlet and used for conveying grinding liquid to the atomizing nozzle through the liquid outlet; the gas conveying module comprises a gas conveying pipeline, the gas conveying pipeline is provided with a gas outlet, and the gas conveying pipeline is used for providing gas for the atomizing nozzle through the gas outlet; the atomizing nozzle is arranged on the spraying pipe, the atomizing nozzle is communicated with a liquid outlet of the spraying pipe and a gas outlet of the gas conveying pipeline, and the atomizing nozzle is used for atomizing the grinding liquid and spraying the atomized grinding liquid. The gas conveying module is used for providing gas, so that the atomizing nozzle can atomize the grinding fluid and spray the atomized grinding fluid, the contact area between the grinding fluid and the grinding pad is increased, the utilization rate of the grinding fluid is increased, the cost is effectively reduced, and the influence of the grinding fluid on the environment is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing, and in particular to a polishing slurry spraying device and polishing equipment. Background Technology

[0002] In the semiconductor manufacturing industry, wafer surface planarization is required to remove excess material from the wafer surface and achieve surface planarization.

[0003] Chemical mechanical polishing (CMP) is a commonly used wafer planarization method. In the CMP process, the wafer to be polished is usually attached to the polishing head, with the wafer facing the polishing pad. By applying downward pressure to the polishing head, the wafer comes into contact with the polishing pad. At the same time, polishing slurry is delivered to the polishing pad through the polishing slurry supply line, so that the polishing slurry covers the surface of the polishing pad. The properties of the polishing slurry are used to polish the wafer, thereby achieving planarization through the combined action of chemical and mechanical processes.

[0004] In chemical mechanical polishing (CMP), polishing fluid plays a crucial role. However, polishing fluid is characterized by high technical content, strong confidentiality, and non-recyclability. CMP processes consume a large amount of polishing fluid, so how to save polishing fluid has become an urgent problem to be solved. Utility Model Content

[0005] The problem solved by this utility model embodiment is to provide a grinding slurry spraying device and grinding equipment to improve the utilization rate of grinding slurry.

[0006] To address the aforementioned problems, this utility model provides a grinding slurry spraying device, comprising a grinding slurry delivery module, a gas delivery module, and an atomizing nozzle. The grinding slurry delivery module includes a spray pipe with a liquid outlet, which delivers grinding slurry to the atomizing nozzle through the liquid outlet. The gas delivery module includes a gas delivery pipeline with an air outlet, which supplies gas to the atomizing nozzle through the air outlet. The atomizing nozzle is mounted on the spray pipe and communicates with both the liquid outlet of the spray pipe and the air outlet of the gas delivery pipeline. The atomizing nozzle atomizes the grinding slurry and sprays the atomized grinding slurry.

[0007] Optionally, the grinding fluid delivery module includes multiple nozzles, each nozzle having a fluid inlet; the grinding fluid delivery module further includes a fluid supply main pipeline connected to the fluid inlets of the multiple nozzles.

[0008] Optionally, the grinding fluid spraying device is applied to a grinding equipment, which includes a grinding table; the grinding fluid delivery module further includes: a main pipeline housing connected to a plurality of the spray nozzles, the main pipeline housing having the main fluid supply pipeline; the main pipeline housing includes a housing vertical portion, the housing vertical portion being configured to be perpendicular to the grinding table; the plurality of spray nozzles are distributed at equal angular intervals along the circumferential direction at the end of the housing vertical portion.

[0009] Optionally, the grinding fluid delivery module further includes: a first multi-port pipe fitting, the main port of the first multi-port pipe fitting being connected to the main fluid supply pipeline, and multiple branch ports of the first multi-port pipe fitting being connected to the fluid inlets of each of the nozzles.

[0010] Optionally, a first solenoid valve and a first flow meter are provided on the main liquid supply line; the first solenoid valve is used to control the opening and closing of the main liquid supply line and to regulate the flow rate of the grinding fluid; the first solenoid valve and the first flow meter are arranged sequentially on the main liquid supply line along the transmission direction of the grinding fluid.

[0011] Optionally, the grinding fluid spraying device is applied to a grinding equipment, which includes a grinding table; the grinding fluid delivery module further includes: a main pipeline housing connected to a plurality of the spray nozzles, the main pipeline housing having the main fluid supply pipeline, the main pipeline housing including a housing vertical portion configured to be perpendicular to the grinding table; the angle between the spray nozzles and the housing vertical portion is 90 degrees to 180 degrees.

[0012] Optionally, there are multiple gas delivery pipelines for supplying gas to the atomizing nozzles on the corresponding nozzles, and each gas delivery pipeline also has an air inlet; the gas delivery module further includes a main gas supply pipeline connected to the air inlets of the multiple gas delivery pipelines.

[0013] Optionally, the grinding fluid delivery module further includes: a main pipeline housing connected to a plurality of the nozzles, wherein the main pipeline housing has the liquid supply main pipeline; and the air supply main pipeline is located inside the main pipeline housing.

[0014] Optionally, a filter component, a second solenoid valve, and a second flow meter are provided on the main gas supply line; the second solenoid valve is used to control the opening and closing of the main gas supply line and regulate the gas flow rate; the second solenoid valve, the filter component, and the second flow meter are arranged sequentially on the main gas supply line along the gas transmission direction.

[0015] Optionally, the gas delivery module further includes: a second multi-port fitting, wherein the main port of the second multi-port fitting is connected to the main gas supply pipeline, and the multiple branch ports of the second multi-port fitting are respectively connected to the gas inlets of each of the gas delivery pipelines.

[0016] Optionally, the grinding fluid spraying device is applied to a grinding equipment, which includes a grinding table; the angle between the atomizing nozzle and the preset reference line of the spray pipe is 0 degrees to 60 degrees, the preset reference line is perpendicular to the axis of the spray pipe, and the preset reference line is configured such that the projection of the preset reference line on the grinding table and the projection of the axis of the spray pipe on the grinding table are on the same straight line.

[0017] Optionally, a single nozzle has multiple liquid outlets; the number of atomizing nozzles is multiple, and the multiple atomizing nozzles are respectively connected to each liquid outlet on the single nozzle.

[0018] Optionally, the grinding fluid spraying device is applied to a grinding equipment, which includes a grinding table; the outlet of the spray pipe includes a first outlet and a second outlet, the first outlet and the second outlet are symmetrically arranged along a preset reference line of the spray pipe, the preset reference line is perpendicular to the axis of the spray pipe, and the preset reference line is configured such that the projection of the preset reference line on the grinding table and the projection of the axis of the spray pipe on the grinding table are on the same straight line.

[0019] Optionally, in the extending direction of the nozzle, there are multiple liquid outlets on a single nozzle, and the multiple liquid outlets are equidistantly distributed on the nozzle.

[0020] Optionally, in the extension direction of the nozzle, the distance between adjacent liquid outlets is 3 to 5 centimeters.

[0021] Optionally, the nozzle includes: a pipe body having a nozzle mounting port; a grinding fluid delivery pipe located inside the pipe body having the liquid outlet; an atomizing nozzle fixed to the pipe body via the nozzle mounting port and communicating with the liquid outlet of the grinding fluid delivery pipe; and a gas delivery pipeline located inside the pipe body, with the atomizing nozzle communicating with the gas delivery pipeline outlet via the nozzle mounting port.

[0022] Optionally, the grinding fluid delivery pipe includes a grinding fluid delivery hose, and the gas delivery pipeline includes a gas delivery hose.

[0023] Optionally, a single nozzle has multiple nozzle mounting ports and a grinding fluid delivery pipe corresponding to each of the nozzle mounting ports; the number of atomizing nozzles is multiple, and the multiple atomizing nozzles correspond to and are connected to the grinding fluid delivery pipes, and the multiple atomizing nozzles correspond to and are connected to the gas delivery pipes.

[0024] Optionally, the gas delivery module may be a compressed air delivery module or an inert gas delivery module.

[0025] Accordingly, this utility model embodiment also provides a grinding device, including a grinding table; a grinding pad disposed on the grinding table; and a grinding fluid spraying device as described in any embodiment of this utility model, used to spray atomized grinding fluid onto the grinding pad.

[0026] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0027] The grinding slurry spraying device provided in this embodiment of the present invention includes: a grinding slurry delivery module, a gas delivery module, and an atomizing nozzle; the grinding slurry delivery module includes a spray pipe for delivering grinding slurry to the atomizing nozzle, and the spray pipe has a liquid outlet; the gas delivery module includes a gas delivery pipeline for supplying gas to the atomizing nozzle, and the gas delivery pipeline has an air outlet; the atomizing nozzle is connected to the liquid outlet of the spray pipe and the air outlet of the gas delivery pipeline, and the atomizing nozzle is used to atomize the grinding slurry and spray the atomized grinding slurry; the grinding slurry spraying device provided in this embodiment of the present invention... In the center, the gas delivery module is used to supply gas to the atomizing nozzle, enabling the atomizing nozzle to atomize the polishing slurry and spray the atomized polishing slurry. The polishing slurry forms finer droplets through the atomizing nozzle, which helps to increase the contact area between the polishing slurry and the polishing pad, thereby improving the utilization rate of the polishing slurry and reducing the amount of polishing slurry used. This effectively reduces costs and minimizes the environmental impact of the polishing slurry. Moreover, the gas can effectively inhibit the accumulation of residual polishing slurry inside the atomizing nozzle, thereby improving the atomization of the polishing slurry and thus enhancing the stability and reliability of the polishing slurry spraying device.

[0028] In an optional embodiment, the polishing slurry delivery module includes multiple nozzles, each nozzle having an inlet. The module also includes a main supply line connected to the inlets of the multiple nozzles. This facilitates slurry distribution during delivery, simultaneously meeting the supply requirements of each nozzle. Consequently, it increases the spraying area of ​​the polishing pad, reducing the probability of areas on the pad not being sprayed with polishing slurry. This helps to mitigate accidents such as reduced wafer polishing performance or damage to the wafer surface due to insufficient polishing slurry spraying, thus improving the reliability of the polishing process. Furthermore, having multiple nozzles share a single main supply line simplifies the piping structure of the polishing slurry spraying device.

[0029] In an optional configuration, the main pipeline housing is configured to be perpendicular to the grinding table, and multiple nozzles in the grinding fluid spraying device are distributed at equal angular intervals along the circumferential direction at the end of the main fluid supply pipeline. This helps to increase the uniformity of the grinding fluid spraying on the grinding pad, thereby further reducing the probability of areas on the grinding pad that have not been sprayed with grinding fluid.

[0030] In an optional configuration, multiple liquid outlets are equidistantly distributed on the nozzle along its extension direction, which makes the atomizing nozzles equidistantly distributed on the nozzle, thus improving the uniformity of the atomized grinding fluid.

[0031] Accordingly, this utility model provides a grinding device, which includes the grinding slurry spraying device described in this utility model. Since the grinding slurry spraying device integrates an atomization function, the grinding slurry is atomized and sprayed onto the grinding pad of the grinding device, which helps to improve the utilization rate of the grinding slurry, thereby helping to reduce costs, reduce the environmental impact of the grinding slurry, and improve the grinding performance and process reliability of the grinding device. Attached Figure Description

[0032] Figure 1 This is a top view of a grinding fluid spraying device according to an embodiment of the present invention;

[0033] Figure 2 yes Figure 1 A cross-sectional view of an embodiment at position AB;

[0034] Figure 3 This is a cross-sectional schematic diagram of the nozzle of an abrasive spraying device according to an embodiment of the present invention;

[0035] Figure 4 This is a schematic diagram showing the relative positions of the spray pipe and the atomizing nozzle of the grinding fluid spraying device according to an embodiment of the present invention.

[0036] Figure 5 This is a schematic diagram of the structure of a grinding device according to an embodiment of the present invention. Detailed Implementation

[0037] As can be seen from the background technology, how to save grinding fluid has become an urgent problem to be solved.

[0038] Research has found that in existing chemical mechanical polishing processes, the polishing slurry participates in the polishing process in fluid form, with a small contact area with the polishing pad, resulting in low utilization of the polishing slurry. Excessive use of polishing slurry significantly increases costs, and also leads to the discharge of large amounts of waste liquid, causing environmental pollution.

[0039] To address the aforementioned technical problems, this utility model provides a grinding slurry spraying device, comprising: a grinding slurry delivery module, a gas delivery module, and an atomizing nozzle; the grinding slurry delivery module includes a spray pipe having a liquid outlet, the spray pipe being used to deliver grinding slurry to the atomizing nozzle through the liquid outlet; the gas delivery module includes a gas delivery pipeline having an air outlet, the gas delivery pipeline being used to supply gas to the atomizing nozzle through the air outlet; the atomizing nozzle is disposed on the spray pipe, the atomizing nozzle being connected to the liquid outlet of the spray pipe and the air outlet of the gas delivery pipeline, the atomizing nozzle being used to atomize the grinding slurry and spray the atomized grinding slurry.

[0040] In the polishing slurry spraying device provided in this embodiment of the utility model, the gas delivery module is used to supply gas to the atomizing nozzle, so that the atomizing nozzle can atomize the polishing slurry and spray the atomized polishing slurry. The polishing slurry forms finer droplets through the atomizing nozzle, which helps to increase the contact area between the polishing slurry and the polishing pad, thereby improving the utilization rate of the polishing slurry, that is, reducing the amount of polishing slurry used, thus effectively reducing costs and reducing the impact of polishing slurry on the environment. Moreover, under the action of gas, the residual accumulation of polishing slurry inside the atomizing nozzle can be effectively inhibited, thereby helping to improve the fullness of polishing slurry atomization, and thus helping to improve the stability and reliability of the polishing slurry spraying device.

[0041] To make the above-mentioned objectives, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0042] Figure 1 This is a top view of a grinding fluid spraying device according to an embodiment of the present invention. Figure 2 yes Figure 1 A cross-sectional view of an embodiment at position AB. Figure 3 This is a cross-sectional schematic diagram of the spray pipe of an grinding fluid spraying device according to an embodiment of the present invention. Figure 4 This is a schematic diagram showing the relative positions of the spray pipe and the atomizing nozzle of the grinding fluid spraying device according to an embodiment of this utility model. Figure 5 This is a schematic diagram of the structure of a grinding device according to an embodiment of the present invention.

[0043] It should be noted that, Figure 1 The outline of the grinding pad is represented by a dashed circle.

[0044] Reference Figures 1 to 3A grinding slurry spraying device includes a grinding slurry delivery module 10, a gas delivery module 20, and an atomizing nozzle 302. The grinding slurry delivery module 10 includes a spray pipe 300 with a liquid outlet 103, which delivers grinding slurry to the atomizing nozzle 302 through the liquid outlet 103. The gas delivery module 20 includes a gas delivery pipeline 202 with an air outlet 203, which provides gas to the atomizing nozzle 302 through the air outlet 203. The atomizing nozzle 302 is disposed on the spray pipe 300 and is connected to both the liquid outlet 103 of the spray pipe 300 and the air outlet 203 of the gas delivery pipeline 202. The atomizing nozzle 302 atomizes the grinding slurry and sprays the atomized grinding slurry.

[0045] In the grinding fluid spraying device provided in this embodiment of the utility model, the grinding fluid spraying device is applied to a grinding equipment, the grinding equipment includes a grinding table, and a grinding pad is provided on the grinding table.

[0046] The gas delivery module 20 is used to supply gas to the atomizing nozzle 302, enabling the atomizing nozzle 302 to atomize the grinding slurry and spray the atomized grinding slurry. The grinding slurry forms finer droplets through the atomizing nozzle 302, which helps to increase the contact area between the grinding slurry and the grinding pad, thereby improving the utilization rate of the grinding slurry and reducing the amount of grinding slurry used. This effectively reduces costs and the environmental impact of the grinding slurry. Moreover, the gas can effectively inhibit the accumulation of grinding slurry residue inside the atomizing nozzle, thereby improving the atomization of the grinding slurry and thus improving the stability and reliability of the grinding slurry spraying device.

[0047] In this embodiment, the grinding fluid delivery module includes multiple nozzles 300, and each nozzle 300 also has a liquid inlet 104; the grinding fluid delivery module 10 further includes a liquid supply main pipeline 100, which is connected to the liquid inlets 104 of the multiple nozzles 300.

[0048] The main supply line 100 is used to connect to the grinding slurry supply system 40, so that the grinding slurry is transmitted to the nozzle 300 through the main supply line 100, and then transmitted to the atomizing nozzle 302 through the nozzle 300.

[0049] In one embodiment, a single main supply line 100 is connected to multiple nozzles 300. This facilitates diversion of the polishing slurry while simultaneously supplying it to each nozzle, increasing the spray area of ​​the polishing pad. This reduces the probability of areas on the polishing pad that have not been sprayed with polishing slurry, thus mitigating the risk of reduced wafer polishing performance or damage to the wafer surface due to insufficient polishing slurry application. Consequently, it improves the reliability of the polishing process. Furthermore, having multiple nozzles 300 share a single main supply line 100 simplifies the piping structure of the polishing slurry spraying device.

[0050] Specifically, the grinding fluid delivery module 10 further includes: a main pipeline housing 400; the main pipeline housing 400 includes a housing vertical portion 401, the housing vertical portion 401 is connected to the nozzle 300, and the main pipeline housing 400 has the liquid supply main pipeline 100.

[0051] The vertical part 401 of the housing facilitates the fixing of the nozzle 300.

[0052] In this embodiment, the main pipeline housing 400 includes a housing vertical portion 401, which is configured to be perpendicular to the grinding table of the grinding equipment. This facilitates a suitable angle between the nozzle 300 and the normal of the grinding table.

[0053] In other embodiments, the angle between the vertical portion 401 of the housing and the normal to the grinding table may also be other angles.

[0054] As an example, the number of nozzles 300 connected to a single housing vertical section 401 is three.

[0055] In other embodiments, the number of nozzles connected to a single main pipeline housing may be one, two, four, or other numbers, depending on actual needs.

[0056] Please refer to Figure 1 In one embodiment, the plurality of nozzles 300 are spaced at equal angular intervals around the end of the vertical portion 401 of the housing, which helps to increase the uniformity of the polishing fluid spraying device on the polishing pad, thereby further reducing the probability of areas on the polishing pad that have not been sprayed with polishing fluid.

[0057] In other embodiments, the plurality of nozzles may also be distributed in other ways.

[0058] In this embodiment, the angle β between the nozzle 300 and the vertical portion 401 of the housing is 90 to 180 degrees, which makes it easier for the atomizing nozzle 302 to spray the grinding fluid toward the grinding pad.

[0059] For example, Figure 2 The illustration shows the case where the angle β between the nozzle 300 and the vertical portion 401 of the housing is 90 degrees. It can be understood that when the angle β between the nozzle 300 and the vertical portion 401 of the housing is 180 degrees, the nozzle 300 is located on the extension line of the vertical portion 401 of the housing.

[0060] In this embodiment, the grinding fluid delivery module 10 further includes: a first multi-port pipe 101, the main port 105 of the first multi-port pipe 101 being connected to the main fluid supply pipeline 100, and the multiple branch ports 106 of the first multi-port pipe 101 being connected to the inlet ports 104 of each of the nozzles 300.

[0061] In this embodiment, the first multi-port fitting 101 enables a single liquid supply main pipeline 100 to be simultaneously connected to multiple nozzles 300, thereby connecting the liquid supply main pipeline 100 to multiple atomizing nozzles 302. This simplifies the internal piping structure of the device and improves the uniformity of the grinding slurry dispersion. The structure of the first multi-port fitting 101 also helps to change the flow direction of the grinding slurry, thereby reducing the difficulty of grinding slurry transmission.

[0062] In other embodiments, the main supply line and the nozzle may be connected by other means or other components. In other embodiments, the main supply lines in a single main line housing may also correspond one-to-one with the nozzles.

[0063] In this embodiment, a first solenoid valve 110 and a first flow meter 111 are provided on the main liquid supply pipeline 100. The first solenoid valve 110 and the first flow meter 111 are arranged sequentially on the main liquid supply pipeline 100 along the transmission direction of the grinding liquid.

[0064] Specifically, the first solenoid valve 110 is used to control the on / off state of the main liquid supply line 100, thereby enabling more sensitive control of the transmission of polishing slurry and reducing the difficulty of controlling the transmission of polishing slurry; the first solenoid valve 110 can also be used to adjust the flow rate of polishing slurry, and adjust the flow rate of polishing slurry according to the different wafer process requirements, which helps to improve the versatility of the polishing slurry spraying device.

[0065] The first flow meter 111 is used to monitor the flow rate of the grinding fluid so that the flow rate of the grinding fluid can be adjusted in a timely manner according to different process requirements, effectively preventing accidents caused by excessive or insufficient flow rate of the grinding fluid.

[0066] In other embodiments, the main liquid supply line may not be equipped with a first solenoid valve or a first flow meter.

[0067] It should be noted that the first solenoid valve 110 and the first flow meter 111 are arranged sequentially on the main supply pipeline 100 along the transmission direction of the grinding fluid. In other words, along the transmission direction of the grinding fluid, the first flow meter 111 is located downstream of the first solenoid valve 110 in order to improve the accuracy of the flow rate monitored by the first flow meter 111.

[0068] In this embodiment, there are multiple gas delivery pipelines 202, which are used to supply gas to the atomizing nozzles 302 on the corresponding nozzles 300. The gas delivery pipelines 202 also have air inlets 204. The gas delivery module 20 further includes a main gas supply pipeline 200, which is connected to the air inlets 204 of the multiple gas delivery pipelines 202.

[0069] The main gas supply line 200 is used to connect to the gas supply system 50, so that the gas is transmitted to the gas delivery line 202 through the main gas supply line 200, and then transmitted to the atomizing nozzle 302 through the gas delivery line 202.

[0070] The single gas supply main pipeline 200 is connected to multiple gas delivery pipelines 202, which is beneficial for gas diversion while transmitting gas, and simultaneously meets the gas supply requirements of each nozzle, and helps to simplify the pipeline structure of the grinding fluid spraying device.

[0071] In this embodiment, the main gas supply line 200 is located in the main gas supply line housing 400, which helps to reduce the space occupied by the grinding fluid spraying device. Moreover, it also helps to suppress the occurrence of safety hazards caused by the exposure of the main gas supply line 200, and helps to improve the safety of the grinding fluid spraying device.

[0072] In other embodiments, the main gas supply line may also be located outside the main pipeline housing where the main liquid supply line is located. For example, the main gas supply line may also be located in another main pipeline housing.

[0073] In this embodiment, the gas delivery module 20 further includes: a second multi-port fitting 201, the main port 205 of the second multi-port fitting 201 being connected to the main gas supply pipeline 200, and the multiple branch ports 206 of the second multi-port fitting being connected to the air inlets 204 of each of the gas delivery pipelines 202.

[0074] In this embodiment, the second multi-port fitting 201 facilitates the distribution and transmission of the gas output from the main gas supply line 200, enabling a single main gas supply line 200 to be simultaneously connected to multiple nozzles 300, thereby connecting the main gas supply line 200 to multiple atomizing nozzles 302, which helps to simplify the pipeline structure of the grinding fluid spraying device.

[0075] In this embodiment, a filter element 220, a second solenoid valve 221, and a second flow meter 222 are provided on the gas supply main pipeline 200. The filter element 220, the second solenoid valve 221, and the second flow meter 222 are arranged sequentially on the gas supply main pipeline 200 along the gas transmission direction.

[0076] Specifically, the second solenoid valve 221 is used to control the opening and closing of the main gas supply line 200, thereby enabling more sensitive control of gas transmission and simplifying the control process for gas transmission. The second solenoid valve 221 can also be used to adjust the gas flow rate according to the different wafer process requirements, which helps to improve the versatility of the polishing slurry spraying device.

[0077] The second flow meter 222 is used to monitor the gas flow rate so that the gas flow rate can be adjusted in a timely manner according to different process requirements. This effectively suppresses the problem of excessive gas pressure inside the atomizing nozzle 302 due to excessive gas flow rate, thereby reducing the probability of damage to the atomizing nozzle 302. It can also effectively suppress the problem of insufficient atomization of grinding fluid due to insufficient gas flow rate.

[0078] The filter element 220 is used to filter impurities inside the pipeline, which helps to reduce the probability of impurities in the gas and effectively suppresses the accident of the atomizing nozzle 302 being blocked due to too many impurities entering the atomizing nozzle 302; moreover, it also helps to reduce the probability of impurities having an adverse effect on the surface quality of the polishing pad, thereby improving the surface quality of the wafer after polishing.

[0079] In other embodiments, the main gas supply line may not be equipped with a filter, a second solenoid valve, or a second flow meter.

[0080] It should be noted that, along the gas transmission direction, the filter element 220 is located upstream of the second solenoid valve 221. By filtering impurities in the pipeline through the filter element 220, the occurrence of damage to the second solenoid valve 221 caused by impurities is effectively suppressed, which helps to improve the safety of the grinding fluid spraying device.

[0081] It should be noted that, along the gas transmission direction, the second flow meter 222 is located downstream of the second solenoid valve 221 in order to improve the accuracy of the flow rate monitored by the second flow meter 222.

[0082] Furthermore, along the gas transmission direction, the second flow meter 222 is located downstream of the filter element 220 and close to the end of the gas supply main pipeline 200. It monitors the gas flow near the outlet of the gas supply main pipeline 200, which minimizes the impact of the pressure difference caused by blockage of the filter element 220 on the monitoring of the gas flow of the gas supply main pipeline 200, and helps to improve the accuracy of the flow monitored by the second flow meter 222.

[0083] In this embodiment, the gas delivery module 20 includes either a compressed air delivery module or an inert gas delivery module.

[0084] The compressed air delivery module is used to deliver compressed air, and the inert gas delivery module is used to deliver inert gas. The inert gas may include nitrogen or other inert gases.

[0085] The gas delivery module 20 transmits gases including compressed air or nitrogen and other inert gases. After the gas comes into contact with the grinding fluid, it helps to reduce the probability of chemical reaction between the gas and the grinding fluid, thereby improving the safety and reliability of the grinding fluid spraying device.

[0086] In other embodiments, the gas transported by the gas delivery module may also be other applicable types.

[0087] Please refer to Figure 3 The angle α between the atomizing nozzle 302 and the preset reference line 402 of the nozzle 300 is 0 degrees to 60 degrees. The preset reference line 402 is perpendicular to the axis of the nozzle 300, and the preset reference line 402 is configured such that the projection of the preset reference line 402 on the grinding table and the projection of the axis of the nozzle 300 on the grinding table are on the same straight line.

[0088] By setting the angle α between the atomizing nozzle 302 and the preset reference line 402 of the spray pipe 300 to 0 degrees to 60 degrees, it is beneficial to spray the abrasive liquid into the area close to the spray pipe 300, thereby improving the accuracy of the spraying position.

[0089] In other embodiments, the angle between the atomizing nozzle and the preset baseline of the nozzle can also be other angles.

[0090] It should be noted that the axis of the nozzle 300 extends along the length of the nozzle 300.

[0091] In this embodiment, a single nozzle 300 has multiple liquid outlets 103; the number of atomizing nozzles 302 is multiple, and the multiple atomizing nozzles 302 are respectively connected to each liquid outlet 103 on the single nozzle 300.

[0092] The multiple atomizing nozzles 302 are connected to the multiple liquid outlets 103 one by one, which helps to improve the independence of each atomizing nozzle 302. When a single atomizing nozzle 302 fails to work due to blockage or other accidents, the remaining atomizing nozzles 302 can continue to maintain normal operation, which helps to improve the reliability of the grinding fluid spraying device.

[0093] Moreover, the multiple atomizing nozzles 302 can effectively increase the spraying area of ​​the polishing slurry, which helps to reduce the probability of areas on the polishing pad that have not been sprayed with polishing slurry. This helps to suppress accidents such as reduced wafer polishing effect or damage to the wafer polishing surface caused by the polishing pad not being sprayed with polishing slurry, thereby improving the reliability of the polishing process.

[0094] Please refer to Figure 3 In one embodiment, the liquid outlet 103 of the nozzle 300 includes a first liquid outlet 310 and a second liquid outlet 311. The first liquid outlet 310 and the second liquid outlet 311 are symmetrically arranged along a preset reference line 402 of the nozzle 300. The preset reference line 402 is perpendicular to the axis of the nozzle 300, and the preset reference line 402 is configured such that its projection on the grinding table and the projection of the axis of the nozzle 300 on the grinding table are on the same straight line.

[0095] In this embodiment, the first liquid outlet 310 and the second liquid outlet 311 are symmetrically arranged 402 along the preset baseline of the spray pipe 300, which helps to increase the spraying area and coverage uniformity of the grinding slurry spraying device on the grinding pad, thereby helping to reduce the probability of areas on the grinding pad that have not been sprayed with grinding slurry.

[0096] In other embodiments, the first and second liquid outlets may be asymmetrically arranged along a preset baseline of the nozzle. In other embodiments, the nozzle may have an outlet only on one side of the preset baseline.

[0097] In this embodiment, in the extending direction of the nozzle 300, there are multiple liquid outlets 103 of a single nozzle 300, and the multiple liquid outlets 103 are equidistantly distributed on the nozzle 300.

[0098] It should be noted that the multiple liquid outlets 103 are equidistantly distributed on the spray pipe 300, which makes the multiple atomizing nozzles 302 equidistantly distributed on the spray pipe 300, which helps to improve the uniformity of the atomized grinding fluid.

[0099] In other embodiments, the liquid outlets may also be distributed non-equidistantly on the nozzle.

[0100] It should be noted that the distance between adjacent liquid outlets 103 in the extending direction of the nozzle 300 should not be too small or too large. If the distance between adjacent liquid outlets 103 is too small, the airflow generated by the atomizing nozzle 302 may interfere with each other, resulting in poor uniformity of the polishing fluid spray and thus poor polishing fluid saving effect. If the distance between adjacent liquid outlets 103 is too large, the polishing pad may be partially unsprayed with polishing fluid or the polishing fluid may be too diluted, thereby reducing the polishing effect. Therefore, in this embodiment, the distance between adjacent liquid outlets 103 in the extending direction of the nozzle 300 is 3 cm to 5 cm.

[0101] In this embodiment, the atomizing nozzle 302 includes: a grinding fluid inlet (not shown in the figure), which is connected to the liquid outlet 103 of the nozzle 300; and a gas inlet (not shown in the figure), which is connected to the gas outlet 203 of the gas delivery pipeline 202.

[0102] The grinding fluid enters the internal structure of the atomizing nozzle 302 through the grinding fluid inlet, and the gas enters the internal structure of the atomizing nozzle 302 through the gas inlet. The grinding fluid inlet and the gas inlet are set independently to avoid the grinding fluid and gas coming into contact before entering the atomizing nozzle 302, thereby effectively suppressing overflow or other accidents.

[0103] In other embodiments, the atomizing nozzle may also be connected to the liquid outlet of the nozzle and the gas outlet of the gas delivery pipeline in other ways.

[0104] Please refer to Figure 2 In this embodiment, the nozzle 300 includes: a pipe body 303 having a nozzle mounting port 301; a grinding fluid delivery pipe 102 located inside the pipe body 303 having a liquid outlet 103; and an atomizing nozzle 302 fixed to the pipe body 303 via the nozzle mounting port 301 and communicating with the liquid outlet 103 of the grinding fluid delivery pipe 102.

[0105] The tube body 303 serves as a conduit located inside the tube and also provides an installation location for the atomizing nozzle 302.

[0106] The nozzle mounting port 301 is used to fix the atomizing nozzle 302 and to connect the atomizing nozzle 302 with the outlet 103 of the grinding fluid delivery pipe 102. This effectively prevents accidents such as accidental displacement of the atomizing nozzle 302 or detachment of the atomizing nozzle 302 due to excessive gas pressure, thereby improving the safety of the grinding fluid spraying device.

[0107] In this embodiment, the atomizing nozzle 302 is detachably mounted on the tube body 303, thereby facilitating the replacement of the atomizing nozzle 302.

[0108] As an example, the nozzle mounting port 301 may have a threaded structure for securing the atomizing nozzle 302.

[0109] In other embodiments, the atomizing nozzle can also be detachably mounted on the tube body using other installation methods. In other embodiments, the atomizing nozzle is fixed to the tube body in a non-detachable manner.

[0110] The gas delivery pipeline 202 is located inside the pipe body 303, and the atomizing nozzle 302 is connected to the gas outlet 203 of the gas delivery pipeline 202 through the nozzle mounting port 301.

[0111] In this embodiment, the gas delivery pipeline 202 is disposed inside the pipe body 303, which helps to reduce the space occupied by the grinding fluid spraying device, effectively suppresses the occurrence of accidental safety hazards caused by the exposure of the gas pipeline 202, and helps to improve the safety of the grinding fluid spraying device.

[0112] In other embodiments, the gas delivery pipeline may also be located outside the pipe body.

[0113] In this embodiment, the grinding fluid delivery pipe 102 includes a grinding fluid delivery hose, and the gas delivery pipe 202 includes a gas delivery hose.

[0114] The grinding fluid delivery hose and the gas delivery hose have good flexibility, which makes the transmission of grinding fluid or gas smoother. Moreover, the grinding fluid delivery hose and the gas delivery hose have high plasticity, which is conducive to their distribution in relatively small spaces, thereby improving the space utilization rate of the pipeline of the grinding fluid spraying device.

[0115] In other embodiments, the grinding fluid delivery line and the gas delivery line also include lines with other characteristics.

[0116] Please refer to Figure 2 Each nozzle 300 has multiple nozzle mounting ports 301 and grinding fluid delivery pipes 102 corresponding to each nozzle mounting port 301; the number of atomizing nozzles 302 is multiple, and the multiple atomizing nozzles 302 correspond to and are connected to each grinding fluid delivery pipe 102, and the multiple atomizing nozzles 302 correspond to and are connected to each gas delivery pipe 202.

[0117] In this embodiment, the plurality of atomizing nozzles 302 correspond one-to-one with and are connected to the grinding fluid delivery pipe 102, which helps to improve the independence of the grinding fluid delivery pipe 102. When a single grinding fluid delivery pipe 102 fails to work due to blockage or other accidents, the remaining grinding fluid delivery pipes 102 can continue to maintain normal operation, which helps to improve the reliability of the grinding fluid spraying device.

[0118] The multiple atomizing nozzles 302 correspond one-to-one with and are connected to the gas delivery pipelines 202, which helps to improve the independence of the gas delivery pipelines 202. When a single gas delivery pipeline 202 fails to work due to impurities or other accidents, the remaining gas delivery pipelines 202 can continue to maintain normal operation, which helps to improve the reliability of the grinding fluid spraying device.

[0119] Accordingly, this utility model also provides a grinding device, for reference Figure 5 The grinding equipment includes: a grinding table 1001; a grinding pad 1002 disposed on the grinding table 1001; and a grinding fluid spraying device (not shown) as described in any of the preceding embodiments, used to spray atomized grinding fluid onto the grinding pad 1002.

[0120] like Figures 1 to 5 As shown, since the spray nozzle 300 is equipped with an atomizing nozzle 302, the grinding slurry spraying device integrates an atomization function, so that the grinding slurry is atomized and sprayed onto the grinding pad 1002 of the grinding equipment. This is beneficial to improve the utilization rate of the grinding slurry, thereby reducing costs, reducing the environmental impact of the grinding slurry, and improving the grinding performance and process reliability of the grinding equipment.

[0121] For a detailed description of the grinding fluid spraying device, please refer to the relevant content of the foregoing embodiments, which will not be repeated here.

[0122] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A grinding fluid spraying device, characterized in that, It includes a slurry delivery module, a gas delivery module, and an atomizing nozzle; The grinding fluid delivery module includes a nozzle with a liquid outlet, and the nozzle is used to deliver grinding fluid to the atomizing nozzle through the liquid outlet. The gas delivery module includes a gas delivery pipeline with an outlet, and the gas delivery pipeline is used to supply gas to the atomizing nozzle through the outlet. The atomizing nozzle is disposed on the spray pipe, and the atomizing nozzle is connected to the liquid outlet of the spray pipe and the gas outlet of the gas delivery pipeline. The atomizing nozzle is used to atomize the grinding fluid and spray the atomized grinding fluid.

2. The grinding fluid spraying device according to claim 1, characterized in that, The grinding fluid delivery module includes multiple nozzles, each nozzle having a fluid inlet; the grinding fluid delivery module also includes a fluid supply main pipeline connected to the fluid inlets of the multiple nozzles.

3. The grinding fluid spraying device according to claim 2, characterized in that, The grinding fluid spraying device is used in a grinding equipment, which includes a grinding table; The grinding fluid delivery module further includes: a main pipeline housing connected to a plurality of the nozzles, the main pipeline housing having the main fluid supply pipeline; the main pipeline housing includes a housing vertical portion, the housing vertical portion being configured to be perpendicular to the grinding table; The multiple nozzles are distributed at equal angular intervals along the circumferential direction at the end of the vertical portion of the housing.

4. The grinding fluid spraying device according to claim 2, characterized in that, The grinding fluid delivery module further includes: a first multi-port pipe fitting, the main port of the first multi-port pipe fitting being connected to the main fluid supply pipeline, and multiple branch ports of the first multi-port pipe fitting being connected to the fluid inlets of each of the spray pipes.

5. The grinding fluid spraying device according to claim 2, characterized in that, The main liquid supply line is equipped with a first solenoid valve and a first flow meter; the first solenoid valve is used to control the on / off state of the main liquid supply line and to regulate the flow rate of the grinding fluid. The first solenoid valve and the first flow meter are arranged sequentially along the transmission direction of the grinding fluid on the main fluid supply line.

6. The grinding fluid spraying device according to claim 2, characterized in that, The grinding fluid spraying device is used in a grinding equipment, which includes a grinding table; The grinding fluid delivery module further includes: a main pipeline housing connected to a plurality of the nozzles, the main pipeline housing having the main fluid supply pipeline, the main pipeline housing including a housing vertical portion, the housing vertical portion being configured to be perpendicular to the grinding table; The angle between the nozzle and the vertical part of the housing is 90 degrees to 180 degrees.

7. The grinding fluid spraying device according to claim 2, characterized in that, The gas delivery pipelines are multiple and are used to supply gas to the atomizing nozzles on the corresponding nozzles. The gas delivery pipelines also have air inlets. The gas delivery module further includes a main gas supply pipeline, which is connected to the air inlets of the multiple gas delivery pipelines.

8. The grinding fluid spraying device according to claim 7, characterized in that, The grinding fluid delivery module further includes: a main pipeline housing, connected to a plurality of the nozzles, wherein the main pipeline housing has the main fluid supply pipeline; The main gas supply line is located inside the main line housing.

9. The grinding fluid spraying device according to claim 7, characterized in that, The main gas supply line is equipped with a filter component, a second solenoid valve, and a second flow meter; the second solenoid valve is used to control the on / off state of the main gas supply line and regulate the gas flow rate. The second solenoid valve, the filter component, and the second flow meter are arranged sequentially along the gas transmission direction on the main gas supply line.

10. The grinding fluid spraying device according to claim 7, characterized in that, The gas delivery module further includes: a second multi-port fitting, the main port of the second multi-port fitting being connected to the main gas supply pipeline, and multiple branch ports of the second multi-port fitting being connected to the gas inlets of each of the gas delivery pipelines.

11. The grinding fluid spraying device according to claim 1, characterized in that, The grinding fluid spraying device is used in a grinding equipment, which includes a grinding table; The angle between the atomizing nozzle and the preset reference line of the spray pipe is 0 degrees to 60 degrees. The preset reference line is perpendicular to the axis of the spray pipe, and the preset reference line is configured such that the projection of the preset reference line on the grinding table and the projection of the axis of the spray pipe on the grinding table are on the same straight line.

12. The grinding fluid spraying device according to any one of claims 1 to 11, characterized in that, Each of the nozzles has multiple liquid outlets; The number of atomizing nozzles is multiple, and each of the multiple atomizing nozzles is connected to a liquid outlet on a single spray pipe.

13. The grinding fluid spraying device according to claim 12, characterized in that, The grinding fluid spraying device is used in a grinding equipment, which includes a grinding table; The nozzle has a first outlet and a second outlet. The first outlet and the second outlet are symmetrically arranged along a preset reference line of the nozzle. The preset reference line is perpendicular to the axis of the nozzle, and the preset reference line is configured such that the projection of the preset reference line on the grinding table and the projection of the axis of the nozzle on the grinding table are on the same straight line.

14. The grinding fluid spraying device according to claim 12, characterized in that, In the extending direction of the nozzle, there are multiple liquid outlets on a single nozzle, and the multiple liquid outlets are equidistantly distributed on the nozzle.

15. The grinding fluid spraying device according to claim 14, characterized in that, In the extending direction of the nozzle, the distance between adjacent liquid outlets is 3 to 5 centimeters.

16. The grinding fluid spraying device according to any one of claims 1 to 11, characterized in that, The nozzle includes: a pipe body having a nozzle mounting port; and a grinding fluid delivery pipe located inside the pipe body having the liquid outlet. The atomizing nozzle is fixed to the tube body through the nozzle mounting port and is connected to the outlet of the grinding fluid delivery tube. The gas delivery pipeline is located inside the pipe body, and the atomizing nozzle is connected to the gas outlet of the gas delivery pipeline through the nozzle mounting port.

17. The grinding fluid spraying device according to claim 16, characterized in that, The grinding fluid delivery pipe includes a grinding fluid delivery hose, and the gas delivery pipeline includes a gas delivery hose.

18. The grinding fluid spraying device according to claim 16, characterized in that, Each of the nozzles has multiple nozzle mounting ports and grinding fluid delivery pipes corresponding to each of the nozzle mounting ports; The number of atomizing nozzles is multiple, and each of the multiple atomizing nozzles corresponds to and is connected to the grinding fluid delivery pipe, and each of the multiple atomizing nozzles corresponds to and is connected to the gas delivery pipe.

19. The grinding fluid spraying device according to any one of claims 1 to 11, characterized in that, The types of gas delivery modules include compressed air delivery modules or inert gas delivery modules.

20. A grinding apparatus, characterized in that, include: Grinding table; A polishing pad is disposed on the polishing table; The grinding fluid spraying device according to any one of claims 1 to 19 is used to spray atomized grinding fluid onto the grinding pad.

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